LiNbO_3压电薄膜的制备及在足底压力检测中的应用研究
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摘要
人体足底压力分布反映有关足的结构、功能及整个身体姿势控制等情况。测试、分析足底压力可以获取人体在各体态和运动上的生理、病理力学参数和机能参数。这对临床医学诊断、疾患程度测定、术后疗效评价、生物力学及康复研究均有重要意义。
根据人体步态分析的需求,本文设计了一种基于压电薄膜LiNbO_3和PCD-300A数据采集分析仪的足底压力测量系统。其目的是为临床医学研究提供分析工具,提供测量数据,以提高医学研究的理论水平。利用压电传感器动态特性好的优点,提高了测量系统的动态响应能力,使得测量数据更精确,克服了传统传感器测量技术中动态测试能力低的缺陷。
本文针对足底压力检测中的力—电转换原理进行分析,采用居里点高,动态性能好的LiNbO_3材料进行压电式传感器的设计和制作。围绕LiNbO_3薄膜的制备,分析比较了LiNbO_3薄膜的常用制备方法,如:溅射法(sputtering)、脉冲激光沉积(PLD)法、金属有机物化学气相沉积(MOCVD)法和溶胶—凝胶(Sod-gel)法等。分析比较后决定采用RF射频磁控溅射法制备LiNbO_3薄膜,并对溅射沉积原理和方法作了介绍,对射频溅射成膜原理进行了理论分析和重点阐述,主要工作如下:
首先,利用RF磁控溅射法采用LiNbO_3陶瓷靶溅射沉积薄膜,突破以往传统衬底材料创新采用了一种新型的衬底材料一橡胶,在功率为70W,氩氧比为1:9,压强为8×10~(-3)Torr的工艺条件下成功地取得了质量较好的LiNbO_3薄膜,为开发新型衬底材料提供了成功实例。
其次,在制备LiNbO_3薄膜的过程中对晶体的晶化动力学过程取向生长作了比较详细全面的分析。如形核机理的描述,晶粒生长过程中应力对薄膜取向生长的影响等。
最后,进行了足底压力检测系统的设计,利用日本KOYAW公司的压电式传感器数据采集系统PCD-320A功能强大、数据采集迅速、操作简单等优点,联合自制的LiNbO_3薄膜对人体足底压力进行检测,采集数据,并以波形和数据显示测试结果。
本系统采用了PCD-300系列数据采集分析技术,简化了硬件电路,充分利用目前KOWAY公司PCD-30软件的丰富资源,设计了体积小,能实时测量,结果直观的测量系统,体现了医学仪器小型化的发展趋势,可以适应基本的医学研究需要。
The thenar Pressure of human being can reflcet the situation about the instruction and function of thenar, the control of whole body posture.Test and analyze the thenar pressure can obtain the physiologic and pathologic parameter about posture and athletics.It is significant in medical diagnosis,illness degree test,the evaluation of curative effect,biology mechnics and healing investigation.
In this dissertation a Measuring System based on LiNbO_3 and the data collection analyser of PCD-300 is designed in order to analyze the walking pace. The purpose is to provide a tool for clinical research. This system is designed using aseries of piezoelectricity transducers and the measurement technology of PCD-300. Piezoelectricity transducers have the advantage of fine dynamic character-istics, which can improve dynamic response of measurement system. This advantage makes this system superior to those traditional transducer measurement systems and the data is more accurate than ever.
In this dissertation ,we deposited LiNbO_3 films on latex substrate by radio frequency(RF) magnetron sputtering.The main work can be described as following:
First, we use LiNbO_3 ceramic target to deposite LiNbO_3 on the latex substrate by RF magnetron sputtering method. We have made high quality LiNbO_3 thin films under the higher target power 70W condition.
Secondly, besides drpositing LN films,we analyze the tropism development of crystalloid in the course of dynamics.
Finally,we use the LiNbO_3 thin films to test the thenar pressure of human being. We collected data and use graphics to display the test result.
