蓝宝石单晶ELID磨削表面质量研究
|
摘要
本论文利用了ELID(Electrolytic In-Process Dressing,ELID)方法,对蓝宝石进行塑性磨削研究,同时对青龙玉,微晶玻璃等不同硬度材料进行ELID磨削研究。实验采用了GM73-Ⅲ型超精密平面磨床,铸铁基短纤维结合剂金刚石砂轮(粒度为W5),配合在线电解修整,通过调整砂轮单位进给量和砂轮转速,实现了对蓝宝石的塑性切削;并通过对青龙玉,微晶玻璃等脆性材料的ELID磨削,研究了单位进给量和砂轮转速对表面粗糙度的影响。利用表面光度仪(XP-2TM)、原子力显微镜(Atomic Force Microscope,AFM)和偏光显微镜(DMRXP)分别对蓝宝石加工表面轮廓、表面形貌和表面加工缺陷进行了分析。并采用X射线衍射小角度掠入射的方法,对蓝宝石加工表面变质层进行了研究。
研究结果表明,本实验中,用ELID方法对蓝宝石进行磨削,表面粗糙度值随单位进给量增大而增大,随砂轮转速增大呈先降低后升高的趋势;蓝宝石磨削有脆性断裂和塑性切削两种模式;当单位进给量为1μm,砂轮转速为1900 rpm时,蓝宝石处于塑性域磨削,得到表面粗糙度值为3.2 nm。利用ELID方法,与传统磨削抛光相比,大大减少了蓝宝石材料表面的加工缺陷,实现了以磨代抛,提高了加工效率,蓝宝石加工表面变质层厚度仅为2.33μm,满足了蓝宝石基片作为功能材料的精度要求和光学要求。本实验用ELID方法磨削不同硬度的脆性材料,均满足表面粗糙度随砂轮转速增加而先降低后增大的趋势,且最低表面粗糙度对应的砂轮转速随材料硬度增大而降低。
The surface of sapphire crystal grinded under ductile mode was discussed with the Electrolytic In-Process Dressing(ELID) method in this paper. Different hardness materials, such as jade and glass ceramic, were also researched under ELID grinding. In this experiment, the ductile cutting mode of sapphire crystal has been achieved via changing the feed rate and the rotation speed of grinding wheel. All the sapphire crystal were grinded by ELID method on surface grinder that type is GM73-Ⅲand short cast iron fibers bonded diamond grinding wheel. Via grinding jade and glass ceramic with ELID method, the effect of feed rate and rotation speed to surface roughness had been researched. The surface profile, surface topography and manufacturing deficiency had been researched separately by using profilometer (XP-2TM), Atomic Force Microscope (AFM) and polarization microscope (DMRXP). Then the metamorphic layer was studied by grazing incidence X-ray diffraction method.
The result showed that the surface roughness of sapphire crystal grinded by ELID method increases with the feed rate increasing, and the surface roughness decreases at first and then increaseswith the rotation speed increasing. There are two mode when the sapphire crystal was grinded, such as brittle fracture and ductile cutting. When the feed rate was 1μm and the rotation speed was 1900 rpm, the sapphire crystal was grinded under ductile cutting, the surface roughness of sapphire crystal was 3.2 nm. The manufacturing deficiency of sapphire crystal grinded by ELID method was reduced greatly compare to the surface grinded by traditional grinding method and polishing. The traditional grinding method and polishing was replaced by ELID method, and the efficiency also was improved. The thickness of metamorphic layer of sapphire crystal grinded by ELID is 2.33μm, which satisfied the request of sapphire crystal slice as functional material. After grinding the different hardness materials by ELID method, the direction that the surface roughness decreases at first and then increases when the rotation speed increases had been proved. And the corresponding rotation speed of the lowest surface roughness decreases withthe hardness increasing.
