新型轴用并联压电式六维大力传感器的研究
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摘要
巨型重载制造装备是制造产业链中的基础装备,国家极端制造能力和制造水平的体现,国民经济和国防安全的重要保障,是核电、造船、化工、国防等领域大型构件精确高效制造中必备的关键设备,其工作过程中,所受载荷通常可达100kN至100MN量级,具有多维特征。对六维力测量以及实时力反馈是实现装备协调操作控制、力顺应控制的基础,也是规划和调整锻造工艺的重要依据。现有大力传感器仅可测量一维大力载荷,六维力传感器的测量范围远不能满足大力值的测量需求。
本文在国家重点基础研究发展计划(973项目)(2006CB705406)的资助下,主要研究大承载力条件下六维力的测量。具体工作如下：
1.提出了基于压电效应的多点支撑式六维力测量方法,建立了支撑点数与被测六维力的映射关系,并构建了多点支撑式六维力传感器构型库及其相对应的解耦算法。根据巨型重载操作装备机械手臂对空间六维大力动态测量的要求,规划出传感器安装位置,选择压电石英为力敏元件,推导出支撑点数与空间六维力的关系。利用有限元软件ANSYS对基于四点支撑式结构的力敏元件空间布局进行加载分析,并通过试验获得了力敏元件不同空间布局对轴上六维力传感器测量性能的影响关系,试验结果与理论分析和有限元分析相吻合,基于四点支撑式结构的力敏元件正方形布局更适合用于轴上六维力的测量。
2.研究了基于并联机构原理的六维大力值测量的方法。根据并联分流的原理,提出了利用四点支撑式结构及大力承载轴刚性并联来实现并联多维分载测量新方法,将六维大力的极小部分载荷分载到六维力传感器,并根据六维大力与分载力的映射关系,实现六维大力测量。对轴向力、横向力、弯矩和扭矩等各个方向的分载进行了分析和计算,得到了影响分载分载的各个主要参数。利用有限元软件并联分载原理进行仿真分析并进行了分载试验,验证并联分载测量原理的可行性和有效性。
3.提出一种高刚度、高线性度、强解耦非组装整体化的四点支撑压电式六维大力传感器新的结构形式。研究了该结构传感器的预紧方案,分析了预紧力对传感器测量的影响。利用有限元软件对传感器的结构进行了静、动态分析,结果表明施加载荷与输出载荷成线性关系。以量程为主要约束,以提高灵敏度和分载效果为主要目标,采用单因素的方法对结构参数进行优化,确定了传感器的主要参数。研究传感器的动态响应特性,建立传感器结构与动态特性的映射关系。有限元分析表明,施加载荷与输出载荷之间成线性关系,可以实现大力值测量；该结构传感器固有频率高,动态响应好,可以实现六维力动态测量。
4.研究了并联式轴用压电六维大力传感器的静态性能标定方法,设计了一种新型的六维大力传感器标定装置。建立了六维大力传感器的测量平台,研究了针对轴用并联压电式六维大力传感器的静态标定矩阵的解法和标定方法。针对传感器的测量要求和实际安装条件,提出了一种基于胀紧原理的面摩擦紧固技术,并提出了基于该技术的六维大力传感器与轴紧固装置,解决了六维大力传感器轴上固定和力传递问题。
5.对并联式轴用压电六维大力传感器进行静、动态标定实验。通过静态标定实验得出该传感器的标定矩阵C,并由标定矩阵来耦合出传感器的6路信号,对影响传感器输出性能的因素进行了误差分析,得到该传感器的各向力输出性能。研究并设计了动态标定实验。实验数据表明,该结构六维力传感器非线性误差和重复性误差均小于1%,向间干扰误差小于5%。轴用并联压电式六维力传感器各个方向第一阶固有频率值均超过2000Hz,均超过要求的1000Hz,满足巨型操作机的动态测量要求。
本文研究内容对压电力敏元件在六维大力测量技术上的发展具有参考价值,可广泛应用于极端环境下多维时变大载荷的实时精确测量,可为提高大型构件的制造精度、生产效率和材料利用率,规划和调整加工工艺提供重要的技术保障,对提升我国重载制造装备的高精度、高效、节能制造能力和水平具有重要的工程实用价值。
The huge heavy-load manipulators are foundational equipment in machine industry chain. They not only represent the national extreme manufacturing capability and level, but also affect national economy and national construction projects. They are key devices which are needed in precise manufacture of large structure in fields of nuclear power, shipbuliding, chemical engineering, national defense. In working process of huge heavy-load manipulators, the loads can usually reach 100kN to 100MN, and have multi-degree characteristics. Measurement of six-dimensional force/moment and real-time force feedback are foundation to realize coordinated operation control and force compliance control on huge industrial robots. And they are also important to planning and adjusting forge process. At present, heavy force sensor can only measure one dimensional force. However, the measurement range of existing multi-dimensional force sensor can not satisfy requirement of heavy force value.
