红外薄膜系统的设计和制备
|
摘要
硒化锌是红外宽波段(0．7-14μm)优秀的红外窗口透过材料，但是由于其折射率相对偏高，耐磨抗蚀性能差，并且有32％的反射损失，因此必须在它的表面镀制红外增透和保护膜。本文的主要研究目的就是在硒化锌基底沉积红外增透和保护膜系。根据薄膜光学的基本理论和计算机辅助设计方法之一的“彻底搜索法”在硒化锌基底上设计了各种增透保护膜系方案。结合对红外光学保护材料的分析，对膜系材料进行了合理的选择，确定了膜系结构，各膜层的材料，及光学常数(主要指薄膜的厚度和折射率)以及对膜系结构的光学常数偏差对透射率的影响的分析，最终确立了设计方案受薄膜的厚度影响很小的方案，为膜系制备可重复性提供了保障。通过对不同制膜技术的分析和研究以及选择对比，并进行了大量的试制，在此基础上，采用了中频双靶磁控反应溅射技术制备进行了DLC／Ge_(1-x)C_x红外保护和增透膜系的制备，和当前采用射频磁控反应溅射技术相比，有以下几点优点：1)中频溅射大大减少了对操作人员以及周边环境的危害性。2)双靶共溅射(Ge靶+C靶)，可以方便控制Ge_(1-x)C_x的成分，同时，可以减少工作气体(CH_4+Ar)中的CH_4所占的比例，从而避免CH_4在分解过程中在靶表面形成介质膜。而出现靶中毒现象，影响溅射的稳定从而影响成膜的质量。3)能制备从低到高各种碳成分的Ge_(1-x)C_x薄膜，便于我们控制薄膜的折射率，而以往的方法只适用于制备高折射率的Ge_(1-x)C_x薄膜。据资料调研表明，尚未发现国内其它单位采用该技术进行DLC／Ge_(1-x)C膜系结构的制备。对制备的各种薄膜进行了相关测试和分析，研究了薄膜的结构，成分及光学常数，并与制备工艺进行了系统研究的关系，采用XPS测试分析的Ge_(1-x)C_x薄膜的成分，结合进气比例CH4／CH4+Ar，得出了进气比例和薄膜成分的关系；根据光谱法中的极值方法确定光学常数(薄膜厚度和折射率)，得出了薄膜成分和折射率的关系；根椐XRD，和激光Raman谱测量Ge_(1-x)C_x薄膜的晶相结构，还研究了基底温度对薄膜结构的影响。在此基础上，进行了膜系结构工艺参数的筛选和总结，制备硒化锌为基底的增透保护膜，在双面镀膜的情况下，在红外宽波段(0．7-14微米)的平均透过率为80．3％，整体透过率提高了15％左右。
本文主要研究内容和取得的成果：
1．根据薄膜光学的基本理论和本工作的实际情况，选择了“彻底搜索法”的设计方法在硒化锌基底上进行增透保护膜系结构的设计。并根据保护要求合理的选择了材料，最终确定了膜系结构参数。
2．根据设计方案，对膜系结构进行了大量实验探索，确立了双靶中频磁控反应溅射技术进行该膜系结构制备的最终技术。
3．采用双靶中频磁控反应溅射技术实现了不同含碳成分的Ge_(1-x)C_x薄膜的制备，满足了膜系结构折射率变化的设计要求，同时避免了靶中毒现象，实现了溅射的稳定进行。
4．进行了双靶中频磁控反应溅射技术对Ge_(1-x)C_x红外增透和保护膜的制备工艺的系统研究，通过各种分析测试手段，研究了薄膜的结构、成分及光学常数等与制备工艺参数的关系，由此最终确立的膜系结构的制备工艺，该工艺不仅制备出满足目标的，而且为该膜系结构制备的重复性提供了保障。
5．在硒化锌基底制备的增透保护膜，在双面镀膜的情况下，在红外宽波段(0．7-14微米)的平均透过率为80．3％，整体透过率提高了15％左右。抗磨耐蚀试验表明，该膜系还具有较好的抗磨耐蚀性能。
ZnSe is an excellent one of all the infrared transparent materials used in the 0.7-14μm area,but its refractive index is relative high,its reflection loss is as high as 32％,and its mechanical properties such as wear and corrosion resistances are not satisfied when it is as infrared parts,therefore, it is very necessary for it to cover anti-reflective and protective films on its surfaces. The main aim of the thesis is to design such film system and to prepare these film system on ZnSe. Based on the theory of film optics and design method of the computer- assisted 'complete search', several kinds of anti-reflective and protective films suitable for ZnSe surfaces were designed. Based on the study of protective materials used in infrared field, the materials used in the film system were chosen. The film system is DLC/DLC/Ge_(1-x)C_x. The design scheme was at last decided according to the study in the materials for films, optical constant (mainly thickness and refractive index of the component film) and the deriation of optical constant of film system on transmittance. The advantage of this scheme is that its transmittance is less influenced by the error of the films thickness, hence the reproduction of such film system can be guaranteed.
Based on the study in the techiques of film preparation and their comparison each other, aa well as a lot of experiments,t he technique of reactive mid-frequency magnetron co-sputtering with double targets was used to prepare the DLC/DLC/Ge_(1-x)C_x film system with infrared transmittance and protectice properties. The advantages of this techique comparing with radio-frequecy(RF) magnetron sputtering are as follows:
1) The damage due to this technique to operators and environment is less than that due to RF one.
2) The composition of DLC/Ge_(1-x)C_x can be easily controlled by this technique with double target (Ge and C targets) and hence, the ratio of CH_4/CH_4+Ar could be reduced by using C target the poison of the targets due to the formation of nonconducting film on the surface of the targets, therefore, can be avoided, which will harm to stabilization of sputtering, and affect the quality of the prepared films.
3) DLC/Ge_(1-x)C_x with different carbon concentration can be prepared, in other words, different values of refractive index of the films can be controlled. while DLC/Ge_(1-x)_x films with high refractive index can be prepared by RF magnitron sputtering.
According to the investigation of the publication, DLC/Ge_(1-x)C_x films system is firstly prepared with reactive mid-frequency magnetron co-sputtering. The prepared films were analysed to understand their structure, composition and optical constant. And systematic study were also done on the relation ship between the composition of the DLC/Ge_(1-x)C_x miasured with XPS analysis and the ratio of the CH_4/CH_4+Ar can be obtained; and the relationship between the composition of the film and refractive index can be obtained based on the optical constant (thickness and refractive index of the films according to the maximum method in spectral analysis; The effect of substrate temperature on the phase structure of the films can be checked by XRD and Raman spectra. On the basis of these analysed above, the technology parameters and film systems were selected and finally confirmed, and the DLC/Ge_(1-x)C_x film system with anti-reflective and protective films was produced on the both surfaces of ZnSe substrate, where its average transmittance in 0.7-14μm is as high as 80.3％,in other words, this film system cause ZnSe to incrense transmittance by about 15％.
The main content and results in the thesis are as follows:
1. Based on the theory of film optics and experimental results in our work, a computer-assisted 'complete search' was selected to design our film system on ZnSe substrate with anti- reflective property; base on the demand for the protection of ZnSe, several materials were selected, and hence the parameters of film system were also determined.
2. Based on the design scheme, several film systems were selected and experimentally studied with different preparetion methods. At last, a technique of the reactive mid-frequency magnetron co- sputtering with double targets to be used to prepare DLC/Ge_(1-x)C_x film system was obtained.
3. Ge_(1-x)C_x film system deposited on ZnSe with this method with different carbon concentration can be satisfied the demand of different refractive index of design scheme, apart from this, This deposition method can avoid the poison of target, hence, can realize stable operation during film preparation.
4. Systematic reaearch in the preparation of Ge_(1-x)C_x films with our method, a varies of analyses on the structure, composition and optical constant of the films, as well as study in the relation ship between the preparation technologies and those analyses,. The optimum tehcnology parameters have been obtained. The film system with excellent properties has been prepared with this technology. And the reproduction of such film system can also be guaranted with this technology.
5. .ZnSe deposited with DLC/Ge_(1-x)C_x film system on its both surfaces has average transmittance of 80.3％in the area of 0.7-14μm waveband. This means that the whole transmittance of ZnSe is increased to 15％by such a film system. In addition, the coated ZnSE has a better resistant wear and corrosion based on the wear and corrosion experimental results.
