紫外光子计数成像系统关键技术研究
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摘要
在我国二期和三期“探月工程”中将要搭载极紫外相机,开展月基地球等离子体层极紫外(30.4 nm)成像实验,用于探测地球周围的等离子体层结构,该相机的核心—极紫外探测器的研究具有十分重要的意义!
本课题拟采用基于微通道板(MCP)的楔条形阳极(WSA)探测器,它具有信噪比高、背景噪声低、探测量子效率高、无漏电流影响和抗漂移、动态范围宽、大面阵、空间分辨和时间分辨较高以及耐辐射等优点。因此,该探测器更适合空间探测和天文观测。按照电荷接收和读出万式,阳极探测器可分为直接读出方式和感应读出方式,本文主要研究了直接读出方式和感应读出方式的WSA探测器。
WSA是阳极探测器的核心器件之一,因此WSA的自主设计和研制至关重要。利用实验室拥有的镀膜设备和本所的光刻设备,实现了WSA的自主设计和加工,从而大大缩短了阳极的制作成本和周期。
WSA探测器输出电荷有两种读出方式。对于直接读出方式的阳极探测器,研究了三块不同设计参数的WSA探测器的性能。通过测试三块不同阳极探测器的暗计数、分辨率、线性度和计数率等性能,发现极间电容最小的WSA探测器具有最好的空间分辨率,探测器在X方向的象元分辨率接近75μm,在Y方向的象元分辨率优于62.5μm。另外,探测器的线性度主要由MCP和WSA的距离决定,通过调节MCP和WSA的距离可以提高探测器的线性度。三块阳极探测器均在计数率小于10000 counts/s时具有较高的分辨率。
对于感应读出方式的WSA探测器,研究了不同条件下大周期窄沟道(N0.2)WSA探测器和大周期宽沟道(N0.3)WSA探测器的性能。对于NO.2-WSA探测器,分别研究了当MCP和Ge膜间距为10mm和1mm时,不同Ge膜基底、不同基底厚度,不同Ge膜电阻、不同Ge膜厚度对探测器的暗计数、分辨率、线性度和计数率的影响。测试结果表明,基底越厚,图像畸变越大,计数率越低;Ge膜的方块电阻越大,相同光强下的计数率越低,并且在较高的入射光子时,成像区域越小;Ge膜越厚,相同光强下的计数率也越低。
对于NO.3-WSA探测器,主要研究了当MCP和Ge膜间距为1 mm时,陶瓷厚度分别为1.5 mm和2 mm的基底上蒸镀Ge膜的阳极探测器性能,并且与NO.2-WSA探测器做了一些对比。暗计数测试结果表明,在陶瓷基底厚度相同时,两个阳极探测器的暗计数图像畸变相差不多,图像畸变均随基底厚度增加而增大。分辨率测试结果表明,在Φ42 mm范围内,2 mm陶瓷基底的NO.3-WSA探测器在X方向的分辨率接近100μm,在Y方向的分辨率优于100μm。线性度测试结果表明,陶瓷厚度为1.5 mm时,NO.3-WSA探测器具有较高的线性度。计数率测试结果表明,当陶瓷厚度为1.5 mm,且减光片相同时,NO.3-WSA探测器的计数率要高于NO.2-WSA探测器。
对于直接收集方式的WSA探测器,光子计数图像一般会存在畸变,为了校正图像畸变,分别采用了三种不同的方法来校正原始图像。第一种方法称为物理校正法,主要通过调节不同电极之间的电容耦合常数来减小图像畸变。第二种方法称为整体校正法,通过一个共同的变换矩阵对畸变图像进行整体校正。第三种方法称为局部校正法,通过不同的局域变换矩阵对图像局部进行校正,局部校正联合起来完成整个图像的校正。通过评价参数比较,发现局部校正算法的效果最好。此外,分别利用理论计算和实验两种方法来估算基于楔条形阳极的感应电荷云尺寸。理论估算和对实验图像的分析均表明,MCP和Ge膜的距离对电荷云的扩散影响较小,而Ge膜的基底厚度对电荷云的扩散有很大影响。
设计和研制的直接读出式极紫外光子计数成像探测器有效面积为Φ48 mm,暗计数率小于1 counts/s·cm~2,在16000 counts/s的计数率下具有较高的分辨率,在1 000 counts/s的计数率时探测器分辨率优于75μm,上述技术指标满足探月二期工程EUV相机的技术要求。
An Extreme Ultraviolet Camera is designed in the second and third project of Chinese Moon Program to study the distribution of plasma in Earth's plasmasphere by imaging the distribution of the He~+ ion through its emission at 30.4 nm.The Extreme ultraviolet imaging detector is the key part of the camera,and it is very importanc to study the extreme ultraviolet detector.