This work is supported by a grant from the Major State Basic Research Development Program of China (973 Program) (No.2006CB705406). The main reaserch of this paper is to measure six-dimensional force in condition of huge heavy load. The concrete work is shown as following
Firstly, based on piezoelectric effect, the measuring method of multi-point supporting six-dimensinal heavy force is present. The mapping relationships between number of supporting points and six-dimensional heavy force to be measured are established. Configuration database of multi-point supporting six-dimensional heavy force sensor and responding decoupling algorithem are constructed. According to dynamic measurement requirement of six-dimensional force on huge heavy-load manipulator's gripper, the installation position of six-dimensional heavy force sensor is determined. Piezoelectric quartz is chosen as force sensing element to realize real-time measurement. The relationship between supporting points and spatial six-dimensional force is deduced. In order to investigate the validity of the proposed method, the FEM analysis and the experiments of piezoelectric six-dimensional force sensor is put forward with two kind's different spatial arrangement, and characteristic tests of the piezoelectric six-dimensional force sensor are performed. The results of experiment are consistent with theoretical and FEM analysis. The square arrangement based on four-point supporting structure is vertified to be better for measurement of six-dimensional force on axis.
Secondly, the method for measurement of six-dimensional heavy force based on parallel structure principle is researched. According to parallel concente shunt principle, the parallel load distribution principle of piezoelectric six-dimensional force sensor based on four-point supporting structure is presented. The six-dimensional force sensor is rigidity connected with parallel bearing axis, so small part load of six-dimensional force/torque is translated to six-dimensional force/torque sensor. The measurement of six-dimensional heavy force/torque can be received by the mapping relationship between six-dimensional force/torque and load distribution force. The load distribution ratios are analyzed and calculated in vertical, horizontal, torque, moment directions. The main parameters which influence load distribution are obtained and analyzed. The feasibility and effectiveness of six-dimensional heavy force are verified by parallel load distribution principle and method.
Thirdly, a novel non-assembly four-point supporting piezoelectric six-dimensional force sensor is designed with advantages of high-rigidity and high linearity. The preload project of this kind sensor is researched, and the influence of preload force on sensor is analyzed. The model of parallel piezoelectric six-dimensional heavy force sensor is set up, and the static and dynamic characteristics are analyzed by ANSYS software. By using scale as constraint conditions and improving the sensitivity as the main objective, structural parameters of four-point supporting six-dimensional heavy force sensor are optimized by single-factor method. The dynamic response characteristic of the sensor is studied. The mapping relationship between structure and dynamic characteristic is built.
Fourth, method of static calibration on parallel piezoelectric six-dimensional force sensor is deeply researched. Novel calibration equipment for parallel force sensor is designed. Measurement platform for the sensor is built. According to measurement requirement and actural installation condition, tightening technology of surface friction based on distensible principle is presented. Tightening equipment for the sensor to fix on axis is put forward to solve fixation of six-dimensional force sensor and force transfer problem.
Fifth, the static and dynamic calibrations on the optimal designed four-point supporting six-dimensional heavy force sensor are made. And then its calibrated matrix is obtained after static calibration experiment. Six signals can be decoupled by calibration matrix. Measurement performances in each direction can be obtained. The factors which affect on measurement performance of parallel piezoelectric six-dimensional are analyzed. The method of dynamic calibration is researched, and dynamic calibration experiment is dsigned. The result of experiment shows this kind six-dimensional force sensor has good force mesuring performance, and can realize measurement of spatial external force. The value of linearity error and repeatability error are all less than 1%, and the interference errors are less than 5%. The first natural frequency in three directions are all more than 2 kHz, and can satisfy required measuring requirement of huge heavy-load manipulator(1 kHz).