本文主要研究内容和取得的成果：
1．根据薄膜光学的基本理论和本工作的实际情况，选择了“彻底搜索法”的设计方法在硒化锌基底上进行增透保护膜系结构的设计。并根据保护要求合理的选择了材料，最终确定了膜系结构参数。
2．根据设计方案，对膜系结构进行了大量实验探索，确立了双靶中频磁控反应溅射技术进行该膜系结构制备的最终技术。
3．采用双靶中频磁控反应溅射技术实现了不同含碳成分的Ge_(1-x)C_x薄膜的制备，满足了膜系结构折射率变化的设计要求，同时避免了靶中毒现象，实现了溅射的稳定进行。
4．进行了双靶中频磁控反应溅射技术对Ge_(1-x)C_x红外增透和保护膜的制备工艺的系统研究，通过各种分析测试手段，研究了薄膜的结构、成分及光学常数等与制备工艺参数的关系，由此最终确立的膜系结构的制备工艺，该工艺不仅制备出满足目标的，而且为该膜系结构制备的重复性提供了保障。
5．在硒化锌基底制备的增透保护膜，在双面镀膜的情况下，在红外宽波段(0．7-14微米)的平均透过率为80．3％，整体透过率提高了15％左右。抗磨耐蚀试验表明，该膜系还具有较好的抗磨耐蚀性能。
ZnSe is an excellent one of all the infrared transparent materials used in the 0.7-14μm area,but its refractive index is relative high,its reflection loss is as high as 32％,and its mechanical properties such as wear and corrosion resistances are not satisfied when it is as infrared parts,therefore, it is very necessary for it to cover anti-reflective and protective films on its surfaces. The main aim of the thesis is to design such film system and to prepare these film system on ZnSe. Based on the theory of film optics and design method of the computer- assisted 'complete search', several kinds of anti-reflective and protective films suitable for ZnSe surfaces were designed. Based on the study of protective materials used in infrared field, the materials used in the film system were chosen. The film system is DLC/DLC/Ge_(1-x)C_x. The design scheme was at last decided according to the study in the materials for films, optical constant (mainly thickness and refractive index of the component film) and the deriation of optical constant of film system on transmittance. The advantage of this scheme is that its transmittance is less influenced by the error of the films thickness, hence the reproduction of such film system can be guaranteed.
Based on the study in the techiques of film preparation and their comparison each other, aa well as a lot of experiments,t he technique of reactive mid-frequency magnetron co-sputtering with double targets was used to prepare the DLC/DLC/Ge_(1-x)C_x film system with infrared transmittance and protectice properties. The advantages of this techique comparing with radio-frequecy(RF) magnetron sputtering are as follows:
1) The damage due to this technique to operators and environment is less than that due to RF one.
2) The composition of DLC/Ge_(1-x)C_x can be easily controlled by this technique with double target (Ge and C targets) and hence, the ratio of CH_4/CH_4+Ar could be reduced by using C target the poison of the targets due to the formation of nonconducting film on the surface of the targets, therefore, can be avoided, which will harm to stabilization of sputtering, and affect the quality of the prepared films.
3) DLC/Ge_(1-x)C_x with different carbon concentration can be prepared, in other words, different values of refractive index of the films can be controlled. while DLC/Ge_(1-x)_x films with high refractive index can be prepared by RF magnitron sputtering.
According to the investigation of the publication, DLC/Ge_(1-x)C_x films system is firstly prepared with reactive mid-frequency magnetron co-sputtering. The prepared films were analysed to understand their structure, composition and optical constant. And systematic study were also done on the relation ship between the composition of the DLC/Ge_(1-x)C_x miasured with XPS analysis and the ratio of the CH_4/CH_4+Ar can be obtained; and the relationship between the composition of the film and refractive index can be obtained based on the optical constant (thickness and refractive index of the films according to the maximum method in spectral analysis; The effect of substrate temperature on the phase structure of the films can be checked by XRD and Raman spectra. On the basis of these analysed above, the technology parameters and film systems were selected and finally confirmed, and the DLC/Ge_(1-x)C_x film system with anti-reflective and protective films was produced on the both surfaces of ZnSe substrate, where its average transmittance in 0.7-14μm is as high as 80.3％,in other words, this film system cause ZnSe to incrense transmittance by about 15％.
The main content and results in the thesis are as follows:
1. Based on the theory of film optics and experimental results in our work, a computer-assisted 'complete search' was selected to design our film system on ZnSe substrate with anti- reflective property; base on the demand for the protection of ZnSe, several materials were selected, and hence the parameters of film system were also determined.
2. Based on the design scheme, several film systems were selected and experimentally studied with different preparetion methods. At last, a technique of the reactive mid-frequency magnetron co- sputtering with double targets to be used to prepare DLC/Ge_(1-x)C_x film system was obtained.
3. Ge_(1-x)C_x film system deposited on ZnSe with this method with different carbon concentration can be satisfied the demand of different refractive index of design scheme, apart from this, This deposition method can avoid the poison of target, hence, can realize stable operation during film preparation.
4. Systematic reaearch in the preparation of Ge_(1-x)C_x films with our method, a varies of analyses on the structure, composition and optical constant of the films, as well as study in the relation ship between the preparation technologies and those analyses,. The optimum tehcnology parameters have been obtained. The film system with excellent properties has been prepared with this technology. And the reproduction of such film system can also be guaranted with this technology.
5. .ZnSe deposited with DLC/Ge_(1-x)C_x film system on its both surfaces has average transmittance of 80.3％in the area of 0.7-14μm waveband. This means that the whole transmittance of ZnSe is increased to 15％by such a film system. In addition, the coated ZnSE has a better resistant wear and corrosion based on the wear and corrosion experimental results.
引文
1．顾聚兴摘译,红外材料的生产与发展,OPTO,1990,No.59
2. Klocek. PAUL. ED, Window and dome technologies and materials, SPIE.Vol. 1326,1990
3.Paul Klocek, Thomas McKenna, John Trombetta. Thermo-optic, thermo-mechanical, andelectromagnetic effects in IR windows and domes, and the rationale for GaAs, GaP, anddiamond. Proc. SPIE, 1994,2286:70-90
4. John M. Hall. Army Applications for Multi-Spectral Windows. Proc. SPIE 1997,3060:330-334
5. JA Savage, GJH Wort, CSJ Pickles, et al. Properties of free-standing CVD diamond optical components. Proc. SPIE 1997, 3060:1441596. A. Zachary Tropf, Michael E. Thomas, William J. Tropf. Optical properties of KRS-5. Proc SPIE 1997,3060:344-354
7. Jitendra S. Goela, Brent Romero. Effects of Defects on ZnSe Absorption and TransmissionSPIE 1997, 3060:366-376
8. Joel Askinazi. Large aperture, broadband sapphire windows for common aperture, target acquisition, tracking and surveillance systems. SPIE 1997,3060:214—225
11.Daniel C. Harris. Infrared Window and Dome Materials. Washington: SPIE OpticalEngineering Press, 1992
13. E. J. Coad, J. E. Field. Liquid impact resistance of CVD diamond and other infrared materials. Proc. SPIE 1997, 3060:169180
14. E. S. Kelly, R. J. Ondercin, J. A. Detro, et al. Environmental Testing of Long Wave Infrared(LWIR) Windows, SPIE 1997,3060:68-75
15. C R Seward, E J Coad, C S J Pickles. The rain erosion resistance of diamond and other window materials, Proc. SPIE 1994, 2286:28530016. J E Field, Q Sun, H Gao. Solid Particles erosion of infrared transmitting materials. Proc. SPIE1994, 2286:301-306
17. E D Nicholson, C S J Pickles, J E Field. The mechanical properties of thin films for aerospace applications. Proc. SPIE, 1994,2286:275-284
18. Lee M. Goldman, Randal W. Tustison. High durability infrared transparent coatings. Proc.SPIE, 1994,2286:316-324
19. A. H. Lettington. Review of recent advances in infrared antireflection coatings. Proc. SPIE, 1988, 915:60-66
20. B C Monachan, C J Kelly, E M Waddell. Ultra-hard coatings for I.R, materials. Proc. SPIE, 1989,1112:29-43
21. Nick Brette, Paul Klocek. Engineered polymeric IR-transparent protective coatings. Proc.SPIE 1994, 2286:325-334
22. Linda F. Johnson, Mark E. Moran. Synthesis and Characterization of Carbon Nitride Films. Proc. SPIE 1997, 3060:3041
23. Daniel C. Harris. Side-by-Side Comparison of Erosion-Resistant Coatings. Proc. SPIE 1997,
24. 张贵锋．新型红外增透膜与保护膜．红外技术，1995， 17(5)：23-28
25. Wasimul Hasan, Stephen H. Propst. Durability testing of hard carbon coatings for Ge and ZnS substrates. Proc. SPIE 1994, 2286:354-363
26. Swec D. M., Mirtich M. J. Diamonlike Carbon Protective Coatings for Optical Windows, Proc.SPIE, 1989,1112:162-173
27. O V. Balachova, M. A. R. Alves, J. W. Swart, et al. Influence of the substrate thickness and radio frequency on the deposition rate of amorphous hydrogenated carbon a-C:H films.Journal of Applied Physics, 1999, 85(6):33453347
28. Wasimul Hasan, Stephen H. Propst, Durability testing of hard carbon coatings for Ge and ZnS substrates. Proc. SPIE 1994, 2286:354363
29. Mark B. Moran, Linda F. Johnson. Diamond-like-carbon films synthesized by electron cyclotron resonance chemical vapor deposition. Proc. SPIE., 1997, 3060:42-54
30. Z. T. Liu, N. K. Xu, D. S. Geng, et al. Thermostability of Diamondlike Carbon Films.Surface Engineering. 1993, 9(2), 148150
31. J. Koskinen, J. P. Hirvonen, J. Keranen. Effect of deposition temperature and growth rate on the bond structure of hydrogen free carbon films. J. Appl. Phys. 1998, 84(l):648650
32. 魏秋明，J．Sankar.功能梯度类金刚石薄膜的脉冲激光制备，金属热处理学报，2000，21 (2)，57-6
33. 姜杰．高性能的类金刚石红外光学薄膜，红外技术，1995 18(4)：1520
34. Kelly C. J., Orr J. S., Gordon H., et al. Application of Germanium Carbide in DurableMultilayer IR Coatings. Proc. SPIE, 1990,1275:122-133
35. R. E. Sah, Ch. Wild, P. Koidl, et al. Amorphous hydrogenated carbon-germanium films forhard multiplayer IR optical coatings. Proc. SPIE, 1990, 1275:59-65
36. Diane M. Swec, Michael J. Mirtich. Diamondlike Carbon Protective Coatings for Optical Windows. Proc. SPIE, 1989,1112:156-173
37. Mackowski J M, Cimma B. Pignard R., et al. Rain erosion behaviour of germanium carbide (GeC) films grown on ZnS substrates. Proc. SPIE , 1992,1760:201-209
38. LIU Zheng-Tang, ZHU Jing-Zhi, XU Nian-Kan, et al. Structure and Properties of Germaniu Carbide Films Prepared by RF Reactive Sputtering in Ar/CH4. Jpn. J. Appl. Phys., 1997.36(6A):3625-3628.