研究结果表明,本实验中,用ELID方法对蓝宝石进行磨削,表面粗糙度值随单位进给量增大而增大,随砂轮转速增大呈先降低后升高的趋势;蓝宝石磨削有脆性断裂和塑性切削两种模式;当单位进给量为1μm,砂轮转速为1900 rpm时,蓝宝石处于塑性域磨削,得到表面粗糙度值为3.2 nm。利用ELID方法,与传统磨削抛光相比,大大减少了蓝宝石材料表面的加工缺陷,实现了以磨代抛,提高了加工效率,蓝宝石加工表面变质层厚度仅为2.33μm,满足了蓝宝石基片作为功能材料的精度要求和光学要求。本实验用ELID方法磨削不同硬度的脆性材料,均满足表面粗糙度随砂轮转速增加而先降低后增大的趋势,且最低表面粗糙度对应的砂轮转速随材料硬度增大而降低。
The surface of sapphire crystal grinded under ductile mode was discussed with the Electrolytic In-Process Dressing(ELID) method in this paper. Different hardness materials, such as jade and glass ceramic, were also researched under ELID grinding. In this experiment, the ductile cutting mode of sapphire crystal has been achieved via changing the feed rate and the rotation speed of grinding wheel. All the sapphire crystal were grinded by ELID method on surface grinder that type is GM73-Ⅲand short cast iron fibers bonded diamond grinding wheel. Via grinding jade and glass ceramic with ELID method, the effect of feed rate and rotation speed to surface roughness had been researched. The surface profile, surface topography and manufacturing deficiency had been researched separately by using profilometer (XP-2TM), Atomic Force Microscope (AFM) and polarization microscope (DMRXP). Then the metamorphic layer was studied by grazing incidence X-ray diffraction method.
The result showed that the surface roughness of sapphire crystal grinded by ELID method increases with the feed rate increasing, and the surface roughness decreases at first and then increaseswith the rotation speed increasing. There are two mode when the sapphire crystal was grinded, such as brittle fracture and ductile cutting. When the feed rate was 1μm and the rotation speed was 1900 rpm, the sapphire crystal was grinded under ductile cutting, the surface roughness of sapphire crystal was 3.2 nm. The manufacturing deficiency of sapphire crystal grinded by ELID method was reduced greatly compare to the surface grinded by traditional grinding method and polishing. The traditional grinding method and polishing was replaced by ELID method, and the efficiency also was improved. The thickness of metamorphic layer of sapphire crystal grinded by ELID is 2.33μm, which satisfied the request of sapphire crystal slice as functional material. After grinding the different hardness materials by ELID method, the direction that the surface roughness decreases at first and then increases when the rotation speed increases had been proved. And the corresponding rotation speed of the lowest surface roughness decreases withthe hardness increasing.
引文
1. 吴希让.高精磨削硬脆材料的新方法.磨床与磨削,2000,(1):42-80