This system simplified hardware circuit. Its small volume realurement and direct outcome display represent the tendency of medicalminifying, which basically satisfied the demand of medical research.time meas-instrument
根据人体步态分析的需求,本文设计了一种基于压电薄膜LiNbO_3和PCD-300A数据采集分析仪的足底压力测量系统。其目的是为临床医学研究提供分析工具,提供测量数据,以提高医学研究的理论水平。利用压电传感器动态特性好的优点,提高了测量系统的动态响应能力,使得测量数据更精确,克服了传统传感器测量技术中动态测试能力低的缺陷。
本文针对足底压力检测中的力—电转换原理进行分析,采用居里点高,动态性能好的LiNbO_3材料进行压电式传感器的设计和制作。围绕LiNbO_3薄膜的制备,分析比较了LiNbO_3薄膜的常用制备方法,如:溅射法(sputtering)、脉冲激光沉积(PLD)法、金属有机物化学气相沉积(MOCVD)法和溶胶—凝胶(Sod-gel)法等。分析比较后决定采用RF射频磁控溅射法制备LiNbO_3薄膜,并对溅射沉积原理和方法作了介绍,对射频溅射成膜原理进行了理论分析和重点阐述,主要工作如下:
首先,利用RF磁控溅射法采用LiNbO_3陶瓷靶溅射沉积薄膜,突破以往传统衬底材料创新采用了一种新型的衬底材料一橡胶,在功率为70W,氩氧比为1:9,压强为8×10~(-3)Torr的工艺条件下成功地取得了质量较好的LiNbO_3薄膜,为开发新型衬底材料提供了成功实例。
其次,在制备LiNbO_3薄膜的过程中对晶体的晶化动力学过程取向生长作了比较详细全面的分析。如形核机理的描述,晶粒生长过程中应力对薄膜取向生长的影响等。
最后,进行了足底压力检测系统的设计,利用日本KOYAW公司的压电式传感器数据采集系统PCD-320A功能强大、数据采集迅速、操作简单等优点,联合自制的LiNbO_3薄膜对人体足底压力进行检测,采集数据,并以波形和数据显示测试结果。
本系统采用了PCD-300系列数据采集分析技术,简化了硬件电路,充分利用目前KOWAY公司PCD-30软件的丰富资源,设计了体积小,能实时测量,结果直观的测量系统,体现了医学仪器小型化的发展趋势,可以适应基本的医学研究需要。
The thenar Pressure of human being can reflcet the situation about the instruction and function of thenar, the control of whole body posture.Test and analyze the thenar pressure can obtain the physiologic and pathologic parameter about posture and athletics.It is significant in medical diagnosis,illness degree test,the evaluation of curative effect,biology mechnics and healing investigation.
In this dissertation a Measuring System based on LiNbO_3 and the data collection analyser of PCD-300 is designed in order to analyze the walking pace. The purpose is to provide a tool for clinical research. This system is designed using aseries of piezoelectricity transducers and the measurement technology of PCD-300. Piezoelectricity transducers have the advantage of fine dynamic character-istics, which can improve dynamic response of measurement system. This advantage makes this system superior to those traditional transducer measurement systems and the data is more accurate than ever.
In this dissertation ,we deposited LiNbO_3 films on latex substrate by radio frequency(RF) magnetron sputtering.The main work can be described as following:
First, we use LiNbO_3 ceramic target to deposite LiNbO_3 on the latex substrate by RF magnetron sputtering method. We have made high quality LiNbO_3 thin films under the higher target power 70W condition.
Secondly, besides drpositing LN films,we analyze the tropism development of crystalloid in the course of dynamics.
Finally,we use the LiNbO_3 thin films to test the thenar pressure of human being. We collected data and use graphics to display the test result.
This system simplified hardware circuit. Its small volume realurement and direct outcome display represent the tendency of medicalminifying, which basically satisfied the demand of medical research.time meas-instrument
引文
[1]张一兵,翁文剑.LiNbO3薄膜的制备方法和应用前景.材料热处理学报 2002.3.
[2]张澎丽,刘技文.铌酸锂薄膜制备的研究现状及进展.天津理工大学学报,2006.8.
[3]Shibata Y,et al.Strain mechanism of LiNbO3 Psappire heterostructure grown by pulsed laser deposition[J].Jpn J Appl,1997,36(12A):7344 - 7347.
[4]Kawagnchi T,Yoon D H,Minakata M,et al.Fabrication of thin2film waveguide QPM2SHGdevice bydomain2inverted liquid2phase exipaxy[J].J Crys Grow,1998,191(122):152-129.
[5]S.Wang,T.A.Rabson,Q.Su,M.Robert,"Theory and Experiment of High-Frequency Surface Acoustic WavePropagation Using LiNbO3 Thin Films on Diamond/Silicon Substrates,"Integrated Ferroelectrics,1999,27,377
[6]张一兵 铌酸锂的晶体结构,上饶师范学院学报,2001
[7]S.Wang,T.A.Rabsom,Q.Su,and M.Robert,"Growth and Characterization of Lithium Niobate Thin Films on Diamond/Si(100) Substrates,"MRS Symposium Proceedings on Ferroelectric Thin Films,1999,541,717-722
[8]T.A.Rabsom,S.Wang,Q.Su,and M.Robert,Deposition of LiNbO3 Thin Films on Diamond/Si(100)Substrates for High-Frequency Surface Acoustic Wave Filter Applications,IntegratedFerroelectrics,1999,25- 37-46.
