激光干涉条纹锁定系统的设计与实现
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摘要
为测量λ/4波长以下位移,研制了激光干涉条纹锁定系统。将干涉仪的工作点稳定在暗点,使其具有线性好和灵敏度高等优点。该系统由激光器及稳频装置、干涉系统、检测及控制电路、位移反馈执行机构(压电陶瓷),以及数据采集系统组成。实验结果表明,所研制的干涉条纹锁定系统在0～0.5 Hz的频带内,其干涉仪的分辨度达到λ/1 500水平;而在0～50 Hz的频带内,其干涉仪的分辨度达到λ/400水平。频谱分析表明,在0.1 Hz和5 Hz时的分辨度分别为7×10-11 m/Hz~(1/2)和1×10-11 m/Hz~(1/2)。
A laser interferometer fringe locking system was designed to measure the displacement of λ/4.The working point of interferometer was stabilized at scotoma to achieve good linearity and high sensitivity.The system consists of a laser interferometer,a detector,a control circuit,and a displacement feedback actuator(piezoelectric ceramic).The experimental results show the resolution of the interferometer comes to the level of λ/1 500 at the bandwidth of 0~0.5 Hz,and the level of λ/400 at the bandwidth of 0~50 Hz.Spectrums analysis show that the resolution of the interferometer at 0.1 Hz and 5 Hz are 7×10-11 m/Hz~(1/2) and 1×10-11 m/Hz~(1/2),respectively.
A laser interferometer fringe locking system was designed to measure the displacement of λ/4.The working point of interferometer was stabilized at scotoma to achieve good linearity and high sensitivity.The system consists of a laser interferometer,a detector,a control circuit,and a displacement feedback actuator(piezoelectric ceramic).The experimental results show the resolution of the interferometer comes to the level of λ/1 500 at the bandwidth of 0~0.5 Hz,and the level of λ/400 at the bandwidth of 0~50 Hz.Spectrums analysis show that the resolution of the interferometer at 0.1 Hz and 5 Hz are 7×10-11 m/Hz~(1/2) and 1×10-11 m/Hz~(1/2),respectively.
引文
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[9]BRACCINI S,BRADASCHIA C,COBAL M,et al.An improvement in the vibration isolation GRO super-at-tenuator for interferometric detection of gravitational waves:the using of a magnetic anti-spring[J].Rev Sci Instrum,1993(64):310-315.
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[11]罗俊,范淑华,蔡惟鑫.地壳应变的激光干涉调制法测量[J].地壳形变与地震,1994,14(2):76-81.
[2]LI J F,MOSES P,VIEHLAND D.Simple high-resolu-tion interferometer for the measurement of frequency-dependent complex piezoelectric responses in ferroelec-tric ceramics[J].Rev Sci Instrum,1995,68(1):215-221.
[3]WANG X Z,SASAKI O S.Measurement of small vibra-tion amplitudes of a rough surface by an interferometer with a phase-conjugate mirror[J].Appl Opt,2000,29(5):4593-4597.
[4]WANG X F,WANG X Z,QIAN F,et al.Laser diode interferometer used for measuring displacements large range with a nanometer accuracy[J].Opt&Laser Technol,2001,33(4):219-223.
[5]严琴,李东风.低膨胀固体材料线膨胀系数的干涉测量方法[J].激光技术,2004,28(2):202-204.
[6]ZHOU Z B,LUO J,YAN Q,et al.Seismic noise effect on equivalence principle test using free-fall interfer-ometry[J].Chin Phys Lett,2001(18):10-12.
[7]SAULSON P R.Fundamentals of interferometric gravi-tational wave detectors[M].Singapore:World Scien-tific,1994:26-127.
[8]易迎彦,周泽兵.压电陶瓷压电特性的激光调制法测量研究[J].应用光学,2004,25(3):27-32.
[9]BRACCINI S,BRADASCHIA C,COBAL M,et al.An improvement in the vibration isolation GRO super-at-tenuator for interferometric detection of gravitational waves:the using of a magnetic anti-spring[J].Rev Sci Instrum,1993(64):310-315.
[10]BRACCINI S.BRADASCHIA C,FABBRO R.et al.Design and operation of an interferometer developed to test the suspensions of the Virgo gravitation wave antenna[J].Phys Lett A,1993(173):252-256.
[11]罗俊,范淑华,蔡惟鑫.地壳应变的激光干涉调制法测量[J].地壳形变与地震,1994,14(2):76-81.
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