低温共烧陶瓷基片集成波导滤波器研究
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摘要
基片集成波导（SIW）滤波器不但具有与传统金属波导滤波器类似的品质因素高、损耗低、功率容量大等特点，而且更易于加工和平面集成。特别是低温共烧陶瓷（LTCC）技术与基片集成波导技术的结合，使得实现小型化和高性能的基片集成波导滤波器成为可能。本文基于基片集成波导的理论和技术，结合LTCC技术的三维布局特点，提出一系列多层结构的小体积、高集成度和高选择性的基片集成波导滤波器。本文的主要工作如下：
首先，本文系统地叙述了低温共烧陶瓷基片集成波导滤波器的设计和工艺基础。包括基片集成波导滤波器的谐振腔特点、过渡结构和腔间耦合方式，以及LTCC技术的特点、材料和工艺流程，并着重对滤波器加工过程中的几个关键工序，进行了分析和优化，为LTCC基片集成波导滤波器研究的开展奠定基础。
其次，本文研究了多种耦合拓扑结构，提出了一系列新颖的多层基片集成波导滤波器。首先基于经典交叉耦合拓扑，通过多层矩形腔基片集成波导滤波器的设计和制备，验证了基片集成波导滤波器在多层LTCC结构中的可行性。在此基础上，提出了六边形基片集成波导谐振器，该结构兼具矩形和圆形谐振腔的特点，并通过设计和制备平面和多层六边形基片集成波导滤波器验证了该谐振器结构的实用性。然后，为了减小滤波器体积并改善其选择特性，本文还对多传输路径的耦合拓扑进行了研究，分别提出了一种新型的多层改进双胞基片集成波导滤波器，即通过将两个谐振器分别垂直放置在输入/输出波导段的上方和下方，该滤波器可以方便的实现和调整的耦合性质和强度，具有灵活的频率选择特性；以及提出一种多层二阶折叠对称基片集成波导滤波器，即通过在源和负载之间引入直接耦合，该滤波器可获得与阶数相同的传输零点；最后基于多层改进三胞结构，提出一种源/负载与谐振器交叉耦合的滤波器，并研究了级联多层改进三胞结构的基片集成波导滤波器，该滤波器具有体积小、集成度高和带外选择性好的优点。
然后，为了在不增加谐振器数目的前提下获得更多的信号传输路径和传输零点，进一步提高多层基片集成波导滤波器的带外选择性，本文利用叉指型槽线结构将混合耦合引入到谐振腔之间的耦合中，提出并验证了一系列新型的基于LTCC多层结构的混合电磁耦合基片集成波导滤波器。包括混合电磁耦合多层改进双胞基片集成波导滤波器，混合电磁耦合多层折叠对称基片集成波导滤波器和混合电磁耦合多层改进三胞基片集成波导滤波器。该系列滤波器通过在源和负载之间引入混合耦合，可以额外增添了一条信号传输路径，从而可在带外增加一个传输零点，在改善滤波器选择特性的同时，依然保持小型化和高集成度的特点。
最后，本文还对结构简单但却拥有多个传输路径的基片集成波导双模滤波器进行了研究。首先介绍了双模谐振器的特点、谐振模式、激励方式和设计综合方法。提出了单腔源/负载混合耦合双模基片集成波导滤波器，该滤波器只需一个谐振腔就能实现带外三个传输零点，具有插入损耗小、带外选择性高等优点。此外，利用低温共烧陶瓷技术设计了多层双腔基片集成波导双模滤波器，测试与仿真结果基本吻合，证实了采用多层技术设计的双腔双模基片集成波导滤波器比传统平面结构的双模基片集成波导滤波器具有更好的选择特性，更小的体积和更高的集成度。
Substrate integrated waveguide (SIW) filters not only have high quality factor, lowinsertion loss and high power capability which are similar to the conventional metalwaveguide, but also have the characteristics of easy integration and fabrication.Particularly, the application of low-temperature co-fired ceramic (LTCC) technologymakes the realization of multilayered SIW filters with compact size, light weight andhigh performance possible, owing to its three dimensional integration characteristic,low-tolerance in manufacturing process, and low loss of high-frequency ceramicmaterials. Based on the basic theory of SIW technology and the LTCC3D structure, thisdissertation presents a series design of multilayer SIW filter with the features ofcompact size, high integration and high selectivity. It is summarized as follows:
Firstly, the elementary principles of design and process on the LTCC multilayerSIW filters is systematically illustrated, which including resonator cavities, transitions,coupling manners of SIW, and features, materials and processes of LTCC. In addition,the analyses and optimizations of several key procedures during the manufacturingprocess are emphasized to lay the foundation for later design and fabrication ofmultilayer SIW filters.
