微细电解加工装备研制及其实验研究
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摘要
微细电解加工加工是一种以离子方式去除材料的特种加工方式,具有加工精度高、工具无损耗、无残余应力变形存在以及与零件硬度无关等显著优点。因此,从理论上来说,微细电解加工和现在的数控技术等相结合,可以实现微细结构的高精度加工。
本文自行研制开发了微细电解加工装备。考虑到和其他功能的复合以及装备刚性要求,整体结构采用“C”型结构,并与立柱旋转平台结构相结合。旋转平台采用防腐性能好的大理石材料制作;应用定制的隔振平台来隔离台基的振动,防止对加工造成影响：选用带光栅尺反馈系统的精密直线位移滑台进行快速接近进给,PI精密三位移平台实现对刀和加工时的精密进给。该装备的精密进给运动范围为100×100×10mm,Z向快速运动范围为0-400mm,进给机构的重复定位精度为1μm；主轴采用伺服电机驱动,调速范围为0-3000rpm,回转精度在1μm之内,且可以自动调节以补偿皮带的热蠕变。另外,在装备上设有高精度CCD镜头对加工状态进行实施检测。
开发了相应的控制和检测系统,由运动控制卡和直线位移滑台结合实现快速运动,由运动控制卡和PI三位移平台结合实现精密进给运动,实现XYZ方向单独运动和两轴联动,用以进行微细电解加工；在人机交互界面上实时观测加工参数并可以进行设置;加工状态监测系统由霍尔电流传感器、A/D转换模块和数据采集卡构成,当检测电路检测到极间间隙加工异常时,反馈给工控机和运动机构进行回退。
结合微细电解加工的特点,在装备上进行了相应的微细电解加工实验。分别对不同的加工电压、电解液、电解液浓度、占空比和电极形状等进行了试验和比较,经过分析研究,得出了以上各加工参数对微细电解加工效果的影响规律。另外,本文还以该装备为基础,结合有限元分析软件,分析在加工状态下工具电极周围的电场分布趋势,为用电解加工方法加工微细电极提供分析依据,并用微细电解加工方法在螺旋电极的基础上加工出了微细螺旋电极。应用微细圆柱电极和加工出的微细螺旋电极分别进行微细孔的加工实验,分别加工出不同的微结构,进一步通过对比验证了不同加工因素对加工效果的影响和机床的精度及稳定性。
Electrochemical micromachining (EMM) is a nontraditional machining method to remove material through metal ions, which has some advantages as higher processing accuracy, no wear of tool, no residual stress and deformation and no relation to the hardness of materials. Therefore, combining with CNC technology, it is easy to realize accurate processing on micro structure.
In this paper, a setup, which can be used for the machining based on electro-chemical micromachining is designed and manufactured. In consideration of stiffness of setup and composition with other processing method, a "C" type structure is designed and selected. Rotating-platform is manufactured by marble material, which has the performance to resisting corrosion; Vibration-isolation platform is customized and can isolate the vibration of environment to impact the EMM process; macro scope feed is supplied by linear displacement slippery sets with feedback of light grid ruler, and micro scope feed is supplied by PI3-axis accurate feed platform; The range of accurate feed of the setup is100×100×10mm, and the range of macro scope of Z axis is0--400mm, the reposition accuracy of feed structure is1μm; The spindle is droved by servo motors and the range of rotary speed is0～3000rpm, and its rotation accuracy is below to2μm. Furthermore, this setup has the function to adjust the tensile force and creep automatically. In addition, the CCD scope fixed on the setup can detect the processing situation in real-time.
The control system for the setup is developed. The rapid movement is controlled by motion card and linear displacement slippery sets, and accurate movement is controlled by motion card and PI3-axis accurate feed platform. Based on the two above facilities, rapid movement and accurate movement of EMM process can be realized easily, no matter single-axis and2-axis motion; The parameters of EMM can be set and observed by the human-computer interface in real-time; The detection circuit system of EMM processing situation is made up by holl current sensor. A/D transfer module and data acquisition card. When the feedback signal of EMM process is delected by detection circuit, it is delivered to IPC (industry personal computer), and combined with motion system to realize rollback operation.
With the characteristic of EMM, some relevant experiments are made by using this setup. In these experiments, lots of influence elements are considered and some comparison and analysis are made, such as machining voltage, feed velocity, electrolyte and electrode shape, etc. After the study and analysis, some different results are discovered because of different machining parameters. Meanwhile, combined with this setup and finite element software, some experiments are made to simulate the electric field distribution of electrode under different machining parameters, which is used to provide experiment basement of EMM. By using electrochemical etching method, some micro cylinder electrodes and spiral electrodes are made. Finally, some micro structures are machining (such as micro holes) by micro cylinder electrodes and spiral electrodes, and some further comparisons are also been made.