The wedge and strip anode detector based on microchannel plate is adopted in this paper.Anode detectors have many merits,such as low background noise,high signal and nose ratio,high detection quantum efficiency,photon-counting sensitivity,long range,large format,radiation tolerance,high space resolution and time resolution.As a result,the anode detector has been widely used in space detection and astronomy observation.According to the electron readout mode,anode detectors can be divided into two types,one is direct collection readout mode,and the other is induction readout mode.The wedge and strip anode detector with direct collection readout and induction readout are studied.
As the key device of anode detector,the(?)ndependent design and manufacture is absolutely critical.Utilizing the coating equipment and the lithography equipment,we design and process the wedge strip anode independently,and the cost and period are reduced significantly.
There are two types of readout mode for anode detector.For direct collection readout anode detector,the performance of three wedge and strip anode detectors with different parameter is studied.The dark count,resolution,linearity and count rate of the detector are measured and the results show that the wedge and strip anode detector with the smallest coupling constants between interelctrodes has the best resolution. The resolution along X direction is close to 75μm,and the resolution along Y direction is better than 62.5μm.In addition,the linearity of detector is determined by the distance between the microchannel plate and the wedge and strip anode,which can be improved by modulating the distance of microchannel plate and anode.The three anode detectors have higher resolution when the count rates are less than 10000 counts/s.
For induction readout anode detectors,the performance of the dectors with different pitch and different insulting gap are studied.For the anode detector with big pitch and narrow insulting gap(NO.2-WSA),when the distance of MCP and Ge layer is 10 mm and 1 mm,the performance of the detector under different Ge substrate,different thickness of Ge layer substrate,different sheet resistance of Ge layer and different thickness of Ge layer are tested.The results suggest that the thicker the Ge layer substrate is,the greater the image distortion is and the lower the count rate is;the higher the sheet resistance of Ge layer is,the lower the count rate is,and under high photon flux the less the image area is;under same light intensity,the thicker the Ge layer is,the lower the count rate is.
For the anode detector with big pintch and wide insulting gap(NO.3-WSA),when the distance between microcharmel plate and Ge layer is 1 mm,the performance of anode detector with 1.5 mm ceramic substrate and 2.0 mm ceramic substrate is tested respectively and compared with the anode detector with big pintch and narrow insulting gap.The results of dark count image show that the image distortions of the two detectors are comparative when the thickness of substrate is same and the image distortions are increased with the substrate thickness increasing.The resolution results which is tested inΦ42 mm show that the resolution of the anode detector with big pintch and wide insulting gap with 2 mm ceramic substrate along the X direction is nearly 100μm and that along Y direction is better than 100μm.The linearity tests suggest that the linearity of the anode detector with big pintch and wide insulting gap is better when the thickness of ceramic substrate is 1.5 mm.In addition,as the light intensity is same and the thickness of ceramic substrate is 1.5 mm,the count rate of the anode detector with wide insulting gap is higher than that of the anode detector with narrow insulting gap.
For the direct collection readout mode,there is distortion of photon counting image. In order to correct the image distortion,three different image processing methods are adopted.The first correction method is the physical correction.The image is corrected by modulating the capacitive coupling constants between electrodes W-S,W-Z,and S-Z(W,S,and Z represent the electrodes of wedge,strip,and Z respectively).The second correction method is the global correction,and the distorted image is corrected through a uniform transformation matrix.The third correction method is the local correction method,and the distorted image is divided into many small areas,each area is corrected by a local matrix.The performance comparision results show that the local correction method can provide the best visual inspections and performance evaluation values among the three correction methods.At last,the induction charge footprint size is estimated by theoretical calculation and experimental image.Both the theoretical calculation and experimental image estimation show that the charge footprint size is significant affected by the thickness of Ge layer substrate,and it is not sensitive to the distance between the microchanne plate and Ge layer.
The designed extreme ultraviolet photon counting imaging detector based on direct collection readout can meet the requirement of the second project of Chinese Moon Program.It hasΦ48 mm effective area,less than 1 counts/s·cm~2 dark count rate, 16000 counts/s count rate and better than 75μm resolution under 1000 counts/s count rate.
