超精密加工高反射曲面光学非接触三维形貌测量
|
摘要
高反射曲面零件的超精密加工技术已成为国防和现代高科技领域的前沿研究方向，准确测量和评价超精密加工高反射曲面零件的三维形貌，研究表面几何特性与使用性能的关系，对提高加工表面的质量和产品性能具有重要的意义。现有的接触式测量方法具有测量速度慢、易划伤测量表面的缺点，而单一的光学非接触测量方法难以完成对大面形或曲率较大的高反射曲面零件三维形貌的高精度测量。本文创新性地提出了将光栅相位偏折测量技术和白光扫描干涉测量技术相结合的异类光学传感器融合测量方法，实现了超精密加工高反射曲面三维形貌的高精度非接触测量。论文的主要研究工作包括：
1.提出融合光栅相位偏折测量方法和白光扫描干涉测量技术的超精密加工高反射曲面光学非接触三维形貌测量方法，并完成了测量系统的设计。采用光栅相位偏折测量方法可完成尺寸为150mm×150mm×20mm超精密加工高反射曲面整体三维形貌的测量，测量精度可达到50μm~100μm，在此基础上合理规划测量路径，使用系统中的干涉测量镜头进行超精密加工高反射曲面局部区域的高精度扫描测量，搭建的白光扫描干涉测量子系统的测量范围为847μm×710μm×100μm，系统的横向分辨率为1.047μm，垂直分辨率为0.126nm。
2.光栅相位偏折测量方法中，在深入研究光栅编码方案和相位提取算法的基础上，提出了复合光栅编码、摄动相位展开的快速相位提取算法，通过显示一幅含有摄动信息的复合光栅编码图案，由图像采集设备接收工件表面反射的变形复合光栅像，根据摄动信息可计算得到工件表面各点对应的展开相位信息，相位提取的可靠性和速度均得到了明显提高。
3.采用基于运动靶标的标定方法，完成了对摄像机内参数的高精度标定；采用Millitron型测长干涉仪完成了白光扫描干涉测量子系统中压电移位器非线性误差的高精度标定；利用标准棋盘格平板和标准量块组合提出超精密加工高反射曲面光学非接触三维形貌测量系统的整体标定方案。
4.在光栅相位偏折测量方法中，提出虚拟参考面的方法，在系统标定阶段，通过由LCD液晶屏幕显示一幅特殊编码图案，由CCD摄像机接收经标定用平面镜反射的特殊编码图像，在完成LCD液晶屏位置标定的同时，可直接得到计算相位偏折信息所需的两垂直方向的参考相位分布，避免了对理想参考面的测量需求，在保证测量精度的同时，提高了测量效率，降低了测量的复杂性。
5.提出光栅相位偏折高反射曲面三维形貌测量模型，基于迭代策略，建立相位偏折信息与被测工件表面梯度和高度的对应关系，由梯度重建工件三维形貌。在梯度重建高度过程中，提出结合区域波前重构和路径积分的三维重建算法，由路径积分法获得被测工件的初始形貌，由区域波前重构法进行面形优化。提出基于编码光栅条纹相移特性的轮廓提取方法，整个重建过程仅在提取后的区域内进行。
6.基于光栅相位偏折测量子系统的测量数据，提出路径规划方案，以引导白光扫描干涉测量子系统对被测工件局部区域进行高精度扫描测量；在深入研究白光扫描干涉测量原理的基础上，对目前广泛使用的多种白光干涉信号峰值提取算法进行了理论推导和算法实现，分析了系统误差和噪声对测量精度的影响，完成对高度变化为0.05μm，10uμm和40μm的模拟台阶面形的三维重建。
7.由光栅相位偏折子系统对组合台阶、超精密加工平面镜及光学双曲面的表面形貌进行了三维重建，测量精度在50μm左右，该测量精度处于白光扫描干涉测量子系统的测量范围内，为后续白光干涉镜头对被测工件局部区域进行高精度扫描测量打下了基础。
Ultra-precision machining technology of specular surfaces has become one of theleading research fields in defense and high technology. Precisely measuring andevaluating the profile of the specular surfaces, studying the relationship between thesurface geometry characteristics and the usability have important significance inincreasing the quality of the surface processing and product performance. For3Dshape measurement of the ultra-precision specular surfaces, the contact measuringmethods have the disadvantages of low measurement speed and damage for thesurface while it is hard to finish high precision measurement by just one of the opticalnon-contact methods when the parts are large or have high curvature. To solve theseproblems, this paper proposed a novel method which combines the phasedeflectormetry technology and the white light scanning interferometry technology.The main work is as follows:
1. A novel method that fuses the phase deflectormetry technology and the whitelight scanning interferometry technology for the measurement of ultra-precisionspecular surfaces was proposed. The whole profile of the measured parts could beobtained by the application of the phase deflectormetry technology with measurementaccuracy50μm~100μm. Then path planning was performed to guide the white-lightinterferometry detector finishing the high precision scanning measurement of the localregion of the measured parts. The measurement range of the white-lightinterferometry system is847μm×710μm×100μm while the lateral and verticalresolution are1.047μm and0.126nm respectively.
2. Based on thorough research on the fringe coded scheme and the phaseextraction algorithm, a fast phase retrival algorithm by combining the compositefringe pattern and perturbation phase unwrapping method was proposed. Byprojecting only one composite fringe pattern onto the surface of the measured parts,the unwrapping phase distribution could be retrivaled by the perturbation informationmodulated in the composite fringe pattern. The dependability and speed of the newalgorithm were much better than those of the traditional methods.
3. High precision calibration of the camera intrinsic parameters was finished byuse of the movement target calibration method. The non-linear error calibration of the piezoelectric ceramic was completed by the Millitron precision gauge. The standardcheckerboard flat and gauge blocks were used to put forward the whole calibrationscheme for the measurement system of the ultra-precision specular surfaces.
4. A novel method of virtual reference surface was proposed. A special codedpattern was displayed on the LCD screen at the stage of system calibration and thevirtual image plane appeared on the other side of the mirror was defined as the virtualreference surface. The reference phase distribution can be calculated directly throughthe corresponding relationship between the points on the virtual reference surface andthe phase distribution on the encoded fringe patterns. Thus the procedures of fringeprojection and phase unwrapping on the real reference surface can be avoided beforethe measurement of the specular parts. With this method the three dimensional shapeof the specular surfaces could be obtained fast and precisely. The detection efficiencyhas been improved and the measurement complexity can be reduced.
5. The3D shape measurement model of specular surfaces based on phasedeflectormetry method was proposed. The corresponding relationship between thephase deflectormetry information and the slope and height of the measured parts wasestablished based on iterative strategy. The3D profile of the measured parts could berecovered by the slope information. A3D shape reconstruction method combined thepath-integration and the zonal wave-front reconstruction algorithm was presented.The initial profile of the measured parts was reconstructed by the path-integrationmethod, and then the zonal wave-front reconstruction algorithm was performed tooptimize the profile. Contour extraction method based on phase shift characteristics ofthe encoded grating stripe was proposed, the whole process of reconstruction is onlyconducted in the extraction area.
6. The path planning scheme was presented to guide the high precison scanningmeasurement of the local area of the measured parts by use of the white lightmicroscopic interference lens. The theoretical derivation and algorithmimplementation for the peak extraction of the white light interferometry patterns werecarried out. The system errors and noise influenced the measurement accuracy wereanalysized. The3D shape reconstruction of a step with the height variation0.5μm,10μm,40μm was completed.
7. The3D shape measurement of steps, an ultra precision manufactured flatmirror and an optical hypoid surface were measured based on phase deflectormetrysub-system. The measurement accuracy can reach approximately50μm which is in the measurement range of the white light scanning interferometry system. Themeasurement results of the phase deflectormetry sub-system lay a foundation for thehigh accuracy scanning measurement of the local area of the parts by use of the whitelight interferometry lens.
1.提出融合光栅相位偏折测量方法和白光扫描干涉测量技术的超精密加工高反射曲面光学非接触三维形貌测量方法，并完成了测量系统的设计。采用光栅相位偏折测量方法可完成尺寸为150mm×150mm×20mm超精密加工高反射曲面整体三维形貌的测量，测量精度可达到50μm~100μm，在此基础上合理规划测量路径，使用系统中的干涉测量镜头进行超精密加工高反射曲面局部区域的高精度扫描测量，搭建的白光扫描干涉测量子系统的测量范围为847μm×710μm×100μm，系统的横向分辨率为1.047μm，垂直分辨率为0.126nm。
2.光栅相位偏折测量方法中，在深入研究光栅编码方案和相位提取算法的基础上，提出了复合光栅编码、摄动相位展开的快速相位提取算法，通过显示一幅含有摄动信息的复合光栅编码图案，由图像采集设备接收工件表面反射的变形复合光栅像，根据摄动信息可计算得到工件表面各点对应的展开相位信息，相位提取的可靠性和速度均得到了明显提高。
3.采用基于运动靶标的标定方法，完成了对摄像机内参数的高精度标定；采用Millitron型测长干涉仪完成了白光扫描干涉测量子系统中压电移位器非线性误差的高精度标定；利用标准棋盘格平板和标准量块组合提出超精密加工高反射曲面光学非接触三维形貌测量系统的整体标定方案。
4.在光栅相位偏折测量方法中，提出虚拟参考面的方法，在系统标定阶段，通过由LCD液晶屏幕显示一幅特殊编码图案，由CCD摄像机接收经标定用平面镜反射的特殊编码图像，在完成LCD液晶屏位置标定的同时，可直接得到计算相位偏折信息所需的两垂直方向的参考相位分布，避免了对理想参考面的测量需求，在保证测量精度的同时，提高了测量效率，降低了测量的复杂性。
5.提出光栅相位偏折高反射曲面三维形貌测量模型，基于迭代策略，建立相位偏折信息与被测工件表面梯度和高度的对应关系，由梯度重建工件三维形貌。在梯度重建高度过程中，提出结合区域波前重构和路径积分的三维重建算法，由路径积分法获得被测工件的初始形貌，由区域波前重构法进行面形优化。提出基于编码光栅条纹相移特性的轮廓提取方法，整个重建过程仅在提取后的区域内进行。
6.基于光栅相位偏折测量子系统的测量数据，提出路径规划方案，以引导白光扫描干涉测量子系统对被测工件局部区域进行高精度扫描测量；在深入研究白光扫描干涉测量原理的基础上，对目前广泛使用的多种白光干涉信号峰值提取算法进行了理论推导和算法实现，分析了系统误差和噪声对测量精度的影响，完成对高度变化为0.05μm，10uμm和40μm的模拟台阶面形的三维重建。
7.由光栅相位偏折子系统对组合台阶、超精密加工平面镜及光学双曲面的表面形貌进行了三维重建，测量精度在50μm左右，该测量精度处于白光扫描干涉测量子系统的测量范围内，为后续白光干涉镜头对被测工件局部区域进行高精度扫描测量打下了基础。
Ultra-precision machining technology of specular surfaces has become one of theleading research fields in defense and high technology. Precisely measuring andevaluating the profile of the specular surfaces, studying the relationship between thesurface geometry characteristics and the usability have important significance inincreasing the quality of the surface processing and product performance. For3Dshape measurement of the ultra-precision specular surfaces, the contact measuringmethods have the disadvantages of low measurement speed and damage for thesurface while it is hard to finish high precision measurement by just one of the opticalnon-contact methods when the parts are large or have high curvature. To solve theseproblems, this paper proposed a novel method which combines the phasedeflectormetry technology and the white light scanning interferometry technology.The main work is as follows:
1. A novel method that fuses the phase deflectormetry technology and the whitelight scanning interferometry technology for the measurement of ultra-precisionspecular surfaces was proposed. The whole profile of the measured parts could beobtained by the application of the phase deflectormetry technology with measurementaccuracy50μm~100μm. Then path planning was performed to guide the white-lightinterferometry detector finishing the high precision scanning measurement of the localregion of the measured parts. The measurement range of the white-lightinterferometry system is847μm×710μm×100μm while the lateral and verticalresolution are1.047μm and0.126nm respectively.
