Z轴微机械陀螺的集成设计技术
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摘要
微机电系统(Micro Electro-Mechanical Systems,MEMS)以其体积小、重量轻、性能稳定、可批量生产等特点在世界范围内的各个领域得到了广泛的应用,尤其是在需要尽量减小器件重量和体积的航空、航天领域更是发挥着越来越重要的作用。
微机械陀螺作为MEMS的典型器件一直是国内外研究的热点,而Z轴微机械陀螺由于具有较好的性能成为微机械陀螺的重要发展方向。
本文针对微机械陀螺设计中存在的机械耦合现象提出了一种能从自身结构上消除机械耦合影响的电容式Z轴微机械陀螺结构,并采用集成化的设计方法分别从系统级、器件级、工艺级三个方面进行Z轴微机械陀螺的设计和验证。
在系统级中开发了相关系统级多端口三维组件模型,建立了Z轴微机械陀螺系统级模型,并对陀螺进行了时域分析和频域分析;在器件级中对Z轴微机械陀螺进行了模态、阻尼等分析;在工艺级中设计了Z轴微机械陀螺的掩膜版图和工艺流程,并进行工艺几何仿真。
最后,实际进行Z轴微机械陀螺的流片加工,分析了检测的结果,比较验证了陀螺集成设计方法。
此外,结合Z轴微机械陀螺设计,完善和补充了集成设计平台的功能,设计开发了相关数据传递接口。
MEMS have the feature of miniature, low cost, strong reliability and the potential of high performance, which enable it to have wide use and have become an important branch of current inertial technology, especially for the aviation, aerospace.Micromachined gyroscope is one typical MEMS device. The Z-axis micromachined gyroscope becomes the development direction of the micromachined gyroscope with its high performance.A new structure of Z-axis micromachined gyroscope with mechanically decoupled through sixteen independent suspension beams is designed by means of the integration design method based on the design flow of system level, device level and process level.In system level design, some Multi-Port Element Network (MuPEN) models were developed, and the system model of Z-axis micromachined gyroscope was established with the small-signal frequency analysis and time-domain transient analysis. In device level design, the mode analysis and damping analysis of the Z-axis micromachined gyroscope was done. In process level design, the layout and process with geometrical simulation was made.At last, the Z-axis micromachined gyroscope was fabricated in a bulk micromachining process, the difference between design and fabrication has been analyzed.In addition, in order to support the design, some data transfer interfaces have been developed in the design fow.
微机械陀螺作为MEMS的典型器件一直是国内外研究的热点,而Z轴微机械陀螺由于具有较好的性能成为微机械陀螺的重要发展方向。
本文针对微机械陀螺设计中存在的机械耦合现象提出了一种能从自身结构上消除机械耦合影响的电容式Z轴微机械陀螺结构,并采用集成化的设计方法分别从系统级、器件级、工艺级三个方面进行Z轴微机械陀螺的设计和验证。
在系统级中开发了相关系统级多端口三维组件模型,建立了Z轴微机械陀螺系统级模型,并对陀螺进行了时域分析和频域分析;在器件级中对Z轴微机械陀螺进行了模态、阻尼等分析;在工艺级中设计了Z轴微机械陀螺的掩膜版图和工艺流程,并进行工艺几何仿真。
最后,实际进行Z轴微机械陀螺的流片加工,分析了检测的结果,比较验证了陀螺集成设计方法。
此外,结合Z轴微机械陀螺设计,完善和补充了集成设计平台的功能,设计开发了相关数据传递接口。
MEMS have the feature of miniature, low cost, strong reliability and the potential of high performance, which enable it to have wide use and have become an important branch of current inertial technology, especially for the aviation, aerospace.Micromachined gyroscope is one typical MEMS device. The Z-axis micromachined gyroscope becomes the development direction of the micromachined gyroscope with its high performance.A new structure of Z-axis micromachined gyroscope with mechanically decoupled through sixteen independent suspension beams is designed by means of the integration design method based on the design flow of system level, device level and process level.In system level design, some Multi-Port Element Network (MuPEN) models were developed, and the system model of Z-axis micromachined gyroscope was established with the small-signal frequency analysis and time-domain transient analysis. In device level design, the mode analysis and damping analysis of the Z-axis micromachined gyroscope was done. In process level design, the layout and process with geometrical simulation was made.At last, the Z-axis micromachined gyroscope was fabricated in a bulk micromachining process, the difference between design and fabrication has been analyzed.In addition, in order to support the design, some data transfer interfaces have been developed in the design fow.