本课题拟采用基于微通道板(MCP)的楔条形阳极(WSA)探测器,它具有信噪比高、背景噪声低、探测量子效率高、无漏电流影响和抗漂移、动态范围宽、大面阵、空间分辨和时间分辨较高以及耐辐射等优点。因此,该探测器更适合空间探测和天文观测。按照电荷接收和读出万式,阳极探测器可分为直接读出方式和感应读出方式,本文主要研究了直接读出方式和感应读出方式的WSA探测器。
WSA是阳极探测器的核心器件之一,因此WSA的自主设计和研制至关重要。利用实验室拥有的镀膜设备和本所的光刻设备,实现了WSA的自主设计和加工,从而大大缩短了阳极的制作成本和周期。
WSA探测器输出电荷有两种读出方式。对于直接读出方式的阳极探测器,研究了三块不同设计参数的WSA探测器的性能。通过测试三块不同阳极探测器的暗计数、分辨率、线性度和计数率等性能,发现极间电容最小的WSA探测器具有最好的空间分辨率,探测器在X方向的象元分辨率接近75μm,在Y方向的象元分辨率优于62.5μm。另外,探测器的线性度主要由MCP和WSA的距离决定,通过调节MCP和WSA的距离可以提高探测器的线性度。三块阳极探测器均在计数率小于10000 counts/s时具有较高的分辨率。
对于感应读出方式的WSA探测器,研究了不同条件下大周期窄沟道(N0.2)WSA探测器和大周期宽沟道(N0.3)WSA探测器的性能。对于NO.2-WSA探测器,分别研究了当MCP和Ge膜间距为10mm和1mm时,不同Ge膜基底、不同基底厚度,不同Ge膜电阻、不同Ge膜厚度对探测器的暗计数、分辨率、线性度和计数率的影响。测试结果表明,基底越厚,图像畸变越大,计数率越低;Ge膜的方块电阻越大,相同光强下的计数率越低,并且在较高的入射光子时,成像区域越小;Ge膜越厚,相同光强下的计数率也越低。
对于NO.3-WSA探测器,主要研究了当MCP和Ge膜间距为1 mm时,陶瓷厚度分别为1.5 mm和2 mm的基底上蒸镀Ge膜的阳极探测器性能,并且与NO.2-WSA探测器做了一些对比。暗计数测试结果表明,在陶瓷基底厚度相同时,两个阳极探测器的暗计数图像畸变相差不多,图像畸变均随基底厚度增加而增大。分辨率测试结果表明,在Φ42 mm范围内,2 mm陶瓷基底的NO.3-WSA探测器在X方向的分辨率接近100μm,在Y方向的分辨率优于100μm。线性度测试结果表明,陶瓷厚度为1.5 mm时,NO.3-WSA探测器具有较高的线性度。计数率测试结果表明,当陶瓷厚度为1.5 mm,且减光片相同时,NO.3-WSA探测器的计数率要高于NO.2-WSA探测器。
对于直接收集方式的WSA探测器,光子计数图像一般会存在畸变,为了校正图像畸变,分别采用了三种不同的方法来校正原始图像。第一种方法称为物理校正法,主要通过调节不同电极之间的电容耦合常数来减小图像畸变。第二种方法称为整体校正法,通过一个共同的变换矩阵对畸变图像进行整体校正。第三种方法称为局部校正法,通过不同的局域变换矩阵对图像局部进行校正,局部校正联合起来完成整个图像的校正。通过评价参数比较,发现局部校正算法的效果最好。此外,分别利用理论计算和实验两种方法来估算基于楔条形阳极的感应电荷云尺寸。理论估算和对实验图像的分析均表明,MCP和Ge膜的距离对电荷云的扩散影响较小,而Ge膜的基底厚度对电荷云的扩散有很大影响。
设计和研制的直接读出式极紫外光子计数成像探测器有效面积为Φ48 mm,暗计数率小于1 counts/s·cm~2,在16000 counts/s的计数率下具有较高的分辨率,在1 000 counts/s的计数率时探测器分辨率优于75μm,上述技术指标满足探月二期工程EUV相机的技术要求。
An Extreme Ultraviolet Camera is designed in the second and third project of Chinese Moon Program to study the distribution of plasma in Earth's plasmasphere by imaging the distribution of the He~+ ion through its emission at 30.4 nm.The Extreme ultraviolet imaging detector is the key part of the camera,and it is very importanc to study the extreme ultraviolet detector.
