射频SiH_4/C_2H_4/Ar放电产生尘埃等离子体及其诊断研究
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摘要
本文在射频容性耦合等离子体放电基础上,采用实验观测,探针和光谱诊断等研究方法,对尘埃等离子体进行了多方面的研究。本文工作主要包括以下一些内容:
第一章介绍了尘埃等离子体的定义和基本特性,列举了尘埃等离子体研究中的一些特殊现象,介绍了尘埃等离子体的常用实验诊断方法。在最后,给出了本文研究的背景和意义,以及研究内容介绍。
第二章内容主要包括实验装置建立和诊断手段详细介绍。在实验中搭建了一个产生微纳米尘埃颗粒的射频尘埃等离子体装置及实验诊断系统。与其它尘埃等离子体装置相比,本实验装置建立在等离子体中化学气体硅烷和乙烯合成尘埃颗粒的基础上,尘埃颗粒产生过程跟实际生产过程比较接近;观察窗和周围圆筒采用透明石英玻璃设计,有利于从放电室上方和侧面对尘埃颗粒进行拍照研究;利用朗谬尔探针和发射光谱仪对尘埃等离子体基本参数和放电产物进行实验诊断,有助于获得尘埃等离子体放电参数以及了解尘埃等离子体特性。
第三章内容包括尘埃颗粒成分、结构的检测和尘埃空洞演化特性的研究两方面内容。一.利用扫描电子显微镜、能量散射谱和X射线衍射谱对所生成的尘埃颗粒的表面形貌、成分、结构进行了检测,发现尘埃颗粒呈聚集状态,单个尘埃颗粒直径在几百纳米,主要组成为碳、硅和氧元素。尘埃颗粒生成物中有C—Si键的形成,并带有氧原子等的掺杂。二.采用CCD相机从放电室上方和侧面拍照研究的方法,对尘埃空洞随射频功率和气压演化特性进行了研究。发现在本实验条件下,约束环(孔)所产生的电场力和离子拖拽力之间的平衡是尘埃空洞形成关键因素,射频功率和气压影响尘埃空洞几何尺寸的演化。
第四章中,对尘埃等离子体进行了诊断。利用朗谬尔探针和发射光谱仪,重点对尘埃等离子体参数以及放电产物进行了系统的诊断。主要内容包括:一.采用朗谬尔探针,对尘埃等离子体中电子密度、电子温度等主要参数进行了测量,并在测量基础上,结合尘埃等离子体鞘层模型和轨道限制理论,求解了尘埃颗粒平均带电量和尘埃颗粒密度等参数。发现了尘埃等离子体中的一些物理现象,例如尘埃颗粒的出现导致等离子体中电子密度降低和电子温度升高等现象。二.采用发射光谱仪,对尘埃等离子体中的放电产物进行了诊断,给出了一些放电产物的光发射强度随实验条件(射频功率、气压、流量)的变化情况。利用斜率法计算了氩的激发温度,给出了激发温度随实验条件的变化规律,讨论了激发温度与电子温度的区别和联系。
第五章采用尘埃等离子体鞘层模型,对尘埃颗粒与鞘层相互作用进行了数值模拟研究,得到了等离子体鞘层势、离子密度和电子密度的分布,尘埃颗粒存在情况下的玻姆判据,尘埃颗粒的带电量和密度之间的关系等。
This paper is mainly about the dust void observation and measurement,Langmuir probe and optical emission spectroscopy diagnostics in dusty plasma,which was created in a radio-frequency capacitively coupled discharge chamber.I summarize my research work as follows:
In chapter one,the introduction to the dusty plasma is presented.
In chapter two,I illustrate the experimental set-up which I used in the research project. Confined in the chamber in various ways,dust particles were formed in the radio-frequency capacitively coupled discharge of reactive mixtures(SiH_4/C_2H_4/Ar) in a cylindrical chamber. The experimental setup should be suitable for simulating the microelectronic manufacturing processes,and for giving basic parameters for improving the quality of discharge.