2. 袁巨龙,袁哲俊.功能陶瓷的超精密加工技术.哈尔滨:哈尔滨工业大学出版社,2000,8:17-20,139-142
3. 关佳亮,范晋伟,王文超,黄旭东,骆琪.ELID 精密镜面磨削技术的开发应用.北京航空精密制造技术,2002,38(2):5-7
4. 李崇豪 , 赵向东 . 陶瓷材料电加工后变质层厚度的研究 . 江苏理工大学学报,1996,17(4):57-60
5. 朱波,袁哲俊.ELID超精密磨削钢结硬质合金及其表面质量分析.中国机械工程,2000,11(8):866-868
6. B. P. Bandyopadhyay, H. Ohmori, I. Takahashi, Efficient and stable grinding of ceramics by electrolytic in-process dressing(ELID). Journal of Materials Processing Technology, 1995:3-12
7. 张飞虎,朱波.ELID 磨削硬脆材料精密和超精密加工的新技术.宇航材料工艺,1999,(1):51-55
8. Nobuhide Itoh, Hitoshi Ohmori. Grinding Characteristics of Hard and Brittle Materials by Fine Grain Lapping Wheels with ELID. Journal of Materials Processing Technology, 1996:315-320
9. 关佳亮.范晋伟.ELID磨削技术在硬脆材料精密超精密加工中的应用.北京工业大学学报,2001,27(4):486-488
10. 张春河,王平.在线电解修整磨削先进陶瓷.机械工艺师,1994,(9):5-7
11. 陈明君,王力松,梁迎春,卢泽生.脆性材料塑性域的超精密加工方法.航空精密制造技术,2001,37(2):10-25
12. Ohmori H. ELID grinding technique and its factors for ultraprecision mirror surface machining In Proc.of the 5th Sino Japan Seminar on Ultraprecision Maching,Harbin, 1994:125-149
13. 李伯民,赵波.现代磨削技术.北京:机械工业出版社,2003:82-105
14. 王先逵.精密加工技术实用手册.北京:机械工业出版社,2001:98-142
15. 任敬心.难加工材料的磨削.北京:国防工业出版社,1999:4-73,423-483
16. 任敬心,史兴宽.磨削技术的新进展-硬脆材料光滑表面的超精磨削.中国机械工程,1997,8(4):106-110
17. 张飞虎,张春河,欧海涛,袁哲俊.在线电解修整镜面磨削中砂轮耐用度的研究.哈尔滨工业大学学报,1999,31(6):9-11
18. 张春河,王平,李伟,袁哲俊,张飞虎.在线连续电解修整磨削工艺.新技术新工艺,1994,(4):21-22
19. 张春河,王平,张飞虎,袁哲俊.ELID 超精密镜面磨削在平面磨床上的实现.精密加工,1999,(9):1-3
20. 周曙光,关佳亮,郭东明,袁哲俊.ELID 镜面磨削技术―综述.制造技术与机床,2001,(2):38-40
21. 田欣利.陶瓷磨削表面变质层的产生机理.机械工程学报,2000,36(11):30-32
22. Peter Blake. Precision machinng of ceramic materials Ceramics. Bulletin, 1988, 67 (6): 67-70
23. 关佳亮,郭东明,袁哲俊.ELID 镜面磨削砂轮氧化膜生成机理.中国机械工程.1999.10(6):630-632
24. 仇中军,张飞虎,谢大纲.应用 ELID 技术进行微晶玻璃超精密磨削.金刚石与磨料磨具工程,2002,(1):36-39
25. Hitoshi Morietal. Electrolytic In-process Dressing(ELID)Grinding Technique for Ultra-precision Mirror Surface Machining. Int.Journal of JSPE, 1992:26
26. 邓朝晖 , 张璧, 孙棕禹等 . 陶瓷磨削材料去除机理的研究进展 . 中国机械工程,2002:1608-1611
27. B. P. Bandyopadhyaya. The effect of ELID grinding on the flexural strength of silicon nitride International. Journal of Machine Tools & Manufacture, 1999, (39):839–853
28. Takao Nakamuea. Mirror Polishing of Silicon Wafers (3rd Report). Int.J.Japen Soc.Drec Eng, 1994:11-13
29. 尚广庆,孙春华.硬脆材料磨削加工机理的理论分析.工具技术,2002,36(10):19-21
30. 史兴宽,原京庭.硬脆材料光滑表面超精磨削的研究.航空学报,1998:253-256
31. Ohmori Hetal. Mirror surface grinding of silicon wafers with electrolytic in-process dressing. Annals of the CIRP, 1990:329-332
32. J. Gilman. Hardness-A Strength Microprobe: The Science of Hardness Testing and Its Research Application. ASM, 1973:11-14
