3000W灯泵浦脉冲Nd:YAG固体激光器技术研究
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摘要
本论文对大功率脉冲Nd:YAG激光器技术进行了探讨和研究，在脉冲Nd:YAG单元模块优化设计的基础上，通过对多棒串接谐振腔中晶体棒对准精度的理论研究，进行了多棒串接实验，分别采用六棒串接谐振腔和四棒串接两棒放大的MOPA结构获得了3000W以上的脉冲激光输出，并对两种结构进行了对比分析。
根据大功率脉冲Nd:YAG激光器的应用要求，对大功率固体激光器的技术方案进行对比分析，优化了脉冲Nd:YAG单元模块结构设计，给出了腔内六棒串接和四棒串接两棒放大的MOPA结构两种具体技术方案。
对脉冲Nd:YAG单元模块的泵浦均匀性和热应力进行了模拟计算，通过对最佳工作参数的实验研究，获得了平均功率为586W，峰值功率为3.45kW，最高单脉冲能量为34.9J的脉冲激光输出。电光效率为4.04%，光束质量为22.5mm×mrad，连续工作输出功率不稳定度为1.1%。
对不同切割方向Nd:YAG晶体的热退偏效应进行了理论和实验的探索研究，结果表明：[111]切割方向的Nd:YAG晶体，退偏大小不随偏振方向的变化而变化；[100]方向的Nd:YAG晶体热退偏与偏振方向有关，通过改变线偏振的方向可以获得热退偏最小的方向，这个方向上的热退偏小于[111]方向Nd:YAG棒的热退偏。
对Nd:YAG脉冲单元模块进行了无锥度直孔打孔应用，通过实验研究了脉冲组合方式、激光焦点位置、组合脉冲个数等因素对激光冲击打孔孔锥度的影响。采用能量递增的组合脉冲，激光焦点位于材料表面上方1.1~1.7mm，通过控制脉冲组合个数，在厚度为1.5mm和3mm的镍基高温合金材料上，获得孔径分别为480μm和510μm的直孔，重复打孔孔径误差约30μm，孔锥度<1%。
对六棒串接谐振腔晶体棒间距、热焦距对稳区范围的影响进行了理论分析。针对多棒串接脉冲激光器的串接需要，提出采用4×4矩阵研究晶体棒失调对谐振腔光轴、模体积和输出指向性的影响：（1）通过对谐振腔内晶体棒不同排列下失调导致的光轴变化的计算，给出了六棒串接谐振腔中晶体棒的对准精度范围，以及对光轴偏移影响最大的失调晶体棒排列方式；（2）通过对模体积损耗的模拟计算，给出了谐振腔内对模体积影响最大的晶体棒位置；（3）模拟了输出指向性随晶体棒失调量和热焦距的变化。
实验中调整激光模块，使每根晶体棒的失调角度≤0.037°，实现了六棒串接脉冲Nd:YAG激光器。采取调整晶体棒泵浦功率的方法对晶体棒热焦距不匹配进行补偿，在输入电功率87kW，占空比为17%时，最高输出功率为3043W，峰值功率17.75kW，最高单脉冲能量66J,光束参数乘积为26.3mm×mrad，电光转换效率3.5%。
研究了四棒串接两棒放大的MOPA结构中晶体棒失调对谐振腔光轴的影响，给出了MOPA结构中晶体棒的对准精度范围。研究了MOPA结构激光器中晶体棒间距、热焦距匹配的影响，结果表明：放大级晶体棒与振荡级晶体棒对称放置，热焦距相同时，可以有效利用晶体棒的模体积，提高放大级的能量提取效率，有利于获得高功率输出。
实验中，激光器采用四棒振荡两棒放大的MOPA结构，调整激光模块，使每根晶体棒的失调角度≤0.042°，在输入电功率87kW，占空比17%时，最高输出功率为3011W，峰值功率17.7kW，最高单脉冲能量为67J，光束参数乘积为：25.2mm×mrad。电光转换效率3.46%，长时间输出功率不稳定度小于2%。
与六棒串接脉冲激光器相比，MOPA结构具有以下优点：（1）MOPA结构谐振腔内晶体棒数量减少，更加容易实现棒间距和热焦距匹配；（2）MOPA结构晶体棒失调允许范围比六棒串接谐振腔的失调允许范围大，更容易达到串接精度要求；（3）在相同的角度失调量下，MOPA结构的的光轴偏移量更小。因而采用腔内四棒串接腔外两棒放大的MOPA结构，有利于实现高平均功率、高脉冲能量的激光输出，提高脉冲激光器工作的安全性。
In this paper, the technology of high power pulsed Nd:YAG laser is studied anddiscussed. Based on the optimized design of pulsed Nd:YAG module unit, thealignment accuracy of Nd:YAG rods in the resonator has been analyzed theoretically,and experiment of multi-rod series connection are carried out. Through six rodsseries connection resonator and a MOPA structure of four rods oscillator and tworods amplifier, the pulsed laser with an average power of more than3000W havebeen obtained. And the differences of the two structures are compared and analyzedAccording to the application requirements of high power pulsed Nd:YAG laser,several technical schemes are analyzed, then the design of pulsed Nd:YAG moduleunit is optimized, and two schemes of six rods resonator and a MOPA structure offour rods oscillator and two rods amplifier are given.