引文
[1]. Damrongrit Piyabongkam, Rajesh Rajamani, Michael Greminger. The Development of a MEMS Gyroscope for Absolute Angle Measurement. IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, VOL. 13, NO. 2, MARCH 2005,pp.185-195
[2].常洪龙.微机械陀螺的集成设计方法与关键技术研究.西北工业大学博士学位论文.2005
[3]. D. S. Eddy and D. R. Sparks, "Application of MEMS technology in automotive sensors and actuators," Proc. IEEE, vol. 86, no. 8, pp.1747 1755, Aug. 1998.
[4]. B. Boxenhorn and P. Greiff. A vibratory micromechanical gyroscope. AIAA Guidance and Controls Conference, Minneapolis, Minnesota, Aug. 15-17, 1988,pp. 1033-1040
[5]. J. Bernstein et al., "A micro-machined comb-drive tuning fork rate gyroscope," in Proc. Workshop Microelectromechanical Systems, 1993, pp. 143-148.
[6].林爱民.双框架微机械陀螺及其准LIGA制备技术的研究.中国科学院上海冶金研究所硕士学位论文.1999
[7]. K.Maenaka, et al. Silicon rate sensor using anisotropic etching technology. Transducers'93. pp.642
[8]. K.Maenaka, et al. A study of silicon angular rate sensors using anisotropic etching technology. Sensor and Actuators. 43(1994). pp.72-77
[9]. Farrokh Ayazi, Khalil Najafi. A HARPSS Polysilicon Vibrating Ring Gyroscope. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,VOL. 10, NO.2, JUNE 2001. pp. 169-179
[10]. W.A. Clark et al., "Micro-machined Z-axis vibratory rate gyroscope," in Proc. Tech. Dig. Solid State Sensors and Actuators Workshop, 1996, pp. 283 287.
[11].曾辉,周百令,苏岩等.微机械陀螺仪检测反馈控制系统研究.传感器技术.2005年第24卷第3期.pp.32-34
[12]. Andrei M Shkel, Roberto Horowitz, Ashwin A Seshia, Sungsu Park, Roger T Howe. Dynamics and control of micromachined gyroscopes[C].Proceeding of the American Control Conference. San Diego, California, June 1999.pp.2119-2124
[13].林烨,莫锦秋.新型双级解耦合微机械陀螺设计与仿真.计算机仿真.第22卷第4期,2005.pp.20-22
[14].李伟建.复杂微机电系统的多域耦合分析与设计优化李伟建.西北工业大学博士学位论文.2004
[15].霍鹏飞.微机电系统的多端口组件网络方法系统级建模研究.西北工业大学博士学位论文.2004
[16].霍鹏飞,马炳和,苑伟政.基于组件网络方法的微加速度计建模与仿真.航空学报.2003,24(5):466-470
[17].刘希珠,雷田玉.陀螺力学基础.北京:清华大学出版社.1987
[18].贾书惠.刚体动力学.北京:高等教育出版社.1987
[19].马炳和,霍鹏飞,苑伟政.MEMS系统级设计与基于多端口组件网络的建模方法.微纳电子技术.2003(7/8)
[20]. Fedder, Gary K.;Jing, Qi.Hierarchical circuit-level design methodology for microelectromechanical systems. IEEE Trans Circuits Syst Ⅱ Analog Digital Signal Process. 1999, 46(10): 1309-1315
[21].裘安萍,蔡体菁,周百令等.音义式硅微机械振动陀螺仪的粘滞阻尼研究.东南大学学报.2000,Vol.30,No.1,pp.131-135
[22]. Mohamed Gad-el-Hak. Flow Physics in MEMS [J]. Mec Ind. 2001, 2:313-341
[23]. Xia Zhang, William C Tang. Viscous air damping in laterally driven microresonators[C]. Proceedings of the IEEE, 1994:199-204
[24]. Cho Y-H, Kwak B M, et al. Slide film damping in laterally driven microstructures [J]. Sensors and Actuators, 1994.A40:31-39
[25].李文望,孙道恒.微机械振动陀螺的耦合误差和隔离耦合的结构设计.机械与电子.2001(6).pp.45-47
[26].李文望.微机械振动陀螺隔离耦合的结构设计.华侨大学学报.第22卷.第4期.2001.pp.380-384
[27]. Min-Hang Bao. Micro mechanical transducers, pressure sensors, accelerometers and gyroscopes [M]. 2000 Elsevier.