[9]袁刚,张木勋.糖尿病患者足底压力研究.中国糖尿病杂志,2002,10(5)
[10]肖辉盛,严励.糖尿病患者足底压力检测及影响因素探讨.中华糖尿病杂志,2005
[11]李海,丁建新.足底压力式步态分析技术在痉挛型脑性瘫痪儿童步态研究中的应用.中华物理医学与康复杂志,2006.3
[12]李建设.足底压力测量技术在生物力学研究中的应用与进展.北京体育大学学报,2005.2
[13]韦启航.人体步态分析系统一足底压力测量系统的研制.中国生物医学工程学报,2002
[14]许贵民.脚压测量用传感器。生物医学工程杂志,1994,11(4);351,356
[15]刘彦民,黄柳宾,王殿生.铌酸锂晶体测量电压研究.中原工学院学报,2003.8
[16]SChaff P,et al.Pressure measurment inside shoes and application in alpineskiing.Biomechanics,Basic and applied research.1987,659 - 6668 Hennacy RA,et al.A piezoelectric crystal method for measuring staticdynamic pressure distribution in the feet.J AM.Podiatry ASS,19754.4.4
[17]闪乃本,《晶体生长的物理基础》,上海科学技术出版社,(1982)
[18]吴自勤,王兵.《薄膜生长》,科学出版利,2005
[19]张旭,薛冬峰.铌酸锂晶体的生长研究.人工晶体学报,第34卷,第4期 2005
[20]杜经宁,黄信凡。电子薄膜科学,第5章.北京:科学出版社,1997
[21]R.Z.Valiev,E.V.Kozlov,Yu.F.Ivanov,J.Lian,A.A.Nazarov,and B.Baudelet,Acta Metall.Mater.42,2467 - 1994.
[22]张建民,徐可为.薄膜中异常晶粒生长理论及能量各向异性分析.《物理学报》52卷
[23]Es-Souni,M.Abed,M.Solterbeck,C.-H.Piorra,A.Crystallization kinetics and dielectric properties of solution deposited,La doped PZT thin films Materials Science and Engineering:Volume:94,Issue:2-3,June 1,2002,pp.229 - 236
[24]Es-Souni,M.Piorra,A.On the crystallization kinetics of solution deposited PZT thin films Materials Research Bulletin Volume:36,Issue:15,December,2001,pp.2563-2575
[25]A.Gruverman,H.Tokutnoto,S.A.Prakash,S.Aggansal,B.Yang,M.Wuttig,R.Rarnesh,O.Auciello and T.Venkatesan,Appl.Phys.Lett.71,3492(1997).
[26]YL.Li,S.YI-Iu and L.O.Chen 2005 J.Appl.Phys.97 034112
[27]Nanjo,Kazuyoshi;Nagaharna,Hiroyuki Fractal properties of spatial distributions of aftershocks and active faults Chaos,Solitons and Fractals Volume:19,Issue:2,Januar3,2004,pp.87-3 97
[28]臼井一郎 应用于压力检测的压电薄膜研究 佐贺工业技术中心材料报 2005.7
[29]平井智纪 薄膜形压力传感器的制作 佐贺工业技术中心材料报 2006.3
[30]P.J.Kelly,R.D Arnell.Magnetron sputtering:a review of recent developments and applications[J].Vacuum,2000,56:159172
[31]P.J.Kelly J.Hisck,Y Zhou》 R.D.Pilkington and R.D.Arnell.Advance coatings through pulsed magnetron sputtering(J].Surface Engineering,2004 20(3):157162.
[32]肖定全 铁电薄膜,一个十分活跃的研究领域.材料导报,1993,(5):33-37.
[33]周济,张孝文.集成铁电学:信息材料的前沿领域.材料导报,1992,(6):3-8.
[34]姚熹 铁电陶瓷薄膜与薄膜器件.材料导报,1992,(6):13-17.
[35]王弘,王民.铁电薄膜与集成铁电学.高技术通讯,1995,(1):53-57.
[36]Aboullei MM,Leonberger J L.Waveguides in lithium Niobate[J].J Am Ceram 1989,72
[2]张澎丽,刘技文.铌酸锂薄膜制备的研究现状及进展.天津理工大学学报,2006.8.
[3]Shibata Y,et al.Strain mechanism of LiNbO3 Psappire heterostructure grown by pulsed laser deposition[J].Jpn J Appl,1997,36(12A):7344 - 7347.
[4]Kawagnchi T,Yoon D H,Minakata M,et al.Fabrication of thin2film waveguide QPM2SHGdevice bydomain2inverted liquid2phase exipaxy[J].J Crys Grow,1998,191(122):152-129.