The distribution of pump energy and thermal stress of the module unit are simulated,and the optimum operating parameters are studied experimentally. An output laserwith an average power of586W, a peak power of3.45kW, a maximum single pulseenergy of34.9J and a beam parameters product of22.5mm×mrad has been obtained.The electro-optical conversion efficiency is4.04%, and the instability of the outputpower is1.1%.
The thermal depolarization effect of Nd:YAG rods of different cut directions aretheoretically and experimentally studied. The results show that, for [111]-cutNd:YAG rod, the thermal depolarization does not change with the polarizationdirection. However, thermal depolarization of [100]-cut direction Nd:YAG rodvaries with the polarization direction, the minimum depolarization can be obtainedby adjusting the direction of linear polarization, the thermal depolarization of thisdirection is less than that of [111]-cut Nd:YAG rod.
Experiments of laser percussion drilling are carried out on nickel-based superalloyusing pulsed Nd:YAG module unit. The influence of combination of pulses, focalposition and the number of pulses are experimentally studied. Through applyingpulse combination with increasing pulse energy, placing the focal position1.1~1.7mm above the top surface of the sample, and adjusting the number of pulses,non-tapered holes with diameters of480μm and510μm are drilled on nickel-based superalloy samples with thickness of1.5mm and3mm. Error of diameter in repeatdrilling is about30μm, and the hole taper is <1%.
The range of stable region and the influence of rod spacing and thermal focal lengthfor six rods series connection resonator are theoretical analyzed. Considering theneed of multi-rods series connection pulsed lasers, a method is presented, and4×4matrices are used to analyze the deviation of resonator optical axis, the mode volumeand the output direction affected by offset of rods:(1) Through calculating thedeviations of optical axis of every arrangement of offset rods, the required alignmentaccuracy of Nd:YAG rods in six rods series connection resonator and thearrangements producing the maximum deviation of optical axis are given;(2)Through calculating the loss of mode volume, the rod positions which producing themaximum loss are given;(3) The changes of the output direction varying with theoffset and the thermal focal length of rods are simulated.
In experiment, through adjusting module unit, the offset angles of all rods are≤0.037°, six rods series connection pulsed Nd:YAG laser is achieved. Thermal lensfocal length of rods is compensated by adjusting pump power. With input electricpower of87kW and a duty cycle of17%, a maximum average output power of3043W, a peak power of17.75kW, a maximum single pulse energy of66J and a beamparameters product of26.3mm×mrad have been obtained. The electro-opticalconversion efficiency is3.5%.
The deviations of optical axis affected by offset rods of the MOPA structure of fourrods oscillator and two rods amplifier are analyzed theoretically, and the requiredalignment accuracy of Nd:YAG rods in the MOPA laser is given. The influence ofrod spacing and thermal focal length are analyzed. The results show that, when therod of amplifier is placed symmetrically and the thermal focal length is same withthe rod of oscillator, the mode volume can be effectively used, which can improvethe amplification level of energy extraction efficiency, it is helpful for high poweroutput.
A MOPA system of four rods oscillator and two rods amplifier has been used in theexperiment, and the offset angle of all rods is adjusted to≤0.042°. With inputelectric power of87kW and a duty cycle of17%, a maximum average output powerof3011W, a peak power of17.7kW, a maximum single pulse energy of67J and abeam parameters product of25.2mm×mrad have been obtained. The electro-optical conversion efficiency is3.46%, and instability of the laser is less than2%.
Comparing with six rods series connection pulsed laser, MOPA pulsed system hasthe following advantages:(1) MOPA system reduces the number of oscillator, thematch of thermal focal length is more easily achieved;(2) The rod tolerance ofMOPA system is bigger, the requirement of precision of series connection is moreeasily achieved;(3) With the same offset angle, the deviation of optical axis of theMOPA system is less than that of six rods resonator. It is helpful to improve thesecurity performance of multi-rod pulsed laser, and obtain high average outputpower and high pulse energy.