The force sensor has reference value for the development of six-dimensional heavy force measuring technology by using piezoelectric as force sensing element. It can be widely used in extreme environments for real-time accurate measurement of multi-dimensional time-varying large loads. It can also provide important technical support to improve manufacturing precision and production efficiency of large and complex components. Meanwhile it has important practical value for upgrading Chinese huge heavy load manufacturing equipments with capabilities of high-precision, high efficiency, energy-saving manufacturing capacity and level of engineering.
本文在国家重点基础研究发展计划(973项目)(2006CB705406)的资助下,主要研究大承载力条件下六维力的测量。具体工作如下：
1.提出了基于压电效应的多点支撑式六维力测量方法,建立了支撑点数与被测六维力的映射关系,并构建了多点支撑式六维力传感器构型库及其相对应的解耦算法。根据巨型重载操作装备机械手臂对空间六维大力动态测量的要求,规划出传感器安装位置,选择压电石英为力敏元件,推导出支撑点数与空间六维力的关系。利用有限元软件ANSYS对基于四点支撑式结构的力敏元件空间布局进行加载分析,并通过试验获得了力敏元件不同空间布局对轴上六维力传感器测量性能的影响关系,试验结果与理论分析和有限元分析相吻合,基于四点支撑式结构的力敏元件正方形布局更适合用于轴上六维力的测量。
2.研究了基于并联机构原理的六维大力值测量的方法。根据并联分流的原理,提出了利用四点支撑式结构及大力承载轴刚性并联来实现并联多维分载测量新方法,将六维大力的极小部分载荷分载到六维力传感器,并根据六维大力与分载力的映射关系,实现六维大力测量。对轴向力、横向力、弯矩和扭矩等各个方向的分载进行了分析和计算,得到了影响分载分载的各个主要参数。利用有限元软件并联分载原理进行仿真分析并进行了分载试验,验证并联分载测量原理的可行性和有效性。
3.提出一种高刚度、高线性度、强解耦非组装整体化的四点支撑压电式六维大力传感器新的结构形式。研究了该结构传感器的预紧方案,分析了预紧力对传感器测量的影响。利用有限元软件对传感器的结构进行了静、动态分析,结果表明施加载荷与输出载荷成线性关系。以量程为主要约束,以提高灵敏度和分载效果为主要目标,采用单因素的方法对结构参数进行优化,确定了传感器的主要参数。研究传感器的动态响应特性,建立传感器结构与动态特性的映射关系。有限元分析表明,施加载荷与输出载荷之间成线性关系,可以实现大力值测量；该结构传感器固有频率高,动态响应好,可以实现六维力动态测量。
4.研究了并联式轴用压电六维大力传感器的静态性能标定方法,设计了一种新型的六维大力传感器标定装置。建立了六维大力传感器的测量平台,研究了针对轴用并联压电式六维大力传感器的静态标定矩阵的解法和标定方法。针对传感器的测量要求和实际安装条件,提出了一种基于胀紧原理的面摩擦紧固技术,并提出了基于该技术的六维大力传感器与轴紧固装置,解决了六维大力传感器轴上固定和力传递问题。
5.对并联式轴用压电六维大力传感器进行静、动态标定实验。通过静态标定实验得出该传感器的标定矩阵C,并由标定矩阵来耦合出传感器的6路信号,对影响传感器输出性能的因素进行了误差分析,得到该传感器的各向力输出性能。研究并设计了动态标定实验。实验数据表明,该结构六维力传感器非线性误差和重复性误差均小于1%,向间干扰误差小于5%。轴用并联压电式六维力传感器各个方向第一阶固有频率值均超过2000Hz,均超过要求的1000Hz,满足巨型操作机的动态测量要求。
本文研究内容对压电力敏元件在六维大力测量技术上的发展具有参考价值,可广泛应用于极端环境下多维时变大载荷的实时精确测量,可为提高大型构件的制造精度、生产效率和材料利用率,规划和调整加工工艺提供重要的技术保障,对提升我国重载制造装备的高精度、高效、节能制造能力和水平具有重要的工程实用价值。
The huge heavy-load manipulators are foundational equipment in machine industry chain. They not only represent the national extreme manufacturing capability and level, but also affect national economy and national construction projects. They are key devices which are needed in precise manufacture of large structure in fields of nuclear power, shipbuliding, chemical engineering, national defense. In working process of huge heavy-load manipulators, the loads can usually reach 100kN to 100MN, and have multi-degree characteristics. Measurement of six-dimensional force/moment and real-time force feedback are foundation to realize coordinated operation control and force compliance control on huge industrial robots. And they are also important to planning and adjusting forge process. At present, heavy force sensor can only measure one dimensional force. However, the measurement range of existing multi-dimensional force sensor can not satisfy requirement of heavy force value.
