五自由度磁悬浮平面电机控制技术研究
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摘要
在许多高新技术领域，如集成电路制造、微型机械装配、生物细胞作业、超精密加工及测量和微外科手术等，都需要具有高速度和高精度的两维定位装置。然而传统的叠加式二维定位平台无法摆脱机械式传动机构和摩擦所带来的固有缺点：定位精度较低，响应速度慢，制造成本高。因此基于直接驱动的磁悬浮平面电机被人们提出来作为实现高速度和高精度定位的有效手段。与传统的两维定位装置相比，磁悬浮平面电机具有直接驱动、无摩擦和无反冲等优点。因此，开展平面电机的研究具有十分重要的现实意义。
本文提出了一种多自由度磁悬浮平面电机，以分析和解决磁悬浮平面电机的悬浮控制和平面定位控制为主线，对平面电机中动力学建模、耦合分析、鲁棒解耦控制器策略以及控制系统集成等一系列问题进行了深入研究，取得了如下的成果：
设计了基于直流吸引式的磁悬浮平面电机机械平台，该平台的定子在垂直方向布置4个U型电磁铁，水平方向布置8个I型电磁铁。通过垂直方向和水平方向的对动子的电磁吸引力驱动动子，使其在竖直方向实现悬浮，并在水平方向上进行平面运动。该磁悬浮平面电机具有以下特点：在垂直方向和水平方向的驱动方式上采用直流吸引式驱动提高了线圈的利用效率；工作台的悬浮与水平驱动部分互相独立，从结构上减少了电磁力相互之间的耦合；电机动子上不存在绕组与永磁阵列，避免了动子散热问题，便于对其进行精密控制。
完成了基于PC机的磁悬浮平面电机集成控制方案。该控制集成方案在硬件上采用PC机上插入基于PCI总线的输入输出卡，并外接模拟线性功率放大芯片的方式。软件上采用Windows平台上安装第三方多任务实时控制软件RTX的方式，实现在windows环境下的定时控制，最小定时周期可达0.1ms。在该软件平台下，开发了磁悬浮平面电机的实时控制与检测软件。通过软、硬件设计表明所设计的集成控制方案结构合理、使用灵活、可靠性好，适合磁悬浮平面电机的实时控制与数据检测。
为了提高悬浮方向上的控制性能，论文研究了磁悬浮电机在垂直方向上电磁力的建模方法，并针对电机垂直方向上的悬浮问题，设计了非线性鲁棒控制器。通过应用全局滑模算法，结合反馈线性化技术，提出了悬浮系统的抗参数不确定鲁棒控制器。通过仿真实验和控制实验验证了基于非线性技术的滑模控制器比传统PID控制器能够使磁悬浮系统获得更好的快速响应性和更强的抗干扰性能，并且能够在系统存在较大参数不确定时实现稳定控制。
针对磁悬浮平面电机在垂直方向上的多输入多输出耦合问题，论文建立了悬浮平台刚体动力学模型；设计了鲁棒解耦控制器使得控制器能够对动子各轴上的旋转角与位移量在互不影响的情况下进行单独控制。该控制器使用模糊滑模控制策略，能够消除磁悬浮系统中的参数不确定影响，对系统的参数不确定项进行估计，柔化控制器的输出，消除“抖振”。同时，在控制器中还设计了扩张观测器以提高平台的抗干扰能力。并通过实验验证了所设计的解耦控制器能够对磁悬浮平面电机悬浮方向上的3个自由度进行解耦，有较强的适应参数不确定和抑制外部扰动的能力。
研究了磁悬浮平面电机在XY平面内的控制方法。建立了磁悬浮平面电机动子在水平面内的动力学模型；针对平面定位的多输入多输出状态，提出了对X、Y轴负向驱动电磁线圈通以恒定电流以减少系统输入数量的控制方案，简化了控制量输入；应用模糊滑模控制算法与扩张观测器设计了3通道解耦鲁棒控制器，该控制器能够实现对悬浮动子多输入多输出耦合模型的解耦，并在控制过程中保持系统的鲁棒性。
综上所述，本文所论述的磁悬浮平面电机实验平台，集成控制方案，提出的系统简化控制输入方案以及所设计的非线性解耦控制器能够实现磁悬浮平面电机的五自由度控制，并使电机在直接驱动下实现精确的平面定位。对于进一步开发高精度大行程的平面定位装置具有一定的理论意义与实用价值。
The two-dimensional positioning device with high speed and high accuracy is needed in many modern high technology manufacturing fields, such as IC manufacturing, micro mechanical assembly, cell operation, ultra-precision measurement and microsurgery. However the traditional cascaded2dimensional positioning device has its intrinsic drawbacks:the positioning accuracy is low, response speed is slow and the manufacturing cost is high. Therefore the Magnetic Levitated Planar Motor (MLPM) is considered to be an effective way to achieve high speed and high accuracy positioning. Compared with the conventional two-dimensional positioning devices, the planar motor possesses many advantages such as direct driving, low friction (no friction), no backlash and high precision, thus it can work with not only high speed, but also high precision.