33. Taniguchi. N.Materials and Machining. Kyoritsu Press (In Japanese), 1974:25-26
34. Yoshikawa H. Brittle-Ductile Behavior of Crystal Surface. Jap Soc, 1969:32-33
35. Hill. R. The Mathematical Theory of Plasticity. Oxford Univ Press, 1950:104-106
36. 张福出.无机非金属材料断裂力学.北京:中国建筑工业出版社,1982:162-214
37. Lawn. B. R, Evans. A. G. and Mavshall. D. B. Elastic/Plastic Indentation Damage in Ceramics. J.Amercian Ceramic Society, 1980:102-104
38. Hong Chen, Jing Li, Jesse Spence, James C.M.Li. An ELID-cutting saw. Journal of materials Processing Technology, 2000, (102):208-214
39. 龚庆寿,宁立伟,黄菊生等.ELID 精密镜面磨削技术及其应用研究.湖南工程学院学报:自然科学版,2003,(003):45-47
40. B. N. Whittaker, R. N. Singh and G. Sun. Rock fracture mechanics. Elsevier Science Publishers R.V, 1992:54-58
41. 王平,韩荣久.电解修整精密镜面磨削工件表面形态及切屑形成理论解析.西安交通大学学报,1998:39-42
42. 刘中本.ELID磨削技术及其在光学加工中的应用.应用化学,1997:30-33
43. K. Katahira, Y. Watanabe, H. Ohmori, T. Kato. ELID grinding and tribological characteristic of TiAlN film. International Journal of Machine Tools&Manufacture, 2002, (42):1307-1313
44. 梁国明.表面光洁度和波纹度.北京:北京科技出版社,1986:l02-105
45. 杨世春.表面质量与光整技术.北京:机械工业出版社,1999 年:1-29
46. 唐文彦等.触针法测量表面粗糙度的发展与现状.机械工艺师,2000:40-41
47. 郭宁 , 秦紫瑞 . 原子力显微镜的发展与表面成像技术 . 理化检验-物理分册,1998,34(10):13-16
48. 陈祥,宋晋生,李言祥.微分干涉相衬法在材料显微分析中的应用.实验技术与管理,2003,(3):19-23
49. Radu Pavel, Madalina Pavel. Loan Marinescu Investigation of pre-dressing time for ELID grinding technique. Journal of Materials Processing Technology, 2004:591-596
50. K. Fathima, A. Senthil Kumar. Wear.2003: 1247-1255
51. 马胜利,卢正欣,井晓天.人工生长蓝宝石单晶结构的 TEM 衍射测定.人工晶体学报,1998,27(2):182-184
52. 王崇鲁.白宝石单晶.天津:天津科学技术出版社,1983:1-20
53. 宋开新,俞建长.微晶玻璃的制备与应用.山东陶瓷,2002,25(1):17-20
54. H.米格兰比.材料的塑性变形与断裂.德国.科学出版社译,1998:501-563
55. Viktor P. Astakhov, S. Shvets. The assessment of plastic deformation in metal cutting. Journal of Materials Processing Technology, 2004: 193-202
56. Jeong-Du Kim, In-hyu Choi. Micro surface Phenomenon of ductile cutting in the ultrasonic vibration cutting of optical plastics. Journal of Materials Processing Technology, 1997: 89-98
57. 王培铭.无机非金属材料学.上海:同济大学出版社.1999:29-36
58. Zhao qingliang, Dong shen, T.Sun. Research on a Diamond Tip Wear Mechanism in Atomic-Force Microscope based Micro/nano machining. High Technology letters, 2001, (7):3-6
59. Martin Baker. The influence of plastic properties in chip formation. Computational Materials Science, 2003, (28):556-562
60. 朱怀义,赵巾奎译.微细加工技术编辑委员会.微细加工技术.北京:科学出版社,1985:25-108
61. Marshall D B, Lawn B R, Evans A G. Elastic Plastic Indentation Damage in Ceramics.The Latered Crack System. J. Amer. Ceram.Soc, 1982:561-566