[5]S.Wang,T.A.Rabson,Q.Su,M.Robert,"Theory and Experiment of High-Frequency Surface Acoustic WavePropagation Using LiNbO3 Thin Films on Diamond/Silicon Substrates,"Integrated Ferroelectrics,1999,27,377
[6]张一兵 铌酸锂的晶体结构,上饶师范学院学报,2001
[7]S.Wang,T.A.Rabsom,Q.Su,and M.Robert,"Growth and Characterization of Lithium Niobate Thin Films on Diamond/Si(100) Substrates,"MRS Symposium Proceedings on Ferroelectric Thin Films,1999,541,717-722
[8]T.A.Rabsom,S.Wang,Q.Su,and M.Robert,Deposition of LiNbO3 Thin Films on Diamond/Si(100)Substrates for High-Frequency Surface Acoustic Wave Filter Applications,IntegratedFerroelectrics,1999,25- 37-46.
[9]袁刚,张木勋.糖尿病患者足底压力研究.中国糖尿病杂志,2002,10(5)
[10]肖辉盛,严励.糖尿病患者足底压力检测及影响因素探讨.中华糖尿病杂志,2005
[11]李海,丁建新.足底压力式步态分析技术在痉挛型脑性瘫痪儿童步态研究中的应用.中华物理医学与康复杂志,2006.3
[12]李建设.足底压力测量技术在生物力学研究中的应用与进展.北京体育大学学报,2005.2
[13]韦启航.人体步态分析系统一足底压力测量系统的研制.中国生物医学工程学报,2002
[14]许贵民.脚压测量用传感器。生物医学工程杂志,1994,11(4);351,356
[15]刘彦民,黄柳宾,王殿生.铌酸锂晶体测量电压研究.中原工学院学报,2003.8
[16]SChaff P,et al.Pressure measurment inside shoes and application in alpineskiing.Biomechanics,Basic and applied research.1987,659 - 6668 Hennacy RA,et al.A piezoelectric crystal method for measuring staticdynamic pressure distribution in the feet.J AM.Podiatry ASS,19754.4.4
[17]闪乃本,《晶体生长的物理基础》,上海科学技术出版社,(1982)
[18]吴自勤,王兵.《薄膜生长》,科学出版利,2005
[19]张旭,薛冬峰.铌酸锂晶体的生长研究.人工晶体学报,第34卷,第4期 2005
[20]杜经宁,黄信凡。电子薄膜科学,第5章.北京:科学出版社,1997
[21]R.Z.Valiev,E.V.Kozlov,Yu.F.Ivanov,J.Lian,A.A.Nazarov,and B.Baudelet,Acta Metall.Mater.42,2467 - 1994.
[22]张建民,徐可为.薄膜中异常晶粒生长理论及能量各向异性分析.《物理学报》52卷
[23]Es-Souni,M.Abed,M.Solterbeck,C.-H.Piorra,A.Crystallization kinetics and dielectric properties of solution deposited,La doped PZT thin films Materials Science and Engineering:Volume:94,Issue:2-3,June 1,2002,pp.229 - 236
[24]Es-Souni,M.Piorra,A.On the crystallization kinetics of solution deposited PZT thin films Materials Research Bulletin Volume:36,Issue:15,December,2001,pp.2563-2575
[25]A.Gruverman,H.Tokutnoto,S.A.Prakash,S.Aggansal,B.Yang,M.Wuttig,R.Rarnesh,O.Auciello and T.Venkatesan,Appl.Phys.Lett.71,3492(1997).
[26]YL.Li,S.YI-Iu and L.O.Chen 2005 J.Appl.Phys.97 034112
[27]Nanjo,Kazuyoshi;Nagaharna,Hiroyuki Fractal properties of spatial distributions of aftershocks and active faults Chaos,Solitons and Fractals Volume:19,Issue:2,Januar3,2004,pp.87-3 97
[28]臼井一郎 应用于压力检测的压电薄膜研究 佐贺工业技术中心材料报 2005.7
[29]平井智纪 薄膜形压力传感器的制作 佐贺工业技术中心材料报 2006.3
[30]P.J.Kelly,R.D Arnell.Magnetron sputtering:a review of recent developments and applications[J].Vacuum,2000,56:159172
[31]P.J.Kelly J.Hisck,Y Zhou》 R.D.Pilkington and R.D.Arnell.Advance coatings through pulsed magnetron sputtering(J].Surface Engineering,2004 20(3):157162.
[32]肖定全 铁电薄膜,一个十分活跃的研究领域.材料导报,1993,(5):33-37.
[33]周济,张孝文.集成铁电学:信息材料的前沿领域.材料导报,1992,(6):3-8.
[34]姚熹 铁电陶瓷薄膜与薄膜器件.材料导报,1992,(6):13-17.
[35]王弘,王民.铁电薄膜与集成铁电学.高技术通讯,1995,(1):53-57.
[36]Aboullei MM,Leonberger J L.Waveguides in lithium Niobate[J].J Am Ceram 1989,72
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