大中型非球面计算机控制研抛工艺方法研究
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摘要
非球面光学零件具有校正像差、改善像质、扩大视场和增大作用距离的优点,同时还能够减轻系统重量、减小占用空间,因此在现代光学系统中具有广泛的应用。随着光学系统性能要求的不断增长,对非球面光学零件口径、相对口径、加工精度、轻量化程度、加工效率和生产成本等方面都提出了更高的要求。计算机控制光学表面成形(CCOS)技术具有加工精度高、工艺实现简单、投资低的显著特点,因此广泛应用于大中型非球面光学零件的加工过程中。目前,CCOS技术仍有一些问题需要解决,例如加工收敛效率较低、小尺度制造误差较大、存在边缘效应等。这些问题的存在严重影响了目前光学零件的加工精度和效率。本论文研究工作的主要任务就是要有效解决CCOS技术目前存在的关键问题,使CCOS技术得以完善,提高我国大中型非球面光学零件的加工能力。论文的研究工作包括以下几个部分:
1.介绍了根据非球面加工需要研制的加工设备——AOCMT光学加工机床,该机床集铣磨成型、研磨抛光、接触式检测于一体;设计了一种基于同步带传动的双旋转研磨抛光工具,通过调节自转与公转的转速、自转中心和公转中心的偏距、气缸工作压力等参数,能够得到需要的去除函数。
2.建立了双旋转研抛工具的去除函数模型,在此基础上对研磨抛光工艺参数进行了系统的实验研究,得出了其对材料去除效率、表面粗糙度和亚表面损伤深度等的影响规律,提出了各加工阶段工艺参数的选择方法。通过实验的方法确定了研磨阶段亚表面损伤深度的量值,对选择后续加工材料去除量提供了依据。利用优化的工艺参数将K9光学玻璃材料研磨阶段的亚表面损伤深度控制在2.2微米左右,大大缩短了后续抛光加工时间,提高了整体加工效率。
3.分析了双旋转研抛工具去除函数的修形能力,给出了偏心率(自转中心到公转中心的距离与研抛盘半径的比值)和转速比(自转速度与公转速度的比值)的优化结果(偏心率0.8、转速比-3);建立了去除函数尺寸、空间误差波长、额外去除量与误差收敛比的传递关系;基于CCOS卷积模型,对由卷积效应引起的残留误差随各参数的产生规律进行了仿真研究,在此基础上提出了面形误差收敛过程的优化控制方法。
4.分析了小尺度制造误差产生的四个原因;提出了以信息熵理论表述研抛效果的新方法,并提出了基于最大熵原理的研抛工艺参数优选方法;针对目前常用消除小尺度制造误差的方法——大尺寸研抛盘全口径均匀研抛修正法,给出了运动速度和研抛盘尺寸等主要工艺参数的选择依据;为了减少修正小尺度制造误差的时间,提高整体加工效率,提出了小尺度制造误差的确定区域修正法。
5.在上述工作基础上,提出了考虑大中型非球面的全口径、全波段面形误差控制和整体加工效率的CCOS研抛加工控制策略。以此为指导,利用AOCMT光学加工机床在233小时内成功加工出φ500mm f/3抛物面反射镜,加工后的面形精度达到9.4nm rms(λ/67 rms,λ=632.8nm),其中尺度在100mm～2mm(5～250个周期)范围内的制造误差含量为3.6nm rms,表面粗糙度约为1.5nm rms,顶点曲率半径偏差控制在1.2mm(0.4%0),其结果符合预期要求。
Aspheric optics are being used more and more widely in modern optical systems, due to their ability of correcting aberrations, enhancing the image quality, enlarging the field of view and extending the range of effect, while reducing the weight and volume of the system. With the ever-increasing demands on optical system performances, requirements for aspheric optical components are more and more critical, which involve aperture, relative aperture, accuracy, lightweight extent, manufacturing efficiency and cost. Computer controlled optical surfacing (CCOS) technique is used widely in machining process of the large and medium aspheric surfaces, because of its high accuracy, simple process conditions, low cost and other merits. However, there are some problems at present in CCOS technique, such as low convergence rate, small scale manufacturing errors and edge effect. These problems have influenced machining accuracy and efficiency of optical components seriously. This thesis is dedicated to solve the key problems in CCOS technique, in order to consummate CCOS technique and improve capability for manufacturing large and medium aspheric surfaces. The major research efforts include the following points.