62. F. H. Zhang, Z. J. Qiu, G. W. Kang, Z. J. Yuan. High efficiency ELID grinding of garnet ferrite. Journal of Materials Processing Technology, 2002, (129):41-44
63. Bifano T G.Dow T A. Scattergood R. Ductile-Regime Grinding. A New Technology for Machining Brittle Materials.ASME. J. of Eng. for Ind, 1991:184-189
64. 杨桂通.塑性力学.北京:中国建材工业出版社,2000:9-63
65. 库拉柯夫.磨削缺陷的预防.苏联:机械工业出版社,1987:39-158
66. 徐耀信.机床振动学.南昌:江西高校出版社,1990:237-274
67. 刘世民.半导体硅片及花岗岩石材 ELID 磨削加工表面变质层的研究.[燕山大学硕士论文].1995:20-30
68. 刁玉强.在线电解修整超精磨削复合加工工艺及工件变质层的研究.[燕山大学硕士论文].1994:15-20
69. D. F. Home. Optical Production technology. Adam Hilger, 1972:12-14
70. Kazutake Kohre, Shiguru Nakano. X-Ray Studies in Lattice Defects in Silicon by Diffraction Microscopy and Double Crystal Spectrometer. Int. J. Japen Soc.Drec .Eng.Vol, 1963:341-343
71. J. Rech, C. Le Calvez, M. Dessoly. A new approach for the characterization of machinability-application to steels for plastic injection molds. Journal of Materials Processing Thechnology, 2004:66-70
72. 丛秋滋.多晶二维 X 射线衍射.北京:科学出版社,1997:170-196
73. K.H 哈比西.严立译.材料的磨损与硬度.北京:机械工业出版社,1987:101-259
74. 石德珂.位错与材料强度.西安:西安交通大学出版社,1988:121-202
75. 李庆生.材料强度学.太原:山西科学教育出版社,1990:157-233
2. 袁巨龙,袁哲俊.功能陶瓷的超精密加工技术.哈尔滨:哈尔滨工业大学出版社,2000,8:17-20,139-142
3. 关佳亮,范晋伟,王文超,黄旭东,骆琪.ELID 精密镜面磨削技术的开发应用.北京航空精密制造技术,2002,38(2):5-7
4. 李崇豪 , 赵向东 . 陶瓷材料电加工后变质层厚度的研究 . 江苏理工大学学报,1996,17(4):57-60
5. 朱波,袁哲俊.ELID超精密磨削钢结硬质合金及其表面质量分析.中国机械工程,2000,11(8):866-868
6. B. P. Bandyopadhyay, H. Ohmori, I. Takahashi, Efficient and stable grinding of ceramics by electrolytic in-process dressing(ELID). Journal of Materials Processing Technology, 1995:3-12
7. 张飞虎,朱波.ELID 磨削硬脆材料精密和超精密加工的新技术.宇航材料工艺,1999,(1):51-55
8. Nobuhide Itoh, Hitoshi Ohmori. Grinding Characteristics of Hard and Brittle Materials by Fine Grain Lapping Wheels with ELID. Journal of Materials Processing Technology, 1996:315-320
9. 关佳亮.范晋伟.ELID磨削技术在硬脆材料精密超精密加工中的应用.北京工业大学学报,2001,27(4):486-488
10. 张春河,王平.在线电解修整磨削先进陶瓷.机械工艺师,1994,(9):5-7
11. 陈明君,王力松,梁迎春,卢泽生.脆性材料塑性域的超精密加工方法.航空精密制造技术,2001,37(2):10-25
12. Ohmori H. ELID grinding technique and its factors for ultraprecision mirror surface machining In Proc.of the 5th Sino Japan Seminar on Ultraprecision Maching,Harbin, 1994:125-149
13. 李伯民,赵波.现代磨削技术.北京:机械工业出版社,2003:82-105
14. 王先逵.精密加工技术实用手册.北京:机械工业出版社,2001:98-142
15. 任敬心.难加工材料的磨削.北京:国防工业出版社,1999:4-73,423-483
16. 任敬心,史兴宽.磨削技术的新进展-硬脆材料光滑表面的超精磨削.中国机械工程,1997,8(4):106-110
17. 张飞虎,张春河,欧海涛,袁哲俊.在线电解修整镜面磨削中砂轮耐用度的研究.哈尔滨工业大学学报,1999,31(6):9-11
18. 张春河,王平,李伟,袁哲俊,张飞虎.在线连续电解修整磨削工艺.新技术新工艺,1994,(4):21-22