In chapter three,I report how the EDS,XRD,and SEM spectroscopies were used to analyze the dust particles.CCD photos were taken from the top and the side of the discharge chamber.Dust cloud and void in the sheath of radio-frequency discharge was observed. Evaluation of the dust void diameter and depth versus experimental conditions are carried out; and their characteristics versus RF power and gas pressure are further investigated experimentally.
In chapter four,measurement of dusty plasma parameters were conducted in the discharges of mixtures(SiH_4/C_2H_4/Ar).Langmuir probe was employed for diagnostics and measurement of important plasma parameters,such as electron density and electron temperature.The results show that the electron density dropped while the electron temperature rise when the dust particles were formed.The curves of the electron density and temperature versus the RF power and pressure are presented and analyzed.Then,a novel method,based on the experimental data of the electron density,corrected ion density and a known theoretical model,is developed in this research project for measuring the density and the charges of dust particles.The curves of densities and charges of dust particles versus RF power and gas pressure are presented under various experimental conditions,respectively. The influence of dust density on the charges of dust particles has also been investigated. Furthermore,optical emission spectroscopy analysis of dusty plasma was reported in this chapter.I add the optical emission spectroscopy into the diagnostic system.Based on the calculation of excitation temperature by using Boltzmann distribution to fit experimental data, I present the curves of excitation temperature versus gas pressure and RF power in SiH_4/C_2H_4 /Ar discharges on different discharge conditions.I also measure the emission intensities of spectral lines as functions of pressure,RF power,and flow rates of SiH_4/C_2H_4.
In chapter five,a one dimension steady dusty plasma sheath model is introduced. Through the solution of this model,I could gain more information of the dusty plasma:the densities distributions of electrons,positive ions and dust particles in the sheath,the Bohm velocity in the sheath boundary as a function of dust density,the relationship between the dust scharge and density.The results showed that,with the increase of dust density and temperature,all the parameters—plasma sheath,electron density,particles charges and the dust density near the sheath boundary and in the sheath—changed,following a certain pattern.
第一章介绍了尘埃等离子体的定义和基本特性,列举了尘埃等离子体研究中的一些特殊现象,介绍了尘埃等离子体的常用实验诊断方法。在最后,给出了本文研究的背景和意义,以及研究内容介绍。
第二章内容主要包括实验装置建立和诊断手段详细介绍。在实验中搭建了一个产生微纳米尘埃颗粒的射频尘埃等离子体装置及实验诊断系统。与其它尘埃等离子体装置相比,本实验装置建立在等离子体中化学气体硅烷和乙烯合成尘埃颗粒的基础上,尘埃颗粒产生过程跟实际生产过程比较接近;观察窗和周围圆筒采用透明石英玻璃设计,有利于从放电室上方和侧面对尘埃颗粒进行拍照研究;利用朗谬尔探针和发射光谱仪对尘埃等离子体基本参数和放电产物进行实验诊断,有助于获得尘埃等离子体放电参数以及了解尘埃等离子体特性。
第三章内容包括尘埃颗粒成分、结构的检测和尘埃空洞演化特性的研究两方面内容。一.利用扫描电子显微镜、能量散射谱和X射线衍射谱对所生成的尘埃颗粒的表面形貌、成分、结构进行了检测,发现尘埃颗粒呈聚集状态,单个尘埃颗粒直径在几百纳米,主要组成为碳、硅和氧元素。尘埃颗粒生成物中有C—Si键的形成,并带有氧原子等的掺杂。二.采用CCD相机从放电室上方和侧面拍照研究的方法,对尘埃空洞随射频功率和气压演化特性进行了研究。发现在本实验条件下,约束环(孔)所产生的电场力和离子拖拽力之间的平衡是尘埃空洞形成关键因素,射频功率和气压影响尘埃空洞几何尺寸的演化。
第四章中,对尘埃等离子体进行了诊断。利用朗谬尔探针和发射光谱仪,重点对尘埃等离子体参数以及放电产物进行了系统的诊断。主要内容包括:一.采用朗谬尔探针,对尘埃等离子体中电子密度、电子温度等主要参数进行了测量,并在测量基础上,结合尘埃等离子体鞘层模型和轨道限制理论,求解了尘埃颗粒平均带电量和尘埃颗粒密度等参数。发现了尘埃等离子体中的一些物理现象,例如尘埃颗粒的出现导致等离子体中电子密度降低和电子温度升高等现象。二.采用发射光谱仪,对尘埃等离子体中的放电产物进行了诊断,给出了一些放电产物的光发射强度随实验条件(射频功率、气压、流量)的变化情况。利用斜率法计算了氩的激发温度,给出了激发温度随实验条件的变化规律,讨论了激发温度与电子温度的区别和联系。