39. M. Gazicki, H. Szymanowski, J. Tyczkowski. Correlation between gas phase composition of rf plasma of argon diluted tetrathylgermanium and chemical structure of therewith deposited Ge/C films. J. Vac. Sci. Technol. 1996, A14(5):2835-2841
40. Ruth Shinar. Hydrogen adsorption on some a-Gei.不 x:H films prepared by radio frequency sputtering. J. Vac. Sci. Technol. 1988, A6(5):2910-291341.宋建全,刘正堂,于忠奇等 与 毫米波学报, 2000,19 (4):266-268
42. Gibson D. R., Waddell E. M., Wilson A. D. et al. Ultradurable phoshide-based antireflection coatings for sand and rain erosion protection. Opt Eng., 1994, 33(3):957-966
43. M. Wilson, Marshall Thomas, Ignacio Perez. Impact damage as a function of crystal orientation in Ge IR windows employing durable phosphide coatings. Proc. SPIE , 1994,2286:108-119
44. Gibson D. R., Waddell E. M.. Advances in ultradurable phosphide-based broadband anti-reflection coationgs for sand and rain erosion protection of infrared windows and domes. Proc. SPIE, 1994, 2286:335-34645.
45. E M Waddle, D R Gibson, J Meredith. Sand impact testing of durable coatings on FUR ZnS relevant to the LANTIRN E-0 system window. Proc. SPIE, 1994,2286:364-375
46. E M Waddle, D R Gibson, M Wilson. Broadband IR transparent rain and sand erosion protective coating for the 1714 aircraft infrared search&track germanium dome. Proc. SPIE1994, 2286:376385
47. Joel Askinazi, Authi Narayanan. Protective broadband window coatings. Proc. SPIE 1997, 3060:356-365
48. K. A. Klemm, H. S. Patterson, L. F. Johnson, et at. Protective optical diamond infraredwindows. SPIE, 1994, 2286:347-353
49. T. McKenna, J. T. Hoggins, J. M. Trombetta, et al. Optical-quality, high-growth-rate, arc jet CVD diamond. Proc. SPIE 1994, 2286:160173
50. K.V. Ravi. High rate synthesis of high quality diamond for IR optics. Proc. SPIE 1994,2286:174185
51 .Lan Llewellyn, Robert Chittick, Rudolf Heinccke. Plasma etching and deposition as a method polishing CVD diamond. Proc. SPIE 1994, 2286:198-20452. M. B. Moran, L. F. Johnson, K. A. Klemn. Method for growth of CVD diamond on thin film
52. refractory coatings, and glass ceramic materials. Proc. SPIE 1994, 2286:205-211
53. Curtis E. Johnson, Jean M. Bennett, Melvin P. Nadier. Oxidative degradation of CVDdiamond. Proc. SPIE 1994, 2286:247253
54. K. A. Klemm, H. S. Patterson, L. F. Johnson, M. B. Moran, Protective optical coatings for diamond infrared windows. Proc. SPIE 1994, 2286:347-353
55. Daniel C. Harris. Properties of diamond for window and dome applications. Proc. SPIE 1994, 2286:218-.228
56. R. S. Sussmann, C. J. H Wort, C. G. Sweency, et al. Optical and dielectric properties of CVD polycrystalline diamond plates. Proc. SPIE 1994, 2286:229-238
57. Charles B. Willingham, Thomas M Hartnett, Richard P. Miller, et al. Bulk diamond for IR/RF windows and domes. SPIE, 1997, 3060:160-168
58. C J Brierley, M C Costello, M D Hudson, et al. Diamond Coatings for Large Area IR Windows. SPIE, 1994, 2286:307-315
59. Korenstein R, Goidman L., Hallock R.,et al. Diamond coated ZnS for improved erosion resistance. Proc. SPIE 1997,3060:181 — 195
60. Martin D. Huduson, Crofton J. Brierley, Andrew J. Miller, et al. Fabrication and testing of diamond coatings on infrared windows for the Harrier GR7 and AV8-B systems. Proc. SPIE 1997,3060:196-202
61 M. L. Carasso, J. H. Adair, P. A. Demkowicz, et al. Improving Electro-Optic WmdowReliability with DIACERTM Coatings. Proc. SPIE 1997, 3060:203212 62. maching on optical surfaces. Optical Society of America, 1991, 8(3):549553
63 林永昌,卢维强．光学薄膜原理．北京：国防1：业出版社,1990
64. 尹树百．薄膜光学—理论与实践.北京：科学出版社，1987
65. 康晋发，顾培夫 薄膜光学与技术．北京：机械业出版社，1989
66. J. A. Aguilera, J. Aguilera, P. Baumeister, et al. Antireflection coatings for germanium IR optics: a comparison of numerical design methods. Applied Optics, 1988, 27(14):28322839
67. Maria Luisa Rastello, Amedeo Premoli. Continuation method for synthesizing antireflection coatings. Applied Optics, 1992, 31(31):67416745
68. W. J. Wild, H Buhay. Thin-film multiplayer design optimization using a Monte Carlo approach. Optical Society of America, 1986, ll(ll):745-747
1．林永昌，卢维强、光学薄膜原理．北京：国防工业出版社，1990
2. 尹树百．薄膜光学—理论与实践．北京：科学出版社，1987
3. 康晋发，顾培夫．薄膜光学与技术北京机械工业出版社，1989
4. J. A, Aguilera, J, Aguilera, P. Baumeister, et al. Antireflection coatings for germanium IR optics: a comparison of numerical design methods. Applied Optics, 1988, 27(14):28322839
5. Maria Luisa Rastello, Amedeo Premoli. Continuation method for synthesizing antireflection coatings. Applied Optics, 1992, 31(31):6741-6745
6. W, J. Wild, H Buhay. Thin-film multiplayer design optimization using a Monte Carlo approach. Optical Society of America, 1986,11(川:745-747
7. 昊乐林，陈国平视保屏减反射膜系的设计，电子器件，1999，22(2)：99．103
8．李忠奇．红外高效率、宽带减反射膜．光学学报，1983，3(3)：253-258
9. 周健，林永昌．一种新的膜系设计方法—Neddle法．光学学报，1997，17(10)：1445-1449
10. 林永昌，顾永琳，张诚等．针法与初始膜系设计．光学学报，19 (10)：2731
11. 李芳，张诚，林永昌．膜系优化设计中的模糊输入及评价函数的改进．2000，29(1)：68-70
12. 李良钮，朱健强，林大健．在定域法中实现光学全局优化．光子学报，2000．29 (4)：348-351
13. 张可村．工程优化与算法分析．西安：西安交通大学出版社，1989
14. 马文金，张子平．计算物理学．合肥：中国科学技术大学出版社，1992
15. 徐钟济 蒙特卡罗方法．上海：上海科学技术出版社，1985
16. 范志刚，张伟，李以贵等．多层介质光学膜系的误差分析—膜层厚度变化的灵敏度因子．激光技术，1996，20(4)：236240
17. Milad F. Tabet, William A. McGahan. Thickness and index measurement of transparent thin films using neural network processed reflectance data. J. Vac. Sci. Technol. 1999, A 17(4): 1836-1839
18. David V. Tsu. Obtaining optical constants of thin GexSbxTez films from measurements ofreflection and transmission. J. Vac. Sci. Technol. 1999, A 17(4): 1854-1860
19. Joge 1. Cisneros. Optical characterizaion of dielectric and semiconductor thin films by use of transmission data. Applied Optics, 1998, 37(22):5262-5270