2. Based on thorough research on the fringe coded scheme and the phaseextraction algorithm, a fast phase retrival algorithm by combining the compositefringe pattern and perturbation phase unwrapping method was proposed. Byprojecting only one composite fringe pattern onto the surface of the measured parts,the unwrapping phase distribution could be retrivaled by the perturbation informationmodulated in the composite fringe pattern. The dependability and speed of the newalgorithm were much better than those of the traditional methods.
3. High precision calibration of the camera intrinsic parameters was finished byuse of the movement target calibration method. The non-linear error calibration of the piezoelectric ceramic was completed by the Millitron precision gauge. The standardcheckerboard flat and gauge blocks were used to put forward the whole calibrationscheme for the measurement system of the ultra-precision specular surfaces.
4. A novel method of virtual reference surface was proposed. A special codedpattern was displayed on the LCD screen at the stage of system calibration and thevirtual image plane appeared on the other side of the mirror was defined as the virtualreference surface. The reference phase distribution can be calculated directly throughthe corresponding relationship between the points on the virtual reference surface andthe phase distribution on the encoded fringe patterns. Thus the procedures of fringeprojection and phase unwrapping on the real reference surface can be avoided beforethe measurement of the specular parts. With this method the three dimensional shapeof the specular surfaces could be obtained fast and precisely. The detection efficiencyhas been improved and the measurement complexity can be reduced.
5. The3D shape measurement model of specular surfaces based on phasedeflectormetry method was proposed. The corresponding relationship between thephase deflectormetry information and the slope and height of the measured parts wasestablished based on iterative strategy. The3D profile of the measured parts could berecovered by the slope information. A3D shape reconstruction method combined thepath-integration and the zonal wave-front reconstruction algorithm was presented.The initial profile of the measured parts was reconstructed by the path-integrationmethod, and then the zonal wave-front reconstruction algorithm was performed tooptimize the profile. Contour extraction method based on phase shift characteristics ofthe encoded grating stripe was proposed, the whole process of reconstruction is onlyconducted in the extraction area.
6. The path planning scheme was presented to guide the high precison scanningmeasurement of the local area of the measured parts by use of the white lightmicroscopic interference lens. The theoretical derivation and algorithmimplementation for the peak extraction of the white light interferometry patterns werecarried out. The system errors and noise influenced the measurement accuracy wereanalysized. The3D shape reconstruction of a step with the height variation0.5μm,10μm,40μm was completed.
7. The3D shape measurement of steps, an ultra precision manufactured flatmirror and an optical hypoid surface were measured based on phase deflectormetrysub-system. The measurement accuracy can reach approximately50μm which is in the measurement range of the white light scanning interferometry system. Themeasurement results of the phase deflectormetry sub-system lay a foundation for thehigh accuracy scanning measurement of the local area of the parts by use of the whitelight interferometry lens.
引文
[1] Zhang Song，Recent progresses on real-time3D shape measurement usingdigital fringe projection techniques [J]， Optics and Lasers in Engineering,2010,48(2)：149~158.
[2]张新，许英朝，光学自由曲面的检测方法[J]，中国光学与应用光学，2008，1（1）：92~98.
[3]李荣彬，张志辉，杜雪，孔令豹，蒋金波，自由曲面光学的超精密加工技术及其应用[J]，红外与激光工程，2010，39（1）：110~115.
[4]冯斌，王建华，用于表面微观形貌测量的光学方法[J]，工具技术，2005，39（11）：71~76.
[5]杨练根，新型表面形貌测量仪器[M]，北京：科学出版社，2008，1~2.
[6]贺大兴，盛伯浩，超精密加工技术的发展现状与趋势[J]，新技术新工艺，2006，5：2~3.
[7] Shaheen G.，Yun Z.，Shape from shading of SAR imagery in fourier space [C].Proceedings of IGARSS2007，Washington D. C.，USA，IEEE Computer SocietyPress，2007：835~837.
[8] Roland W. Fleming，Specular reflections and the perception of shape [J]，Journal of Vision，2004，4：798~820.
[9] K. Mitsui，In-process sensors for surface roughness and their application [J]，Precision Engineering，1986，8（4）：24~31.
[10]张国雄，三坐标测量机[M]，天津：天津大学出版社，1~17.
[11]浦昭邦，杨春兰，赵辉，几何光探针法在表面形貌测量中的应用[J]，计量技术，2001，1：20~23.
[12]Yeshaiahu Fainman，Ehud Lenz，Joseph Shamir，Optical profilometer: a newmethod for high sensitivity and wide dynamic range [J]，Applied Optics，1982，21（17）：3200~3208.
[13] Marek Dobosz，Optical profilometer: a practical approximate method ofanalysis [J]，Applied Optics，1983，22（24）：3983~3987.
[14] Mistsui K.，In Process sensors for surface roughness and their applications[J]，Proc. Eng.，1986，8（4）：24~31.
[15] Mitsui K.，Sakai M.，Kizka Y.，Development of a high resolution sensor forsurface roughness [J]，Opt. Eng.，1988，27（6）：498~502.
[16] I. Sherrington，E. H. Smith，Modern measurement techniques in surfacemetrology: part II: optical instruments [J]，Wear，1988，125（3）：289~308.
[17] Tsuguo Kohno，High precision optical surface sensor [J]，Applied Optics，1998，27（1）：103~108.
[18] M. Minsky，Memoir on inventing the confocal scanning microscope [J]，Scanning，1988，10：128~138.
[19] G. E. Sommargren，Optical heterodyne profilometry [J]，Applied Optics，1981，20（4）：610~662.
[20] G. E. Sommargren，An optical measurement of surface profile [J]，Prec.Eng.，1981，18（2）：131~136.
[21] TS Kaczyk，Tomasz，Jozwicki，Experimental and numerical models of fieldheterodyne interferometer: Discussion on Optical Influences in Measurements [C]，Proc. SPIE，2000，4076：192~200.
[22]周肇飞，王世华，周卫东等，同轴式高分辨率激光轮廓仪[J]，仪器仪表学报，1994，15（3）：250~254.
[23]于瀛洁，激光外差干涉技术用于表面形貌检测的研究[博士学位论文]，哈尔滨工业大学，1998.
[24] G. Makosch，B. Drollinger，Surface profile measurement with a scanningdifferential ac interferometer [J]，Applied Optics，1984，23（24）：4544~4553.
[25] Wyant J. C.，Greath K.，Recent advances in interferometric optical testing[J]，Laser Focous，1985，21（11）：118~132.
[26] Christoph Gerhard，Andreas Stephen，Frank Vollertsen，Limits forinterferometric measurements on rough surfaces in streaming inhomogeneous media[J]，Prod. Eng. Res. Devel.，2010，4：141~146.
[27] Tong Guo，Long Ma，Jinping Chen，et. al.，Micro electromechanical systemssurface characterization based on white light phase shifting interferometry [J]，Opt.Eng.，2011，50（5）：053606~053606-7.
[28] C. Gorecki，S. Bargiel，J. Albero，et. al.，Micro machined array-type Mirauinterferometer for MEMS metrology [C]，Solid-State Sensors, Actuators andMicrosystems Conference，IEEE，2011，546~549.
[29] Jingtao Dong，Rongsheng Lu，Yong Li，et. al.，Automated determinationof best focus and minimization of optical path difference in Linnik white lightinterferometry [J]，Applied Optics，2011，50（30）：5861~5871.
[30]许谊，徐毓娴，惠梅等，微分相衬干涉显微镜定量测量表面形貌[J]，光学精密工程，9（3）：226~229.
[31] Wyant J. C.，White light interferometry [C]，Proc. SPIE，2002，4737：98~107.
[32]刘卿卿，李海燕，浦昭邦，光学表面形貌测量技术[J]，光电技术应用，2008，23（2）：33~40.
[33] Manuel F. M. Costa，Surface inspection by an optical triangulation method[J]，Optical Engineering，1996，35（9）：2743~2750.
[34] Hans-Gerd Maas，Frank Schreiber，Bernd Hentschel，Optical triangulationmethod for height measurement on water surfaces [C]，Proc. SPIE，2003，5013：103~109.
[35]冯俊艳，冯其波，匡萃方，高精度激光三角位移传感器的技术现状[J]，应用光学，2004，25（3）：33~36.
[36] Lijiang Zeng，Hirokazu Matsumoto，Keiji Kawachi，Two-directionalscanning method for reducing the shadow effects in laser triangulation [J]，Meas. Sci.Technol.，1997，8：262~266.
[37]张良，费致根，郭俊杰，激光扫描测头对金属曲面测量研究[J]，机床与液压，2011，39（9）：12~15.
[38] Clark J.，Trucco E.，Cheung H. F.，Improving laser triangulation sensorsusing polarization [C]，Proceedings Fifth International Conference on ComputerVision，1995：981~986.
[39]李兵，罗意平，王昭等，多光刀三维轮廓快速测量方法研究[J]，光子学报，2003，32（6）：738~741.
[40] B H Liu，X J Cui，B Li，et. al.，A method of error compensation formulti-linear structured light probe [C]，International Symposium on InstrumentationScience and Technology，Journal of Physics: Conference Series，2006，48：173~177.
[41] Jordi Pages，Joaquim Salvi，Rafael Garcia，et. al.，Overview of coded lightprojection techniques for automatic3D profiling [C]，International Conference onRobotics and Automation，IEEE，2003：133~138.
[42] Li Zhang，Brian Curless，Steven M. Seitz，Rapid shape acquisition usingcolor structured light and multi-pass dynamic programming [C]，Proceedings of theFirst International Symposium on3D Data Proceeding Visualization andTransmission，IEEE，2002.
[43] Joaquim Salvi，Jordi Pages，Joan Batlle，Pattern codification Strategies instructured light systems [J]，Pattern Recognition，2004，37：827~849.
[44] Jing Xu，Ning Xi，Chi Zhang，et al，Real-time3D shape inspection systemof automotive parts based on structured light pattern [J], Optics&Laser Technology，2011，43：1~8.
[45] Markus C. Knauer，Jürgen Kaminski，Gerd Hausler，Phase MeasuringDeflectometry: a new approach to measure specular free-form surfaces [C]，Proc.SPIE，2004，5457：366~376.
[46] Sai Siva Gorthi，Pramod Rastogi，Fringe projection techniques: Whither weare?[J]，Optics and Lasers in Engineering，2010，48：133~140.
[47] J.-H. Kim，F. Pierron，M. Grediac，et. al.，A procedure for producingreflective coatings on plates to be used for full-field slope measurements by adeflectometry technique [J]，Strain，2007，43（2）：138~144.
[48] D. M. Meadows，W. O. Johnson，J. B. Allen，Generation of surface contoursby moiré patterns [J]，Applied Optics，1970，9（4）：942~947.
[49] H. Takasaki，Moiré topography [J]，Applied Optics，1970，9（6）：1467~1472.