19. 张春河,王平,张飞虎,袁哲俊.ELID 超精密镜面磨削在平面磨床上的实现.精密加工,1999,(9):1-3
20. 周曙光,关佳亮,郭东明,袁哲俊.ELID 镜面磨削技术―综述.制造技术与机床,2001,(2):38-40
21. 田欣利.陶瓷磨削表面变质层的产生机理.机械工程学报,2000,36(11):30-32
22. Peter Blake. Precision machinng of ceramic materials Ceramics. Bulletin, 1988, 67 (6): 67-70
23. 关佳亮,郭东明,袁哲俊.ELID 镜面磨削砂轮氧化膜生成机理.中国机械工程.1999.10(6):630-632
24. 仇中军,张飞虎,谢大纲.应用 ELID 技术进行微晶玻璃超精密磨削.金刚石与磨料磨具工程,2002,(1):36-39
25. Hitoshi Morietal. Electrolytic In-process Dressing(ELID)Grinding Technique for Ultra-precision Mirror Surface Machining. Int.Journal of JSPE, 1992:26
26. 邓朝晖 , 张璧, 孙棕禹等 . 陶瓷磨削材料去除机理的研究进展 . 中国机械工程,2002:1608-1611
27. B. P. Bandyopadhyaya. The effect of ELID grinding on the flexural strength of silicon nitride International. Journal of Machine Tools & Manufacture, 1999, (39):839–853
28. Takao Nakamuea. Mirror Polishing of Silicon Wafers (3rd Report). Int.J.Japen Soc.Drec Eng, 1994:11-13
29. 尚广庆,孙春华.硬脆材料磨削加工机理的理论分析.工具技术,2002,36(10):19-21
30. 史兴宽,原京庭.硬脆材料光滑表面超精磨削的研究.航空学报,1998:253-256
31. Ohmori Hetal. Mirror surface grinding of silicon wafers with electrolytic in-process dressing. Annals of the CIRP, 1990:329-332
32. J. Gilman. Hardness-A Strength Microprobe: The Science of Hardness Testing and Its Research Application. ASM, 1973:11-14
33. Taniguchi. N.Materials and Machining. Kyoritsu Press (In Japanese), 1974:25-26
34. Yoshikawa H. Brittle-Ductile Behavior of Crystal Surface. Jap Soc, 1969:32-33
35. Hill. R. The Mathematical Theory of Plasticity. Oxford Univ Press, 1950:104-106
36. 张福出.无机非金属材料断裂力学.北京:中国建筑工业出版社,1982:162-214
37. Lawn. B. R, Evans. A. G. and Mavshall. D. B. Elastic/Plastic Indentation Damage in Ceramics. J.Amercian Ceramic Society, 1980:102-104
38. Hong Chen, Jing Li, Jesse Spence, James C.M.Li. An ELID-cutting saw. Journal of materials Processing Technology, 2000, (102):208-214
39. 龚庆寿,宁立伟,黄菊生等.ELID 精密镜面磨削技术及其应用研究.湖南工程学院学报:自然科学版,2003,(003):45-47
40. B. N. Whittaker, R. N. Singh and G. Sun. Rock fracture mechanics. Elsevier Science Publishers R.V, 1992:54-58
41. 王平,韩荣久.电解修整精密镜面磨削工件表面形态及切屑形成理论解析.西安交通大学学报,1998:39-42
42. 刘中本.ELID磨削技术及其在光学加工中的应用.应用化学,1997:30-33
43. K. Katahira, Y. Watanabe, H. Ohmori, T. Kato. ELID grinding and tribological characteristic of TiAlN film. International Journal of Machine Tools&Manufacture, 2002, (42):1307-1313
44. 梁国明.表面光洁度和波纹度.北京:北京科技出版社,1986:l02-105
45. 杨世春.表面质量与光整技术.北京:机械工业出版社,1999 年:1-29
46. 唐文彦等.触针法测量表面粗糙度的发展与现状.机械工艺师,2000:40-41
47. 郭宁 , 秦紫瑞 . 原子力显微镜的发展与表面成像技术 . 理化检验-物理分册,1998,34(10):13-16
48. 陈祥,宋晋生,李言祥.微分干涉相衬法在材料显微分析中的应用.实验技术与管理,2003,(3):19-23