20．麦克斯韦,《电磁通论》,武汉出版社,1994年
21. Vasicek, A., Optics of Thin Films, (North-Holland, Amsterdam, 1960).
22. Knittl, Z. Optics of Thin Films. London, New York, Sydney, Toronto, John Wiley and Sons, 1985
23. H. A. Macleod, http://www.thinfilmcenter.com/Expert Techniques in Coating Design.htm
24. A. Thelen, "Design of Optical Interference Coatings", McGraw-Hill, New York, 1989
25. J. A. Dobrowolski, D. Lowe, "Optical thin film synthesis program based on the use of Fourier transforms", Appl. Opt., vl7, 30393050(1978)
26. P. Baumeister, "Design of multiplayer filters by successive approximations", J. Opt. Soc. Am.,v48, 955968(1958)
27. Jinfa Tang, Quan Zheng, "Automatic design of optical thin film systems—merit function and numerical optimization technique", J. Opt. Soc. Amer. vol.72: pl522-1528,1982
28. C. P. Chang, Y. H. Lee, "Optimization of a thin-film multiplayer design by use of the generalized simulated-annealing method", Optics Letters, 05, n11, p595-597
29. S. Martin, J. Rivory, M. Schoenauer, "Synthesis of optical multiplayer systems using geneticalgorithm", Applied Optics, v34, nl3, p2247-2254 (1995)
30 C. A. Floudas, P. M. Pardalos, State of the Art in Global Optimization, Kluwer AcademicPublishers, Dordrecht, The Netherlands, 1994
31. R. Horst, P. M. Pardalos, Handbook of Global Optimization, Kluwer Academic Pubishers, Dordrecht, Netherlands, 1995
32. C. A. Floudas, P. M. Pardalos, State of the Art in Global Optimization, Kluwer AcademicPublishers, Dordrecht, The Netherlands, 1994
33. R. Horst, P. M. Pardalos, Handbook of Global Optimization, Kluwer Academic Pubishers, Dordrecht, Netherlands, 1995
34. M. Locatelli,.Schoen, Random Linkage: a family of acceptance/rejection algorithms for global optimization, Math. Programming v85 n2, p279-396,1999
35. D. R. Jones, M. Schonlau, W. J. Welch, Efficient global optimization of expensive black-boxfunctions, J. Global Optim., vl3 n4, 0455-492, 1998
1. Kelly C. J., Orr J. S., Gordon H., et al. Application of Germanium Carbide in Durable Multilayer IR Coatings. Proc. SPIE, 1990,1275:122-133
2. R. E. Sah, Ch. Wild, P. Koidl, et al. Amorphous hydrogenated carbon-germanium films forhard multiplayer IR optical coatings. Proc. SPIE, 1990, 1275:59-65
3. Diane M. Swec, Michael J. Mirtich. Diamondlike Carbon Protective Coatings for Optical Windows. Proc. SPIE, 1989,1112:156-173
4. Mackowski J M., Cimma B. Pignard R., et al. Rain erosion behaviour of germanium carbide (GeC) films grown on ZnS substrates. Proc. SPIE ,1992,1760:201-209
5. LIU Zheng-Tang, ZHU Jing-Zhi, XU Nian-Kan, et al. Structure and Properties of Germanium Carbide Films Prepared by RF Reactive Sputtering in Ar/CH4. Jpn. J. Appl. Phys., 1997.36(6A) 36253628.
6. B C Monachan, C J Kelly, E M Waddell. Ultra-hard coatings for I.R. materials. Proc. SPIE, 1989,1112:29-43
7. M. Gazicki, H. Szymanowski, J. Tyczkowski. Correlation between gas phase composition of plasma of argon diluted tetrathylgermanium and chemical structure of therewith deposited Ge/C films. J. Vac. Sci. Technol. 1996, A14 (5):28352841
8. Ruth Shinar. Hydrogen adsorption on some a-Gel-xCx:H films prepared radio frequencysputtering. d. Vac. Sci. Technol. 1988, A6 (5):2910-2913
9. 田明波，刘德令编译．薄膜科学与技术(上).北京：机械工业出版社，1991
10. 李云奇真空镀膜技术与设备．沈阳：东北工学院出版社，1992
11. 李学丹，万英超，姜祥祺等真空沉积技术．杭州：浙江大学出版社，1994
12. 陈国平．薄膜物理与技术．南京：东南大学出版社，1993
13. 王力衡，黄运添，郑海涛．薄膜技术.北京：清华大学出版社，1991，
14. 严心、，林鸿海．薄膜技术．北京：兵器工业出版社，1994，
15．史月艳，殷志强，吴家庆等物理电子技术与工艺.北京：国防工业出版社，1995
16. 杨邦朝，王文生．薄膜物理与技术．成都：电子科技大学出版社，1994
17. 姚宗熙等．物理电子学西安：西安交通大学出版社，1991
18. 甄汉生 等离子加工技术．北京：清华大学出版社，1992
19. 张随新，陈国平．磁控反应溅射制备氧化锡膜的工艺研究．真空科学与技术，1995
15. (6):41541920. Siegfried Hofmann. Target and substrate surface reaction kinetics in magnetron sputtering of nitride coatings. Thin Solid Films, 1990, 191:335348
21. 陈国平，张随新，射频磁控溅射制备SiO2薄膜．真空科学与技术，1995 15(5)：310316
22. C D Tsiogas, J N Avaritsiotis. A model for reactive magnetron sputtering. Vacuum, 1992, 43(3): 203211
23. S. Berg, T. Nyberg, H-O. Biom, et al. Computer modeling as a tool to predict deposition rate and film composition in the reactive sputtering process. J. Vac. Sci. Technol. 1998, A16(3):12771285
24. Shenglong Zhu, Fuhui Wang. Abnormal steady state in reactive sputtering. J. Vac. Sci.Technnll999 人 17111 "711...7125. S. Berg, H-O. Blom, T. Larsson, et al. Modeling of reactive sputtering of compound materials.J. Vac. Sci. Technol. 1987, A 5(2): 202207
26. 王德苗，黄士勇，任高潮等，光谱法控制溅射速率的研究真空科学与技术，1997， 17(5)：366368
27. 康晋发，顾培夫．薄膜光学与技术北京：机械工业出版社，1989
28. 王敬义．薄膜生长理论．武汉：华中理工大学出版社，1992
29. C D Tsiogas, J N Avaritsiotis. A model for reactive magnetron sputtering. Vacuum, 1992, 43 (3): 203211
30. S. Berg, T. Nyberg, H-O. Blom, et al. Computer modeling as a tool to predict deposition rate and film composition in the reactive sputtering process. J. Vac. Sci. Technol. 1998,
16. (3):1277128531 .Shenglong Zhu, Fuhui Wang. Abnormal steady state in reactive sputtering. J. Vac. Sci. Technol. 1999, A 17(l):7076
32. S. Berg, H-O. Blom, T. Larsson, et al. Modeling of reactive sputtering of compound materials. J. Vac. Sci. Technol. 1987, A 5(2):202207
33. T. Larsson. A model for reactive sputtering with magnetrons. Vacuum, 1989, 39 (10): 949-954
34. T. Larsson, H-O. Blom, C. Nender, et al. A physical model for eliminating instabilities in reactive sputtering. J. Vac. Sci. Technol. 1988, A6(3):18321836
35. L. B. Jonsson, T. Nyberg, S. Berg. Target compound layer formation during reactive sputtering. J. Vac. Sci. Technol. 1999, A17(4):1827-1831