Secondly, several novel SIW filters with LTCC multilayer structures are proposedin this dissertation. Based on the canonical cross-coupled topology, multilayerrectangular SIW filters are designed and fabricated to verify the feasibility of multilayerSIW filters in LTCC structure. Subsequently, the hexagonal SIW resonators which cancombine flexibility of rectangular cavities and performance of circular cavities, arepresented for the first time. Then the practicability of the proposed hexagonal SIWresonators is proved by constructing planar and multilayer hexagonal SIW filters.Whereafter, to reduce the sizes of the SIW filters and improve their selectivities, thecoupling topologies of multi-transmission channels are investigated in this dissertation.Then three types of SIW filters with these topologies are proposed as follows. A SIWfilter with multilayer modified doublet (MMD) is proposed. The MMD comprises two resonators that are not coupled to each other, whereas the two resonators are placedbelow and above the I/O SIW, respectively. The proposed filter has two transmissionzeros which can be controlled flexibly by adjusting the coupling strength and modifyingcoupling manner. Besides, a compact SIW symmetric filter with source-load coupling ispresented. The number of its transmission zeros is same with the order of the filter.Moreover, multilayer modified trisection (MMT) and its applications to SIW filters arepresented. In virtue of flexible coupling manner of multilayer structure, the proposedfilters exhibit the merits of both miniature size and high selectivity.
Thirdly, to obtain more signal transmission paths and zeros for improving stopbandcharacteristics without increasing the sizes of SIW filters, several novel SIW filters withan interdigital slot-line (ISL) to introduce mixed coupling into two cavities are proposed.Those filters with mixed coupling structures, including the SIW filter with MMD, thesymmetric SIW filter, and the SIW filter with MMT, are studied and discussed,respectively. An additional signal path can be achieved by introducing mixed couplinginto SIW filters, which can add a transmission zero in the passpand without increasingthe sizes of the filters.
Finally, the SIW dual-mode filters with simple structure and high performance areproposed. The characteristics, resonator modes, feeding structures, and the synthesismethods of the SIW dual-mode filters are analyzed and discussed. A novel dual-modeSIW filter with mixed source-load coupling is presented. The proposed filter with singlecavity could have three transmission zeros to obtain low insertion loss and highselectivity. Furthermore, a LTCC multilayer SIW dual-mode filter is designed andfabricated. The measured results show good agreement with the simulated ones andvalidate the structure of the proposed filter. Compared with the conventional planar andsingle-layer structure, the multilayer dual-mode SIW filter exhibits the features withbetter selectivity, smaller size, and higher integration.
首先，本文系统地叙述了低温共烧陶瓷基片集成波导滤波器的设计和工艺基础。包括基片集成波导滤波器的谐振腔特点、过渡结构和腔间耦合方式，以及LTCC技术的特点、材料和工艺流程，并着重对滤波器加工过程中的几个关键工序，进行了分析和优化，为LTCC基片集成波导滤波器研究的开展奠定基础。
其次，本文研究了多种耦合拓扑结构，提出了一系列新颖的多层基片集成波导滤波器。首先基于经典交叉耦合拓扑，通过多层矩形腔基片集成波导滤波器的设计和制备，验证了基片集成波导滤波器在多层LTCC结构中的可行性。在此基础上，提出了六边形基片集成波导谐振器，该结构兼具矩形和圆形谐振腔的特点，并通过设计和制备平面和多层六边形基片集成波导滤波器验证了该谐振器结构的实用性。然后，为了减小滤波器体积并改善其选择特性，本文还对多传输路径的耦合拓扑进行了研究，分别提出了一种新型的多层改进双胞基片集成波导滤波器，即通过将两个谐振器分别垂直放置在输入/输出波导段的上方和下方，该滤波器可以方便的实现和调整的耦合性质和强度，具有灵活的频率选择特性；以及提出一种多层二阶折叠对称基片集成波导滤波器，即通过在源和负载之间引入直接耦合，该滤波器可获得与阶数相同的传输零点；最后基于多层改进三胞结构，提出一种源/负载与谐振器交叉耦合的滤波器，并研究了级联多层改进三胞结构的基片集成波导滤波器，该滤波器具有体积小、集成度高和带外选择性好的优点。
然后，为了在不增加谐振器数目的前提下获得更多的信号传输路径和传输零点，进一步提高多层基片集成波导滤波器的带外选择性，本文利用叉指型槽线结构将混合耦合引入到谐振腔之间的耦合中，提出并验证了一系列新型的基于LTCC多层结构的混合电磁耦合基片集成波导滤波器。包括混合电磁耦合多层改进双胞基片集成波导滤波器，混合电磁耦合多层折叠对称基片集成波导滤波器和混合电磁耦合多层改进三胞基片集成波导滤波器。该系列滤波器通过在源和负载之间引入混合耦合，可以额外增添了一条信号传输路径，从而可在带外增加一个传输零点，在改善滤波器选择特性的同时，依然保持小型化和高集成度的特点。
最后，本文还对结构简单但却拥有多个传输路径的基片集成波导双模滤波器进行了研究。首先介绍了双模谐振器的特点、谐振模式、激励方式和设计综合方法。提出了单腔源/负载混合耦合双模基片集成波导滤波器，该滤波器只需一个谐振腔就能实现带外三个传输零点，具有插入损耗小、带外选择性高等优点。此外，利用低温共烧陶瓷技术设计了多层双腔基片集成波导双模滤波器，测试与仿真结果基本吻合，证实了采用多层技术设计的双腔双模基片集成波导滤波器比传统平面结构的双模基片集成波导滤波器具有更好的选择特性，更小的体积和更高的集成度。