[28]. James B Starr. Squeeze-film damping in solid state accelerometers[C]. IEEE Solid state sensor and actuator workshop, Hilton Head Island, South Carolina, June, 1990:44-47
[29].鲍敏杭.微机械陀螺进展[J].世界产品与技术,2000,(10):20-22
[30]. Larry K. Baxter, Capacitive Sensors[M], New York: IEEE Press, 1997
[31].张海霞,郭辉,张大成等.集成化MEMS工艺设计技术的研究.纳米技术与精密工程,第2卷第3期.2004.pp.229-233
[32]. http://www.coventor.com/coventorware/
[33].苑伟政,马炳和编著.微机械与微细加工技术.西安:西北工业大学出版社;2000
[34].方志华.MEMS工艺版图三维重构技术研究.西北工业大学硕士学位论文.2004
[35].唐华锋.MEMS工艺集成化设计及其可视化.西北工业大学硕士学位论文.2003
[36]. Rongchun Zhou, et al. Simulation of the Bosch process with a string-cell hybrid method. JOURNAL OF MICROMECHANICS AND MICROENGINEERING 14 (2004).pp. 851-858
[37]. Said Emre Alper, Tayfun Akin. A SYMMETRIC SURFACE MICROMACHINED GYROSCOPE WITH DECOUPLED OSCILLATION MODES. The 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, June 10-14, 2001
[38]. W. Geiger et al. Decoupled microgyros and the design principle DAVED. Sensor and Actuator 95(2002). pp. 239-249
[39]. C. C. Painter, A. M. Shkei. Structural and thermal modeling of a z-axis rate integrating gyroscope. JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 13 (2003). pp.229 237
[40]. Tang T K, Gutierrez R C, et al. A packaged silicon MEMS vibratory gyroscope for micro spacecraft[C]. IEEE Micro Electromechanical Systems Conference, Nagoya, Japan, January, 1997:500-505
[41]. Warnasch A, Killen A. Low cost, high G, micro electro-mechanical systems (MEMS), inertial measurements unit (IMU) program[C]. IEEE Position Location and Navigation Symposium, 2002:299-305
[42]. Greiff P, Boxenhorn B, King T, et al. Silicon monolithic micromechanical gyroscope[C]. International Conference on Solid-State Sensors and Actuators, 1991: 966-968
[43]. Geiger W, Folkmer B, Merz J. A new silicon rate gyroscope[C], IEEE Micro Electromechanical Systems Conference, Heidelberg, Germany, January, 1998:615-620
[44]. Jin Woo Song, Jang Gyu Lee, et al. Design and performance test of an in-plane gimbaled silicon gyroscope[C]. Proceedings of the IEEE National Aerospace and Electronics Conference, 2000:339-345
[45]. Harris A J, Burdess J S, et al. A silicon membrane gyroscope with electrostatic actuation[C]. IEE Colloquium on Silicon Fabricated Inertial Instruments, 1996:1-7
[46].黄小振.电容式振动微机械陀螺接口电路的设计模拟与测试[D].上海:中科院上海冶金所.2001
[47].鲍敏杭.微机械陀螺进展[J].世界产品与技术,2000,(10):20-22
[48].姚雅红.微机械陀螺的微结构设计与制造工艺研究[D].北京:清华大学精仪系,1998
[49].吕苗.硅溶片工艺流程文件.河北半导体研究所工艺文件[Z]
[50]. William C Tang. Overview of Microelectromechanical Systems and Design Processes[C]. Design Automation Conference, Anaheim, CA, USA, 1997
[51]. Chang Honglong, Yuan Weizheng. The Study on Suspension for Micromachined Comb Drive Tuning Fork Gyroscope[C]. Asia-Pacific Conference of Transducers and Micro-Nano Technology 2004, Sapporo, Japan, July 4～8,2004
[2].常洪龙.微机械陀螺的集成设计方法与关键技术研究.西北工业大学博士学位论文.2005
[3]. D. S. Eddy and D. R. Sparks, "Application of MEMS technology in automotive sensors and actuators," Proc. IEEE, vol. 86, no. 8, pp.1747 1755, Aug. 1998.