49. Radu Pavel, Madalina Pavel. Loan Marinescu Investigation of pre-dressing time for ELID grinding technique. Journal of Materials Processing Technology, 2004:591-596
50. K. Fathima, A. Senthil Kumar. Wear.2003: 1247-1255
51. 马胜利,卢正欣,井晓天.人工生长蓝宝石单晶结构的 TEM 衍射测定.人工晶体学报,1998,27(2):182-184
52. 王崇鲁.白宝石单晶.天津:天津科学技术出版社,1983:1-20
53. 宋开新,俞建长.微晶玻璃的制备与应用.山东陶瓷,2002,25(1):17-20
54. H.米格兰比.材料的塑性变形与断裂.德国.科学出版社译,1998:501-563
55. Viktor P. Astakhov, S. Shvets. The assessment of plastic deformation in metal cutting. Journal of Materials Processing Technology, 2004: 193-202
56. Jeong-Du Kim, In-hyu Choi. Micro surface Phenomenon of ductile cutting in the ultrasonic vibration cutting of optical plastics. Journal of Materials Processing Technology, 1997: 89-98
57. 王培铭.无机非金属材料学.上海:同济大学出版社.1999:29-36
58. Zhao qingliang, Dong shen, T.Sun. Research on a Diamond Tip Wear Mechanism in Atomic-Force Microscope based Micro/nano machining. High Technology letters, 2001, (7):3-6
59. Martin Baker. The influence of plastic properties in chip formation. Computational Materials Science, 2003, (28):556-562
60. 朱怀义,赵巾奎译.微细加工技术编辑委员会.微细加工技术.北京:科学出版社,1985:25-108
61. Marshall D B, Lawn B R, Evans A G. Elastic Plastic Indentation Damage in Ceramics.The Latered Crack System. J. Amer. Ceram.Soc, 1982:561-566
62. F. H. Zhang, Z. J. Qiu, G. W. Kang, Z. J. Yuan. High efficiency ELID grinding of garnet ferrite. Journal of Materials Processing Technology, 2002, (129):41-44
63. Bifano T G.Dow T A. Scattergood R. Ductile-Regime Grinding. A New Technology for Machining Brittle Materials.ASME. J. of Eng. for Ind, 1991:184-189
64. 杨桂通.塑性力学.北京:中国建材工业出版社,2000:9-63
65. 库拉柯夫.磨削缺陷的预防.苏联:机械工业出版社,1987:39-158
66. 徐耀信.机床振动学.南昌:江西高校出版社,1990:237-274
67. 刘世民.半导体硅片及花岗岩石材 ELID 磨削加工表面变质层的研究.[燕山大学硕士论文].1995:20-30
68. 刁玉强.在线电解修整超精磨削复合加工工艺及工件变质层的研究.[燕山大学硕士论文].1994:15-20
69. D. F. Home. Optical Production technology. Adam Hilger, 1972:12-14
70. Kazutake Kohre, Shiguru Nakano. X-Ray Studies in Lattice Defects in Silicon by Diffraction Microscopy and Double Crystal Spectrometer. Int. J. Japen Soc.Drec .Eng.Vol, 1963:341-343
71. J. Rech, C. Le Calvez, M. Dessoly. A new approach for the characterization of machinability-application to steels for plastic injection molds. Journal of Materials Processing Thechnology, 2004:66-70
72. 丛秋滋.多晶二维 X 射线衍射.北京:科学出版社,1997:170-196
73. K.H 哈比西.严立译.材料的磨损与硬度.北京:机械工业出版社,1987:101-259
74. 石德珂.位错与材料强度.西安:西安交通大学出版社,1988:121-202
75. 李庆生.材料强度学.太原:山西科学教育出版社,1990:157-233
© 2004-2018 中国地质图书馆版权所有 京ICP备05064691号 京公网安备11010802017129号 地址：北京市海淀区学院路29号 邮编：100083 电话：办公室：(+86 10)66554848；文献借阅、咨询服务、科技查新：66554700 |