36. Eiji Kusano, Denis M. Goulart. Time-dependent simulation modeling of reactive sputtering. Thin Solid Films, 1990,1931194:8491
37. Siegfried Hofmann. Target and substrate surface reaction kinetics in magnetron sputtering ofnitride coatings. Thin Solid Films, 1990,191:335348
38. S. Berg, M. Moradi, C. Nender, et al. The use of process modeling for optimum design of reactive sputtering processes. Surface and Coating Technology, 1989, 39140:466-474
39. Hidetoshi Sekiguchi, Atsushi Kanzawa, Takahiro Imai, et al. Enhancement of the depositionrate of TiOz film in radio frequency reactive sputtering. J. Vac. Sci. Technol. 1994, A 12(6):3176=3179
40. 田明波，刘德令编译．薄膜科学与技术(上).北京：机械工业出版社，1991
41. R. D. Mansano, M. Massi, L. S. Zambom, et al. Effects of the methane content on the characteristics of diamond-like carbon films produced by sputtering. Thin Solid Films, 2000,373:243-246
42. N. A. Sanchez, C. Rincon, G. Zambrano, et al. Characterization of diamond-like carbon (DLC) thin films prepared-by r.f. magnetron sputtering. Thin Solid films, 2000, 373: 247250
43. 林永昌，卢维强 光学薄膜原理北京：国防工业出版社，1990
44. 尹树百．薄膜光学—理论与实践．北京：科学出版社，1987
1. SONG Jian-Quan，LIU Zheng-Tang，ZHU JingZhi，et al．Effect of target-substrate distance on reactve sputtering of films．Journal Northwestern Polytechnicalrsity(宋建全，刘正堂，朱景芝，等．极板间距对反应溅射GexC,．薄膜的影响，西北工业大学学报)，1998,4：637-640
2. Krishna Seshan HANDBOOK OF THIN-FILM DEPOSITION PROCESSES ANDTECHNIQUES, Second Edition NOYES PUBLICATIONS 2001
3. C. J. H. Wort et al, Recent Advances in the Quality of CVD diamond Optical components.Proc.SPIE, 3705,1999
4. Tankala et al.Oxidation of diamond films synthesized by hot filament assisted chemical vapour deposition. J. Mater. Res, 1990, 5:2483
5. M. Alam et al. The kinetics of chemical vapour depositeddiamond-oxygen reaction J. Mater.Res, 1993, 8:2870
6. C A Klein et al. Critical-point phonon frequencies of diamond. Ph Rev B45, 1992, 22:12854
7. Jane Yuan Howe. The Oxidation of Diamond. Thesis for Doctor Degree.Alfred university, NewYork(February, 2001
8. Sun C Q. A model of bonding and band-forming for oxides and nitrides.Appl.Phys. Lett, 1998, 72:1706
9. Chang Q Sun et al. preferential oxidation of diamond{111}.J. Phys.D:ADX)l. Phvs, 2000, 33:219
10. P. John et al.The Oxidation of (100) textured diamond. Diamond and Related Materials, 2002, 11:862
11. K P. Loh et al.Surface oxygenation studies on (100)-oriented diamond using an atom beam source and local anodic oxidation. Surface Science, 2002, 505:93
12. Chen J et al.Graphitization of nano diamond powder annealed in argon ambient. Appl.Phys. Lett, 1999, 74:365
13. 李学月一，万学英，姜祥棋等．真空沉积技术．浙江大学出版社．1994
14. 叶宪曾，江子伟，李赛君等．仪器分析教程.北京大学出版社．1997
15. T abet M F, M cgahan W A. Use of artificial neural networks to predict thickness and optical constants of thin films from reflectance data[ J]. Thin Solid F:, 2000, 370:122-127
16. A. Diaz-Parralejo et al? Densification and porosity evaluation of ZrO, 3 mo 1.%Y?OJ solgel thin films, Thin Solid Films 458 (2004) 92
17. 冯爱新等，划痕试验法表征薄膜涂层界面结合强度，江苏大学学报(自科学版)，2003
18. 杨邦朝，王文生．薄膜物理与技术．成都：电子科技大学出版社，199
19. J C Manifacier, J Gasiot, J P Fillard. A simple method for thedetermination of the optical constant n, k, and the thickness of aweakly absorbing thin film[J].l .Phys.E:Sci.Instrum.l976.9:1002-1004
20. R. Swanepoel. Determination of the thickness and opticalconstants of amorphous silicon[J].l.Phys.E:Sci. Instru m.1983, 16:1214-1222
21. Jorge I. Cisneros. Optical characterization of dielectric andsemiconductor thin films by use of transmission data[J]Appl.t., 1998, 37(22):5262-5270
22. John D. Dow, David Redfield. Toward a unified theory of Urbacl} s rules and exponential absorption edges[J]. Phys.Re B, 1972, 6(20):594-610
23. D. Y. Smith, Mitio Inokuti, William Karstens. A generalized Cauchy spersion formula and the refractivity of elementalse miconductors[J]l. Phys:Candensle tte r, 2001, 13:3883-3893
24. 茅听辉，等．[J]．真空科学与技术，2000,20(2)：88．
25. Khawaja E E, Durrani S M A, et a 1. Sun ple method for detexm ining the optical constants of thin metallic films from transm ittance mea- surements[J]. Thin Solid F: 2000,358:166-171
26. Swanepoel R. Determ ination of the thickness and optical constants of amorphous silicon[J]. J Phys E:Sci Intrm., 1983,16: 1214-1222
27. 夏志林，薛亦渝等基于包络线法的薄膜光学常数分析[J]武汉理工大学学报，2003，25(5)：73-76
28. Djurisic A B, et al. Determ ination of optical constants of thin absorbing films from normal reflectance and transm ittance measurement
29. Optics Communication, 1999, 166(l):35-42
30. Bosch S, Ferre-Borrull J, et a 1. . A general-purpose software for optical characterization of thin film:specific features for m icroelectron- is application[ J]. Solid— State, E lectronics, 2001,45: 703-709
32. Gungor T, Saka B. Calculation of the optical constants of a thin layer upon a transparent substrate from the reflection spectrum using a genetic algorithm[J]. Thin Solid F:, 2004,467:319- 325
33.Yu Z X, M o D. Generalized simulated annealing algorithm applied in the ellipsometric inversion problem[J]. Thin Solid F:, 2003,425: 108-112
34.Synow icki R A. Spectroscopic ellipsometry characterization of indium tin oxide film m icrostructure and optical constants[ J] Thin Solid Fibres, 1998, 313-314: 394- 397
35.Swec D.M.,Mirtich M.J . Diamonlike carbon Portective Coating for Optical Windows [C], SPIE.1989.1112:162-173.
36. . Milad F. Tabet, William A. McGahan. Thickness and index measurement of transparent thin films using neural network processed reflectance data. J. Vac. Sci. Technol. 1999, A 17(4):1836:183-970.
