六维加速度传感器的原理、系统及特性研究
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摘要
六维加速度(Six degree-of-freedom (DOF) acceleration)传感技术是实现物体三维空间运动相对于参考惯性坐标系的三维线加速度和三维角加速度的传感和测量的多维运动传感技术。六维加速度传感技术在工业自动化控制系统、交通运输工具、机器人控制系统、导航制导设备、互动娱乐设备、医疗保健设备和地震预测装置中有着广泛的应用前景。目前,已经提出的各种六维加速度传感原理和结构复杂,导致开发的六维加速度传感器尺寸较大或工艺复杂。此外,缺乏完善的六维加速度传感器的传感特性评定方法和标准,制约了六维加速度传感器的实用化。因此,探索新的六维加速度传感方法,开发结构简单、成本低、精度高的六维加速度传感器,建立六维加速度传感器的传感特性评定方法和标准是六维加速度传感技术发展的必然要求。
本文作者提出并实现了一种六维加速度传感器的原理,研究了基于该原理的六维加速度传感器系统的组成和传感特性。根据提出的原理设计并开发了一种基于六个共面的压电式单轴加速度传感器的压电式六维加速度传感器,建立了压电式六维加速度传感器的传感方程和传感误差模型,提出了相应的传感误差补偿方法和校准方法。在此基础上,建立了六维加速度传感器的传感特性测试系统,对开发的压电式六维加速度传感器的快速原型进行了实验测试。
本文的主要研究工作和创新点归纳为以下五个方面:
1.提出并研究了一种基于六个共面的单轴加速度传感器的六维加速度传感器的原理,通过获取和解耦固定在立方体上首尾相连、任意三条棱边不共面的六条棱边中点处且敏感轴线与相应棱边重合的六个单轴加速度传感器的输出实现六维加速度传感。建立了实现六维加速度传感的传感方程,分析了传感特性,包括传感误差、传感分辨率、传感范围和工作频率范围。
2.研究了采用六个压电式单轴加速度传感器作为敏感元件的压电式六维加速度传感器系统的组成和工作原理,建立了相应的传感方程,设计并实现了实现六维加速度传感的敏感单元和相应的信号处理系统。采用基于实时仿真系统的快速控制原型技术开发了压电式六维加速度传感器的快速原型。
3.分析了压电式六维加速度传感器的传感误差,建立了其传感误差模型和六个压电式单轴加速度传感器的安装误差和输出误差引起的传感误差的误差估计方程,分析了六个压电式单轴加速度传感器的安装误差和输出误差对传感误差的影响。在此基础上,提出了一种压电式六维加速度传感器的传感误差补偿方法,利用向量和矩阵的∞-范数建立了压电式六维加速度传感器的传感误差范围与被测对象运动的角速度范围、六个压电式单轴加速度传感器的安装误差范围和输出误差范围之间的数学关系模型。根据该数学模型,提出了一种误差补偿后的误差范围估计的方法。
4.提出了压电式六维加速度传感器的校准原理,建立了相应的校准模型,分析了校准过程中加速度激励误差对校准结果的影响和最佳角加速度激励频率的范围,建立了对校准误差进行估计的方法。
5.建立了六维加速度传感器的实验测试系统。在六维随机振动激励、固定轴线振动激励和固定轴旋转振动激励下对开发的压电式六维加速度传感器的快速原型的传感性能、校准和误差补偿的效果进行了实验测试。
本文的研究工作为基于多个单轴加速度传感器的六维加速度传感器的研究和开发奠定了理论基础,对于评定六维加速度传感器的传感特性具有重要指导意义。
The sensing technology for six degree-of-freedom (DOF) acceleration is one kind of sensing technology for multi-dimensional motions by sensing and measuring the three-DOF linear acceleration and the three-DOF angular acceleration of the spatial motion of a measured object with respect to the reference inertial frame. The potential applications of the sensing technology for six-DOF acceleration can be found in industrial automatic control systems, transportations, robot control systems, navigation equipments, interactive entertainment equipments, medical equipments, and earthquake prediction equipments. Up to now, the existing principles and configurations for sensing the six-DOF acceleration are complex, which results in the dimensional size of the developed six-DOF accelerometers will be large and/or the manufacturing will be difficult. In addition, neither the methods nor the standards for evaluating the sensing performances of six-DOF accelerometers have been deeply investigated, which will restrain the application of six-DOF accelerometers. In this case, exploring new sensing methods for six-DOF acceleration, developing six-DOF accelerometers with simple structure, low cost, and high accuracy, and establishing the methods and standards for evaluating the sensing performances of six-DOF accelerometers are necessary for expediting the sensing technology for six-DOF acceleration.