[50] R. Henao，A. Tagliaferri，R. Torroba，Contouring approach using singlegrating digital shadow moiré with a phase stepping technique [J]，Optik(Jena)，1999，110（4），199~201.
[51] Lan Grant，Neil Stewart，I. A. Padilla-Perez，Topographical measurementsof water waves using the projection moiré method [J]，Rapid Communications，1990，29（28）：3981~3983.
[52] J.–T. Oh，S.–Y. Lee，S.–W. Kim，Scanning projection grating moirétopography [C]，Proc. SPIE，2000，3958，46~51.
[53] H. Takasaki，The development and the present status of moiré Topography[J]，Optica Atca: International Journal of Optics，1979，26（8）：1009~1019.
[54] Masane Suzuki，Motonori Kanaya，Applications of moiré topographymeasurement methods in industry [J]，Optics and Lasers in Engineering，1988，8（3-4）：171~188.
[55] Haroon S.，L. E. Scriven，Measurement of liquid film profiles by moirétopography [J]，Chemical Engineering Science，1983，38（4）：525~534.
[56] Jose J. Esteve-Taboada，David Mas，Javier Garcia，Three-dimensional objectrecognition by Fourier transform profilommetry [J]，Applied Optics，1999，38（22）：4760~4765.
[57] Xianyu Su，Wenjing Chen，Fourier transform profilometry [J]，Optics andLasers Engineering，2001，35：263~284.
[58] J. Vanherzeele，Patrick Guillaume，Steve Vanlanduit，Fourier fringeprocessing using a regressive Fourier-transform technique [J]，Optics and LasersEngineering，2005，43：645~658.
[59] Lei Huang，Qian Kemao，Bing Pan，et al.，Comparison of Fourier transform,windowed Fourier transform, and wavelet transform methods for phase extractionfrom a single fringe pattern in fringe projection profilometry: a review[J]，Optics andLasers in Engineering，2010，48：141~148.
[60] Mitsuo Takeda，Hideki Ina，Seiji Kobayashi，Fourier-transform method offringe-pattern analysis for computer-based topography and interferometry [J]，OpticalSociety of America，1982，72（1）：156~160.
[61] Mitsuo Takeda，Kazuhiro Mutoh，Fourier transform profilometry for theautomatic measurement of3D object shapes [J]，Applied Optics，1983，22（24）：3977~3982.
[62] Xianyu Su，Wenjing Chen，Fourier transform profilometry for dynamic3-Dshape [C]，Proc. SPIE，2000，4222：245~248.
[63] Qican Zhang，Xianyu Su, Wenjing Cao，et al.，An optical real-time3-Dmeasurement for analysis for facial shape and movement [C]，Proc. SPIE，2003，5254：214~221.
[64] Eryi Hu，Yuming He，Surface profile measurement of moving objects byusing an improved phase-shifting Fourier transform profilometry [J]，Optics andLasers Engineering，2009，47（1）：57~61.
[65] Mitsuo Takeda，Quan Gu，Masaya Kinoshita，et al.，Frequency-multiplexFourier-transform profilometry: a single-shot three-dimensional shape measurementof objects with large height discontinuities and/or surface isolations [J]，OpticalSociety of America，1997，36（22）：5347~5354.
[66]苏显渝，谭松新，向立群等，基于傅里叶变换轮廓术方法的复杂物体三维面形测量[J]，光学学报，1998，18（9）：1228~1233.
[67] Oleksandr A. Skydan，Michael J. Lalor，David R. Burton，Technique forphase measurement and surface reconstruction by use of colored structured light [J]，Applied Optics，2002，41（29）：6104~6117.
[68] Wenjing Chen，Xianyu Su，Yp Cao，et al.，Method for eliminating zerospectrum in Fourier transform profilometry [J]，Optics and Lasers Engineering，2005，43：1267~1276.
[69] Munther A. Gdeisat，David R. Burton，Michael J. Lalor，Eliminating the zerospectrum in Fourier transform profilometry using a two-dimensional continuouswavelet transform [J]，Optics Communications，2006，266：482~489.
[70] Sikun Li，Xianyu Su，Wenjing Chen，et al.，Eliminating the zero spectrumin Fourier transform profilometry using empirical mode decomposition [J]，OpticalSociety of America，2009，26（5）：1195~1201.
[71] Yongchang Wang，Kai Liu，Qi Hao，et al.，Period coded phase shiftingstrategy for real-time3D structured light illumination [C]，IEEE Transactions onImage Processing，2011：1~13.
[72] Giovanna Sansoni，Matteo Carocci，Roberto Rodella，Three-dimensionalvision based on a combination of gray-code and phase-shift projection: analysis andcompensation of the systematic errors [J]，Applied Optics，1999，38（31）：6565~6573.
[73] B. K. A. Ngoi，K. Venkatakrishnan，N. R. Sivakumar，et al.，Instantaneousphase shifting arrangement for microsurface profiling of flat surfaces [J]，OpticsCommunications，2001，190：109~116.
[74] V. Srinivasan，H. C. Liu，Maurice Halioua，Automated phase-measuringprofilometry of3-d object shape [J]，Applied Optics，1984，23（13）：3105~3108.
[75] V. Srinivasan，H. C. Liu，Maurice Halioua，Automated phase-measuringprofilometry: a phase mapping approach [J]，Applied Optics，1985，24（2）：185~188.
[76] J. H. Bruning，D. R. Herriott，J. E. Gallagher，et al.，Digital wavefrontmeasuring interferometer for testing optical surfaces and lenses [J]，Applied Optics，1974，13（11）：2693~2703.
[77] James C. Wyant，Phase-Shifting Interferometry.nb，1998.
[78] James C. Wyant，Chris L. Koliopoulos，Bharat Bhushan，et al.，An opticalprofilometer for surface characterization of magnetic media [J]，A S L ETransactions，1984，27（2）：101~113.
[79] P. Hariharan，B. F. Oreb，T. Eiju，Digital phase-shifting interferometry: asimple error-compensating phase calculation algorithm [J]，Applied Optics，1987，26（13）：2504~2506.
[80]Carré P.，Installation et utilisation du comparateur photoélectrique etinterferential du Bureau International des Poids et Mesures [J]，Metrologia，1966，2：13~23.
[81] Chiayu Ai，James C. Wyant，Effect of piezoelectric transducer nonlinearityon phase shift interferometry [J]，Applied Optics，1987，26（6）：1112~1116.
[82]Yves Surrel，Phase stepping: a new self-calibrating algorithm，Applied Optics[J]，1993，32（19）：3598~3600.
[83] In-Bok Kong，Seung-Woo Kim，General algorithm of phase-shiftinginterferometry by iterative least-squares fitting [J]，Optical Engineering，1995，34（1）：183~188.
[84] Y. Y. Cheng，James C. Wyant，Phase shifter calibration in phase-shiftinginterferometry [J]，Applied Optics，1985，24（18）：3049~3052.
[85]钱克矛，续伯钦，伍小平，光学干涉计量中的位相测量方法[J]，实验力学，2001，16（3）：239~249.
[86] P. H. Chan，P. J. Bryanston-Cross，Spatial phase stepping method offringe-pattern analysis [J]，Optics and Lasers in Engineering，1995，23：343~354.
[87] Katherine Creath，Joanna Schmit，N-point spatial phase-measurementtechniques for non-destructive testing [J]，Optics and Lasers in Engineering，1996，24：365~379.
[88] Markus C. Knauer，Jurgen Kaminski，Gerd Hausler，Phase measuringdeflectometry: a new approach to measure specular free-form surfaces [C]，Proc.SPIE，5457，366~376.
[89] Lei Huang，Chi Seng Ng，Anand Krishna Asundi，Dynamicthree-dimensional sensing for specular surface with monoscopic fringe reflectometry[C]，Optics Express，2011，19（13）：1~6.
[90] Satoru Toyooka，Yuuji Lwaasa，Automatic profilometry of3-D diffuseobjects by spatial phase detection [J]，Applied Optics，1986，25（10）：1630~1633.
[91] M. R. Sajan，C. J. Tay，H. M. Shang，et al.，Improved spatial phase detectionfor profilometry [J]，Optics Communications，1998，150：66~70.
[92] Fiona Berryman，Paul Pynsent，James Cubillo，A theoretical comparison ofthree fringe analysis methods for determining the three-dimensional shape of anobject in the presence of noise [J]，Optics and Lasers in Engineering，2003，39：35~50.
[93] Xianyu Su，A new3-D profilometry based on modulation measurement [C]，Proc. SPIE，1998，3558：1~7.
[94] Xianyu Su，Likun Su，Wansong Li，New Fourier transform profilometrybased on modulation measurement [C]，Proc. SPIE，3749：438~439.
[95] LiKun Su，Xianyu Su，Wansong Li，et al.，Application of modulationmeasurement profilometry to objects with surface holes [J]，Applied Optics，1999，38（7）：1153~1158.
[96]邵双运，苏显渝，张启灿等，调制度测量轮廓术在复杂面形测量中的应用[J]，光学学报，2004，24（12）：1623~1628.
[97]窦蕴甫，苏显渝，陈廷非，一种快速的调制度测量轮廓术[J]，光学学报，2009，29（7）：1858~1862.
[98]陈廷非，苏显渝，窦蕴甫，基于彩色双通道投影的快速调制度测量轮廓术[J]，光电工程，2009，36（4）：17~21.
[99]王莹，苏显渝，基于调制度分析的快速三维物体识别方法[J]，光学学报，2010，30（3）：720~726.
[100] Mitsui K.，Sakai M.，Kizka Y.，Development of a high resolution sensor forsurface roughness [J]，Opt. Eng.，1988,27（6）：498~502.
[101] Unakar NJ，Tsui JY，Harding CV，Scanning electron Microscopy [J]，Ophthalmic Research，1981，13（1）：20~30.
[102] Binning G，Rohrer H.，Surface studies by scanning tunneling microscopy[J]，Phys. Rev. Lett.，1982，49（1）：49~57.
[103]G. Binning，C. F. Quate，Atomic force microscope [J]，Phys. Rev. Lett.，1986，56：930~933.
[104] Jürgen H. Massig，Measurement of phase objects by simple means [J]，Applied Optics，1999，38（19）：4103~4105.
[105] César D. Perciante，José A. Ferrari，Visualization of two-dimensionalphase gradients by subtraction of a reference periodic pattern [J]，Applied Optics，39（13）：2081~2083.
[106] Héctor Canabal，José Alonso，Automatic wavefront measurementtechnique using a computer display and a charge-coupled device camera [J]，Opt.Eng.，2002，41（4）：822~826.
[107] D. C. Ghiglia，M. D. Pritt，Two-dimensional phase unwrapping: Theory,Algorithms and Software [M]，John Wiley&Sons，New York，1998.
[108] Michael Y. Y. Hung，H. M. Shang，Nondestructive testing of specularlyrefective objects using reflection three-dimensional computer vision technique [J]，Opt. Eng.，2003，42（5）：1343~1347.
[109]刘元坤，苏显渝，姜美花等，基于相移和非相干成像的反射镜面形测量方法[J]，光电子·激光，2006，17（4）：458~463.
[110] Fiona W.Y. Chan，A novel optical method without phase unwrapping forsubsurface flaw detection [J]，Optics and Lasers in Engineering，2009,47:186~193.
[111] Soren Kammel，Fernando Puente León，Deflectometric Measurement ofSpecular Surfaces [C]，IEEE Transactions on Instrumentation and Measurement，2008，57（4）：763~769.