37. David V. Tsu. Obtaining optical constants of thin GexSb,Te. films from measurements of reflection and transmission. J. Vac. Sci. Technol. 1999, A 17(4): 1854:1860
38. Joge 1. Cisneros. Optical characterizaion of dielectric and semiconductor thin films by use of transmission data. Applied Optics, 1998, 37(22);526:252
2. Klocek. PAUL. ED, Window and dome technologies and materials, SPIE.Vol. 1326,1990
3.Paul Klocek, Thomas McKenna, John Trombetta. Thermo-optic, thermo-mechanical, andelectromagnetic effects in IR windows and domes, and the rationale for GaAs, GaP, anddiamond. Proc. SPIE, 1994,2286:70-90
4. John M. Hall. Army Applications for Multi-Spectral Windows. Proc. SPIE 1997,3060:330-334
5. JA Savage, GJH Wort, CSJ Pickles, et al. Properties of free-standing CVD diamond optical components. Proc. SPIE 1997, 3060:1441596. A. Zachary Tropf, Michael E. Thomas, William J. Tropf. Optical properties of KRS-5. Proc SPIE 1997,3060:344-354
7. Jitendra S. Goela, Brent Romero. Effects of Defects on ZnSe Absorption and TransmissionSPIE 1997, 3060:366-376
8. Joel Askinazi. Large aperture, broadband sapphire windows for common aperture, target acquisition, tracking and surveillance systems. SPIE 1997,3060:214—225
11.Daniel C. Harris. Infrared Window and Dome Materials. Washington: SPIE OpticalEngineering Press, 1992
13. E. J. Coad, J. E. Field. Liquid impact resistance of CVD diamond and other infrared materials. Proc. SPIE 1997, 3060:169180
14. E. S. Kelly, R. J. Ondercin, J. A. Detro, et al. Environmental Testing of Long Wave Infrared(LWIR) Windows, SPIE 1997,3060:68-75
15. C R Seward, E J Coad, C S J Pickles. The rain erosion resistance of diamond and other window materials, Proc. SPIE 1994, 2286:28530016. J E Field, Q Sun, H Gao. Solid Particles erosion of infrared transmitting materials. Proc. SPIE1994, 2286:301-306
17. E D Nicholson, C S J Pickles, J E Field. The mechanical properties of thin films for aerospace applications. Proc. SPIE, 1994,2286:275-284
18. Lee M. Goldman, Randal W. Tustison. High durability infrared transparent coatings. Proc.SPIE, 1994,2286:316-324
19. A. H. Lettington. Review of recent advances in infrared antireflection coatings. Proc. SPIE, 1988, 915:60-66
20. B C Monachan, C J Kelly, E M Waddell. Ultra-hard coatings for I.R, materials. Proc. SPIE, 1989,1112:29-43
21. Nick Brette, Paul Klocek. Engineered polymeric IR-transparent protective coatings. Proc.SPIE 1994, 2286:325-334
22. Linda F. Johnson, Mark E. Moran. Synthesis and Characterization of Carbon Nitride Films. Proc. SPIE 1997, 3060:3041
23. Daniel C. Harris. Side-by-Side Comparison of Erosion-Resistant Coatings. Proc. SPIE 1997,
24. 张贵锋．新型红外增透膜与保护膜．红外技术，1995， 17(5)：23-28
25. Wasimul Hasan, Stephen H. Propst. Durability testing of hard carbon coatings for Ge and ZnS substrates. Proc. SPIE 1994, 2286:354-363
26. Swec D. M., Mirtich M. J. Diamonlike Carbon Protective Coatings for Optical Windows, Proc.SPIE, 1989,1112:162-173
27. O V. Balachova, M. A. R. Alves, J. W. Swart, et al. Influence of the substrate thickness and radio frequency on the deposition rate of amorphous hydrogenated carbon a-C:H films.Journal of Applied Physics, 1999, 85(6):33453347
28. Wasimul Hasan, Stephen H. Propst, Durability testing of hard carbon coatings for Ge and ZnS substrates. Proc. SPIE 1994, 2286:354363
29. Mark B. Moran, Linda F. Johnson. Diamond-like-carbon films synthesized by electron cyclotron resonance chemical vapor deposition. Proc. SPIE., 1997, 3060:42-54
30. Z. T. Liu, N. K. Xu, D. S. Geng, et al. Thermostability of Diamondlike Carbon Films.Surface Engineering. 1993, 9(2), 148150
31. J. Koskinen, J. P. Hirvonen, J. Keranen. Effect of deposition temperature and growth rate on the bond structure of hydrogen free carbon films. J. Appl. Phys. 1998, 84(l):648650
32. 魏秋明，J．Sankar.功能梯度类金刚石薄膜的脉冲激光制备，金属热处理学报，2000，21 (2)，57-6
33. 姜杰．高性能的类金刚石红外光学薄膜，红外技术，1995 18(4)：1520
34. Kelly C. J., Orr J. S., Gordon H., et al. Application of Germanium Carbide in DurableMultilayer IR Coatings. Proc. SPIE, 1990,1275:122-133
35. R. E. Sah, Ch. Wild, P. Koidl, et al. Amorphous hydrogenated carbon-germanium films forhard multiplayer IR optical coatings. Proc. SPIE, 1990, 1275:59-65
36. Diane M. Swec, Michael J. Mirtich. Diamondlike Carbon Protective Coatings for Optical Windows. Proc. SPIE, 1989,1112:156-173
37. Mackowski J M, Cimma B. Pignard R., et al. Rain erosion behaviour of germanium carbide (GeC) films grown on ZnS substrates. Proc. SPIE , 1992,1760:201-209
38. LIU Zheng-Tang, ZHU Jing-Zhi, XU Nian-Kan, et al. Structure and Properties of Germaniu Carbide Films Prepared by RF Reactive Sputtering in Ar/CH4. Jpn. J. Appl. Phys., 1997.36(6A):3625-3628.
39. M. Gazicki, H. Szymanowski, J. Tyczkowski. Correlation between gas phase composition of rf plasma of argon diluted tetrathylgermanium and chemical structure of therewith deposited Ge/C films. J. Vac. Sci. Technol. 1996, A14(5):2835-2841
40. Ruth Shinar. Hydrogen adsorption on some a-Gei.不 x:H films prepared by radio frequency sputtering. J. Vac. Sci. Technol. 1988, A6(5):2910-291341.宋建全,刘正堂,于忠奇等 与 毫米波学报, 2000,19 (4):266-268
42. Gibson D. R., Waddell E. M., Wilson A. D. et al. Ultradurable phoshide-based antireflection coatings for sand and rain erosion protection. Opt Eng., 1994, 33(3):957-966
43. M. Wilson, Marshall Thomas, Ignacio Perez. Impact damage as a function of crystal orientation in Ge IR windows employing durable phosphide coatings. Proc. SPIE , 1994,2286:108-119
44. Gibson D. R., Waddell E. M.. Advances in ultradurable phosphide-based broadband anti-reflection coationgs for sand and rain erosion protection of infrared windows and domes. Proc. SPIE, 1994, 2286:335-34645.
45. E M Waddle, D R Gibson, J Meredith. Sand impact testing of durable coatings on FUR ZnS relevant to the LANTIRN E-0 system window. Proc. SPIE, 1994,2286:364-375
46. E M Waddle, D R Gibson, M Wilson. Broadband IR transparent rain and sand erosion protective coating for the 1714 aircraft infrared search&track germanium dome. Proc. SPIE1994, 2286:376385
47. Joel Askinazi, Authi Narayanan. Protective broadband window coatings. Proc. SPIE 1997, 3060:356-365
48. K. A. Klemm, H. S. Patterson, L. F. Johnson, et at. Protective optical diamond infraredwindows. SPIE, 1994, 2286:347-353
49. T. McKenna, J. T. Hoggins, J. M. Trombetta, et al. Optical-quality, high-growth-rate, arc jet CVD diamond. Proc. SPIE 1994, 2286:160173
50. K.V. Ravi. High rate synthesis of high quality diamond for IR optics. Proc. SPIE 1994,2286:174185
51 .Lan Llewellyn, Robert Chittick, Rudolf Heinccke. Plasma etching and deposition as a method polishing CVD diamond. Proc. SPIE 1994, 2286:198-20452. M. B. Moran, L. F. Johnson, K. A. Klemn. Method for growth of CVD diamond on thin film
52. refractory coatings, and glass ceramic materials. Proc. SPIE 1994, 2286:205-211
53. Curtis E. Johnson, Jean M. Bennett, Melvin P. Nadier. Oxidative degradation of CVDdiamond. Proc. SPIE 1994, 2286:247253
54. K. A. Klemm, H. S. Patterson, L. F. Johnson, M. B. Moran, Protective optical coatings for diamond infrared windows. Proc. SPIE 1994, 2286:347-353
55. Daniel C. Harris. Properties of diamond for window and dome applications. Proc. SPIE 1994, 2286:218-.228
