数控微细铣削机床系统构建及性能研究
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摘要
微细切削加工技术在精密三维微小零件制造中的应用,引发了微细制造领域重大的技术变革。其区别于MEMS技术和超精密加工技术,是利用传统机加工方式并针对微米和中间尺度微小零件进行高效率、高精度微细制造的有效途径。超精密机床是实现微细切削加工技术的重要装备,目前国内在微细切削设备专用机床研发方面尚属初期,欠缺对从系统设计构建到性能评估的一系列深入研究,而国外虽已开发出实用系统,但多数仍处于试制阶段且对我国技术保密。本文针对微细铣削加工,对数控微细铣削机床系统设计过程中的关键技术进行深入的研究,并对影响加工精度的机床主要性能特点进行评估和验证,主要创新性成果如下:
1)设计并构建了一台专用于微细铣削加工的小型三轴数控微细铣削机床系统。机床的本体尺寸为300mm×400mm×500mm,机床的工作空间尺寸为50mm×50mm×20mm,全闭环数控系统分辨率为0.05μm,能实现亚微米级加工精度。关键部件采用高速空气静压电主轴、精密滑台、直线电机以及基于IPC的多轴运动控制卡,结合优化的插补控制策略及误差补偿机制,能实现包括微直槽、微同心圆槽、薄壁、微齿轮及微球体的数控微细铣削加工,加工试验结果显示,该铣床已经具有加工三维大深宽比meso尺度三维零件的能力。
2)对构建的微细铣削机床机械本体结构空间误差特性进行分析,运用多体系统运动学理论和齐次变换矩阵,根据微铣床误差特性,建立了微铣床空间综合误差模型。通过实际测量对微铣床空间误差参数进行辨识,并采用综合动态补偿方法进行误差补偿。
3)提出了利用机床空间误差模型并基于损失模型的微铣床结构参数优化方法,为实现机床结构参数最优化设计提供了数学依据,运用该法实现了在机床设计阶段实现空间误差的最小化。
4)对微细铣削系统直接驱动工作台微进给系统的伺服控制特性进行研究,建立了直线电机直接驱动伺服系统数学模型,并以此为基础分析了微细铣削系统单轴伺服控制特性,提出以PI控制算法为基础,结合速度、加速度前馈和陷波滤波器相结合的的控制策略,达到满意的控制性能。进一步分析多轴联动轮廓误差成因,提出采用交叉耦合轮廓控制方法提高直线电机驱动微进给工作台轮廓精度的控制策略,为微细铣削加工奠定了控制方面的基础。
5)对微细铣削机床系统的切削加工性能进行研究,提出基于最小切削厚度理论的微细铣削加工机理分析过程。通过微细铣削表面粗糙度实验分析验证该机理分析过程的正确性,并考察了重要切削工艺参数对微细铣削零件表面粗糙度的影响规律,为后续生产奠定了工艺方面的基础。进一步通过一系列微小零件的铣削加工实验验证该微细铣削机床系统的切削加工性能。
The applications of micro-cutting processing technology to the machining of 3D precision micro components evoked the great technological revolution in the field of micro-manufacturing. Differed from the MEMS and ultraprecision machining processing, it is a novel effective way using traditional machining method to manufacture micro- and meso-scale components with efficiently and high precisely. The ultraprecision machine tool is fundamental equipment to fufill micro-cutting technology. At present, it is at the initial stage of the domestic study on the special micro-cutting equipments. It is deficient in comprehensive research from system project to performance evaluation on the development of micro-cutting machine tools. Furthmore, although many practical systems have been developed abroad, most of them are trial and keep technical secret to our country. In this dissertation, the key technologies for constructing a miniature CNC micro-milling machine tool are studied deeply and its main technical performance effectting the machining precision of the parts are evaluated systemically. The main creative achievements are as follows:
1) A 3-axis linked miniature CNC milling machine tool system was successfully constructed for manufacturing of micro procucts. The machine has a base size of 300 mm×400 mm×500 mm and the size of XYZ workspace is 50mm×50mm×20mm. With a full closed loop numerical control system of 0.05μm resolution installed in feed axis, it bears the capability of submicro scale machining. The machine tool is equipped with available high speed air spindle, precision stages uphold by cross roller-bearings with each axis, PMLM(Permanent Magnet Linear Motor)and IPC-based multi-axis motion controller. Under the techniques of optimized path interpolation and error compensation, it performed the micro machining of components including the micro straight slots, micro concentric circle slots, thin walls, micro grars and micro sphere shapes. Test results indicate that the milling machine tool implements the capability of machining meso-scale 3D components of high-aspect-ratio.
2) Combining the multi-body system theory and homogeneous transformation matrices, the analysis of volumetric errors was made on the built machine tool mechanical body. The synthetic volumetric error model of the machine tool was presented. Then the volumetric error parameters of machine tool were obtained by means of measurement and were compensated using synthesis dynamic compensation methodology.
3) A method of robust parameter analysis based on loss model to the machine tool optimization of structural design was proposed. It provides a mathematical base of the machine tool structural optimization design. And using it, the minimization of the machine tool design errors was obtained.
4) The direct drived characteristic of micro-feeding platform was studied. And the single axis servo control performance of the machine tool was analyzed based on the established mathematical model of linear actuator. A satisfying control strategy was proposed based on PI position controlling algorithm combining the speed and accelerated speed feedback controller and notch filter. Furthmore, based on analyzing the multi-axis contour error of machine tool, a cross-coupled controller which fits for the linear motor drived micro feeding platform was presented in the dissertation.