The wedge and strip anode detector based on microchannel plate is adopted in this paper.Anode detectors have many merits,such as low background noise,high signal and nose ratio,high detection quantum efficiency,photon-counting sensitivity,long range,large format,radiation tolerance,high space resolution and time resolution.As a result,the anode detector has been widely used in space detection and astronomy observation.According to the electron readout mode,anode detectors can be divided into two types,one is direct collection readout mode,and the other is induction readout mode.The wedge and strip anode detector with direct collection readout and induction readout are studied.
As the key device of anode detector,the(?)ndependent design and manufacture is absolutely critical.Utilizing the coating equipment and the lithography equipment,we design and process the wedge strip anode independently,and the cost and period are reduced significantly.
There are two types of readout mode for anode detector.For direct collection readout anode detector,the performance of three wedge and strip anode detectors with different parameter is studied.The dark count,resolution,linearity and count rate of the detector are measured and the results show that the wedge and strip anode detector with the smallest coupling constants between interelctrodes has the best resolution. The resolution along X direction is close to 75μm,and the resolution along Y direction is better than 62.5μm.In addition,the linearity of detector is determined by the distance between the microchannel plate and the wedge and strip anode,which can be improved by modulating the distance of microchannel plate and anode.The three anode detectors have higher resolution when the count rates are less than 10000 counts/s.
For induction readout anode detectors,the performance of the dectors with different pitch and different insulting gap are studied.For the anode detector with big pitch and narrow insulting gap(NO.2-WSA),when the distance of MCP and Ge layer is 10 mm and 1 mm,the performance of the detector under different Ge substrate,different thickness of Ge layer substrate,different sheet resistance of Ge layer and different thickness of Ge layer are tested.The results suggest that the thicker the Ge layer substrate is,the greater the image distortion is and the lower the count rate is;the higher the sheet resistance of Ge layer is,the lower the count rate is,and under high photon flux the less the image area is;under same light intensity,the thicker the Ge layer is,the lower the count rate is.
For the anode detector with big pintch and wide insulting gap(NO.3-WSA),when the distance between microcharmel plate and Ge layer is 1 mm,the performance of anode detector with 1.5 mm ceramic substrate and 2.0 mm ceramic substrate is tested respectively and compared with the anode detector with big pintch and narrow insulting gap.The results of dark count image show that the image distortions of the two detectors are comparative when the thickness of substrate is same and the image distortions are increased with the substrate thickness increasing.The resolution results which is tested inΦ42 mm show that the resolution of the anode detector with big pintch and wide insulting gap with 2 mm ceramic substrate along the X direction is nearly 100μm and that along Y direction is better than 100μm.The linearity tests suggest that the linearity of the anode detector with big pintch and wide insulting gap is better when the thickness of ceramic substrate is 1.5 mm.In addition,as the light intensity is same and the thickness of ceramic substrate is 1.5 mm,the count rate of the anode detector with wide insulting gap is higher than that of the anode detector with narrow insulting gap.
For the direct collection readout mode,there is distortion of photon counting image. In order to correct the image distortion,three different image processing methods are adopted.The first correction method is the physical correction.The image is corrected by modulating the capacitive coupling constants between electrodes W-S,W-Z,and S-Z(W,S,and Z represent the electrodes of wedge,strip,and Z respectively).The second correction method is the global correction,and the distorted image is corrected through a uniform transformation matrix.The third correction method is the local correction method,and the distorted image is divided into many small areas,each area is corrected by a local matrix.The performance comparision results show that the local correction method can provide the best visual inspections and performance evaluation values among the three correction methods.At last,the induction charge footprint size is estimated by theoretical calculation and experimental image.Both the theoretical calculation and experimental image estimation show that the charge footprint size is significant affected by the thickness of Ge layer substrate,and it is not sensitive to the distance between the microchanne plate and Ge layer.
The designed extreme ultraviolet photon counting imaging detector based on direct collection readout can meet the requirement of the second project of Chinese Moon Program.It hasΦ48 mm effective area,less than 1 counts/s·cm~2 dark count rate, 16000 counts/s count rate and better than 75μm resolution under 1000 counts/s count rate.
引文
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