根据大功率脉冲Nd:YAG激光器的应用要求，对大功率固体激光器的技术方案进行对比分析，优化了脉冲Nd:YAG单元模块结构设计，给出了腔内六棒串接和四棒串接两棒放大的MOPA结构两种具体技术方案。
对脉冲Nd:YAG单元模块的泵浦均匀性和热应力进行了模拟计算，通过对最佳工作参数的实验研究，获得了平均功率为586W，峰值功率为3.45kW，最高单脉冲能量为34.9J的脉冲激光输出。电光效率为4.04%，光束质量为22.5mm×mrad，连续工作输出功率不稳定度为1.1%。
对不同切割方向Nd:YAG晶体的热退偏效应进行了理论和实验的探索研究，结果表明：[111]切割方向的Nd:YAG晶体，退偏大小不随偏振方向的变化而变化；[100]方向的Nd:YAG晶体热退偏与偏振方向有关，通过改变线偏振的方向可以获得热退偏最小的方向，这个方向上的热退偏小于[111]方向Nd:YAG棒的热退偏。
对Nd:YAG脉冲单元模块进行了无锥度直孔打孔应用，通过实验研究了脉冲组合方式、激光焦点位置、组合脉冲个数等因素对激光冲击打孔孔锥度的影响。采用能量递增的组合脉冲，激光焦点位于材料表面上方1.1~1.7mm，通过控制脉冲组合个数，在厚度为1.5mm和3mm的镍基高温合金材料上，获得孔径分别为480μm和510μm的直孔，重复打孔孔径误差约30μm，孔锥度<1%。
对六棒串接谐振腔晶体棒间距、热焦距对稳区范围的影响进行了理论分析。针对多棒串接脉冲激光器的串接需要，提出采用4×4矩阵研究晶体棒失调对谐振腔光轴、模体积和输出指向性的影响：（1）通过对谐振腔内晶体棒不同排列下失调导致的光轴变化的计算，给出了六棒串接谐振腔中晶体棒的对准精度范围，以及对光轴偏移影响最大的失调晶体棒排列方式；（2）通过对模体积损耗的模拟计算，给出了谐振腔内对模体积影响最大的晶体棒位置；（3）模拟了输出指向性随晶体棒失调量和热焦距的变化。
实验中调整激光模块，使每根晶体棒的失调角度≤0.037°，实现了六棒串接脉冲Nd:YAG激光器。采取调整晶体棒泵浦功率的方法对晶体棒热焦距不匹配进行补偿，在输入电功率87kW，占空比为17%时，最高输出功率为3043W，峰值功率17.75kW，最高单脉冲能量66J,光束参数乘积为26.3mm×mrad，电光转换效率3.5%。
研究了四棒串接两棒放大的MOPA结构中晶体棒失调对谐振腔光轴的影响，给出了MOPA结构中晶体棒的对准精度范围。研究了MOPA结构激光器中晶体棒间距、热焦距匹配的影响，结果表明：放大级晶体棒与振荡级晶体棒对称放置，热焦距相同时，可以有效利用晶体棒的模体积，提高放大级的能量提取效率，有利于获得高功率输出。
实验中，激光器采用四棒振荡两棒放大的MOPA结构，调整激光模块，使每根晶体棒的失调角度≤0.042°，在输入电功率87kW，占空比17%时，最高输出功率为3011W，峰值功率17.7kW，最高单脉冲能量为67J，光束参数乘积为：25.2mm×mrad。电光转换效率3.46%，长时间输出功率不稳定度小于2%。
与六棒串接脉冲激光器相比，MOPA结构具有以下优点：（1）MOPA结构谐振腔内晶体棒数量减少，更加容易实现棒间距和热焦距匹配；（2）MOPA结构晶体棒失调允许范围比六棒串接谐振腔的失调允许范围大，更容易达到串接精度要求；（3）在相同的角度失调量下，MOPA结构的的光轴偏移量更小。因而采用腔内四棒串接腔外两棒放大的MOPA结构，有利于实现高平均功率、高脉冲能量的激光输出，提高脉冲激光器工作的安全性。
In this paper, the technology of high power pulsed Nd:YAG laser is studied anddiscussed. Based on the optimized design of pulsed Nd:YAG module unit, thealignment accuracy of Nd:YAG rods in the resonator has been analyzed theoretically,and experiment of multi-rod series connection are carried out. Through six rodsseries connection resonator and a MOPA structure of four rods oscillator and tworods amplifier, the pulsed laser with an average power of more than3000W havebeen obtained. And the differences of the two structures are compared and analyzedAccording to the application requirements of high power pulsed Nd:YAG laser,several technical schemes are analyzed, then the design of pulsed Nd:YAG moduleunit is optimized, and two schemes of six rods resonator and a MOPA structure offour rods oscillator and two rods amplifier are given.