[112] J. Lellmann，J. Balzer，A. Rieder，et. al.，Shape from specular reflectionand optical flow，2008,80:226~241.
[113] Stefan Werling，Michael Mai，Michael Heizmann，et. al.，Inspection ofspecular and partially spcular surfaces [J]，Metrol. Meas. Syst.，2009,16（3）：415~431.
[114] J. Balzer，S. Werling，Principles of shape from specular reflection [J]，Measurement，2010，43:1305~1317.
[115] O A Skydan，M J Lalor，D R Burton，3D shape measurement of automotiveglass by using a fringe reflection technique [J]，Meas. Sci. Technol.，2007,18:106~114.
[116] PETZ M.，RITTER R.，Reflection grating method for3D measurement ofreflecting surfaces [C]，Proc. SPIE，2001，4399：35~41.
[117] PETZ M.，TUTSCH R.，Reflection grating photogrammetry: a techniquefor absolute shape measurement of specular free-form surfaces [C]，SPIE，2005，5869：5869D/1-12.
[118] Hongwei Guo，Peng Feng，Tao Tao，Specular surface measurement byusing least squares light tracking technique [J]，Optics and Lasers in Engineering，2010,48:166~171.
[119] Yan Tang，Xianyu Su，Yuankun Liu，et al.，3D shape measurement of theaspheric mirror by advanced phase measuring deflectometry [J]，Optics Express，2008，16（19）：15090~15096.
[120] James C. Wyant，White light Interferometry [C]，Proc. SPIE，2002，4737：98~107.
[121] N. Balsubramanian，Optical system for surface topography measurement，U. S. Patent4340306，field4Feb.1980，issued20July1982.
[122]常素萍，基于白光干涉轮廓尺寸与形貌非接触测量方法和系统[博士论文]，华中科技大学，2007.
[123]张红霞，用于微表面形貌检测的纳米级白光相移干涉研究及仪器化
[博士论文]，天津大学，2004.
[124] Gao F，Leach R. K.，Petzing J，et. al.，Surface measurement errors usingcommercial scanning white light interferometers [J]，Measurement ScienceTechnology，2008，19（1）：015303.
[125] Weckenmann A.，Jiang X.，Sommer K.-D.，et.al.，Multisensor Data Fusionin Dimensional Metrology [J]，CIRP Ann，2009，58（2）：701~721.
[126] Avinash Burla，Tobias Haist，Wolfram Lyda，et. al.，Assistant systems forefficient multiscale measurement and inspection [C]，Proc. SPIE，2011，OpticalMeasurement Systems for Industrial Inspection VII，8082：808202.
[127] Eberhard Manske，Gerd J ger，Tino Hausotte，et. al.，Multi-sensortechnology based on a laser focus probe for nano-measuring applications over largeareas [C]，Proc. SPIE，2011，Optical Measurement Systems for Industrial InspectionVII，8082：808203.
[128] Shuzhen Wang，Tiebang Xie，Suping Chang，A white lightinterference-based atomic force probe scanning microscopy [J]，Meas. Sci. Technol.，2011，22：045502：1~8.
[129]盖绍彦，达飞鹏，基于数字投影仪的光栅相位自校正方法[J]，自动化学报，2008，34（11）：1363~1368.
[130]费东，苏显渝，李杰林，PMP中的液晶投影器的性能研究[J]，光电工程，1996，23（5）：17~23.
[131]王庆有，孙学珠，CCD应用技术[M]，天津：天津大学出版社，1993：58~59.
[132]林家明，面阵CCD摄像机光学镜头参数及其相互关系[J]，光学技术，2000，26（2）：183~185.
[133]杨明，白烨，王秋良等，面阵CCD摄像机光学镜头参数及选用[J]，光电子技术与信息，2005，18（3）：27~43.
[134] Michael W. Lindner，White-light interferometry via an endoscope [C]，Proc.SPIE，2002，4777：90~101.
[135] Michael B. Sinclair，Maarten P. de Boer，Alex D. Corwin，Long-working-distance incoherent-light interference microscope [J]，Applied Optics，2005，44（36）：7714~7721.
[136] Olszak A.，Lateral scanning white-light interferometer [J]，Optical Societyof America，2000,39（22）：3906~3913.
[137]王伯雄，陈非凡，董瑛，微纳米测量技术[M]，北京：清华大学出版社，2006.
[138]张涛，孙立宁，蔡鹤皋，压电陶瓷基本特性研究[J]，光学精密工程，1998,6（5）：26~32..
[139]迟泽英，陈文建，应用光学与光学设计基础[M]，南京：东南大学出版社，2008：331~333.
[140]马龙，白光扫描干涉测量方法与系统研究[博士论文]，天津大学，2011.
[141]苏显渝，李继陶，信息光学[M]，北京：科学出版社，2004.
[142]李朝辉，基于相移干涉法的微表面轮廓仪的研究[博士论文]，天津大学，2004.
[143] Joaquim Salvi，Jordi Pages，Joan Batlle，Pattern codification strategies instructured light systems [J]，Pattern Recognition，2004，37：827~849.
[144] Inokuchi S.，Sato K.，Matsuda F.，Range imaging system for3D objectrecognition [J]，Proceedings of the International Coference on Pattern Recognition，1984，806~808.
[145] José A. Ferrari，Erna M. Frins，Multiple phase-shifted interferomgramsobtained from a single interferogram with linear carier [J]，Optics Communications，2007，271：59~64.
[146] Senya Kiyasu，Hiroshi Hoshino，Koichi Yano，et. al.，Measurement of the3D shape of specular polyhedrons using an M-array coded light source [C]，IEEETransactions on Instrumentation and Measurement，1995，44（3）：775~778.
[147] F. J. MacWilliams，N. J. A. Sloane，Pseudorandom sequences and arrays
[C]，Proc. IEEE，1976，64（12）：1715~1729.
[148] H. Fredricksen，A survey of full length nonlinear shift register cyclealgorithms [J]，Soc. Ind. Appl. Math. Rev.，1982，24（2）：195~221.
[149] P. Griffin，L. Narasimhan，S. Yee，Generation of uniquely encoded lightpatterns for range data acquisition [J]，Pattern Recognition，1992，25（6）：609~616.
[150] R. A. Morano，C. Ozturk，R. Conn，et. al.，Structured light usingpseudorandom codes，Pattern Analy [J]，Mach. Intell.，1998，20（3）：322~327.
[151] C. Guan，L. G. Hassebrook，D. L. Lau，Composite structured light patternfor three-dimensional video [J]，Optics Express，2003，11（5）：406~417.
[152] J. Li，L. G. Hassebrook，Chun Guan，Optimized two-frequency phasemeasuring profilometry light sensor temporal noise sensitivity [J]，J. Opt. Soc. Am.A，2003，20：106~115.
[153]岳慧敏，苏显渝，李泽仁，基于复合光栅投影的快速傅里叶变换轮廓术[J]，光学学报，2005，25（6）：767~771.
[154]岳慧敏，苏显渝，复合相位测量轮廓术的研究[J]，激光杂志，2006，27（1）：22~23.
[155]何定高，曹益平，基于相位测量轮廓术的复合光栅优化设计[J]，光电工程，2008，35（2）：128~133.
[156] Itoh K.，Analysis of phase unwrapping algorithm [J]，Applied Optics，1982，21（14）：2470~2470.
[157] Mitsuo Takeda，Hideki Ina，Seiji Kobayashi，Fourier-trasform method offringe-pattern analysis for computer-based topography and interferometry [J]，OpticalSociety of America，1982，72（1）：156~160.
[158] Richard M. Goldstein，Howard A. Zebker，Charles L. Werner，Satelliteradar interferometry: Two-dimensional phase unwrapping [J]，Radio Science，1988，3（3）：713~720.
[159] J. A. Quiroga，A. Gonzalez-Cano，E. Bernabeu，Phase-unwrappingalgorithm based on an adaptive criterion [J]，Applied Optics，1995，34（14）：2560~2563.
[160] D. C. Ghiglia，L. A. Romero，Direct phase estimation from phasedifferences using fast elliptic partial differential equation solvers [J]，Optic Letters，1989，14（20）：1107~1109.
[161] J. M. Huntley，H. Saldner，Temporal phase-unwrapping algorithm forautomated interferogram analysis [J]，Applied Optics，1993，32（17）：3047~3052.
[162] Hong Zhao，Wenyi Chen，Yushan Tan，Phase-unwrapping algorithm for themeasurement of three-dimensional object shape [J]，Applied Optics，1994，33（20）：4497~4500.
[163] J. M. Huntley，H. O. Saldner，Shape measurement by temporal phaseunwrapping: comparision of unwrapping algorithms [J]，Meas. Sci. Technol.，1997，8：986~992.
[164] J. M. Huntley，H. O. Saldner，Error-reduction methods for shapemeasurement by temporal phase unwrapping [J]，Opt. Soc. Am. A.，1997，14（12）：3188~3196.
[165] W. Nadeborn，P. Andr，W. Osten，Robust procedure for absolute phasemeasurement [J]，Optics and Lasers in Engineering，1995，24（2-3）：245~260.
[166] D. R. Burton，M. J. Lalor，Multichannel Fourier fringe analysis as an aid toautomatic phase unwrapping [J]，Applied Optics，1994，33（14）：2939~2949.
[167]盖绍彦，达飞鹏，一种新的快速解相位方法[J]，光学学报，2008，28（2）：259~267.
[168]马颂德，张正友，计算机视觉——计算理论与实践[M]，北京：科学出版社，1998.
[169]吴立德，计算机视觉[M]，上海：复旦大学出版社，1993，7~10，119~129.
[170] Faig W.，Calibration of close-range photogrammetric system: mathematicalformulation [J]，American Society of Photogrammetry，1975，41（12）：1479~1486.
[171] Y. I. Abdel-Aziz，H. M. Karara，Direct linear transformation into objectspace coordinates in close-range photogrammetry [C]，Proc. Symposium onClose-Range Photogrammetry，Urbana，Unibersity of Illinios，1971：1~18.
[172] Martins H. A.，Birk J. R.，Kelley R. B.，Camera models based on data fromtwo calibration planes [J]，Computer Graphics and Imaging Processing，1981，17：173~180.
[173] Tsai R. Y.，An efficient and accurate camera calibration technique for3Dmachine vision [C]，Proc. CV PR’86，364~374.
[174] Tasi R. Y.，A versatile camera calibration technique for high-accuracy3Dmachine vision metrology using off-the-shelf TV cameras and lenses [C]，IEEEJournal of robotics and automation，1987，RA-3（4）：323~344.
[175] Zhengyou Zhang，A flexible new technique for camera calibration [C]，IEEE Transactions on Pattern Analysis and Machnie Intelligence，2000，22（11）：1330~1334.
[176] Maybank S. J.，Faugeras O. D.，A theory of self-calibratin of a movingcamera [J]，Int. J. Computer Vision，1992，8（2）：123~151.
[177] Hartley R.，Euclidean reconstruction and invariants from multiple images
[C]，IEEE Transactions on Pattern Analysis and Machine Intelligence，1994，16（10）：1036~1041.
[178] Pollefeys M.，Van Gool L.，Oosterlinck A.，The modulus constraint: A newconstraint for self-calibration [C]，Proceedings of International Conference of PatternRecognition，Vienna，1996，349~353.
[179] Triggs B.，Auto-calibration and absolute quadric [J]，Proceedings ofComputer Vision and Pattern Recognition，1997，604~614.