第五章采用尘埃等离子体鞘层模型,对尘埃颗粒与鞘层相互作用进行了数值模拟研究,得到了等离子体鞘层势、离子密度和电子密度的分布,尘埃颗粒存在情况下的玻姆判据,尘埃颗粒的带电量和密度之间的关系等。
This paper is mainly about the dust void observation and measurement,Langmuir probe and optical emission spectroscopy diagnostics in dusty plasma,which was created in a radio-frequency capacitively coupled discharge chamber.I summarize my research work as follows:
In chapter one,the introduction to the dusty plasma is presented.
In chapter two,I illustrate the experimental set-up which I used in the research project. Confined in the chamber in various ways,dust particles were formed in the radio-frequency capacitively coupled discharge of reactive mixtures(SiH_4/C_2H_4/Ar) in a cylindrical chamber. The experimental setup should be suitable for simulating the microelectronic manufacturing processes,and for giving basic parameters for improving the quality of discharge.
In chapter three,I report how the EDS,XRD,and SEM spectroscopies were used to analyze the dust particles.CCD photos were taken from the top and the side of the discharge chamber.Dust cloud and void in the sheath of radio-frequency discharge was observed. Evaluation of the dust void diameter and depth versus experimental conditions are carried out; and their characteristics versus RF power and gas pressure are further investigated experimentally.
In chapter four,measurement of dusty plasma parameters were conducted in the discharges of mixtures(SiH_4/C_2H_4/Ar).Langmuir probe was employed for diagnostics and measurement of important plasma parameters,such as electron density and electron temperature.The results show that the electron density dropped while the electron temperature rise when the dust particles were formed.The curves of the electron density and temperature versus the RF power and pressure are presented and analyzed.Then,a novel method,based on the experimental data of the electron density,corrected ion density and a known theoretical model,is developed in this research project for measuring the density and the charges of dust particles.The curves of densities and charges of dust particles versus RF power and gas pressure are presented under various experimental conditions,respectively. The influence of dust density on the charges of dust particles has also been investigated. Furthermore,optical emission spectroscopy analysis of dusty plasma was reported in this chapter.I add the optical emission spectroscopy into the diagnostic system.Based on the calculation of excitation temperature by using Boltzmann distribution to fit experimental data, I present the curves of excitation temperature versus gas pressure and RF power in SiH_4/C_2H_4 /Ar discharges on different discharge conditions.I also measure the emission intensities of spectral lines as functions of pressure,RF power,and flow rates of SiH_4/C_2H_4.
In chapter five,a one dimension steady dusty plasma sheath model is introduced. Through the solution of this model,I could gain more information of the dusty plasma:the densities distributions of electrons,positive ions and dust particles in the sheath,the Bohm velocity in the sheath boundary as a function of dust density,the relationship between the dust scharge and density.The results showed that,with the increase of dust density and temperature,all the parameters—plasma sheath,electron density,particles charges and the dust density near the sheath boundary and in the sheath—changed,following a certain pattern.
引文
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