The distribution of pump energy and thermal stress of the module unit are simulated,and the optimum operating parameters are studied experimentally. An output laserwith an average power of586W, a peak power of3.45kW, a maximum single pulseenergy of34.9J and a beam parameters product of22.5mm×mrad has been obtained.The electro-optical conversion efficiency is4.04%, and the instability of the outputpower is1.1%.
The thermal depolarization effect of Nd:YAG rods of different cut directions aretheoretically and experimentally studied. The results show that, for [111]-cutNd:YAG rod, the thermal depolarization does not change with the polarizationdirection. However, thermal depolarization of [100]-cut direction Nd:YAG rodvaries with the polarization direction, the minimum depolarization can be obtainedby adjusting the direction of linear polarization, the thermal depolarization of thisdirection is less than that of [111]-cut Nd:YAG rod.
Experiments of laser percussion drilling are carried out on nickel-based superalloyusing pulsed Nd:YAG module unit. The influence of combination of pulses, focalposition and the number of pulses are experimentally studied. Through applyingpulse combination with increasing pulse energy, placing the focal position1.1~1.7mm above the top surface of the sample, and adjusting the number of pulses,non-tapered holes with diameters of480μm and510μm are drilled on nickel-based superalloy samples with thickness of1.5mm and3mm. Error of diameter in repeatdrilling is about30μm, and the hole taper is <1%.
The range of stable region and the influence of rod spacing and thermal focal lengthfor six rods series connection resonator are theoretical analyzed. Considering theneed of multi-rods series connection pulsed lasers, a method is presented, and4×4matrices are used to analyze the deviation of resonator optical axis, the mode volumeand the output direction affected by offset of rods:(1) Through calculating thedeviations of optical axis of every arrangement of offset rods, the required alignmentaccuracy of Nd:YAG rods in six rods series connection resonator and thearrangements producing the maximum deviation of optical axis are given;(2)Through calculating the loss of mode volume, the rod positions which producing themaximum loss are given;(3) The changes of the output direction varying with theoffset and the thermal focal length of rods are simulated.
In experiment, through adjusting module unit, the offset angles of all rods are≤0.037°, six rods series connection pulsed Nd:YAG laser is achieved. Thermal lensfocal length of rods is compensated by adjusting pump power. With input electricpower of87kW and a duty cycle of17%, a maximum average output power of3043W, a peak power of17.75kW, a maximum single pulse energy of66J and a beamparameters product of26.3mm×mrad have been obtained. The electro-opticalconversion efficiency is3.5%.
The deviations of optical axis affected by offset rods of the MOPA structure of fourrods oscillator and two rods amplifier are analyzed theoretically, and the requiredalignment accuracy of Nd:YAG rods in the MOPA laser is given. The influence ofrod spacing and thermal focal length are analyzed. The results show that, when therod of amplifier is placed symmetrically and the thermal focal length is same withthe rod of oscillator, the mode volume can be effectively used, which can improvethe amplification level of energy extraction efficiency, it is helpful for high poweroutput.
A MOPA system of four rods oscillator and two rods amplifier has been used in theexperiment, and the offset angle of all rods is adjusted to≤0.042°. With inputelectric power of87kW and a duty cycle of17%, a maximum average output powerof3011W, a peak power of17.7kW, a maximum single pulse energy of67J and abeam parameters product of25.2mm×mrad have been obtained. The electro-optical conversion efficiency is3.46%, and instability of the laser is less than2%.
Comparing with six rods series connection pulsed laser, MOPA pulsed system hasthe following advantages:(1) MOPA system reduces the number of oscillator, thematch of thermal focal length is more easily achieved;(2) The rod tolerance ofMOPA system is bigger, the requirement of precision of series connection is moreeasily achieved;(3) With the same offset angle, the deviation of optical axis of theMOPA system is less than that of six rods resonator. It is helpful to improve thesecurity performance of multi-rod pulsed laser, and obtain high average outputpower and high pulse energy.
引文
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