Substrate integrated waveguide (SIW) filters not only have high quality factor, lowinsertion loss and high power capability which are similar to the conventional metalwaveguide, but also have the characteristics of easy integration and fabrication.Particularly, the application of low-temperature co-fired ceramic (LTCC) technologymakes the realization of multilayered SIW filters with compact size, light weight andhigh performance possible, owing to its three dimensional integration characteristic,low-tolerance in manufacturing process, and low loss of high-frequency ceramicmaterials. Based on the basic theory of SIW technology and the LTCC3D structure, thisdissertation presents a series design of multilayer SIW filter with the features ofcompact size, high integration and high selectivity. It is summarized as follows:
Firstly, the elementary principles of design and process on the LTCC multilayerSIW filters is systematically illustrated, which including resonator cavities, transitions,coupling manners of SIW, and features, materials and processes of LTCC. In addition,the analyses and optimizations of several key procedures during the manufacturingprocess are emphasized to lay the foundation for later design and fabrication ofmultilayer SIW filters.
Secondly, several novel SIW filters with LTCC multilayer structures are proposedin this dissertation. Based on the canonical cross-coupled topology, multilayerrectangular SIW filters are designed and fabricated to verify the feasibility of multilayerSIW filters in LTCC structure. Subsequently, the hexagonal SIW resonators which cancombine flexibility of rectangular cavities and performance of circular cavities, arepresented for the first time. Then the practicability of the proposed hexagonal SIWresonators is proved by constructing planar and multilayer hexagonal SIW filters.Whereafter, to reduce the sizes of the SIW filters and improve their selectivities, thecoupling topologies of multi-transmission channels are investigated in this dissertation.Then three types of SIW filters with these topologies are proposed as follows. A SIWfilter with multilayer modified doublet (MMD) is proposed. The MMD comprises two resonators that are not coupled to each other, whereas the two resonators are placedbelow and above the I/O SIW, respectively. The proposed filter has two transmissionzeros which can be controlled flexibly by adjusting the coupling strength and modifyingcoupling manner. Besides, a compact SIW symmetric filter with source-load coupling ispresented. The number of its transmission zeros is same with the order of the filter.Moreover, multilayer modified trisection (MMT) and its applications to SIW filters arepresented. In virtue of flexible coupling manner of multilayer structure, the proposedfilters exhibit the merits of both miniature size and high selectivity.
Thirdly, to obtain more signal transmission paths and zeros for improving stopbandcharacteristics without increasing the sizes of SIW filters, several novel SIW filters withan interdigital slot-line (ISL) to introduce mixed coupling into two cavities are proposed.Those filters with mixed coupling structures, including the SIW filter with MMD, thesymmetric SIW filter, and the SIW filter with MMT, are studied and discussed,respectively. An additional signal path can be achieved by introducing mixed couplinginto SIW filters, which can add a transmission zero in the passpand without increasingthe sizes of the filters.
Finally, the SIW dual-mode filters with simple structure and high performance areproposed. The characteristics, resonator modes, feeding structures, and the synthesismethods of the SIW dual-mode filters are analyzed and discussed. A novel dual-modeSIW filter with mixed source-load coupling is presented. The proposed filter with singlecavity could have three transmission zeros to obtain low insertion loss and highselectivity. Furthermore, a LTCC multilayer SIW dual-mode filter is designed andfabricated. The measured results show good agreement with the simulated ones andvalidate the structure of the proposed filter. Compared with the conventional planar andsingle-layer structure, the multilayer dual-mode SIW filter exhibits the features withbetter selectivity, smaller size, and higher integration.
引文
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