MEMS加速度传感器噪声分析
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摘要
与传统的传感器相比,MEMS传感器具有体积小、成本低、可靠性高、易于集成和实现智能化等特点,而近年来更多的地震仪器应用此技术,更加有助于地震研究的深入。本文分析了MEMS的发展现状,介绍了MEMS加速度计的主要分类,通过理论分析和实测背景噪声,比较机械式力平衡加速度计和MEMS加速度计的性能指标,并初步探索地震预警采用何种类型设备的技术成熟度及其可行性。
Compared with traditional sensors,MEMS sensors have smaller size,lower cost,higher reliability,better integration and intelligence. In recent years,MEMS is applied to more and more earthquake instruments to deepen the research of earthquake. The development and classification of MEMS are introduced. Analyzing the background noise based on the theory and the experiments,the performance index of the mechanical force-balance accelerometer and the MEMS accelerometers are compared to select the right ones for the study of earthquake. The technology readiness and the practicability are discussed that what types of the MEMS accelerometers are applied to earthquake early warning.
Compared with traditional sensors,MEMS sensors have smaller size,lower cost,higher reliability,better integration and intelligence. In recent years,MEMS is applied to more and more earthquake instruments to deepen the research of earthquake. The development and classification of MEMS are introduced. Analyzing the background noise based on the theory and the experiments,the performance index of the mechanical force-balance accelerometer and the MEMS accelerometers are compared to select the right ones for the study of earthquake. The technology readiness and the practicability are discussed that what types of the MEMS accelerometers are applied to earthquake early warning.
引文
[1]王立鼎,罗怡.中国ME MS的研究与开发进程[J].仪表技术与传感器,2003,1(1),1-3.WANG Liding,LUO Yi.Research and development of MEMS in China[J].Instrument Technique and Sensor,2003,1(1),1-3.(in Chinese)
[2]林世荣.地震仪器指标体系研究与MEMS仪器设计[D].哈尔滨:中国地震局工程力学研究所,2012.LIN Shirong.Research on specification system of seismometers and design of MEMS accelerograph[J].Harbin:Institute of Engineering Mechanics,2012.(in Chinese)
[3]李学东,余志伟.基于MEMS技术的微型传感器[J].仪表技术与传感器,2005,9:4-5,12.LI Xuedong,YU Zhiwei.Micro sensors based on MEMS technology[J].Instrument Technique and Sensor,2005,9:4-5,12.(in Chinese)
[4]郝一龙,等.硅基MEMS技术[J].机械强度,2001,23(4):523-526.HAO Yilong.Technology of silicon-based MEMS[J].Journal of Mechanical strength,2001,23(4):523-526.(in Chinese)
[5]王展飞,鲁文高.MEMS振动陀螺闭环自激驱动的理论分析及数值仿真[J].传感技术学报,2008,8(21):1337-1342.WANG Zhanfei,LU Wengao.Theoetical analysis and numerical simulation of closed-loop self-oscillation system for MEMS vibratory gyroscopes[J].Chinese Journal of Sensors and Actuators,2008,8(21):1337-1342.(in Chinese)
[6]陈立国,凌云峰.MEMS压力传感器自动组装系统[J].纳米技术与精密工程,2008,6(4):297-301.CHEN Liguo,LING Yunfeng.Automatic micro assembly system for MEMS pressure sensor packaging[J].Nanotechnology and Precision Engineering,2008,6(4):297-301.(in Chinese)
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[8]曹晓棠,石云波.基于MEMS的微型飞行器姿态测量系统[J].传感器与微系统,2013,23(2):122-127.CAO Xiaotang,SHI Yunbo.Attitude measurement system for based on MEMS[J].Transducer and Microsystems Tech nologies,2013,23(2):122-127.(in Chinese)
[9]高宗余,李德胜.多MEMS传感器姿态测量系统的研究[J].电光与控制,2010,17(3):68-70.GAO Zongyu,LI Desheng.Attitude measurement system based on multiple MEMS sensors[J].Electronics Optics&Control,2010,17(3):68-70.(in Chinese)
[10]孙凤鸣,傅星.基于MEMS的微位移传感器及其应用研究[J].传感技术学报,2013,26(2):293-296.SUN Fengming,FU Xing.MEMS based micro displacement sensor and Its application[J].Chinese Journal of Sensors and Actuatiors,2013,26(2):293-296.(in Chinese)
[11]彭孝东,陈瑜.MEMS三轴数字陀螺仪标定方法研究[J].传感器与微系统,2013,32(6):63-65,69.PENG Xiaodong,CHEN Yu.Study on calibration method of MEMS 3-axis digital gyroscope[J].Transducer and Microsystems Technologies,2013,32(6):63-65,69.(in Chinese)
[12]任建新,杜亚宁.实用的MEMS惯性器件外场标定方法[J].传感器与微系统,2014,33(6):27-30.REN Jianxin,DU Yaning.Outfield calibration method for practical MEMS inertial device[J].Transducer and Microsystems Technologies,2014,33(6):27-30.(in Chinese)
[13]李圣怡,刘宗林.微加速度计研究的进展[J].国防科技大学学报,2004,26(6):34-37.LI Shengyi,LIU Zonglin.Developments of micro accelerometer research[J].Journal of National University of Defense Technology,2004,26(6):34-37.(in Chinese)
[14]B.John Merchant.MEMS applications in seismology[J].Seismic Instrumentation Technology Symposium,2009,11.
[15]TDA-33M力平衡加速度计使用说明书,珠海市泰德企业有限公司.
