微型光纤干涉型氢气传感器关键技术研究
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摘要
氢气作为一种清洁能源,在现代工业中有着极大的潜在应用价值。由于其自身易燃易爆的缺点,利用本质安全的氢气传感器来检测其泄漏成为人们日益关注的问题。光纤氢气传感器具有体积小、重量轻、以及抗电磁干扰等优点,成为目前研究的热点。其中,干涉型光纤氢气传感器已有长期的研究工作,其具有测量精度高、重复性好、误差小等优点,但不适合在某些安装位置狭小或对传感器集成化要求较高的场合应用。近年来,光纤氢气传感器朝着微型化及高灵敏度方向发展。并且,传统的光纤干涉型氢气传感器一般利用焊接或者毛细管封装的方法制作,其制作工序复杂,不利于批量生产。飞秒激光微加工技术为干涉型光纤氢气传感器的微型化及高效制作提供了一种新技术。
本文对微型光纤干涉型氢气传感器深入研究,对飞秒激光微加工及磁控溅射镀膜技术进行了深入探讨,研究基于Mach-Zehnder、Fabry-Perot、Michelson干涉原理的三种不同微结构的氢气传感器,建立光学设计模型,理论分析其传感性能,实验研究该传感器的氢气响应特性,验证这种氢气检测方法的可行性。本文主要研究工作如下：
(1)提出了利用飞秒激光微加工及磁控溅射镀膜技术相结合制作微型光纤干涉型氢气传感器的方法。利用飞秒激光微加工可以通过计算机准确控制飞秒激光微加工腔长,具有精度较高、重复性好的优点,且这类干涉型光纤氢气传感器本质安全,制作简单,灵敏度较高,结构紧凑,尺寸一般为微米级,适用于空间有限的场合。
(2)研究了飞秒激光微加工和磁控溅射镀膜工艺,为微型光纤干涉型氢气传感器的制备提供实验基础。微结构的加工及氢敏感薄膜的制备是光纤氢气传感器制作中很重要的部分,其制作性能的优劣会直接影响检测的准确性及稳定性。
(3)设计并研究微型Mach-Zehnder干涉型光纤氢气传感器,系统地分析其传感原理,建立光学模型计算其不同条件下光谱变化,详细介绍了微型Mach-Zehnder干涉型光纤氢气传感器的制备方法,并研究其在不同氢气浓度下的响应特性。在微加工腔长为40μm,Pd膜厚度为110m的情况下,Mach-Zehnder干涉型光纤氢气传感器的波长漂移率为～0.155nm/%。实验表明这种传感器具有较高的灵敏度,与现有的光纤氢气传感器相比,其制作简单、结构紧凑、体积小,因此在光纤氢气传感领域具有潜在应用价值。
(4)研究了一种微型Fabry-Perot干涉型光纤氢气传感器的制作方法,详细分析了基于Fabry-Perot原理的光纤氢气传感器的工作原理,建立光学模型分析不同条件下其光谱变化,并研究了这种传感器对不同氢气浓度的响应特性。实验表明,Pd膜厚度为20nm的F-P光纤干涉仪(L1=20μm,L2=50μm)在氢气浓度分别为2%,4%,6%,8%时,在1298.42nm的波长漂移量分别为10pm,30pm,100pm和150pm。与微型Mach-Zehnder干涉型光纤氢气传感器相比,微型Fabry-Perot于涉型光纤氢气传感器灵敏度稍低,但是其采用的是检测反射光谱变化的方法,传感头结构更小,更符合微型化发展要求。
(5)研究了基于Michelson原理的微型光纤氢气传感器,详细阐述了其工作原理,模拟分析结构参数变化对其性能的影响,并研究了其氢气浓度响应特性。实验中随着氢气浓度增加,样品在1280nm和1330nm的波峰向左漂移,其波长漂移率为-0.155nm/%和-0.1625nm/%。与基于Mach-Zehnder干涉的微型光纤氢气传感器相比,微型Michelson干涉型光纤氢气传感器和微型Fabry-Perot干涉型光纤氢气传感器采用的是检测其反射光谱变化的方法,其传感头结构更小,其中Michelson干涉型光纤氢气传感器灵敏度较高。
With the development of society and industry, hydrogen has been an important industrial raw material extensively used in many fields such as chemical industry, electronic industry, and metallurgical industry, etc. However the hydrogen is flammable and explosive; thus it is of great importance to precisely detect hydrogen concentration and monitor leakage. Optical fiber hydrogen sensors have attracted considerable research interests in recent years because of their advantages of small size, light weight, compactness, good reliability and electromagnetic immunity. However, the sensor is not suitable for the limited space or high integration. The recent research efforts have focused on miniaturization and high sensitivity. The traditional methods to fabricate the sensors by welding and capillary encapsulation are complicated, and difficult to be applied in mass production. The femtosecond(fs) laser has provided a new plateform and process for sensor fabrication.