In this dissertation, the sensing principle of a six-DOF accelerometer based on six coplanar sensing elements for single-axis accelerations is proposed and realized, the systematic configuration and sensing characteristics of the six-DOF accelerometer based on the proposed principle are explored. According to the proposed principle, a piezoelectric six-DOF accelerometer based on six coplanar piezoelectric single-axis accelerometers is designed and developed, the sensing equation and sensing error model of the piezoelectric six-DOF accelerometer are established, and the corresponding compensation method and calibration method for the sensing errors are proposed. On these bases, the experimental setups for evaluating the sensing performances of the developed piezoelectric six-DOF accelerometer are established and the developed piezoelectric six-DOF accelerometer is experimentally tested.
The major research works and the innovations in this dissertation can be summarized as follows
1. The principle and sensing characteristics of a six-DOF accelerometer based on six coplanar sensing elements for single-axis accelerations are proposed and explored, the six-DOF acceleration can be sensed by accessing and decoupling the outputs from the six coplanar sensing elements for single-axis accelerations fixed at the midpoints of six end-to-end edges of a cube by ensuring that the sensing axial direction of one of the six single-axis accelerometers is aligned along one of the cube edges and any three edges of the six end-to-end edges are not in one plane. The corresponding sensing equation for the six-DOF acceleration is established. According to the established sensing equation, the sensing characteristics, including the sensing errors, sensing resolutions, sensing ranges, and operating frequency range, are analyzed.
2. The configuration and principle of a piezoelectric six-DOF accelerometer based on coplanar six piezoelectric single-axis accelerometers is explored, the corresponding sensing equation is established, and the corresponding sensing unit of the piezoelectric six-DOF accelerometer to sense the six-DOF acceleration, as well as the signal processing system, are designed and developed. A rapid prototype of the piezoelectric six-DOF accelerometer is developed with the rapid control prototyping (RCP) technique based on a real-time simulation system.
3. The sensing errors of the developed piezoelectric six-DOF accelerometer are analyzed, the mathematical model of the sensing errors and the estimation equations of the sensing errors attributable to the alignment errors and the output errors of the six piezoelectric single-axis accelerometers are established. On these bases, the impacts of the alignment errors and the output errors of the six piezoelectric single-axis accelerometers on the sensing errors of the piezoelectric six-DOF accelerameters are explored. The estimation method and the compensation method for the sensing errors of the piezoelectric six-DOF accelerometer are proposed and the mathematical relationship between the ranges of the sensing errors of the piezoelectric six-DOF accelerometer and the ranges of the alignment errors and the output errors of the six piezoelectric single-axis accelerometers is established utilizing the∞-norms of the vector and matrix. The estimation method for the ranges of the sensing errors after compensation is proposed according to the established mathematical relationship.
4. The principle for calibrating the piezoelectric six-DOF accelerometer is proposed and the corresponding calibration model is established. The affect of the errors of the acceleration excitations on the calibration results and the optimal range of the frequency of the angular acceleration excitations are analyzed and an estimation method for the calibration error is proposed.