In this dissertation, a new design of multi-degree of freedoms magnetic levitated planar motor is proposed. We focus on the levitation control technique and planar positioning control technique. The key techniques of the MLPM control system, such as modeling technique, coupling analysis, robust control strategy, controller development and etc are studied deeply. And the main research contents and achievements are shown as follows:
The mechanical platform of MLPM based on the attractive direct current principle is designed. In the planar motor mechanical design, it consists a stator and a mover. In the stator, there are4U-shape electro-magnets which are installed vertically and8I-shape electro-magnets which are installed horizontally. The attractive magnetic forces from vertical and horizontal directions will drive the mover to be levitated in space and positioning in the plane. The MLPM has following characters:the efficiency of the electro-magnets is increased since the attractive direct current forces are applied in the design; the coupling effect of the magnetic forces are avoided in the structure since the mover is driven by vertical magnetic forces and horizontal forces independently; the heat dissipation problem is avoided since there is no coil or permanent arrays in the mover.
The integrated control system framework based on PC is proposed. In the control system, the hardwares of the control system consist of a PC, input&output card based on PCI bus and an analog linear power amplifier board. The software platform of the control system is Windows XP which is installed with multi-tasks real-time software:RTX. On this software platform, the minimal hard real-time period can be0.1ms. The real time control and measurement program for the MLPM is also developed on the software platform. This program can synchronously feedback the sensor data of the system, control the planar motor, and display the sensor data on the screen of the control PC. The control results of the experiments show that the integrated control system is practical and reliable, it is suitable for the real-time control&measurement of the MLPM.
For the MLPM, control technique is key for the system. In order to improve the levitation performance of the MLPM, the modeling method of the magnetic force is studied, and designed a nonlinear robust controller for the suspending problem of the MLPM. In the nonlinear robust controller which is robust against parameter perturbation, the Global Sliding Mode Control (GSMC) algorithm combined with feedback linearization technique are employed. Experiment and simulation results show that compared with classic PID, the proposed nonlinear robust controller provides better transient response performance and better robustness against the nonlinear parameter perturbation and will stabilize the MLPM in the levitated direction with large parameter uncertainty in the system.
In order to achieve the decoupling control for the MLPM in the vertical direction, we establish the3DOF rigid body dynamic model for the magnetic suspension; then the robust decoupling controller is designed to manipulate the mover to rotate along its axis or move along z axis independently. The proposed controller applies fuzzy sliding mode control algorithm to eliminate the effect of parameter uncertainty in the system model, moreover it will estimate the uncertainty of the system in control procedure, with the estimated uncertainty the sliding mode control output will be softened and the chattering phenomenon will be eliminated. Meanwhile, the extended state observer is employed in the controller to observe the external disturbance and improve the robustness against external disturbance. Experimental results show that the proposed controller can achieve the decoupling control in the3DOF of the MLPM while it is robust against internal parameter uncertainty and external disturbance.
The control technique for planar positioning of the MLPM is studied. First, the planar rigid body dynamic model of the MLPM mover is established; second, in order to reduce the inputs of the MLPM planar drive, a simplified control scheme is proposed. In the proposed control scheme, the electro-magnets in the negative direction of the X/Y axises are energized with constant direct current to provide negative magnetic drive force while the electro-magnets in the positive direction of the X/Y axises are used as the control inputs; then,3DOF decoupling robust controller are designed. The controller applies fuzzy sliding mode control algorithm combining extended state observer. with the proposed controller, the MLPM could achieve2DOF planar positioning. Planar positioning experimental results show that the MLPM proposed in this thesis is capable of generating translation of2mm in the X and Y axes.