In this dissertation, fs laser fabricated miniature interferometric optical fiber hydrogen sensors coated with Pd films are proposed and developed. The optical fiber hydrogen sensors based on interferometer, such as Mach-Zehnder interferometer, Fabry-Perot interferometer, and Michelson interferometer, are analyzed and discussed under different conditions, and the novel sensors have high potential in hydrogen sensing. The main contents are listed as follows:
(1) The miniature interferometric optical fiber hydrogen sensor fabricated by a new method is proposed. The proposed sensors in the micrometer size are compact, easy in fabrication and have high potentials in hydrogen concentration detection.
(2) The materials micromachining methods and procedures with fs laser micromachining have been investigated systematically. Thus, the miniature interferometric optical fiber hydrogen sensors can be fabricated with optimal processing parameters.
(3) The working principle of the miniature optical fiber hydrogen sensor based on Mach-Zehnder interferometer has been analyzed and the transmission characteristic of the sensor is discussed with optical model simulation under different conditions. The sensor is measured in the hydrogen volume concentration range of0-16%, and the sensitivity of the sensor (L=40μm, dfilm=110nm) is-0.155nm/%. Experimental results show that the miniature sensor has high sensitivity, and is featured by small size as compared to the existing hydrogen sensor.
(4) The fs laser fabricated miniature Fabry-Perot interferometer hydrogen sensor coated with Pd film has been proposed and investigated. The corresponding reflection characteristics to hydrogen concentration have been discussed, and the wavelength shifts of the sensor (L1=20μm, Li=50μm) are10,30,100, and150pm respectively, corresponding to the hydrogen concentration of2%,4%,6%,8%, respectively. The sensitivity of the miniature Fabry-Perot interferometer hydrogen sensor is lower than that of the Mach-Zehnder interferometer, but the detection of reflection spectra leads to a smaller size.
(5) The fs laser fabricated miniature Michelson interferometer with Pd film deposited on the fiber end face is proposed and demonstrated for hydrogen detection. The experimental results show that the reflection spectrum experiences a blue-shift, and the sensitivity of the sensor are-0.155nm/%at1280nm and-0.1625nm/%at1330nm. As the reflection spectra are detected, the sensor is almost the same size as the miniature Fabry-Perot interferometer hydrogen sensor. And it has higher sensitivity than the Mach-Zehnder interferometer and Fabry-Perot interferometer.
本文对微型光纤干涉型氢气传感器深入研究,对飞秒激光微加工及磁控溅射镀膜技术进行了深入探讨,研究基于Mach-Zehnder、Fabry-Perot、Michelson干涉原理的三种不同微结构的氢气传感器,建立光学设计模型,理论分析其传感性能,实验研究该传感器的氢气响应特性,验证这种氢气检测方法的可行性。本文主要研究工作如下：
(1)提出了利用飞秒激光微加工及磁控溅射镀膜技术相结合制作微型光纤干涉型氢气传感器的方法。利用飞秒激光微加工可以通过计算机准确控制飞秒激光微加工腔长,具有精度较高、重复性好的优点,且这类干涉型光纤氢气传感器本质安全,制作简单,灵敏度较高,结构紧凑,尺寸一般为微米级,适用于空间有限的场合。
(2)研究了飞秒激光微加工和磁控溅射镀膜工艺,为微型光纤干涉型氢气传感器的制备提供实验基础。微结构的加工及氢敏感薄膜的制备是光纤氢气传感器制作中很重要的部分,其制作性能的优劣会直接影响检测的准确性及稳定性。
(3)设计并研究微型Mach-Zehnder干涉型光纤氢气传感器,系统地分析其传感原理,建立光学模型计算其不同条件下光谱变化,详细介绍了微型Mach-Zehnder干涉型光纤氢气传感器的制备方法,并研究其在不同氢气浓度下的响应特性。在微加工腔长为40μm,Pd膜厚度为110m的情况下,Mach-Zehnder干涉型光纤氢气传感器的波长漂移率为～0.155nm/%。实验表明这种传感器具有较高的灵敏度,与现有的光纤氢气传感器相比,其制作简单、结构紧凑、体积小,因此在光纤氢气传感领域具有潜在应用价值。
(4)研究了一种微型Fabry-Perot干涉型光纤氢气传感器的制作方法,详细分析了基于Fabry-Perot原理的光纤氢气传感器的工作原理,建立光学模型分析不同条件下其光谱变化,并研究了这种传感器对不同氢气浓度的响应特性。实验表明,Pd膜厚度为20nm的F-P光纤干涉仪(L1=20μm,L2=50μm)在氢气浓度分别为2%,4%,6%,8%时,在1298.42nm的波长漂移量分别为10pm,30pm,100pm和150pm。与微型Mach-Zehnder干涉型光纤氢气传感器相比,微型Fabry-Perot于涉型光纤氢气传感器灵敏度稍低,但是其采用的是检测反射光谱变化的方法,传感头结构更小,更符合微型化发展要求。
(5)研究了基于Michelson原理的微型光纤氢气传感器,详细阐述了其工作原理,模拟分析结构参数变化对其性能的影响,并研究了其氢气浓度响应特性。实验中随着氢气浓度增加,样品在1280nm和1330nm的波峰向左漂移,其波长漂移率为-0.155nm/%和-0.1625nm/%。与基于Mach-Zehnder干涉的微型光纤氢气传感器相比,微型Michelson干涉型光纤氢气传感器和微型Fabry-Perot干涉型光纤氢气传感器采用的是检测其反射光谱变化的方法,其传感头结构更小,其中Michelson干涉型光纤氢气传感器灵敏度较高。