5. The experiment setups for the six-DOF accelerometer are established. The sensing performances and the effects of the calibration and error compensation of the developed rapid prototype of the piezoelectric six-DOF accelerometer are experimentally verified with a six-DOF random vibration excitation, three fixed axis linear vibration excitations, and three fixed axis angular vibration excitations.
The research works in this dissertation has established the theoretical foundation for the research and development of the six-DOF accelerometers based on multiple single-axis accelerometers and will be beneficial to evaluating the sensing characteristics of the six-DOF accelerometers.
本文作者提出并实现了一种六维加速度传感器的原理,研究了基于该原理的六维加速度传感器系统的组成和传感特性。根据提出的原理设计并开发了一种基于六个共面的压电式单轴加速度传感器的压电式六维加速度传感器,建立了压电式六维加速度传感器的传感方程和传感误差模型,提出了相应的传感误差补偿方法和校准方法。在此基础上,建立了六维加速度传感器的传感特性测试系统,对开发的压电式六维加速度传感器的快速原型进行了实验测试。
本文的主要研究工作和创新点归纳为以下五个方面:
1.提出并研究了一种基于六个共面的单轴加速度传感器的六维加速度传感器的原理,通过获取和解耦固定在立方体上首尾相连、任意三条棱边不共面的六条棱边中点处且敏感轴线与相应棱边重合的六个单轴加速度传感器的输出实现六维加速度传感。建立了实现六维加速度传感的传感方程,分析了传感特性,包括传感误差、传感分辨率、传感范围和工作频率范围。
2.研究了采用六个压电式单轴加速度传感器作为敏感元件的压电式六维加速度传感器系统的组成和工作原理,建立了相应的传感方程,设计并实现了实现六维加速度传感的敏感单元和相应的信号处理系统。采用基于实时仿真系统的快速控制原型技术开发了压电式六维加速度传感器的快速原型。
3.分析了压电式六维加速度传感器的传感误差,建立了其传感误差模型和六个压电式单轴加速度传感器的安装误差和输出误差引起的传感误差的误差估计方程,分析了六个压电式单轴加速度传感器的安装误差和输出误差对传感误差的影响。在此基础上,提出了一种压电式六维加速度传感器的传感误差补偿方法,利用向量和矩阵的∞-范数建立了压电式六维加速度传感器的传感误差范围与被测对象运动的角速度范围、六个压电式单轴加速度传感器的安装误差范围和输出误差范围之间的数学关系模型。根据该数学模型,提出了一种误差补偿后的误差范围估计的方法。
4.提出了压电式六维加速度传感器的校准原理,建立了相应的校准模型,分析了校准过程中加速度激励误差对校准结果的影响和最佳角加速度激励频率的范围,建立了对校准误差进行估计的方法。
5.建立了六维加速度传感器的实验测试系统。在六维随机振动激励、固定轴线振动激励和固定轴旋转振动激励下对开发的压电式六维加速度传感器的快速原型的传感性能、校准和误差补偿的效果进行了实验测试。
本文的研究工作为基于多个单轴加速度传感器的六维加速度传感器的研究和开发奠定了理论基础,对于评定六维加速度传感器的传感特性具有重要指导意义。
The sensing technology for six degree-of-freedom (DOF) acceleration is one kind of sensing technology for multi-dimensional motions by sensing and measuring the three-DOF linear acceleration and the three-DOF angular acceleration of the spatial motion of a measured object with respect to the reference inertial frame. The potential applications of the sensing technology for six-DOF acceleration can be found in industrial automatic control systems, transportations, robot control systems, navigation equipments, interactive entertainment equipments, medical equipments, and earthquake prediction equipments. Up to now, the existing principles and configurations for sensing the six-DOF acceleration are complex, which results in the dimensional size of the developed six-DOF accelerometers will be large and/or the manufacturing will be difficult. In addition, neither the methods nor the standards for evaluating the sensing performances of six-DOF accelerometers have been deeply investigated, which will restrain the application of six-DOF accelerometers. In this case, exploring new sensing methods for six-DOF acceleration, developing six-DOF accelerometers with simple structure, low cost, and high accuracy, and establishing the methods and standards for evaluating the sensing performances of six-DOF accelerometers are necessary for expediting the sensing technology for six-DOF acceleration.