This work is supported by a grant from the Major State Basic Research Development Program of China (973 Program) (No.2006CB705406). The main reaserch of this paper is to measure six-dimensional force in condition of huge heavy load. The concrete work is shown as following
Firstly, based on piezoelectric effect, the measuring method of multi-point supporting six-dimensinal heavy force is present. The mapping relationships between number of supporting points and six-dimensional heavy force to be measured are established. Configuration database of multi-point supporting six-dimensional heavy force sensor and responding decoupling algorithem are constructed. According to dynamic measurement requirement of six-dimensional force on huge heavy-load manipulator's gripper, the installation position of six-dimensional heavy force sensor is determined. Piezoelectric quartz is chosen as force sensing element to realize real-time measurement. The relationship between supporting points and spatial six-dimensional force is deduced. In order to investigate the validity of the proposed method, the FEM analysis and the experiments of piezoelectric six-dimensional force sensor is put forward with two kind's different spatial arrangement, and characteristic tests of the piezoelectric six-dimensional force sensor are performed. The results of experiment are consistent with theoretical and FEM analysis. The square arrangement based on four-point supporting structure is vertified to be better for measurement of six-dimensional force on axis.
Secondly, the method for measurement of six-dimensional heavy force based on parallel structure principle is researched. According to parallel concente shunt principle, the parallel load distribution principle of piezoelectric six-dimensional force sensor based on four-point supporting structure is presented. The six-dimensional force sensor is rigidity connected with parallel bearing axis, so small part load of six-dimensional force/torque is translated to six-dimensional force/torque sensor. The measurement of six-dimensional heavy force/torque can be received by the mapping relationship between six-dimensional force/torque and load distribution force. The load distribution ratios are analyzed and calculated in vertical, horizontal, torque, moment directions. The main parameters which influence load distribution are obtained and analyzed. The feasibility and effectiveness of six-dimensional heavy force are verified by parallel load distribution principle and method.
Thirdly, a novel non-assembly four-point supporting piezoelectric six-dimensional force sensor is designed with advantages of high-rigidity and high linearity. The preload project of this kind sensor is researched, and the influence of preload force on sensor is analyzed. The model of parallel piezoelectric six-dimensional heavy force sensor is set up, and the static and dynamic characteristics are analyzed by ANSYS software. By using scale as constraint conditions and improving the sensitivity as the main objective, structural parameters of four-point supporting six-dimensional heavy force sensor are optimized by single-factor method. The dynamic response characteristic of the sensor is studied. The mapping relationship between structure and dynamic characteristic is built.
Fourth, method of static calibration on parallel piezoelectric six-dimensional force sensor is deeply researched. Novel calibration equipment for parallel force sensor is designed. Measurement platform for the sensor is built. According to measurement requirement and actural installation condition, tightening technology of surface friction based on distensible principle is presented. Tightening equipment for the sensor to fix on axis is put forward to solve fixation of six-dimensional force sensor and force transfer problem.
Fifth, the static and dynamic calibrations on the optimal designed four-point supporting six-dimensional heavy force sensor are made. And then its calibrated matrix is obtained after static calibration experiment. Six signals can be decoupled by calibration matrix. Measurement performances in each direction can be obtained. The factors which affect on measurement performance of parallel piezoelectric six-dimensional are analyzed. The method of dynamic calibration is researched, and dynamic calibration experiment is dsigned. The result of experiment shows this kind six-dimensional force sensor has good force mesuring performance, and can realize measurement of spatial external force. The value of linearity error and repeatability error are all less than 1%, and the interference errors are less than 5%. The first natural frequency in three directions are all more than 2 kHz, and can satisfy required measuring requirement of huge heavy-load manipulator(1 kHz).
The force sensor has reference value for the development of six-dimensional heavy force measuring technology by using piezoelectric as force sensing element. It can be widely used in extreme environments for real-time accurate measurement of multi-dimensional time-varying large loads. It can also provide important technical support to improve manufacturing precision and production efficiency of large and complex components. Meanwhile it has important practical value for upgrading Chinese huge heavy load manufacturing equipments with capabilities of high-precision, high efficiency, energy-saving manufacturing capacity and level of engineering.
引文
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