To sum up, the magnetic levitation planar motor experimental platform, integrated control scheme, the proposed scheme to simplify the control input of the system and the design of nonlinear decoupling controller discussed in this paper can realize5DOF control of the magnetic levitation planar motor, and make the motor realize precision plane positioning in direct drive. For the further development of high precision large stroke plane positioning device, this paper has certain theoretical meaning and practical value.
本文提出了一种多自由度磁悬浮平面电机，以分析和解决磁悬浮平面电机的悬浮控制和平面定位控制为主线，对平面电机中动力学建模、耦合分析、鲁棒解耦控制器策略以及控制系统集成等一系列问题进行了深入研究，取得了如下的成果：
设计了基于直流吸引式的磁悬浮平面电机机械平台，该平台的定子在垂直方向布置4个U型电磁铁，水平方向布置8个I型电磁铁。通过垂直方向和水平方向的对动子的电磁吸引力驱动动子，使其在竖直方向实现悬浮，并在水平方向上进行平面运动。该磁悬浮平面电机具有以下特点：在垂直方向和水平方向的驱动方式上采用直流吸引式驱动提高了线圈的利用效率；工作台的悬浮与水平驱动部分互相独立，从结构上减少了电磁力相互之间的耦合；电机动子上不存在绕组与永磁阵列，避免了动子散热问题，便于对其进行精密控制。
完成了基于PC机的磁悬浮平面电机集成控制方案。该控制集成方案在硬件上采用PC机上插入基于PCI总线的输入输出卡，并外接模拟线性功率放大芯片的方式。软件上采用Windows平台上安装第三方多任务实时控制软件RTX的方式，实现在windows环境下的定时控制，最小定时周期可达0.1ms。在该软件平台下，开发了磁悬浮平面电机的实时控制与检测软件。通过软、硬件设计表明所设计的集成控制方案结构合理、使用灵活、可靠性好，适合磁悬浮平面电机的实时控制与数据检测。
为了提高悬浮方向上的控制性能，论文研究了磁悬浮电机在垂直方向上电磁力的建模方法，并针对电机垂直方向上的悬浮问题，设计了非线性鲁棒控制器。通过应用全局滑模算法，结合反馈线性化技术，提出了悬浮系统的抗参数不确定鲁棒控制器。通过仿真实验和控制实验验证了基于非线性技术的滑模控制器比传统PID控制器能够使磁悬浮系统获得更好的快速响应性和更强的抗干扰性能，并且能够在系统存在较大参数不确定时实现稳定控制。
针对磁悬浮平面电机在垂直方向上的多输入多输出耦合问题，论文建立了悬浮平台刚体动力学模型；设计了鲁棒解耦控制器使得控制器能够对动子各轴上的旋转角与位移量在互不影响的情况下进行单独控制。该控制器使用模糊滑模控制策略，能够消除磁悬浮系统中的参数不确定影响，对系统的参数不确定项进行估计，柔化控制器的输出，消除“抖振”。同时，在控制器中还设计了扩张观测器以提高平台的抗干扰能力。并通过实验验证了所设计的解耦控制器能够对磁悬浮平面电机悬浮方向上的3个自由度进行解耦，有较强的适应参数不确定和抑制外部扰动的能力。
研究了磁悬浮平面电机在XY平面内的控制方法。建立了磁悬浮平面电机动子在水平面内的动力学模型；针对平面定位的多输入多输出状态，提出了对X、Y轴负向驱动电磁线圈通以恒定电流以减少系统输入数量的控制方案，简化了控制量输入；应用模糊滑模控制算法与扩张观测器设计了3通道解耦鲁棒控制器，该控制器能够实现对悬浮动子多输入多输出耦合模型的解耦，并在控制过程中保持系统的鲁棒性。
综上所述，本文所论述的磁悬浮平面电机实验平台，集成控制方案，提出的系统简化控制输入方案以及所设计的非线性解耦控制器能够实现磁悬浮平面电机的五自由度控制，并使电机在直接驱动下实现精确的平面定位。对于进一步开发高精度大行程的平面定位装置具有一定的理论意义与实用价值。
The two-dimensional positioning device with high speed and high accuracy is needed in many modern high technology manufacturing fields, such as IC manufacturing, micro mechanical assembly, cell operation, ultra-precision measurement and microsurgery. However the traditional cascaded2dimensional positioning device has its intrinsic drawbacks:the positioning accuracy is low, response speed is slow and the manufacturing cost is high. Therefore the Magnetic Levitated Planar Motor (MLPM) is considered to be an effective way to achieve high speed and high accuracy positioning. Compared with the conventional two-dimensional positioning devices, the planar motor possesses many advantages such as direct driving, low friction (no friction), no backlash and high precision, thus it can work with not only high speed, but also high precision.