[4]. B. Boxenhorn and P. Greiff. A vibratory micromechanical gyroscope. AIAA Guidance and Controls Conference, Minneapolis, Minnesota, Aug. 15-17, 1988,pp. 1033-1040
[5]. J. Bernstein et al., "A micro-machined comb-drive tuning fork rate gyroscope," in Proc. Workshop Microelectromechanical Systems, 1993, pp. 143-148.
[6].林爱民.双框架微机械陀螺及其准LIGA制备技术的研究.中国科学院上海冶金研究所硕士学位论文.1999
[7]. K.Maenaka, et al. Silicon rate sensor using anisotropic etching technology. Transducers'93. pp.642
[8]. K.Maenaka, et al. A study of silicon angular rate sensors using anisotropic etching technology. Sensor and Actuators. 43(1994). pp.72-77
[9]. Farrokh Ayazi, Khalil Najafi. A HARPSS Polysilicon Vibrating Ring Gyroscope. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,VOL. 10, NO.2, JUNE 2001. pp. 169-179
[10]. W.A. Clark et al., "Micro-machined Z-axis vibratory rate gyroscope," in Proc. Tech. Dig. Solid State Sensors and Actuators Workshop, 1996, pp. 283 287.
[11].曾辉,周百令,苏岩等.微机械陀螺仪检测反馈控制系统研究.传感器技术.2005年第24卷第3期.pp.32-34
[12]. Andrei M Shkel, Roberto Horowitz, Ashwin A Seshia, Sungsu Park, Roger T Howe. Dynamics and control of micromachined gyroscopes[C].Proceeding of the American Control Conference. San Diego, California, June 1999.pp.2119-2124
[13].林烨,莫锦秋.新型双级解耦合微机械陀螺设计与仿真.计算机仿真.第22卷第4期,2005.pp.20-22
[14].李伟建.复杂微机电系统的多域耦合分析与设计优化李伟建.西北工业大学博士学位论文.2004
[15].霍鹏飞.微机电系统的多端口组件网络方法系统级建模研究.西北工业大学博士学位论文.2004
[16].霍鹏飞,马炳和,苑伟政.基于组件网络方法的微加速度计建模与仿真.航空学报.2003,24(5):466-470
[17].刘希珠,雷田玉.陀螺力学基础.北京:清华大学出版社.1987
[18].贾书惠.刚体动力学.北京:高等教育出版社.1987
[19].马炳和,霍鹏飞,苑伟政.MEMS系统级设计与基于多端口组件网络的建模方法.微纳电子技术.2003(7/8)
[20]. Fedder, Gary K.;Jing, Qi.Hierarchical circuit-level design methodology for microelectromechanical systems. IEEE Trans Circuits Syst Ⅱ Analog Digital Signal Process. 1999, 46(10): 1309-1315
[21].裘安萍,蔡体菁,周百令等.音义式硅微机械振动陀螺仪的粘滞阻尼研究.东南大学学报.2000,Vol.30,No.1,pp.131-135
[22]. Mohamed Gad-el-Hak. Flow Physics in MEMS [J]. Mec Ind. 2001, 2:313-341
[23]. Xia Zhang, William C Tang. Viscous air damping in laterally driven microresonators[C]. Proceedings of the IEEE, 1994:199-204
[24]. Cho Y-H, Kwak B M, et al. Slide film damping in laterally driven microstructures [J]. Sensors and Actuators, 1994.A40:31-39
[25].李文望,孙道恒.微机械振动陀螺的耦合误差和隔离耦合的结构设计.机械与电子.2001(6).pp.45-47
[26].李文望.微机械振动陀螺隔离耦合的结构设计.华侨大学学报.第22卷.第4期.2001.pp.380-384
[27]. Min-Hang Bao. Micro mechanical transducers, pressure sensors, accelerometers and gyroscopes [M]. 2000 Elsevier.