1. Aspheric optical compound machining tool (AOCMT) is introduced, which has milling, grinding and polishing, and contact measuring functions. A dual rotors grinding and polishing tool is designed, based on the timing belt drive. The required material removal function can be obtained by adjusting rotational speeds of the dual rotors, eccentricity of the two rotating centers, working pressure of the cylinder and other parameters.
2. The material removal function model of the dual rotors grinding and polishing tool is built. Systematic experiments are done to study the grinding and polishing parameters. The influences of parameters on material removal rate, surface quality and subsurface damage (SSD) depth are gained. The methods for selecting process parameters in each fabrication stage are given. The SSD depth values in grinding stage are gained experimentally, which provides basis for determining the material removal quantity in the subsequent process. With optimized parameters, the SSD depth of K9 optical glass in grinding stage is controlled within about 2.2μm. Consequently the polishing time is considerably decreased and the machining efficiency is improved.
3. The figuring ability of the removal functions of the dual rotors grinding and polishing tool is analyzed. The optimized parameters are gained, with the eccentricity ratio being 0.8 and the rotate speed ratio -3. The transfer relation of removal function size, spatial error wavelength, and extra material removal quantity to error convergence ratio is analyzed. Based on CCOS convolution model, the generating rules of residual errors due to convolution effect are gained by computer simulations. The optimizing control method in the shape error convergence process is brought forward.
4. Four reasons for generation of small scale manufacturing errors are recognized. Based on maximum entropy principle, a new method for expressing the polishing effect and optimizing processing parameters is presented. The typical method for controlling small scale manufacturing errors is to polish the whole surface uniformly with a large tool. Aiming at this method, the principle for selecting main processing parameters including kinematic velocity and size of polishing tool is put forward. Moreover, in order to increase working efficiency, a new method for controlling small scale manufacturing errors is brought forward, which suggests correcting errors in definite areas.
5. Finally, a CCOS control strategy is proposed to control full aperture errors and full band of frequency errors of the large and medium aspheric surfaces and to increase working efficiency. As an application, a 500-mm diameter, f/3, parabolic mirror was successfully fabricated on AOCMT within 233 hours. The finished mirror has a shape accuracy of 9.4nm rms (λ/67 rms,λ=632.8nm), surface roughness of about 1.5nm, and curvature error of 1.2mm (0.4‰). The magnitude of the surface errors from 100mm to 2mm scale is 3.6nm rms. The results meet expected requirements.
1.介绍了根据非球面加工需要研制的加工设备——AOCMT光学加工机床,该机床集铣磨成型、研磨抛光、接触式检测于一体;设计了一种基于同步带传动的双旋转研磨抛光工具,通过调节自转与公转的转速、自转中心和公转中心的偏距、气缸工作压力等参数,能够得到需要的去除函数。
2.建立了双旋转研抛工具的去除函数模型,在此基础上对研磨抛光工艺参数进行了系统的实验研究,得出了其对材料去除效率、表面粗糙度和亚表面损伤深度等的影响规律,提出了各加工阶段工艺参数的选择方法。通过实验的方法确定了研磨阶段亚表面损伤深度的量值,对选择后续加工材料去除量提供了依据。利用优化的工艺参数将K9光学玻璃材料研磨阶段的亚表面损伤深度控制在2.2微米左右,大大缩短了后续抛光加工时间,提高了整体加工效率。
3.分析了双旋转研抛工具去除函数的修形能力,给出了偏心率(自转中心到公转中心的距离与研抛盘半径的比值)和转速比(自转速度与公转速度的比值)的优化结果(偏心率0.8、转速比-3);建立了去除函数尺寸、空间误差波长、额外去除量与误差收敛比的传递关系;基于CCOS卷积模型,对由卷积效应引起的残留误差随各参数的产生规律进行了仿真研究,在此基础上提出了面形误差收敛过程的优化控制方法。
4.分析了小尺度制造误差产生的四个原因;提出了以信息熵理论表述研抛效果的新方法,并提出了基于最大熵原理的研抛工艺参数优选方法;针对目前常用消除小尺度制造误差的方法——大尺寸研抛盘全口径均匀研抛修正法,给出了运动速度和研抛盘尺寸等主要工艺参数的选择依据;为了减少修正小尺度制造误差的时间,提高整体加工效率,提出了小尺度制造误差的确定区域修正法。
5.在上述工作基础上,提出了考虑大中型非球面的全口径、全波段面形误差控制和整体加工效率的CCOS研抛加工控制策略。以此为指导,利用AOCMT光学加工机床在233小时内成功加工出φ500mm f/3抛物面反射镜,加工后的面形精度达到9.4nm rms(λ/67 rms,λ=632.8nm),其中尺度在100mm～2mm(5～250个周期)范围内的制造误差含量为3.6nm rms,表面粗糙度约为1.5nm rms,顶点曲率半径偏差控制在1.2mm(0.4%0),其结果符合预期要求。