[180] Ma S. D.，A self-calibration technique for active vision systems [C]，IEEETrans, Robotics and Automation，1996.
[181]章毓晋，图像分割[M]，北京：科学出版社，2001：43~44.
[182]何斌，马天予，王运坚，VC++数字图像处理，北京：人民邮电出版社，2001，435~444.
[183]刘书桂，李蓬，那永林，基于最小二乘原理的平面任意位置椭圆的评价[J]，计量学报，2002，23（4）：245~247.
[184] N. E. Coleman，R. Jain，Obtaining3-dimensional shape of textured andspecular surfaces using for-source photometry [C]，CGIP，1982，18：309~328.
[185] G. Healey，R. Jain，Depth recovery from surface normals [C]，ICPR’84，Montreal，Canada，1984，894~896.
[186] Z. Wu，L. Li，A line-integration based method for depth recovery fromsurface normals [J]，Computer Vision, Graphics, and Image Processing，1988，43：53~66.
[187] T. Wei，R. Klette，A wavelet-based algorithm for height from gradients [J]，Lecture Notes in Computer Science，1998，2001：84~90.
[188] T. Wei，R. Klette，A new algorithm for Gradient field integration [J]，Imageand Vision Computing New Zealand (IVCNZ’2001)，Dunedin，New Zealand，2001.
[189] Klette P.，Schluns K.，Height data from gradient fieleds [C]，Proc. SPIE，1996，2908：204~215.
[190]周仁忠，自适应光学理论[M]，北京：国防工业出版社，1996：283~290.
[191] Tiangong Wei，Reinhard Klette，Height from gradient using surfacecurvature and area constraints [J]，Communication and Information TechnologyResearch Techniccal Report，2001，109.
[192] G. H. Golue，C. Reinsch，Singular value decomposition and least squaressolutions [J]，Numer Math，1970，14：403~420.
[193] W. H. Southwell，Wave-front estimation from wave-front slopemeasurement [J]，Opt. Soc. Am.，70（8）：998~1006.
[194] Berthold K. P. Horn，Michael J. Brooks，the variational approach to shapefrom shading [J]，1985，1~33.
[195] Rafael C. Gonzalez，Richard E. Woods，Steven L. Eddins，Digital ImageProcessing (3rdEdition)[M]，Prentice Hall，2010.
[196] Richard O. Duda，Peter E. Hart，David G. Stork，Pattern Classification (2edEdition)[M]，Wiley，2000.
[197]何永辉，蒋剑锋，赵万生，基于扫描白光干涉法的表面三维轮廓仪[J]，光学技术，2001，27（2）：150~152.
[198] Leslie Deck，Peter de Groot，High-speed non-contact profiler based onscanning white-light interferometry [J]，Applied Optics，1994，33（31）：424~426.
[199] Sinclair，et. al.，Long working distance incoherent interference microscope，US Patent，US7034271B1，2006
[200] B. S. Lee，T. C. Strand，Profilometry with a coherence scanning microscope[J]，Applied Optics，1990，29：3784~3788.
[201] B. L. Danielson，C. Y. Loisrobert，Absolute optical ranging using lowcoherence interferometry [J]，Applied Optics，1991，30：2975~2979.
[202] T. Dreset，G. Hauster，H. Venzke，Three-dimensional sensing of roughsurfaces by coherence rader，Applied Optics，1992，31：919~925.
[203] Joanna Schmit，Artur Olszak，High-preicision shape measurement bywhite-light interferometry with real-time scanner error correction [J]，Applied Optics，2002，41（28）：5943~5950.
[204] Maitreyee Roy, Colin J. R. Sheppard，Guy Cox，et. al.，White-lightinterference microscopy: a way to obtain high lateral resolution over an extendedrange of heights [J]，Optics Express，2006，16（15）：6788~6793.
[205] Slava G. Turyshev，Analytical modeling of the white light fringe [J]，Applied Optics，2003，42（1）：71~90.
[206] Bruning J. H.，Herriott D. R.，Gallagher J. E.，et. al.，Digital wavefrontmeasuring interferometer for testing optical surfaces and lenses [J]Applied Optics，1974，13（11）：2693~2703.
[207]许万里，郑伟等，用相移干涉法测量表面三维轮廓的研究[J]，传感器技术，2001，20（8）：19~21/
[208] G. S. Kino，S. S. C. Chim，Mirau correlation microscope [J]，AppliedOptics，1990，29：3775~3783.
[209] Bankhead A.，Surface profiling apparatus，UK Patent，GB2386417B，2004.
[210] Chiayu Ai，Erik L. Novak，Centroid approach for estimating modulationpeak in broad-brandwidth interferometry，United States Patens：5633715，1915.
[211] De Groot P，et. al.，Determination of fringe order in white-light interferencemicroscopy [J]，Applied Optics，2002，41：4571~4578.
[212] Akira Hirabayashi，Hidemttsu Ogawa，Katsuichi Kitagawa，Fast surfaceprofiler by white-light interferometry by use of a new algorithm based on samplingtheory [J]，Applied Optics，2002，41：4876~4883.
[213] D. A. Zwing，R. E. Hufnagel，A Hilbert transform algorithm forfringe-pattern analysis，Advanced Optical Manufacturing and Testing，Proc. SPIE，1333，295~302.
[214] Stanley S. C. Chim，Gordon S. Kino，Three-dimensional image realizationin interference microscopy，Applied Optics，1992，31：2550~2553.
[215] P. Sandoz， Wavelet transform as processing tool in white-lightinterferometry [J]，Opt. Lett.，1997，22：1065~1067.
[216] Recknagel R. J.，Analysis of white-light interferograms using waveletmethods [J]，Optics Communications，1998，148：122~128.
[217] Peter de Groot，Leslie Deck，Surface profiling by analysis of white-lightinterferograms in the spatial frequency domain [J]，J. Mod. Opt.，1995，42（2）：389~401.
[218] Peter de Groot，Xaier Colonna de Lega，Jim Kramer，et. al.，Determinationof fringe order in white-light interference microscopy [J]，Applied Optics，2002，41：4571~4578.
[219] Peter de Groot，Xaier Colonna de Lega，Signal modeling for low coherenceheight scanning interference microscopy [J]，Applied Optics，2004，43：4821~4830.
[220] Katherine Creath，Phase-measurement interferometry techniques [J]，Progress in Optics，1988，26：349~393.
[221] Danielson B. L.， Absolute optical ranging using low coherenceinterferometry [J]，Applied Optics，1991，30：2975~2979.
[222] K. G. Larkin，Efficient non-linear algorithm for envelope detection in whitelight interferometry，J. Opt. Soc. Am. A，1996，13（4）：832~843.
[223] P. Sandoz，R. Devillers，A. Plata，Unambiguous profilometry byfringe-order identification in white-light phase-shifting interferometry [J]，J. Mod.Opt.，1997，44：519~534.
[224] P. Sandoz，An algorithm for profilometry by white-light phase-shiftinginterferometey [J]，J. Mod. Opt.，1996，43：1545~1554.
[225] Akiko Harasaki，Improved Vertical Scanning Interferometry，nb，2000.
[226] Min-Cheol Park，Seung-Woo Kim，Direct quadratic polynomial fitting forfringe peak detection of white-light scanning interferograms [J]，Opt. Eng.，2000，39：952~659.
[227] Seok-moon Ryoo，Tae-Sun Choi，3-D profilometry by analysis of noisywhite-light interferograms [C]，Proc. SPIE，2000，3919：152~160.
[2]张新，许英朝，光学自由曲面的检测方法[J]，中国光学与应用光学，2008，1（1）：92~98.
[3]李荣彬，张志辉，杜雪，孔令豹，蒋金波，自由曲面光学的超精密加工技术及其应用[J]，红外与激光工程，2010，39（1）：110~115.
[4]冯斌，王建华，用于表面微观形貌测量的光学方法[J]，工具技术，2005，39（11）：71~76.
[5]杨练根，新型表面形貌测量仪器[M]，北京：科学出版社，2008，1~2.
[6]贺大兴，盛伯浩，超精密加工技术的发展现状与趋势[J]，新技术新工艺，2006，5：2~3.
[7] Shaheen G.，Yun Z.，Shape from shading of SAR imagery in fourier space [C].Proceedings of IGARSS2007，Washington D. C.，USA，IEEE Computer SocietyPress，2007：835~837.
[8] Roland W. Fleming，Specular reflections and the perception of shape [J]，Journal of Vision，2004，4：798~820.
[9] K. Mitsui，In-process sensors for surface roughness and their application [J]，Precision Engineering，1986，8（4）：24~31.
[10]张国雄，三坐标测量机[M]，天津：天津大学出版社，1~17.
[11]浦昭邦，杨春兰，赵辉，几何光探针法在表面形貌测量中的应用[J]，计量技术，2001，1：20~23.
[12]Yeshaiahu Fainman，Ehud Lenz，Joseph Shamir，Optical profilometer: a newmethod for high sensitivity and wide dynamic range [J]，Applied Optics，1982，21（17）：3200~3208.
[13] Marek Dobosz，Optical profilometer: a practical approximate method ofanalysis [J]，Applied Optics，1983，22（24）：3983~3987.
[14] Mistsui K.，In Process sensors for surface roughness and their applications[J]，Proc. Eng.，1986，8（4）：24~31.
[15] Mitsui K.，Sakai M.，Kizka Y.，Development of a high resolution sensor forsurface roughness [J]，Opt. Eng.，1988，27（6）：498~502.
[16] I. Sherrington，E. H. Smith，Modern measurement techniques in surfacemetrology: part II: optical instruments [J]，Wear，1988，125（3）：289~308.
[17] Tsuguo Kohno，High precision optical surface sensor [J]，Applied Optics，1998，27（1）：103~108.
[18] M. Minsky，Memoir on inventing the confocal scanning microscope [J]，Scanning，1988，10：128~138.
[19] G. E. Sommargren，Optical heterodyne profilometry [J]，Applied Optics，1981，20（4）：610~662.
[20] G. E. Sommargren，An optical measurement of surface profile [J]，Prec.Eng.，1981，18（2）：131~136.
[21] TS Kaczyk，Tomasz，Jozwicki，Experimental and numerical models of fieldheterodyne interferometer: Discussion on Optical Influences in Measurements [C]，Proc. SPIE，2000，4076：192~200.
[22]周肇飞，王世华，周卫东等，同轴式高分辨率激光轮廓仪[J]，仪器仪表学报，1994，15（3）：250~254.
[23]于瀛洁，激光外差干涉技术用于表面形貌检测的研究[博士学位论文]，哈尔滨工业大学，1998.
[24] G. Makosch，B. Drollinger，Surface profile measurement with a scanningdifferential ac interferometer [J]，Applied Optics，1984，23（24）：4544~4553.
[25] Wyant J. C.，Greath K.，Recent advances in interferometric optical testing[J]，Laser Focous，1985，21（11）：118~132.
[26] Christoph Gerhard，Andreas Stephen，Frank Vollertsen，Limits forinterferometric measurements on rough surfaces in streaming inhomogeneous media[J]，Prod. Eng. Res. Devel.，2010，4：141~146.
[27] Tong Guo，Long Ma，Jinping Chen，et. al.，Micro electromechanical systemssurface characterization based on white light phase shifting interferometry [J]，Opt.Eng.，2011，50（5）：053606~053606-7.
[28] C. Gorecki，S. Bargiel，J. Albero，et. al.，Micro machined array-type Mirauinterferometer for MEMS metrology [C]，Solid-State Sensors, Actuators andMicrosystems Conference，IEEE，2011，546~549.