[28]. James B Starr. Squeeze-film damping in solid state accelerometers[C]. IEEE Solid state sensor and actuator workshop, Hilton Head Island, South Carolina, June, 1990:44-47
[29].鲍敏杭.微机械陀螺进展[J].世界产品与技术,2000,(10):20-22
[30]. Larry K. Baxter, Capacitive Sensors[M], New York: IEEE Press, 1997
[31].张海霞,郭辉,张大成等.集成化MEMS工艺设计技术的研究.纳米技术与精密工程,第2卷第3期.2004.pp.229-233
[32]. http://www.coventor.com/coventorware/
[33].苑伟政,马炳和编著.微机械与微细加工技术.西安:西北工业大学出版社;2000
[34].方志华.MEMS工艺版图三维重构技术研究.西北工业大学硕士学位论文.2004
[35].唐华锋.MEMS工艺集成化设计及其可视化.西北工业大学硕士学位论文.2003
[36]. Rongchun Zhou, et al. Simulation of the Bosch process with a string-cell hybrid method. JOURNAL OF MICROMECHANICS AND MICROENGINEERING 14 (2004).pp. 851-858
[37]. Said Emre Alper, Tayfun Akin. A SYMMETRIC SURFACE MICROMACHINED GYROSCOPE WITH DECOUPLED OSCILLATION MODES. The 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, June 10-14, 2001
[38]. W. Geiger et al. Decoupled microgyros and the design principle DAVED. Sensor and Actuator 95(2002). pp. 239-249
[39]. C. C. Painter, A. M. Shkei. Structural and thermal modeling of a z-axis rate integrating gyroscope. JOURNAL OF MICROMECHANICS AND MICROENGINEERING. 13 (2003). pp.229 237
[40]. Tang T K, Gutierrez R C, et al. A packaged silicon MEMS vibratory gyroscope for micro spacecraft[C]. IEEE Micro Electromechanical Systems Conference, Nagoya, Japan, January, 1997:500-505
[41]. Warnasch A, Killen A. Low cost, high G, micro electro-mechanical systems (MEMS), inertial measurements unit (IMU) program[C]. IEEE Position Location and Navigation Symposium, 2002:299-305
[42]. Greiff P, Boxenhorn B, King T, et al. Silicon monolithic micromechanical gyroscope[C]. International Conference on Solid-State Sensors and Actuators, 1991: 966-968
[43]. Geiger W, Folkmer B, Merz J. A new silicon rate gyroscope[C], IEEE Micro Electromechanical Systems Conference, Heidelberg, Germany, January, 1998:615-620
[44]. Jin Woo Song, Jang Gyu Lee, et al. Design and performance test of an in-plane gimbaled silicon gyroscope[C]. Proceedings of the IEEE National Aerospace and Electronics Conference, 2000:339-345
[45]. Harris A J, Burdess J S, et al. A silicon membrane gyroscope with electrostatic actuation[C]. IEE Colloquium on Silicon Fabricated Inertial Instruments, 1996:1-7
[46].黄小振.电容式振动微机械陀螺接口电路的设计模拟与测试[D].上海:中科院上海冶金所.2001
[47].鲍敏杭.微机械陀螺进展[J].世界产品与技术,2000,(10):20-22
[48].姚雅红.微机械陀螺的微结构设计与制造工艺研究[D].北京:清华大学精仪系,1998
[49].吕苗.硅溶片工艺流程文件.河北半导体研究所工艺文件[Z]
[50]. William C Tang. Overview of Microelectromechanical Systems and Design Processes[C]. Design Automation Conference, Anaheim, CA, USA, 1997
[51]. Chang Honglong, Yuan Weizheng. The Study on Suspension for Micromachined Comb Drive Tuning Fork Gyroscope[C]. Asia-Pacific Conference of Transducers and Micro-Nano Technology 2004, Sapporo, Japan, July 4～8,2004
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