Aspheric optics are being used more and more widely in modern optical systems, due to their ability of correcting aberrations, enhancing the image quality, enlarging the field of view and extending the range of effect, while reducing the weight and volume of the system. With the ever-increasing demands on optical system performances, requirements for aspheric optical components are more and more critical, which involve aperture, relative aperture, accuracy, lightweight extent, manufacturing efficiency and cost. Computer controlled optical surfacing (CCOS) technique is used widely in machining process of the large and medium aspheric surfaces, because of its high accuracy, simple process conditions, low cost and other merits. However, there are some problems at present in CCOS technique, such as low convergence rate, small scale manufacturing errors and edge effect. These problems have influenced machining accuracy and efficiency of optical components seriously. This thesis is dedicated to solve the key problems in CCOS technique, in order to consummate CCOS technique and improve capability for manufacturing large and medium aspheric surfaces. The major research efforts include the following points.
1. Aspheric optical compound machining tool (AOCMT) is introduced, which has milling, grinding and polishing, and contact measuring functions. A dual rotors grinding and polishing tool is designed, based on the timing belt drive. The required material removal function can be obtained by adjusting rotational speeds of the dual rotors, eccentricity of the two rotating centers, working pressure of the cylinder and other parameters.
2. The material removal function model of the dual rotors grinding and polishing tool is built. Systematic experiments are done to study the grinding and polishing parameters. The influences of parameters on material removal rate, surface quality and subsurface damage (SSD) depth are gained. The methods for selecting process parameters in each fabrication stage are given. The SSD depth values in grinding stage are gained experimentally, which provides basis for determining the material removal quantity in the subsequent process. With optimized parameters, the SSD depth of K9 optical glass in grinding stage is controlled within about 2.2μm. Consequently the polishing time is considerably decreased and the machining efficiency is improved.
3. The figuring ability of the removal functions of the dual rotors grinding and polishing tool is analyzed. The optimized parameters are gained, with the eccentricity ratio being 0.8 and the rotate speed ratio -3. The transfer relation of removal function size, spatial error wavelength, and extra material removal quantity to error convergence ratio is analyzed. Based on CCOS convolution model, the generating rules of residual errors due to convolution effect are gained by computer simulations. The optimizing control method in the shape error convergence process is brought forward.
4. Four reasons for generation of small scale manufacturing errors are recognized. Based on maximum entropy principle, a new method for expressing the polishing effect and optimizing processing parameters is presented. The typical method for controlling small scale manufacturing errors is to polish the whole surface uniformly with a large tool. Aiming at this method, the principle for selecting main processing parameters including kinematic velocity and size of polishing tool is put forward. Moreover, in order to increase working efficiency, a new method for controlling small scale manufacturing errors is brought forward, which suggests correcting errors in definite areas.
5. Finally, a CCOS control strategy is proposed to control full aperture errors and full band of frequency errors of the large and medium aspheric surfaces and to increase working efficiency. As an application, a 500-mm diameter, f/3, parabolic mirror was successfully fabricated on AOCMT within 233 hours. The finished mirror has a shape accuracy of 9.4nm rms (λ/67 rms,λ=632.8nm), surface roughness of about 1.5nm, and curvature error of 1.2mm (0.4‰). The magnitude of the surface errors from 100mm to 2mm scale is 3.6nm rms. The results meet expected requirements.
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