基于石英晶体三分量土层压力传感器研制
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摘要
介绍了一种基于AT切石英晶体谐振器力-频线性关系原理研制的土层压力传感器。该压力传感器由3个相互垂直的压力传感器和1个温度传感构成,采用等精度频率测量技术,实现高精度数据采集,用RS485串行接口进行数据传输。重点介绍了传感器的结构设计,并对弹性膜片材料和厚度与量程和灵敏度的关系进行试验和研究。研制的传感器量程为0～1.0MPa,非线性度小于1.0%,重复性误差小于0.05%,滞后误差小于0.1%,温度的测量精度为0.01℃,可用于地震监测的试验。
A soil pressure sensor based on the principle of force-frequency linear relationship of AT-cut quartz crystal resonator is introduced.High precision frequency measurement is realized by use of equal-precision technology.This sensor consists of three pressure sensors perpendicular to each other,together with a temperature sensor,and RS485 serial interface is used for data communication.The structural design of the pressure sensors is described in detail,and the relationships between elastic film material and its thickness to the range and sensitivity are tested.Experimental results show that the sensor range is 0~1.0 MPa;non-linearity of less than 1.0%;repeatability error less than 0.05%,delay error is less than 0.1%,the temperature measurement accuracy is 0.01 ℃.This instrument can be used for earthquake monitoring test.
A soil pressure sensor based on the principle of force-frequency linear relationship of AT-cut quartz crystal resonator is introduced.High precision frequency measurement is realized by use of equal-precision technology.This sensor consists of three pressure sensors perpendicular to each other,together with a temperature sensor,and RS485 serial interface is used for data communication.The structural design of the pressure sensors is described in detail,and the relationships between elastic film material and its thickness to the range and sensitivity are tested.Experimental results show that the sensor range is 0~1.0 MPa;non-linearity of less than 1.0%;repeatability error less than 0.05%,delay error is less than 0.1%,the temperature measurement accuracy is 0.01 ℃.This instrument can be used for earthquake monitoring test.
引文
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[12]汪首坤,林波涛,王军政.自适应等精度频率测量方法与实现[J].传感技术学报,2007,20(2):346-349.WANG Shoukun,LIN Botao,WANG Junzheng,etal.New measurement of digital frequency based on au-to-adapted and equal-precision technique[J].ChineseJournal of Sensors and Actuators,2007,20(2):346-349.
[2]张宝红,邱泽华,易志刚.南北地震带上的钻孔应力-应变观测[J].地震研究,2006,29(1):97-102.ZHANG Baohong,QIU Zehua,YI Zhigang.Boreholestress-strain observatory on south-north seismic zone[J].Journal of Seismologic Research,2006,29(1):97-102.
[3]梁晓平,田志林,董杏坤.土层地应力异常与地震的关系[J].华北地震科学,1998,16(2):69-74.LIANG Xiaoping,TIAN Zhilin,DONG Xingkun.Therelationship between terrestrial stress anomaly in soillayer and earthquake[J].North China Seismic Sci-ences,1998,16(2):69-74.
[4]张道义,延军,胡遵素,等.高精度岩层应力仪探头安装在土层中的实验观测[J].地震,1994,4(2):81-84.ZHANG Daoyi,YAN Jun,HU Zunsu,et al.Experi-mental observation with high-precision rock stratastressometer when the probe mounted in earth strata[J].Earthquake,1994,4(2):81-84.
[5]蒋靖祥,杜文平,张进,等.新疆土层应力地震异常类型初步分析[J].内陆地震,2007,21(1):29-38.JIANG Jinxiang,DU Wenping,ZHANG Jin,et al.Preliminary analysis of earthquake abnormaty typeabout xinjiang soil layer stress[J].Inland Earthquake,2007,21(1):29-38.
[6]陈健,田滔,刘江斌,等.沙层应变观测特征的初步研究[J].防灾科技学院学报,2011,13(4):1-7.CHEN Jian,TIAN Tao,LIU Jiangbin,et al.Prelimi-nary observational study on sand layer strain character-istics[J].Journal of Institute of Disaster Prevention,2011,13(4):1-7.
[7]吴永贵,王喆,朱惠忠,等.石英谐振式力传感器的结构模型与性能分析[J].仪器仪表学报,1998,19(1):102-105.WU Yonggui,WANG Zhe,ZHU Huizhong,et al.The structure model of quartz resonator force sensorand its capability analysis[J].Chinese Journal of Sci-entific Instrument,1998,19(1):102-105.
[8]王晓红,朱惠忠,董永贵,等.石英谐振式力传感器及几个工程问题研究[J],仪器仪表学报,1999,20(3):274-279.WANG Xiaohong,ZHU Huizhong,DONG Yonggui,et al.Study for the quartz resonator force sensor andits engineering problems[J].Chinese Journal of Scien-tific Instrument,1999,20(3):274-279.
[9]罗兵,田文杰,邹淑芳.薄圆片石英晶体应力分布及谐振器力频实验[J].显微、测量、徽细加工技术与设备,2009,46(8):489-493.LUO Bing,TIAN Wenjie,ZHOU Shufang.Stress dis-tribution of thin circular quartz crystalsand force fre-quency sensitive experiments[J].Microscope,Meas-urement,Microfabrication&Equipment,2009,46(8):489-493.
[10]张景文.基于石英谐振式力敏传感器的便携式测力系统的设计[M].南京:南京航空航天大学,2005.
[11]李红刚,张素萍,杨林楠.基于FPGA的高速等精度频率测量系统设计[J].微计算机信息,2008,24(12):227-230.LI Honggang,ZHANG Suping,YANG Linnan.De-sign of high speed and equal precision frequency meas-urement system based on FPGA[J].MicrocomputerInformation,2008,24(12):227-230.
[12]汪首坤,林波涛,王军政.自适应等精度频率测量方法与实现[J].传感技术学报,2007,20(2):346-349.WANG Shoukun,LIN Botao,WANG Junzheng,etal.New measurement of digital frequency based on au-to-adapted and equal-precision technique[J].ChineseJournal of Sensors and Actuators,2007,20(2):346-349.
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