本文自行研制开发了微细电解加工装备。考虑到和其他功能的复合以及装备刚性要求,整体结构采用“C”型结构,并与立柱旋转平台结构相结合。旋转平台采用防腐性能好的大理石材料制作;应用定制的隔振平台来隔离台基的振动,防止对加工造成影响：选用带光栅尺反馈系统的精密直线位移滑台进行快速接近进给,PI精密三位移平台实现对刀和加工时的精密进给。该装备的精密进给运动范围为100×100×10mm,Z向快速运动范围为0-400mm,进给机构的重复定位精度为1μm；主轴采用伺服电机驱动,调速范围为0-3000rpm,回转精度在1μm之内,且可以自动调节以补偿皮带的热蠕变。另外,在装备上设有高精度CCD镜头对加工状态进行实施检测。
开发了相应的控制和检测系统,由运动控制卡和直线位移滑台结合实现快速运动,由运动控制卡和PI三位移平台结合实现精密进给运动,实现XYZ方向单独运动和两轴联动,用以进行微细电解加工；在人机交互界面上实时观测加工参数并可以进行设置;加工状态监测系统由霍尔电流传感器、A/D转换模块和数据采集卡构成,当检测电路检测到极间间隙加工异常时,反馈给工控机和运动机构进行回退。
结合微细电解加工的特点,在装备上进行了相应的微细电解加工实验。分别对不同的加工电压、电解液、电解液浓度、占空比和电极形状等进行了试验和比较,经过分析研究,得出了以上各加工参数对微细电解加工效果的影响规律。另外,本文还以该装备为基础,结合有限元分析软件,分析在加工状态下工具电极周围的电场分布趋势,为用电解加工方法加工微细电极提供分析依据,并用微细电解加工方法在螺旋电极的基础上加工出了微细螺旋电极。应用微细圆柱电极和加工出的微细螺旋电极分别进行微细孔的加工实验,分别加工出不同的微结构,进一步通过对比验证了不同加工因素对加工效果的影响和机床的精度及稳定性。
Electrochemical micromachining (EMM) is a nontraditional machining method to remove material through metal ions, which has some advantages as higher processing accuracy, no wear of tool, no residual stress and deformation and no relation to the hardness of materials. Therefore, combining with CNC technology, it is easy to realize accurate processing on micro structure.
In this paper, a setup, which can be used for the machining based on electro-chemical micromachining is designed and manufactured. In consideration of stiffness of setup and composition with other processing method, a "C" type structure is designed and selected. Rotating-platform is manufactured by marble material, which has the performance to resisting corrosion; Vibration-isolation platform is customized and can isolate the vibration of environment to impact the EMM process; macro scope feed is supplied by linear displacement slippery sets with feedback of light grid ruler, and micro scope feed is supplied by PI3-axis accurate feed platform; The range of accurate feed of the setup is100×100×10mm, and the range of macro scope of Z axis is0--400mm, the reposition accuracy of feed structure is1μm; The spindle is droved by servo motors and the range of rotary speed is0～3000rpm, and its rotation accuracy is below to2μm. Furthermore, this setup has the function to adjust the tensile force and creep automatically. In addition, the CCD scope fixed on the setup can detect the processing situation in real-time.
The control system for the setup is developed. The rapid movement is controlled by motion card and linear displacement slippery sets, and accurate movement is controlled by motion card and PI3-axis accurate feed platform. Based on the two above facilities, rapid movement and accurate movement of EMM process can be realized easily, no matter single-axis and2-axis motion; The parameters of EMM can be set and observed by the human-computer interface in real-time; The detection circuit system of EMM processing situation is made up by holl current sensor. A/D transfer module and data acquisition card. When the feedback signal of EMM process is delected by detection circuit, it is delivered to IPC (industry personal computer), and combined with motion system to realize rollback operation.
With the characteristic of EMM, some relevant experiments are made by using this setup. In these experiments, lots of influence elements are considered and some comparison and analysis are made, such as machining voltage, feed velocity, electrolyte and electrode shape, etc. After the study and analysis, some different results are discovered because of different machining parameters. Meanwhile, combined with this setup and finite element software, some experiments are made to simulate the electric field distribution of electrode under different machining parameters, which is used to provide experiment basement of EMM. By using electrochemical etching method, some micro cylinder electrodes and spiral electrodes are made. Finally, some micro structures are machining (such as micro holes) by micro cylinder electrodes and spiral electrodes, and some further comparisons are also been made.
引文
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