新型MEMS三维振动传感器的有限元分析

英文篇名：Finite Element Analysis for a New Kind of MEMS Three-Dimensional Vibration Sensor
中文刊名：传感技术学报
英文刊名：Chinese Journal of Sensors and Actuators
作者：李振 ; 吴淑娟 ; 张国军 ; 薛晨阳
英文作者：LI Zhen1 ; 2 ; WU Shujuan1 ; 2 ; ZHANG Guojun1 ; 2* ; XUE Chenyang1 ; 2(1.Key Laboratory of Instrumentation Science & Dynamic Measurement ; Ministry of Education ; Taiyuan 030051 ; China ; 2.Science and Technology on Electronic Test & Measurement Laboratory North University of China ; Taiyuan 030051 ; China)
中文关键词：振动传感器 ; MEMS ; 有限元法 ; 三维 ; 仿生
英文关键词：vibration sensor ; MEMS ; finite element method ; three-demension ; bionic
出版日期：2013-04-15
机构：中北大学仪器科学与动态测试教育部重点实验室;中北大学电子测试技术重点实验室;
年：2013
期：04
出版单位：传感技术学报

摘要

针对目前多维振动传感器的需求,研制了一种基于MEMS技术的仿昆虫纤毛三维振动传感器。首先,介绍了振动传感器的仿生机理和工作原理;然后,推导了振动传感器的力学模型并建立了有限元模型;最后,对该传感器进行了静、动态特性分析,并通过实验验证最终得出该传感器的灵敏度为274.18μV/gn、维间耦合小于等于0.612 5%、测量范围为±25 gn、共振频率为2 342.6 Hz、抗冲击能力为100 gn。
According to the requirements of multidimensional vibration sensor,a kind of three-dimensional MEMS vibration sensor imitated insects cilium is developed.After discussing the bionic mechanism and the operating principle,the mechanical model and the finite element model of the sensor were established.Combining the analysis of the static and dynamic characteristics of the sensor with experimental verification,the results show that the sensor ' s sensitivity is 274.18 μV/gn,and the demensional coupling interference is less then 0.612 5%,and the measurement range is ±25 gn,and the resonance frequency is 0-2 342.6 Hz.Its resistant to impact is 100 gn.

引文

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