With the development of society and industry, hydrogen has been an important industrial raw material extensively used in many fields such as chemical industry, electronic industry, and metallurgical industry, etc. However the hydrogen is flammable and explosive; thus it is of great importance to precisely detect hydrogen concentration and monitor leakage. Optical fiber hydrogen sensors have attracted considerable research interests in recent years because of their advantages of small size, light weight, compactness, good reliability and electromagnetic immunity. However, the sensor is not suitable for the limited space or high integration. The recent research efforts have focused on miniaturization and high sensitivity. The traditional methods to fabricate the sensors by welding and capillary encapsulation are complicated, and difficult to be applied in mass production. The femtosecond(fs) laser has provided a new plateform and process for sensor fabrication.
In this dissertation, fs laser fabricated miniature interferometric optical fiber hydrogen sensors coated with Pd films are proposed and developed. The optical fiber hydrogen sensors based on interferometer, such as Mach-Zehnder interferometer, Fabry-Perot interferometer, and Michelson interferometer, are analyzed and discussed under different conditions, and the novel sensors have high potential in hydrogen sensing. The main contents are listed as follows:
(1) The miniature interferometric optical fiber hydrogen sensor fabricated by a new method is proposed. The proposed sensors in the micrometer size are compact, easy in fabrication and have high potentials in hydrogen concentration detection.
(2) The materials micromachining methods and procedures with fs laser micromachining have been investigated systematically. Thus, the miniature interferometric optical fiber hydrogen sensors can be fabricated with optimal processing parameters.
(3) The working principle of the miniature optical fiber hydrogen sensor based on Mach-Zehnder interferometer has been analyzed and the transmission characteristic of the sensor is discussed with optical model simulation under different conditions. The sensor is measured in the hydrogen volume concentration range of0-16%, and the sensitivity of the sensor (L=40μm, dfilm=110nm) is-0.155nm/%. Experimental results show that the miniature sensor has high sensitivity, and is featured by small size as compared to the existing hydrogen sensor.
(4) The fs laser fabricated miniature Fabry-Perot interferometer hydrogen sensor coated with Pd film has been proposed and investigated. The corresponding reflection characteristics to hydrogen concentration have been discussed, and the wavelength shifts of the sensor (L1=20μm, Li=50μm) are10,30,100, and150pm respectively, corresponding to the hydrogen concentration of2%,4%,6%,8%, respectively. The sensitivity of the miniature Fabry-Perot interferometer hydrogen sensor is lower than that of the Mach-Zehnder interferometer, but the detection of reflection spectra leads to a smaller size.
(5) The fs laser fabricated miniature Michelson interferometer with Pd film deposited on the fiber end face is proposed and demonstrated for hydrogen detection. The experimental results show that the reflection spectrum experiences a blue-shift, and the sensitivity of the sensor are-0.155nm/%at1280nm and-0.1625nm/%at1330nm. As the reflection spectra are detected, the sensor is almost the same size as the miniature Fabry-Perot interferometer hydrogen sensor. And it has higher sensitivity than the Mach-Zehnder interferometer and Fabry-Perot interferometer.
引文
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