5) The micro milling performance of the machine tool system was studied according to the analyzing of the micro milling mechanism based on the minimum cutting thickness theory. A series of experiments have been conducted in order to verify the proposed theory and characterize the key factors affecting surface roughness. Moveover, a lot of milling tests of micro parts on the machine tool proved its capability.
1)设计并构建了一台专用于微细铣削加工的小型三轴数控微细铣削机床系统。机床的本体尺寸为300mm×400mm×500mm,机床的工作空间尺寸为50mm×50mm×20mm,全闭环数控系统分辨率为0.05μm,能实现亚微米级加工精度。关键部件采用高速空气静压电主轴、精密滑台、直线电机以及基于IPC的多轴运动控制卡,结合优化的插补控制策略及误差补偿机制,能实现包括微直槽、微同心圆槽、薄壁、微齿轮及微球体的数控微细铣削加工,加工试验结果显示,该铣床已经具有加工三维大深宽比meso尺度三维零件的能力。
2)对构建的微细铣削机床机械本体结构空间误差特性进行分析,运用多体系统运动学理论和齐次变换矩阵,根据微铣床误差特性,建立了微铣床空间综合误差模型。通过实际测量对微铣床空间误差参数进行辨识,并采用综合动态补偿方法进行误差补偿。
3)提出了利用机床空间误差模型并基于损失模型的微铣床结构参数优化方法,为实现机床结构参数最优化设计提供了数学依据,运用该法实现了在机床设计阶段实现空间误差的最小化。
4)对微细铣削系统直接驱动工作台微进给系统的伺服控制特性进行研究,建立了直线电机直接驱动伺服系统数学模型,并以此为基础分析了微细铣削系统单轴伺服控制特性,提出以PI控制算法为基础,结合速度、加速度前馈和陷波滤波器相结合的的控制策略,达到满意的控制性能。进一步分析多轴联动轮廓误差成因,提出采用交叉耦合轮廓控制方法提高直线电机驱动微进给工作台轮廓精度的控制策略,为微细铣削加工奠定了控制方面的基础。
5)对微细铣削机床系统的切削加工性能进行研究,提出基于最小切削厚度理论的微细铣削加工机理分析过程。通过微细铣削表面粗糙度实验分析验证该机理分析过程的正确性,并考察了重要切削工艺参数对微细铣削零件表面粗糙度的影响规律,为后续生产奠定了工艺方面的基础。进一步通过一系列微小零件的铣削加工实验验证该微细铣削机床系统的切削加工性能。
The applications of micro-cutting processing technology to the machining of 3D precision micro components evoked the great technological revolution in the field of micro-manufacturing. Differed from the MEMS and ultraprecision machining processing, it is a novel effective way using traditional machining method to manufacture micro- and meso-scale components with efficiently and high precisely. The ultraprecision machine tool is fundamental equipment to fufill micro-cutting technology. At present, it is at the initial stage of the domestic study on the special micro-cutting equipments. It is deficient in comprehensive research from system project to performance evaluation on the development of micro-cutting machine tools. Furthmore, although many practical systems have been developed abroad, most of them are trial and keep technical secret to our country. In this dissertation, the key technologies for constructing a miniature CNC micro-milling machine tool are studied deeply and its main technical performance effectting the machining precision of the parts are evaluated systemically. The main creative achievements are as follows:
1) A 3-axis linked miniature CNC milling machine tool system was successfully constructed for manufacturing of micro procucts. The machine has a base size of 300 mm×400 mm×500 mm and the size of XYZ workspace is 50mm×50mm×20mm. With a full closed loop numerical control system of 0.05μm resolution installed in feed axis, it bears the capability of submicro scale machining. The machine tool is equipped with available high speed air spindle, precision stages uphold by cross roller-bearings with each axis, PMLM(Permanent Magnet Linear Motor)and IPC-based multi-axis motion controller. Under the techniques of optimized path interpolation and error compensation, it performed the micro machining of components including the micro straight slots, micro concentric circle slots, thin walls, micro grars and micro sphere shapes. Test results indicate that the milling machine tool implements the capability of machining meso-scale 3D components of high-aspect-ratio.
2) Combining the multi-body system theory and homogeneous transformation matrices, the analysis of volumetric errors was made on the built machine tool mechanical body. The synthetic volumetric error model of the machine tool was presented. Then the volumetric error parameters of machine tool were obtained by means of measurement and were compensated using synthesis dynamic compensation methodology.
3) A method of robust parameter analysis based on loss model to the machine tool optimization of structural design was proposed. It provides a mathematical base of the machine tool structural optimization design. And using it, the minimization of the machine tool design errors was obtained.
4) The direct drived characteristic of micro-feeding platform was studied. And the single axis servo control performance of the machine tool was analyzed based on the established mathematical model of linear actuator. A satisfying control strategy was proposed based on PI position controlling algorithm combining the speed and accelerated speed feedback controller and notch filter. Furthmore, based on analyzing the multi-axis contour error of machine tool, a cross-coupled controller which fits for the linear motor drived micro feeding platform was presented in the dissertation.
5) The micro milling performance of the machine tool system was studied according to the analyzing of the micro milling mechanism based on the minimum cutting thickness theory. A series of experiments have been conducted in order to verify the proposed theory and characterize the key factors affecting surface roughness. Moveover, a lot of milling tests of micro parts on the machine tool proved its capability.
引文
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