微电子机械系统数字地震检波器模拟方法的研究
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摘要
在地下资源勘探中,地震检波器是一种将机械振动转化为电信号的专用检波器。主要从MEMS数字检波器的内部结构和工作原理入手,提出一种MEMS传感器内部结构的模拟方法。该方法采用脉宽调制发生器、二极管、控制电压和常量等模块模拟可变差动电容,运用可编程模块S-function实现地震信号的输入,输出电路由传递函数、零阶保持器和模数转换等模块组成。该模拟方法可以调节系统中的各个参数,为硬件的设计提供更多的依据。输入地震信号与输出信号的对比可见该模拟方法能够有效的采集和传输地震信号。
In the underground mineral resources exploration,the geophone is a special sensor which can translate the mechanical vibration into the electrical signal.This paper researches on the micro-electro-mechanical system(MEMS) digital geophone which is the one of the most advanced geophones at present.Based on the analysis of the internal structure and work principle of MEMS digital geophone,a simulation method of MEMS sensor′s internal structure is proposed.The Pulse-Width Modulation(PWM) generator,diode,controlled voltage source and the object constant are uesd to simulate the differential capacitor.The program module S-function is used to input seismic signal.The output module constitutes of transform function,zero-oder hold and the Analog to Digital Converter(ADC).With the help of the above measure,this simulation method can be of very good help for the adjustment of the parameters to supply the fundamental for the hardware designing.From the results of the experiments,it is clear that the simulation method proposed in the paper is effective and feasible.
In the underground mineral resources exploration,the geophone is a special sensor which can translate the mechanical vibration into the electrical signal.This paper researches on the micro-electro-mechanical system(MEMS) digital geophone which is the one of the most advanced geophones at present.Based on the analysis of the internal structure and work principle of MEMS digital geophone,a simulation method of MEMS sensor′s internal structure is proposed.The Pulse-Width Modulation(PWM) generator,diode,controlled voltage source and the object constant are uesd to simulate the differential capacitor.The program module S-function is used to input seismic signal.The output module constitutes of transform function,zero-oder hold and the Analog to Digital Converter(ADC).With the help of the above measure,this simulation method can be of very good help for the adjustment of the parameters to supply the fundamental for the hardware designing.From the results of the experiments,it is clear that the simulation method proposed in the paper is effective and feasible.
引文
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[9]李宵宵等.加速度传感器的数字化标定系统[J].科技信息,2010,(2):83～88
[10]董良国,马在田,曹景忠等.一阶弹性波方程交错网格高阶差分解法[J].地球物理学报,2000,43(3):411～419
[2]汉泽西,李彪,邵媛,郭正虹.地震检波器发展初探[J].石油仪器,2006,(6):1～5
[3]霍振飞,马柄和,苑伟政.一种基于多端口组件网络的MEMS系统级建模方法[J].机械科学与技术,2005,24:192～195
[4]Maxwell P,Tessman J,Reichert B.Design through to productionof a MEMS digital accelerometer for seismic acquisition[J].First Break,2001,(19):141～143
[5]Mougenot D.How digital sensors compare to geophone[A].SEG Expanded Abstracts CPS/SEG 2004 International Ge-ophysical Conference[C],2004
[6]李剑峰,黄卫,胡中平等.基于微机电系统的数字检波器研制和性能分析[J].石油物探,2005,44:439～453
[7]Savazzi S,et al.Wireless geophone networks for high-densityland acquisition technologies and futer potential[J].The Lead-ing Edge,2008,27:882～886
[8]Song C,Ha B,Lee S.Micromachined inertial sensors[A].Proceedings of the 1999 IEEE/RSI International Conferenceon Intelligent Robots and System[C],Korea Suwon,1999:1049～1056
[9]李宵宵等.加速度传感器的数字化标定系统[J].科技信息,2010,(2):83～88
[10]董良国,马在田,曹景忠等.一阶弹性波方程交错网格高阶差分解法[J].地球物理学报,2000,43(3):411～419
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