[16]刘宇,等,MEMS加速度传感器计量检测技术的研究进展[J].计测技术,2010,30:5-8.LIU Yu.Research progress of gauge check technology of MEMS accelerometers[J].Metrology&Measurement Technology,2010,30:5-8.(in Chinese)
[17]F Mohd-Yasin,Nagel D J,Korman C E.Noise in MEMS[J].Meas.Sci.Technol,2010,21.
[18]Mikko Saukoshi,Lasse Aaltonen.Fully integrated charge sensitive amplifier for readout of micromechanical capacitive sensors[C]∥ISCAS 2005:5377-5380.
[19]Cochran E S,Lawrence J F,Christensen Cet al.The Quake-Catcher Network:Citizen science expanding seismic horizons[J].Seism.Res.Letts.,2009,80,26-30.
[2]林世荣.地震仪器指标体系研究与MEMS仪器设计[D].哈尔滨:中国地震局工程力学研究所,2012.LIN Shirong.Research on specification system of seismometers and design of MEMS accelerograph[J].Harbin:Institute of Engineering Mechanics,2012.(in Chinese)
[3]李学东,余志伟.基于MEMS技术的微型传感器[J].仪表技术与传感器,2005,9:4-5,12.LI Xuedong,YU Zhiwei.Micro sensors based on MEMS technology[J].Instrument Technique and Sensor,2005,9:4-5,12.(in Chinese)
[4]郝一龙,等.硅基MEMS技术[J].机械强度,2001,23(4):523-526.HAO Yilong.Technology of silicon-based MEMS[J].Journal of Mechanical strength,2001,23(4):523-526.(in Chinese)
[5]王展飞,鲁文高.MEMS振动陀螺闭环自激驱动的理论分析及数值仿真[J].传感技术学报,2008,8(21):1337-1342.WANG Zhanfei,LU Wengao.Theoetical analysis and numerical simulation of closed-loop self-oscillation system for MEMS vibratory gyroscopes[J].Chinese Journal of Sensors and Actuators,2008,8(21):1337-1342.(in Chinese)
[6]陈立国,凌云峰.MEMS压力传感器自动组装系统[J].纳米技术与精密工程,2008,6(4):297-301.CHEN Liguo,LING Yunfeng.Automatic micro assembly system for MEMS pressure sensor packaging[J].Nanotechnology and Precision Engineering,2008,6(4):297-301.(in Chinese)
[7]陈立国,孙立宁,荣伟彬.MEMS器件微装配系统的设计与研制[J].中国机械工程,2005,16(14):1226-1228,1232.CHEN Liguo,SUN Lining,RONG Weibin.Design and development of MEMS assembly system[J].China Mechanical Engineering,2005,16(14):1226-1228,1232.(in Chinese)
[8]曹晓棠,石云波.基于MEMS的微型飞行器姿态测量系统[J].传感器与微系统,2013,23(2):122-127.CAO Xiaotang,SHI Yunbo.Attitude measurement system for based on MEMS[J].Transducer and Microsystems Tech nologies,2013,23(2):122-127.(in Chinese)
[9]高宗余,李德胜.多MEMS传感器姿态测量系统的研究[J].电光与控制,2010,17(3):68-70.GAO Zongyu,LI Desheng.Attitude measurement system based on multiple MEMS sensors[J].Electronics Optics&Control,2010,17(3):68-70.(in Chinese)
[10]孙凤鸣,傅星.基于MEMS的微位移传感器及其应用研究[J].传感技术学报,2013,26(2):293-296.SUN Fengming,FU Xing.MEMS based micro displacement sensor and Its application[J].Chinese Journal of Sensors and Actuatiors,2013,26(2):293-296.(in Chinese)
[11]彭孝东,陈瑜.MEMS三轴数字陀螺仪标定方法研究[J].传感器与微系统,2013,32(6):63-65,69.PENG Xiaodong,CHEN Yu.Study on calibration method of MEMS 3-axis digital gyroscope[J].Transducer and Microsystems Technologies,2013,32(6):63-65,69.(in Chinese)
[12]任建新,杜亚宁.实用的MEMS惯性器件外场标定方法[J].传感器与微系统,2014,33(6):27-30.REN Jianxin,DU Yaning.Outfield calibration method for practical MEMS inertial device[J].Transducer and Microsystems Technologies,2014,33(6):27-30.(in Chinese)
[13]李圣怡,刘宗林.微加速度计研究的进展[J].国防科技大学学报,2004,26(6):34-37.LI Shengyi,LIU Zonglin.Developments of micro accelerometer research[J].Journal of National University of Defense Technology,2004,26(6):34-37.(in Chinese)
[14]B.John Merchant.MEMS applications in seismology[J].Seismic Instrumentation Technology Symposium,2009,11.
[15]TDA-33M力平衡加速度计使用说明书,珠海市泰德企业有限公司.
[16]刘宇,等,MEMS加速度传感器计量检测技术的研究进展[J].计测技术,2010,30:5-8.LIU Yu.Research progress of gauge check technology of MEMS accelerometers[J].Metrology&Measurement Technology,2010,30:5-8.(in Chinese)
[17]F Mohd-Yasin,Nagel D J,Korman C E.Noise in MEMS[J].Meas.Sci.Technol,2010,21.
[18]Mikko Saukoshi,Lasse Aaltonen.Fully integrated charge sensitive amplifier for readout of micromechanical capacitive sensors[C]∥ISCAS 2005:5377-5380.
[19]Cochran E S,Lawrence J F,Christensen Cet al.The Quake-Catcher Network:Citizen science expanding seismic horizons[J].Seism.Res.Letts.,2009,80,26-30.
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