56. R. S. Sussmann, C. J. H Wort, C. G. Sweency, et al. Optical and dielectric properties of CVD polycrystalline diamond plates. Proc. SPIE 1994, 2286:229-238
57. Charles B. Willingham, Thomas M Hartnett, Richard P. Miller, et al. Bulk diamond for IR/RF windows and domes. SPIE, 1997, 3060:160-168
58. C J Brierley, M C Costello, M D Hudson, et al. Diamond Coatings for Large Area IR Windows. SPIE, 1994, 2286:307-315
59. Korenstein R, Goidman L., Hallock R.,et al. Diamond coated ZnS for improved erosion resistance. Proc. SPIE 1997,3060:181 — 195
60. Martin D. Huduson, Crofton J. Brierley, Andrew J. Miller, et al. Fabrication and testing of diamond coatings on infrared windows for the Harrier GR7 and AV8-B systems. Proc. SPIE 1997,3060:196-202
61 M. L. Carasso, J. H. Adair, P. A. Demkowicz, et al. Improving Electro-Optic WmdowReliability with DIACERTM Coatings. Proc. SPIE 1997, 3060:203212 62. maching on optical surfaces. Optical Society of America, 1991, 8(3):549553
63 林永昌,卢维强．光学薄膜原理．北京：国防1：业出版社,1990
64. 尹树百．薄膜光学—理论与实践.北京：科学出版社，1987
65. 康晋发，顾培夫 薄膜光学与技术．北京：机械业出版社，1989
66. J. A. Aguilera, J. Aguilera, P. Baumeister, et al. Antireflection coatings for germanium IR optics: a comparison of numerical design methods. Applied Optics, 1988, 27(14):28322839
67. Maria Luisa Rastello, Amedeo Premoli. Continuation method for synthesizing antireflection coatings. Applied Optics, 1992, 31(31):67416745
68. W. J. Wild, H Buhay. Thin-film multiplayer design optimization using a Monte Carlo approach. Optical Society of America, 1986, ll(ll):745-747
1．林永昌，卢维强、光学薄膜原理．北京：国防工业出版社，1990
2. 尹树百．薄膜光学—理论与实践．北京：科学出版社，1987
3. 康晋发，顾培夫．薄膜光学与技术北京机械工业出版社，1989
4. J. A, Aguilera, J, Aguilera, P. Baumeister, et al. Antireflection coatings for germanium IR optics: a comparison of numerical design methods. Applied Optics, 1988, 27(14):28322839
5. Maria Luisa Rastello, Amedeo Premoli. Continuation method for synthesizing antireflection coatings. Applied Optics, 1992, 31(31):6741-6745
6. W, J. Wild, H Buhay. Thin-film multiplayer design optimization using a Monte Carlo approach. Optical Society of America, 1986,11(川:745-747
7. 昊乐林，陈国平视保屏减反射膜系的设计，电子器件，1999，22(2)：99．103
8．李忠奇．红外高效率、宽带减反射膜．光学学报，1983，3(3)：253-258
9. 周健，林永昌．一种新的膜系设计方法—Neddle法．光学学报，1997，17(10)：1445-1449
10. 林永昌，顾永琳，张诚等．针法与初始膜系设计．光学学报，19 (10)：2731
11. 李芳，张诚，林永昌．膜系优化设计中的模糊输入及评价函数的改进．2000，29(1)：68-70
12. 李良钮，朱健强，林大健．在定域法中实现光学全局优化．光子学报，2000．29 (4)：348-351
13. 张可村．工程优化与算法分析．西安：西安交通大学出版社，1989
14. 马文金，张子平．计算物理学．合肥：中国科学技术大学出版社，1992
15. 徐钟济 蒙特卡罗方法．上海：上海科学技术出版社，1985
16. 范志刚，张伟，李以贵等．多层介质光学膜系的误差分析—膜层厚度变化的灵敏度因子．激光技术，1996，20(4)：236240
17. Milad F. Tabet, William A. McGahan. Thickness and index measurement of transparent thin films using neural network processed reflectance data. J. Vac. Sci. Technol. 1999, A 17(4): 1836-1839
18. David V. Tsu. Obtaining optical constants of thin GexSbxTez films from measurements ofreflection and transmission. J. Vac. Sci. Technol. 1999, A 17(4): 1854-1860
19. Joge 1. Cisneros. Optical characterizaion of dielectric and semiconductor thin films by use of transmission data. Applied Optics, 1998, 37(22):5262-5270
20．麦克斯韦,《电磁通论》,武汉出版社,1994年
21. Vasicek, A., Optics of Thin Films, (North-Holland, Amsterdam, 1960).
22. Knittl, Z. Optics of Thin Films. London, New York, Sydney, Toronto, John Wiley and Sons, 1985
23. H. A. Macleod, http://www.thinfilmcenter.com/Expert Techniques in Coating Design.htm
24. A. Thelen, "Design of Optical Interference Coatings", McGraw-Hill, New York, 1989
25. J. A. Dobrowolski, D. Lowe, "Optical thin film synthesis program based on the use of Fourier transforms", Appl. Opt., vl7, 30393050(1978)
26. P. Baumeister, "Design of multiplayer filters by successive approximations", J. Opt. Soc. Am.,v48, 955968(1958)
27. Jinfa Tang, Quan Zheng, "Automatic design of optical thin film systems—merit function and numerical optimization technique", J. Opt. Soc. Amer. vol.72: pl522-1528,1982
28. C. P. Chang, Y. H. Lee, "Optimization of a thin-film multiplayer design by use of the generalized simulated-annealing method", Optics Letters, 05, n11, p595-597
29. S. Martin, J. Rivory, M. Schoenauer, "Synthesis of optical multiplayer systems using geneticalgorithm", Applied Optics, v34, nl3, p2247-2254 (1995)
30 C. A. Floudas, P. M. Pardalos, State of the Art in Global Optimization, Kluwer AcademicPublishers, Dordrecht, The Netherlands, 1994
31. R. Horst, P. M. Pardalos, Handbook of Global Optimization, Kluwer Academic Pubishers, Dordrecht, Netherlands, 1995
32. C. A. Floudas, P. M. Pardalos, State of the Art in Global Optimization, Kluwer AcademicPublishers, Dordrecht, The Netherlands, 1994
33. R. Horst, P. M. Pardalos, Handbook of Global Optimization, Kluwer Academic Pubishers, Dordrecht, Netherlands, 1995
34. M. Locatelli,.Schoen, Random Linkage: a family of acceptance/rejection algorithms for global optimization, Math. Programming v85 n2, p279-396,1999
35. D. R. Jones, M. Schonlau, W. J. Welch, Efficient global optimization of expensive black-boxfunctions, J. Global Optim., vl3 n4, 0455-492, 1998
1. Kelly C. J., Orr J. S., Gordon H., et al. Application of Germanium Carbide in Durable Multilayer IR Coatings. Proc. SPIE, 1990,1275:122-133
2. R. E. Sah, Ch. Wild, P. Koidl, et al. Amorphous hydrogenated carbon-germanium films forhard multiplayer IR optical coatings. Proc. SPIE, 1990, 1275:59-65
3. Diane M. Swec, Michael J. Mirtich. Diamondlike Carbon Protective Coatings for Optical Windows. Proc. SPIE, 1989,1112:156-173
4. Mackowski J M., Cimma B. Pignard R., et al. Rain erosion behaviour of germanium carbide (GeC) films grown on ZnS substrates. Proc. SPIE ,1992,1760:201-209
5. LIU Zheng-Tang, ZHU Jing-Zhi, XU Nian-Kan, et al. Structure and Properties of Germanium Carbide Films Prepared by RF Reactive Sputtering in Ar/CH4. Jpn. J. Appl. Phys., 1997.36(6A) 36253628.
6. B C Monachan, C J Kelly, E M Waddell. Ultra-hard coatings for I.R. materials. Proc. SPIE, 1989,1112:29-43
7. M. Gazicki, H. Szymanowski, J. Tyczkowski. Correlation between gas phase composition of plasma of argon diluted tetrathylgermanium and chemical structure of therewith deposited Ge/C films. J. Vac. Sci. Technol. 1996, A14 (5):28352841
8. Ruth Shinar. Hydrogen adsorption on some a-Gel-xCx:H films prepared radio frequencysputtering. d. Vac. Sci. Technol. 1988, A6 (5):2910-2913
9. 田明波，刘德令编译．薄膜科学与技术(上).北京：机械工业出版社，1991
10. 李云奇真空镀膜技术与设备．沈阳：东北工学院出版社，1992
11. 李学丹，万英超，姜祥祺等真空沉积技术．杭州：浙江大学出版社，1994
12. 陈国平．薄膜物理与技术．南京：东南大学出版社，1993
13. 王力衡，黄运添，郑海涛．薄膜技术.北京：清华大学出版社，1991，
14. 严心、，林鸿海．薄膜技术．北京：兵器工业出版社，1994，
15．史月艳，殷志强，吴家庆等物理电子技术与工艺.北京：国防工业出版社，1995
16. 杨邦朝，王文生．薄膜物理与技术．成都：电子科技大学出版社，1994
17. 姚宗熙等．物理电子学西安：西安交通大学出版社，1991
18. 甄汉生 等离子加工技术．北京：清华大学出版社，1992
19. 张随新，陈国平．磁控反应溅射制备氧化锡膜的工艺研究．真空科学与技术，1995
15. (6):41541920. Siegfried Hofmann. Target and substrate surface reaction kinetics in magnetron sputtering of nitride coatings. Thin Solid Films, 1990, 191:335348
21. 陈国平，张随新，射频磁控溅射制备SiO2薄膜．真空科学与技术，1995 15(5)：310316
22. C D Tsiogas, J N Avaritsiotis. A model for reactive magnetron sputtering. Vacuum, 1992, 43(3): 203211
23. S. Berg, T. Nyberg, H-O. Biom, et al. Computer modeling as a tool to predict deposition rate and film composition in the reactive sputtering process. J. Vac. Sci. Technol. 1998, A16(3):12771285