[29] Jingtao Dong，Rongsheng Lu，Yong Li，et. al.，Automated determinationof best focus and minimization of optical path difference in Linnik white lightinterferometry [J]，Applied Optics，2011，50（30）：5861~5871.
[30]许谊，徐毓娴，惠梅等，微分相衬干涉显微镜定量测量表面形貌[J]，光学精密工程，9（3）：226~229.
[31] Wyant J. C.，White light interferometry [C]，Proc. SPIE，2002，4737：98~107.
[32]刘卿卿，李海燕，浦昭邦，光学表面形貌测量技术[J]，光电技术应用，2008，23（2）：33~40.
[33] Manuel F. M. Costa，Surface inspection by an optical triangulation method[J]，Optical Engineering，1996，35（9）：2743~2750.
[34] Hans-Gerd Maas，Frank Schreiber，Bernd Hentschel，Optical triangulationmethod for height measurement on water surfaces [C]，Proc. SPIE，2003，5013：103~109.
[35]冯俊艳，冯其波，匡萃方，高精度激光三角位移传感器的技术现状[J]，应用光学，2004，25（3）：33~36.
[36] Lijiang Zeng，Hirokazu Matsumoto，Keiji Kawachi，Two-directionalscanning method for reducing the shadow effects in laser triangulation [J]，Meas. Sci.Technol.，1997，8：262~266.
[37]张良，费致根，郭俊杰，激光扫描测头对金属曲面测量研究[J]，机床与液压，2011，39（9）：12~15.
[38] Clark J.，Trucco E.，Cheung H. F.，Improving laser triangulation sensorsusing polarization [C]，Proceedings Fifth International Conference on ComputerVision，1995：981~986.
[39]李兵，罗意平，王昭等，多光刀三维轮廓快速测量方法研究[J]，光子学报，2003，32（6）：738~741.
[40] B H Liu，X J Cui，B Li，et. al.，A method of error compensation formulti-linear structured light probe [C]，International Symposium on InstrumentationScience and Technology，Journal of Physics: Conference Series，2006，48：173~177.
[41] Jordi Pages，Joaquim Salvi，Rafael Garcia，et. al.，Overview of coded lightprojection techniques for automatic3D profiling [C]，International Conference onRobotics and Automation，IEEE，2003：133~138.
[42] Li Zhang，Brian Curless，Steven M. Seitz，Rapid shape acquisition usingcolor structured light and multi-pass dynamic programming [C]，Proceedings of theFirst International Symposium on3D Data Proceeding Visualization andTransmission，IEEE，2002.
[43] Joaquim Salvi，Jordi Pages，Joan Batlle，Pattern codification Strategies instructured light systems [J]，Pattern Recognition，2004，37：827~849.
[44] Jing Xu，Ning Xi，Chi Zhang，et al，Real-time3D shape inspection systemof automotive parts based on structured light pattern [J], Optics&Laser Technology，2011，43：1~8.
[45] Markus C. Knauer，Jürgen Kaminski，Gerd Hausler，Phase MeasuringDeflectometry: a new approach to measure specular free-form surfaces [C]，Proc.SPIE，2004，5457：366~376.
[46] Sai Siva Gorthi，Pramod Rastogi，Fringe projection techniques: Whither weare?[J]，Optics and Lasers in Engineering，2010，48：133~140.
[47] J.-H. Kim，F. Pierron，M. Grediac，et. al.，A procedure for producingreflective coatings on plates to be used for full-field slope measurements by adeflectometry technique [J]，Strain，2007，43（2）：138~144.
[48] D. M. Meadows，W. O. Johnson，J. B. Allen，Generation of surface contoursby moiré patterns [J]，Applied Optics，1970，9（4）：942~947.
[49] H. Takasaki，Moiré topography [J]，Applied Optics，1970，9（6）：1467~1472.
[50] R. Henao，A. Tagliaferri，R. Torroba，Contouring approach using singlegrating digital shadow moiré with a phase stepping technique [J]，Optik(Jena)，1999，110（4），199~201.
[51] Lan Grant，Neil Stewart，I. A. Padilla-Perez，Topographical measurementsof water waves using the projection moiré method [J]，Rapid Communications，1990，29（28）：3981~3983.
[52] J.–T. Oh，S.–Y. Lee，S.–W. Kim，Scanning projection grating moirétopography [C]，Proc. SPIE，2000，3958，46~51.
[53] H. Takasaki，The development and the present status of moiré Topography[J]，Optica Atca: International Journal of Optics，1979，26（8）：1009~1019.
[54] Masane Suzuki，Motonori Kanaya，Applications of moiré topographymeasurement methods in industry [J]，Optics and Lasers in Engineering，1988，8（3-4）：171~188.
[55] Haroon S.，L. E. Scriven，Measurement of liquid film profiles by moirétopography [J]，Chemical Engineering Science，1983，38（4）：525~534.
[56] Jose J. Esteve-Taboada，David Mas，Javier Garcia，Three-dimensional objectrecognition by Fourier transform profilommetry [J]，Applied Optics，1999，38（22）：4760~4765.
[57] Xianyu Su，Wenjing Chen，Fourier transform profilometry [J]，Optics andLasers Engineering，2001，35：263~284.
[58] J. Vanherzeele，Patrick Guillaume，Steve Vanlanduit，Fourier fringeprocessing using a regressive Fourier-transform technique [J]，Optics and LasersEngineering，2005，43：645~658.
[59] Lei Huang，Qian Kemao，Bing Pan，et al.，Comparison of Fourier transform,windowed Fourier transform, and wavelet transform methods for phase extractionfrom a single fringe pattern in fringe projection profilometry: a review[J]，Optics andLasers in Engineering，2010，48：141~148.
[60] Mitsuo Takeda，Hideki Ina，Seiji Kobayashi，Fourier-transform method offringe-pattern analysis for computer-based topography and interferometry [J]，OpticalSociety of America，1982，72（1）：156~160.
[61] Mitsuo Takeda，Kazuhiro Mutoh，Fourier transform profilometry for theautomatic measurement of3D object shapes [J]，Applied Optics，1983，22（24）：3977~3982.
[62] Xianyu Su，Wenjing Chen，Fourier transform profilometry for dynamic3-Dshape [C]，Proc. SPIE，2000，4222：245~248.
[63] Qican Zhang，Xianyu Su, Wenjing Cao，et al.，An optical real-time3-Dmeasurement for analysis for facial shape and movement [C]，Proc. SPIE，2003，5254：214~221.
[64] Eryi Hu，Yuming He，Surface profile measurement of moving objects byusing an improved phase-shifting Fourier transform profilometry [J]，Optics andLasers Engineering，2009，47（1）：57~61.
[65] Mitsuo Takeda，Quan Gu，Masaya Kinoshita，et al.，Frequency-multiplexFourier-transform profilometry: a single-shot three-dimensional shape measurementof objects with large height discontinuities and/or surface isolations [J]，OpticalSociety of America，1997，36（22）：5347~5354.
[66]苏显渝，谭松新，向立群等，基于傅里叶变换轮廓术方法的复杂物体三维面形测量[J]，光学学报，1998，18（9）：1228~1233.
[67] Oleksandr A. Skydan，Michael J. Lalor，David R. Burton，Technique forphase measurement and surface reconstruction by use of colored structured light [J]，Applied Optics，2002，41（29）：6104~6117.
[68] Wenjing Chen，Xianyu Su，Yp Cao，et al.，Method for eliminating zerospectrum in Fourier transform profilometry [J]，Optics and Lasers Engineering，2005，43：1267~1276.
[69] Munther A. Gdeisat，David R. Burton，Michael J. Lalor，Eliminating the zerospectrum in Fourier transform profilometry using a two-dimensional continuouswavelet transform [J]，Optics Communications，2006，266：482~489.
[70] Sikun Li，Xianyu Su，Wenjing Chen，et al.，Eliminating the zero spectrumin Fourier transform profilometry using empirical mode decomposition [J]，OpticalSociety of America，2009，26（5）：1195~1201.
[71] Yongchang Wang，Kai Liu，Qi Hao，et al.，Period coded phase shiftingstrategy for real-time3D structured light illumination [C]，IEEE Transactions onImage Processing，2011：1~13.
[72] Giovanna Sansoni，Matteo Carocci，Roberto Rodella，Three-dimensionalvision based on a combination of gray-code and phase-shift projection: analysis andcompensation of the systematic errors [J]，Applied Optics，1999，38（31）：6565~6573.
[73] B. K. A. Ngoi，K. Venkatakrishnan，N. R. Sivakumar，et al.，Instantaneousphase shifting arrangement for microsurface profiling of flat surfaces [J]，OpticsCommunications，2001，190：109~116.
[74] V. Srinivasan，H. C. Liu，Maurice Halioua，Automated phase-measuringprofilometry of3-d object shape [J]，Applied Optics，1984，23（13）：3105~3108.
[75] V. Srinivasan，H. C. Liu，Maurice Halioua，Automated phase-measuringprofilometry: a phase mapping approach [J]，Applied Optics，1985，24（2）：185~188.
[76] J. H. Bruning，D. R. Herriott，J. E. Gallagher，et al.，Digital wavefrontmeasuring interferometer for testing optical surfaces and lenses [J]，Applied Optics，1974，13（11）：2693~2703.
[77] James C. Wyant，Phase-Shifting Interferometry.nb，1998.
[78] James C. Wyant，Chris L. Koliopoulos，Bharat Bhushan，et al.，An opticalprofilometer for surface characterization of magnetic media [J]，A S L ETransactions，1984，27（2）：101~113.
[79] P. Hariharan，B. F. Oreb，T. Eiju，Digital phase-shifting interferometry: asimple error-compensating phase calculation algorithm [J]，Applied Optics，1987，26（13）：2504~2506.
[80]Carré P.，Installation et utilisation du comparateur photoélectrique etinterferential du Bureau International des Poids et Mesures [J]，Metrologia，1966，2：13~23.
[81] Chiayu Ai，James C. Wyant，Effect of piezoelectric transducer nonlinearityon phase shift interferometry [J]，Applied Optics，1987，26（6）：1112~1116.
[82]Yves Surrel，Phase stepping: a new self-calibrating algorithm，Applied Optics[J]，1993，32（19）：3598~3600.
[83] In-Bok Kong，Seung-Woo Kim，General algorithm of phase-shiftinginterferometry by iterative least-squares fitting [J]，Optical Engineering，1995，34（1）：183~188.
[84] Y. Y. Cheng，James C. Wyant，Phase shifter calibration in phase-shiftinginterferometry [J]，Applied Optics，1985，24（18）：3049~3052.
[85]钱克矛，续伯钦，伍小平，光学干涉计量中的位相测量方法[J]，实验力学，2001，16（3）：239~249.
[86] P. H. Chan，P. J. Bryanston-Cross，Spatial phase stepping method offringe-pattern analysis [J]，Optics and Lasers in Engineering，1995，23：343~354.
[87] Katherine Creath，Joanna Schmit，N-point spatial phase-measurementtechniques for non-destructive testing [J]，Optics and Lasers in Engineering，1996，24：365~379.
[88] Markus C. Knauer，Jurgen Kaminski，Gerd Hausler，Phase measuringdeflectometry: a new approach to measure specular free-form surfaces [C]，Proc.SPIE，5457，366~376.
[89] Lei Huang，Chi Seng Ng，Anand Krishna Asundi，Dynamicthree-dimensional sensing for specular surface with monoscopic fringe reflectometry[C]，Optics Express，2011，19（13）：1~6.