In this dissertation, the sensing principle of a six-DOF accelerometer based on six coplanar sensing elements for single-axis accelerations is proposed and realized, the systematic configuration and sensing characteristics of the six-DOF accelerometer based on the proposed principle are explored. According to the proposed principle, a piezoelectric six-DOF accelerometer based on six coplanar piezoelectric single-axis accelerometers is designed and developed, the sensing equation and sensing error model of the piezoelectric six-DOF accelerometer are established, and the corresponding compensation method and calibration method for the sensing errors are proposed. On these bases, the experimental setups for evaluating the sensing performances of the developed piezoelectric six-DOF accelerometer are established and the developed piezoelectric six-DOF accelerometer is experimentally tested.
The major research works and the innovations in this dissertation can be summarized as follows
1. The principle and sensing characteristics of a six-DOF accelerometer based on six coplanar sensing elements for single-axis accelerations are proposed and explored, the six-DOF acceleration can be sensed by accessing and decoupling the outputs from the six coplanar sensing elements for single-axis accelerations fixed at the midpoints of six end-to-end edges of a cube by ensuring that the sensing axial direction of one of the six single-axis accelerometers is aligned along one of the cube edges and any three edges of the six end-to-end edges are not in one plane. The corresponding sensing equation for the six-DOF acceleration is established. According to the established sensing equation, the sensing characteristics, including the sensing errors, sensing resolutions, sensing ranges, and operating frequency range, are analyzed.
2. The configuration and principle of a piezoelectric six-DOF accelerometer based on coplanar six piezoelectric single-axis accelerometers is explored, the corresponding sensing equation is established, and the corresponding sensing unit of the piezoelectric six-DOF accelerometer to sense the six-DOF acceleration, as well as the signal processing system, are designed and developed. A rapid prototype of the piezoelectric six-DOF accelerometer is developed with the rapid control prototyping (RCP) technique based on a real-time simulation system.
3. The sensing errors of the developed piezoelectric six-DOF accelerometer are analyzed, the mathematical model of the sensing errors and the estimation equations of the sensing errors attributable to the alignment errors and the output errors of the six piezoelectric single-axis accelerometers are established. On these bases, the impacts of the alignment errors and the output errors of the six piezoelectric single-axis accelerometers on the sensing errors of the piezoelectric six-DOF accelerameters are explored. The estimation method and the compensation method for the sensing errors of the piezoelectric six-DOF accelerometer are proposed and the mathematical relationship between the ranges of the sensing errors of the piezoelectric six-DOF accelerometer and the ranges of the alignment errors and the output errors of the six piezoelectric single-axis accelerometers is established utilizing the∞-norms of the vector and matrix. The estimation method for the ranges of the sensing errors after compensation is proposed according to the established mathematical relationship.
4. The principle for calibrating the piezoelectric six-DOF accelerometer is proposed and the corresponding calibration model is established. The affect of the errors of the acceleration excitations on the calibration results and the optimal range of the frequency of the angular acceleration excitations are analyzed and an estimation method for the calibration error is proposed.
5. The experiment setups for the six-DOF accelerometer are established. The sensing performances and the effects of the calibration and error compensation of the developed rapid prototype of the piezoelectric six-DOF accelerometer are experimentally verified with a six-DOF random vibration excitation, three fixed axis linear vibration excitations, and three fixed axis angular vibration excitations.
The research works in this dissertation has established the theoretical foundation for the research and development of the six-DOF accelerometers based on multiple single-axis accelerometers and will be beneficial to evaluating the sensing characteristics of the six-DOF accelerometers.
引文
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