In this dissertation, a new design of multi-degree of freedoms magnetic levitated planar motor is proposed. We focus on the levitation control technique and planar positioning control technique. The key techniques of the MLPM control system, such as modeling technique, coupling analysis, robust control strategy, controller development and etc are studied deeply. And the main research contents and achievements are shown as follows:
The mechanical platform of MLPM based on the attractive direct current principle is designed. In the planar motor mechanical design, it consists a stator and a mover. In the stator, there are4U-shape electro-magnets which are installed vertically and8I-shape electro-magnets which are installed horizontally. The attractive magnetic forces from vertical and horizontal directions will drive the mover to be levitated in space and positioning in the plane. The MLPM has following characters:the efficiency of the electro-magnets is increased since the attractive direct current forces are applied in the design; the coupling effect of the magnetic forces are avoided in the structure since the mover is driven by vertical magnetic forces and horizontal forces independently; the heat dissipation problem is avoided since there is no coil or permanent arrays in the mover.
The integrated control system framework based on PC is proposed. In the control system, the hardwares of the control system consist of a PC, input&output card based on PCI bus and an analog linear power amplifier board. The software platform of the control system is Windows XP which is installed with multi-tasks real-time software:RTX. On this software platform, the minimal hard real-time period can be0.1ms. The real time control and measurement program for the MLPM is also developed on the software platform. This program can synchronously feedback the sensor data of the system, control the planar motor, and display the sensor data on the screen of the control PC. The control results of the experiments show that the integrated control system is practical and reliable, it is suitable for the real-time control&measurement of the MLPM.
For the MLPM, control technique is key for the system. In order to improve the levitation performance of the MLPM, the modeling method of the magnetic force is studied, and designed a nonlinear robust controller for the suspending problem of the MLPM. In the nonlinear robust controller which is robust against parameter perturbation, the Global Sliding Mode Control (GSMC) algorithm combined with feedback linearization technique are employed. Experiment and simulation results show that compared with classic PID, the proposed nonlinear robust controller provides better transient response performance and better robustness against the nonlinear parameter perturbation and will stabilize the MLPM in the levitated direction with large parameter uncertainty in the system.
In order to achieve the decoupling control for the MLPM in the vertical direction, we establish the3DOF rigid body dynamic model for the magnetic suspension; then the robust decoupling controller is designed to manipulate the mover to rotate along its axis or move along z axis independently. The proposed controller applies fuzzy sliding mode control algorithm to eliminate the effect of parameter uncertainty in the system model, moreover it will estimate the uncertainty of the system in control procedure, with the estimated uncertainty the sliding mode control output will be softened and the chattering phenomenon will be eliminated. Meanwhile, the extended state observer is employed in the controller to observe the external disturbance and improve the robustness against external disturbance. Experimental results show that the proposed controller can achieve the decoupling control in the3DOF of the MLPM while it is robust against internal parameter uncertainty and external disturbance.
The control technique for planar positioning of the MLPM is studied. First, the planar rigid body dynamic model of the MLPM mover is established; second, in order to reduce the inputs of the MLPM planar drive, a simplified control scheme is proposed. In the proposed control scheme, the electro-magnets in the negative direction of the X/Y axises are energized with constant direct current to provide negative magnetic drive force while the electro-magnets in the positive direction of the X/Y axises are used as the control inputs; then,3DOF decoupling robust controller are designed. The controller applies fuzzy sliding mode control algorithm combining extended state observer. with the proposed controller, the MLPM could achieve2DOF planar positioning. Planar positioning experimental results show that the MLPM proposed in this thesis is capable of generating translation of2mm in the X and Y axes.
To sum up, the magnetic levitation planar motor experimental platform, integrated control scheme, the proposed scheme to simplify the control input of the system and the design of nonlinear decoupling controller discussed in this paper can realize5DOF control of the magnetic levitation planar motor, and make the motor realize precision plane positioning in direct drive. For the further development of high precision large stroke plane positioning device, this paper has certain theoretical meaning and practical value.
引文
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