[90] Satoru Toyooka，Yuuji Lwaasa，Automatic profilometry of3-D diffuseobjects by spatial phase detection [J]，Applied Optics，1986，25（10）：1630~1633.
[91] M. R. Sajan，C. J. Tay，H. M. Shang，et al.，Improved spatial phase detectionfor profilometry [J]，Optics Communications，1998，150：66~70.
[92] Fiona Berryman，Paul Pynsent，James Cubillo，A theoretical comparison ofthree fringe analysis methods for determining the three-dimensional shape of anobject in the presence of noise [J]，Optics and Lasers in Engineering，2003，39：35~50.
[93] Xianyu Su，A new3-D profilometry based on modulation measurement [C]，Proc. SPIE，1998，3558：1~7.
[94] Xianyu Su，Likun Su，Wansong Li，New Fourier transform profilometrybased on modulation measurement [C]，Proc. SPIE，3749：438~439.
[95] LiKun Su，Xianyu Su，Wansong Li，et al.，Application of modulationmeasurement profilometry to objects with surface holes [J]，Applied Optics，1999，38（7）：1153~1158.
[96]邵双运，苏显渝，张启灿等，调制度测量轮廓术在复杂面形测量中的应用[J]，光学学报，2004，24（12）：1623~1628.
[97]窦蕴甫，苏显渝，陈廷非，一种快速的调制度测量轮廓术[J]，光学学报，2009，29（7）：1858~1862.
[98]陈廷非，苏显渝，窦蕴甫，基于彩色双通道投影的快速调制度测量轮廓术[J]，光电工程，2009，36（4）：17~21.
[99]王莹，苏显渝，基于调制度分析的快速三维物体识别方法[J]，光学学报，2010，30（3）：720~726.
[100] Mitsui K.，Sakai M.，Kizka Y.，Development of a high resolution sensor forsurface roughness [J]，Opt. Eng.，1988,27（6）：498~502.
[101] Unakar NJ，Tsui JY，Harding CV，Scanning electron Microscopy [J]，Ophthalmic Research，1981，13（1）：20~30.
[102] Binning G，Rohrer H.，Surface studies by scanning tunneling microscopy[J]，Phys. Rev. Lett.，1982，49（1）：49~57.
[103]G. Binning，C. F. Quate，Atomic force microscope [J]，Phys. Rev. Lett.，1986，56：930~933.
[104] Jürgen H. Massig，Measurement of phase objects by simple means [J]，Applied Optics，1999，38（19）：4103~4105.
[105] César D. Perciante，José A. Ferrari，Visualization of two-dimensionalphase gradients by subtraction of a reference periodic pattern [J]，Applied Optics，39（13）：2081~2083.
[106] Héctor Canabal，José Alonso，Automatic wavefront measurementtechnique using a computer display and a charge-coupled device camera [J]，Opt.Eng.，2002，41（4）：822~826.
[107] D. C. Ghiglia，M. D. Pritt，Two-dimensional phase unwrapping: Theory,Algorithms and Software [M]，John Wiley&Sons，New York，1998.
[108] Michael Y. Y. Hung，H. M. Shang，Nondestructive testing of specularlyrefective objects using reflection three-dimensional computer vision technique [J]，Opt. Eng.，2003，42（5）：1343~1347.
[109]刘元坤，苏显渝，姜美花等，基于相移和非相干成像的反射镜面形测量方法[J]，光电子·激光，2006，17（4）：458~463.
[110] Fiona W.Y. Chan，A novel optical method without phase unwrapping forsubsurface flaw detection [J]，Optics and Lasers in Engineering，2009,47:186~193.
[111] Soren Kammel，Fernando Puente León，Deflectometric Measurement ofSpecular Surfaces [C]，IEEE Transactions on Instrumentation and Measurement，2008，57（4）：763~769.
[112] J. Lellmann，J. Balzer，A. Rieder，et. al.，Shape from specular reflectionand optical flow，2008,80:226~241.
[113] Stefan Werling，Michael Mai，Michael Heizmann，et. al.，Inspection ofspecular and partially spcular surfaces [J]，Metrol. Meas. Syst.，2009,16（3）：415~431.
[114] J. Balzer，S. Werling，Principles of shape from specular reflection [J]，Measurement，2010，43:1305~1317.
[115] O A Skydan，M J Lalor，D R Burton，3D shape measurement of automotiveglass by using a fringe reflection technique [J]，Meas. Sci. Technol.，2007,18:106~114.
[116] PETZ M.，RITTER R.，Reflection grating method for3D measurement ofreflecting surfaces [C]，Proc. SPIE，2001，4399：35~41.
[117] PETZ M.，TUTSCH R.，Reflection grating photogrammetry: a techniquefor absolute shape measurement of specular free-form surfaces [C]，SPIE，2005，5869：5869D/1-12.
[118] Hongwei Guo，Peng Feng，Tao Tao，Specular surface measurement byusing least squares light tracking technique [J]，Optics and Lasers in Engineering，2010,48:166~171.
[119] Yan Tang，Xianyu Su，Yuankun Liu，et al.，3D shape measurement of theaspheric mirror by advanced phase measuring deflectometry [J]，Optics Express，2008，16（19）：15090~15096.
[120] James C. Wyant，White light Interferometry [C]，Proc. SPIE，2002，4737：98~107.
[121] N. Balsubramanian，Optical system for surface topography measurement，U. S. Patent4340306，field4Feb.1980，issued20July1982.
[122]常素萍，基于白光干涉轮廓尺寸与形貌非接触测量方法和系统[博士论文]，华中科技大学，2007.
[123]张红霞，用于微表面形貌检测的纳米级白光相移干涉研究及仪器化
[博士论文]，天津大学，2004.
[124] Gao F，Leach R. K.，Petzing J，et. al.，Surface measurement errors usingcommercial scanning white light interferometers [J]，Measurement ScienceTechnology，2008，19（1）：015303.
[125] Weckenmann A.，Jiang X.，Sommer K.-D.，et.al.，Multisensor Data Fusionin Dimensional Metrology [J]，CIRP Ann，2009，58（2）：701~721.
[126] Avinash Burla，Tobias Haist，Wolfram Lyda，et. al.，Assistant systems forefficient multiscale measurement and inspection [C]，Proc. SPIE，2011，OpticalMeasurement Systems for Industrial Inspection VII，8082：808202.
[127] Eberhard Manske，Gerd J ger，Tino Hausotte，et. al.，Multi-sensortechnology based on a laser focus probe for nano-measuring applications over largeareas [C]，Proc. SPIE，2011，Optical Measurement Systems for Industrial InspectionVII，8082：808203.
[128] Shuzhen Wang，Tiebang Xie，Suping Chang，A white lightinterference-based atomic force probe scanning microscopy [J]，Meas. Sci. Technol.，2011，22：045502：1~8.
[129]盖绍彦，达飞鹏，基于数字投影仪的光栅相位自校正方法[J]，自动化学报，2008，34（11）：1363~1368.
[130]费东，苏显渝，李杰林，PMP中的液晶投影器的性能研究[J]，光电工程，1996，23（5）：17~23.
[131]王庆有，孙学珠，CCD应用技术[M]，天津：天津大学出版社，1993：58~59.
[132]林家明，面阵CCD摄像机光学镜头参数及其相互关系[J]，光学技术，2000，26（2）：183~185.
[133]杨明，白烨，王秋良等，面阵CCD摄像机光学镜头参数及选用[J]，光电子技术与信息，2005，18（3）：27~43.
[134] Michael W. Lindner，White-light interferometry via an endoscope [C]，Proc.SPIE，2002，4777：90~101.
[135] Michael B. Sinclair，Maarten P. de Boer，Alex D. Corwin，Long-working-distance incoherent-light interference microscope [J]，Applied Optics，2005，44（36）：7714~7721.
[136] Olszak A.，Lateral scanning white-light interferometer [J]，Optical Societyof America，2000,39（22）：3906~3913.
[137]王伯雄，陈非凡，董瑛，微纳米测量技术[M]，北京：清华大学出版社，2006.
[138]张涛，孙立宁，蔡鹤皋，压电陶瓷基本特性研究[J]，光学精密工程，1998,6（5）：26~32..
[139]迟泽英，陈文建，应用光学与光学设计基础[M]，南京：东南大学出版社，2008：331~333.
[140]马龙，白光扫描干涉测量方法与系统研究[博士论文]，天津大学，2011.
[141]苏显渝，李继陶，信息光学[M]，北京：科学出版社，2004.
[142]李朝辉，基于相移干涉法的微表面轮廓仪的研究[博士论文]，天津大学，2004.
[143] Joaquim Salvi，Jordi Pages，Joan Batlle，Pattern codification strategies instructured light systems [J]，Pattern Recognition，2004，37：827~849.
[144] Inokuchi S.，Sato K.，Matsuda F.，Range imaging system for3D objectrecognition [J]，Proceedings of the International Coference on Pattern Recognition，1984，806~808.
[145] José A. Ferrari，Erna M. Frins，Multiple phase-shifted interferomgramsobtained from a single interferogram with linear carier [J]，Optics Communications，2007，271：59~64.
[146] Senya Kiyasu，Hiroshi Hoshino，Koichi Yano，et. al.，Measurement of the3D shape of specular polyhedrons using an M-array coded light source [C]，IEEETransactions on Instrumentation and Measurement，1995，44（3）：775~778.
[147] F. J. MacWilliams，N. J. A. Sloane，Pseudorandom sequences and arrays
[C]，Proc. IEEE，1976，64（12）：1715~1729.
[148] H. Fredricksen，A survey of full length nonlinear shift register cyclealgorithms [J]，Soc. Ind. Appl. Math. Rev.，1982，24（2）：195~221.
[149] P. Griffin，L. Narasimhan，S. Yee，Generation of uniquely encoded lightpatterns for range data acquisition [J]，Pattern Recognition，1992，25（6）：609~616.
[150] R. A. Morano，C. Ozturk，R. Conn，et. al.，Structured light usingpseudorandom codes，Pattern Analy [J]，Mach. Intell.，1998，20（3）：322~327.
[151] C. Guan，L. G. Hassebrook，D. L. Lau，Composite structured light patternfor three-dimensional video [J]，Optics Express，2003，11（5）：406~417.
[152] J. Li，L. G. Hassebrook，Chun Guan，Optimized two-frequency phasemeasuring profilometry light sensor temporal noise sensitivity [J]，J. Opt. Soc. Am.A，2003，20：106~115.
[153]岳慧敏，苏显渝，李泽仁，基于复合光栅投影的快速傅里叶变换轮廓术[J]，光学学报，2005，25（6）：767~771.
[154]岳慧敏，苏显渝，复合相位测量轮廓术的研究[J]，激光杂志，2006，27（1）：22~23.
[155]何定高，曹益平，基于相位测量轮廓术的复合光栅优化设计[J]，光电工程，2008，35（2）：128~133.
[156] Itoh K.，Analysis of phase unwrapping algorithm [J]，Applied Optics，1982，21（14）：2470~2470.
[157] Mitsuo Takeda，Hideki Ina，Seiji Kobayashi，Fourier-trasform method offringe-pattern analysis for computer-based topography and interferometry [J]，OpticalSociety of America，1982，72（1）：156~160.
[158] Richard M. Goldstein，Howard A. Zebker，Charles L. Werner，Satelliteradar interferometry: Two-dimensional phase unwrapping [J]，Radio Science，1988，3（3）：713~720.