24. Shenglong Zhu, Fuhui Wang. Abnormal steady state in reactive sputtering. J. Vac. Sci.Technnll999 人 17111 "711...7125. S. Berg, H-O. Blom, T. Larsson, et al. Modeling of reactive sputtering of compound materials.J. Vac. Sci. Technol. 1987, A 5(2): 202207
26. 王德苗，黄士勇，任高潮等，光谱法控制溅射速率的研究真空科学与技术，1997， 17(5)：366368
27. 康晋发，顾培夫．薄膜光学与技术北京：机械工业出版社，1989
28. 王敬义．薄膜生长理论．武汉：华中理工大学出版社，1992
29. C D Tsiogas, J N Avaritsiotis. A model for reactive magnetron sputtering. Vacuum, 1992, 43 (3): 203211
30. S. Berg, T. Nyberg, H-O. Blom, et al. Computer modeling as a tool to predict deposition rate and film composition in the reactive sputtering process. J. Vac. Sci. Technol. 1998,
16. (3):1277128531 .Shenglong Zhu, Fuhui Wang. Abnormal steady state in reactive sputtering. J. Vac. Sci. Technol. 1999, A 17(l):7076
32. S. Berg, H-O. Blom, T. Larsson, et al. Modeling of reactive sputtering of compound materials. J. Vac. Sci. Technol. 1987, A 5(2):202207
33. T. Larsson. A model for reactive sputtering with magnetrons. Vacuum, 1989, 39 (10): 949-954
34. T. Larsson, H-O. Blom, C. Nender, et al. A physical model for eliminating instabilities in reactive sputtering. J. Vac. Sci. Technol. 1988, A6(3):18321836
35. L. B. Jonsson, T. Nyberg, S. Berg. Target compound layer formation during reactive sputtering. J. Vac. Sci. Technol. 1999, A17(4):1827-1831
36. Eiji Kusano, Denis M. Goulart. Time-dependent simulation modeling of reactive sputtering. Thin Solid Films, 1990,1931194:8491
37. Siegfried Hofmann. Target and substrate surface reaction kinetics in magnetron sputtering ofnitride coatings. Thin Solid Films, 1990,191:335348
38. S. Berg, M. Moradi, C. Nender, et al. The use of process modeling for optimum design of reactive sputtering processes. Surface and Coating Technology, 1989, 39140:466-474
39. Hidetoshi Sekiguchi, Atsushi Kanzawa, Takahiro Imai, et al. Enhancement of the depositionrate of TiOz film in radio frequency reactive sputtering. J. Vac. Sci. Technol. 1994, A 12(6):3176=3179
40. 田明波，刘德令编译．薄膜科学与技术(上).北京：机械工业出版社，1991
41. R. D. Mansano, M. Massi, L. S. Zambom, et al. Effects of the methane content on the characteristics of diamond-like carbon films produced by sputtering. Thin Solid Films, 2000,373:243-246
42. N. A. Sanchez, C. Rincon, G. Zambrano, et al. Characterization of diamond-like carbon (DLC) thin films prepared-by r.f. magnetron sputtering. Thin Solid films, 2000, 373: 247250
43. 林永昌，卢维强 光学薄膜原理北京：国防工业出版社，1990
44. 尹树百．薄膜光学—理论与实践．北京：科学出版社，1987
1. SONG Jian-Quan，LIU Zheng-Tang，ZHU JingZhi，et al．Effect of target-substrate distance on reactve sputtering of films．Journal Northwestern Polytechnicalrsity(宋建全，刘正堂，朱景芝，等．极板间距对反应溅射GexC,．薄膜的影响，西北工业大学学报)，1998,4：637-640
2. Krishna Seshan HANDBOOK OF THIN-FILM DEPOSITION PROCESSES ANDTECHNIQUES, Second Edition NOYES PUBLICATIONS 2001
3. C. J. H. Wort et al, Recent Advances in the Quality of CVD diamond Optical components.Proc.SPIE, 3705,1999
4. Tankala et al.Oxidation of diamond films synthesized by hot filament assisted chemical vapour deposition. J. Mater. Res, 1990, 5:2483
5. M. Alam et al. The kinetics of chemical vapour depositeddiamond-oxygen reaction J. Mater.Res, 1993, 8:2870
6. C A Klein et al. Critical-point phonon frequencies of diamond. Ph Rev B45, 1992, 22:12854
7. Jane Yuan Howe. The Oxidation of Diamond. Thesis for Doctor Degree.Alfred university, NewYork(February, 2001
8. Sun C Q. A model of bonding and band-forming for oxides and nitrides.Appl.Phys. Lett, 1998, 72:1706
9. Chang Q Sun et al. preferential oxidation of diamond{111}.J. Phys.D:ADX)l. Phvs, 2000, 33:219
10. P. John et al.The Oxidation of (100) textured diamond. Diamond and Related Materials, 2002, 11:862
11. K P. Loh et al.Surface oxygenation studies on (100)-oriented diamond using an atom beam source and local anodic oxidation. Surface Science, 2002, 505:93
12. Chen J et al.Graphitization of nano diamond powder annealed in argon ambient. Appl.Phys. Lett, 1999, 74:365
13. 李学月一，万学英，姜祥棋等．真空沉积技术．浙江大学出版社．1994
14. 叶宪曾，江子伟，李赛君等．仪器分析教程.北京大学出版社．1997
15. T abet M F, M cgahan W A. Use of artificial neural networks to predict thickness and optical constants of thin films from reflectance data[ J]. Thin Solid F:, 2000, 370:122-127
16. A. Diaz-Parralejo et al? Densification and porosity evaluation of ZrO, 3 mo 1.%Y?OJ solgel thin films, Thin Solid Films 458 (2004) 92
17. 冯爱新等，划痕试验法表征薄膜涂层界面结合强度，江苏大学学报(自科学版)，2003
18. 杨邦朝，王文生．薄膜物理与技术．成都：电子科技大学出版社，199
19. J C Manifacier, J Gasiot, J P Fillard. A simple method for thedetermination of the optical constant n, k, and the thickness of aweakly absorbing thin film[J].l .Phys.E:Sci.Instrum.l976.9:1002-1004
20. R. Swanepoel. Determination of the thickness and opticalconstants of amorphous silicon[J].l.Phys.E:Sci. Instru m.1983, 16:1214-1222
21. Jorge I. Cisneros. Optical characterization of dielectric andsemiconductor thin films by use of transmission data[J]Appl.t., 1998, 37(22):5262-5270
22. John D. Dow, David Redfield. Toward a unified theory of Urbacl} s rules and exponential absorption edges[J]. Phys.Re B, 1972, 6(20):594-610
23. D. Y. Smith, Mitio Inokuti, William Karstens. A generalized Cauchy spersion formula and the refractivity of elementalse miconductors[J]l. Phys:Candensle tte r, 2001, 13:3883-3893
24. 茅听辉，等．[J]．真空科学与技术，2000,20(2)：88．
25. Khawaja E E, Durrani S M A, et a 1. Sun ple method for detexm ining the optical constants of thin metallic films from transm ittance mea- surements[J]. Thin Solid F: 2000,358:166-171
26. Swanepoel R. Determ ination of the thickness and optical constants of amorphous silicon[J]. J Phys E:Sci Intrm., 1983,16: 1214-1222
27. 夏志林，薛亦渝等基于包络线法的薄膜光学常数分析[J]武汉理工大学学报，2003，25(5)：73-76
28. Djurisic A B, et al. Determ ination of optical constants of thin absorbing films from normal reflectance and transm ittance measurement
29. Optics Communication, 1999, 166(l):35-42
30. Bosch S, Ferre-Borrull J, et a 1. . A general-purpose software for optical characterization of thin film:specific features for m icroelectron- is application[ J]. Solid— State, E lectronics, 2001,45: 703-709
32. Gungor T, Saka B. Calculation of the optical constants of a thin layer upon a transparent substrate from the reflection spectrum using a genetic algorithm[J]. Thin Solid F:, 2004,467:319- 325
33.Yu Z X, M o D. Generalized simulated annealing algorithm applied in the ellipsometric inversion problem[J]. Thin Solid F:, 2003,425: 108-112
34.Synow icki R A. Spectroscopic ellipsometry characterization of indium tin oxide film m icrostructure and optical constants[ J] Thin Solid Fibres, 1998, 313-314: 394- 397
35.Swec D.M.,Mirtich M.J . Diamonlike carbon Portective Coating for Optical Windows [C], SPIE.1989.1112:162-173.
36. . Milad F. Tabet, William A. McGahan. Thickness and index measurement of transparent thin films using neural network processed reflectance data. J. Vac. Sci. Technol. 1999, A 17(4):1836:183-970.
37. David V. Tsu. Obtaining optical constants of thin GexSb,Te. films from measurements of reflection and transmission. J. Vac. Sci. Technol. 1999, A 17(4): 1854:1860
38. Joge 1. Cisneros. Optical characterizaion of dielectric and semiconductor thin films by use of transmission data. Applied Optics, 1998, 37(22);526:252
© 2004-2018 中国地质图书馆版权所有 京ICP备05064691号 京公网安备11010802017129号 地址：北京市海淀区学院路29号 邮编：100083 电话：办公室：(+86 10)66554848；文献借阅、咨询服务、科技查新：66554700 |