[159] J. A. Quiroga，A. Gonzalez-Cano，E. Bernabeu，Phase-unwrappingalgorithm based on an adaptive criterion [J]，Applied Optics，1995，34（14）：2560~2563.
[160] D. C. Ghiglia，L. A. Romero，Direct phase estimation from phasedifferences using fast elliptic partial differential equation solvers [J]，Optic Letters，1989，14（20）：1107~1109.
[161] J. M. Huntley，H. Saldner，Temporal phase-unwrapping algorithm forautomated interferogram analysis [J]，Applied Optics，1993，32（17）：3047~3052.
[162] Hong Zhao，Wenyi Chen，Yushan Tan，Phase-unwrapping algorithm for themeasurement of three-dimensional object shape [J]，Applied Optics，1994，33（20）：4497~4500.
[163] J. M. Huntley，H. O. Saldner，Shape measurement by temporal phaseunwrapping: comparision of unwrapping algorithms [J]，Meas. Sci. Technol.，1997，8：986~992.
[164] J. M. Huntley，H. O. Saldner，Error-reduction methods for shapemeasurement by temporal phase unwrapping [J]，Opt. Soc. Am. A.，1997，14（12）：3188~3196.
[165] W. Nadeborn，P. Andr，W. Osten，Robust procedure for absolute phasemeasurement [J]，Optics and Lasers in Engineering，1995，24（2-3）：245~260.
[166] D. R. Burton，M. J. Lalor，Multichannel Fourier fringe analysis as an aid toautomatic phase unwrapping [J]，Applied Optics，1994，33（14）：2939~2949.
[167]盖绍彦，达飞鹏，一种新的快速解相位方法[J]，光学学报，2008，28（2）：259~267.
[168]马颂德，张正友，计算机视觉——计算理论与实践[M]，北京：科学出版社，1998.
[169]吴立德，计算机视觉[M]，上海：复旦大学出版社，1993，7~10，119~129.
[170] Faig W.，Calibration of close-range photogrammetric system: mathematicalformulation [J]，American Society of Photogrammetry，1975，41（12）：1479~1486.
[171] Y. I. Abdel-Aziz，H. M. Karara，Direct linear transformation into objectspace coordinates in close-range photogrammetry [C]，Proc. Symposium onClose-Range Photogrammetry，Urbana，Unibersity of Illinios，1971：1~18.
[172] Martins H. A.，Birk J. R.，Kelley R. B.，Camera models based on data fromtwo calibration planes [J]，Computer Graphics and Imaging Processing，1981，17：173~180.
[173] Tsai R. Y.，An efficient and accurate camera calibration technique for3Dmachine vision [C]，Proc. CV PR’86，364~374.
[174] Tasi R. Y.，A versatile camera calibration technique for high-accuracy3Dmachine vision metrology using off-the-shelf TV cameras and lenses [C]，IEEEJournal of robotics and automation，1987，RA-3（4）：323~344.
[175] Zhengyou Zhang，A flexible new technique for camera calibration [C]，IEEE Transactions on Pattern Analysis and Machnie Intelligence，2000，22（11）：1330~1334.
[176] Maybank S. J.，Faugeras O. D.，A theory of self-calibratin of a movingcamera [J]，Int. J. Computer Vision，1992，8（2）：123~151.
[177] Hartley R.，Euclidean reconstruction and invariants from multiple images
[C]，IEEE Transactions on Pattern Analysis and Machine Intelligence，1994，16（10）：1036~1041.
[178] Pollefeys M.，Van Gool L.，Oosterlinck A.，The modulus constraint: A newconstraint for self-calibration [C]，Proceedings of International Conference of PatternRecognition，Vienna，1996，349~353.
[179] Triggs B.，Auto-calibration and absolute quadric [J]，Proceedings ofComputer Vision and Pattern Recognition，1997，604~614.
[180] Ma S. D.，A self-calibration technique for active vision systems [C]，IEEETrans, Robotics and Automation，1996.
[181]章毓晋，图像分割[M]，北京：科学出版社，2001：43~44.
[182]何斌，马天予，王运坚，VC++数字图像处理，北京：人民邮电出版社，2001，435~444.
[183]刘书桂，李蓬，那永林，基于最小二乘原理的平面任意位置椭圆的评价[J]，计量学报，2002，23（4）：245~247.
[184] N. E. Coleman，R. Jain，Obtaining3-dimensional shape of textured andspecular surfaces using for-source photometry [C]，CGIP，1982，18：309~328.
[185] G. Healey，R. Jain，Depth recovery from surface normals [C]，ICPR’84，Montreal，Canada，1984，894~896.
[186] Z. Wu，L. Li，A line-integration based method for depth recovery fromsurface normals [J]，Computer Vision, Graphics, and Image Processing，1988，43：53~66.
[187] T. Wei，R. Klette，A wavelet-based algorithm for height from gradients [J]，Lecture Notes in Computer Science，1998，2001：84~90.
[188] T. Wei，R. Klette，A new algorithm for Gradient field integration [J]，Imageand Vision Computing New Zealand (IVCNZ’2001)，Dunedin，New Zealand，2001.
[189] Klette P.，Schluns K.，Height data from gradient fieleds [C]，Proc. SPIE，1996，2908：204~215.
[190]周仁忠，自适应光学理论[M]，北京：国防工业出版社，1996：283~290.
[191] Tiangong Wei，Reinhard Klette，Height from gradient using surfacecurvature and area constraints [J]，Communication and Information TechnologyResearch Techniccal Report，2001，109.
[192] G. H. Golue，C. Reinsch，Singular value decomposition and least squaressolutions [J]，Numer Math，1970，14：403~420.
[193] W. H. Southwell，Wave-front estimation from wave-front slopemeasurement [J]，Opt. Soc. Am.，70（8）：998~1006.
[194] Berthold K. P. Horn，Michael J. Brooks，the variational approach to shapefrom shading [J]，1985，1~33.
[195] Rafael C. Gonzalez，Richard E. Woods，Steven L. Eddins，Digital ImageProcessing (3rdEdition)[M]，Prentice Hall，2010.
[196] Richard O. Duda，Peter E. Hart，David G. Stork，Pattern Classification (2edEdition)[M]，Wiley，2000.
[197]何永辉，蒋剑锋，赵万生，基于扫描白光干涉法的表面三维轮廓仪[J]，光学技术，2001，27（2）：150~152.
[198] Leslie Deck，Peter de Groot，High-speed non-contact profiler based onscanning white-light interferometry [J]，Applied Optics，1994，33（31）：424~426.
[199] Sinclair，et. al.，Long working distance incoherent interference microscope，US Patent，US7034271B1，2006
[200] B. S. Lee，T. C. Strand，Profilometry with a coherence scanning microscope[J]，Applied Optics，1990，29：3784~3788.
[201] B. L. Danielson，C. Y. Loisrobert，Absolute optical ranging using lowcoherence interferometry [J]，Applied Optics，1991，30：2975~2979.
[202] T. Dreset，G. Hauster，H. Venzke，Three-dimensional sensing of roughsurfaces by coherence rader，Applied Optics，1992，31：919~925.
[203] Joanna Schmit，Artur Olszak，High-preicision shape measurement bywhite-light interferometry with real-time scanner error correction [J]，Applied Optics，2002，41（28）：5943~5950.
[204] Maitreyee Roy, Colin J. R. Sheppard，Guy Cox，et. al.，White-lightinterference microscopy: a way to obtain high lateral resolution over an extendedrange of heights [J]，Optics Express，2006，16（15）：6788~6793.
[205] Slava G. Turyshev，Analytical modeling of the white light fringe [J]，Applied Optics，2003，42（1）：71~90.
[206] Bruning J. H.，Herriott D. R.，Gallagher J. E.，et. al.，Digital wavefrontmeasuring interferometer for testing optical surfaces and lenses [J]Applied Optics，1974，13（11）：2693~2703.
[207]许万里，郑伟等，用相移干涉法测量表面三维轮廓的研究[J]，传感器技术，2001，20（8）：19~21/
[208] G. S. Kino，S. S. C. Chim，Mirau correlation microscope [J]，AppliedOptics，1990，29：3775~3783.
[209] Bankhead A.，Surface profiling apparatus，UK Patent，GB2386417B，2004.
[210] Chiayu Ai，Erik L. Novak，Centroid approach for estimating modulationpeak in broad-brandwidth interferometry，United States Patens：5633715，1915.
[211] De Groot P，et. al.，Determination of fringe order in white-light interferencemicroscopy [J]，Applied Optics，2002，41：4571~4578.
[212] Akira Hirabayashi，Hidemttsu Ogawa，Katsuichi Kitagawa，Fast surfaceprofiler by white-light interferometry by use of a new algorithm based on samplingtheory [J]，Applied Optics，2002，41：4876~4883.
[213] D. A. Zwing，R. E. Hufnagel，A Hilbert transform algorithm forfringe-pattern analysis，Advanced Optical Manufacturing and Testing，Proc. SPIE，1333，295~302.
[214] Stanley S. C. Chim，Gordon S. Kino，Three-dimensional image realizationin interference microscopy，Applied Optics，1992，31：2550~2553.
[215] P. Sandoz， Wavelet transform as processing tool in white-lightinterferometry [J]，Opt. Lett.，1997，22：1065~1067.
[216] Recknagel R. J.，Analysis of white-light interferograms using waveletmethods [J]，Optics Communications，1998，148：122~128.
[217] Peter de Groot，Leslie Deck，Surface profiling by analysis of white-lightinterferograms in the spatial frequency domain [J]，J. Mod. Opt.，1995，42（2）：389~401.
[218] Peter de Groot，Xaier Colonna de Lega，Jim Kramer，et. al.，Determinationof fringe order in white-light interference microscopy [J]，Applied Optics，2002，41：4571~4578.
[219] Peter de Groot，Xaier Colonna de Lega，Signal modeling for low coherenceheight scanning interference microscopy [J]，Applied Optics，2004，43：4821~4830.
[220] Katherine Creath，Phase-measurement interferometry techniques [J]，Progress in Optics，1988，26：349~393.
[221] Danielson B. L.， Absolute optical ranging using low coherenceinterferometry [J]，Applied Optics，1991，30：2975~2979.
[222] K. G. Larkin，Efficient non-linear algorithm for envelope detection in whitelight interferometry，J. Opt. Soc. Am. A，1996，13（4）：832~843.
[223] P. Sandoz，R. Devillers，A. Plata，Unambiguous profilometry byfringe-order identification in white-light phase-shifting interferometry [J]，J. Mod.Opt.，1997，44：519~534.
[224] P. Sandoz，An algorithm for profilometry by white-light phase-shiftinginterferometey [J]，J. Mod. Opt.，1996，43：1545~1554.
[225] Akiko Harasaki，Improved Vertical Scanning Interferometry，nb，2000.
[226] Min-Cheol Park，Seung-Woo Kim，Direct quadratic polynomial fitting forfringe peak detection of white-light scanning interferograms [J]，Opt. Eng.，2000，39：952~659.
[227] Seok-moon Ryoo，Tae-Sun Choi，3-D profilometry by analysis of noisywhite-light interferograms [C]，Proc. SPIE，2000，3919：152~160.
© 2004-2018 中国地质图书馆版权所有 京ICP备05064691号 京公网安备11010802017129号 地址：北京市海淀区学院路29号 邮编：100083 电话：办公室：(+86 10)66554848；文献借阅、咨询服务、科技查新：66554700 |