白光扫描干涉法测量三维表面形貌的研究
摘要
白光扫描干涉法在三维表面形貌的测量中有着广阔的应用前景。本文在了解各种三维表面形貌测量方法的基础上，比较了各种方法的优缺点，对使用白光扫描干涉法高精度测量三维表面形貌技术进行了研究。
建立了在频域分析白光干涉图像求解表面高度的算法，在消除相位跃变上作了主要工作。分析了PZT步进间隔、步进总数、CCD灰度等级这几个参数以及PZT误差对计算高度准确性的影响。
自行组建了白光扫描干涉测量的实验装置，编程实现了PZT扫描的控制、CCD图像的采集，通过计算得到被测的三维表面图像，验证了白光干涉频域分析算法可以消除相位的不确定性。白光扫描干涉法扩大了纵向测量范围，达到了纳米级的精度。
Scanning white-light interferometry of measuring 3-D surface topography has a wide application in the feature. Several methods of measuring 3-D surface topography are introduced in this paper, and the advantages of these methods are compared. The technology of high-precision 3-D surface topography analyzing based on scanning white-light interferometry is described in details.
The algorithm of calculating the surface height by analyzing white-light interferograms in frequency domain is implemented, and how to remove the ambiguity in the phase data is mainly analyzed. Then we analyze the effect on the veracity of calculation height due to the parameter of step interval. step number of PZT, gray level of CCD, and the error of PZT. The experiment instruments for measuring by scanning white-light interferometry is constructed, also the program to control the scan of PZT and sample images by CCD is implemented, then a three-dimensional surface profile is obtained through calculation. It is testified that the algorithm by analyzing white-light interferograms in the frequency domain can overcome the problems associated with phase ambiguities. Scanning white-light interferometry increases the portrait measurement range, and its measurement precision achieves the level of nanometer.
建立了在频域分析白光干涉图像求解表面高度的算法，在消除相位跃变上作了主要工作。分析了PZT步进间隔、步进总数、CCD灰度等级这几个参数以及PZT误差对计算高度准确性的影响。
自行组建了白光扫描干涉测量的实验装置，编程实现了PZT扫描的控制、CCD图像的采集，通过计算得到被测的三维表面图像，验证了白光干涉频域分析算法可以消除相位的不确定性。白光扫描干涉法扩大了纵向测量范围，达到了纳米级的精度。
Scanning white-light interferometry of measuring 3-D surface topography has a wide application in the feature. Several methods of measuring 3-D surface topography are introduced in this paper, and the advantages of these methods are compared. The technology of high-precision 3-D surface topography analyzing based on scanning white-light interferometry is described in details.
The algorithm of calculating the surface height by analyzing white-light interferograms in frequency domain is implemented, and how to remove the ambiguity in the phase data is mainly analyzed. Then we analyze the effect on the veracity of calculation height due to the parameter of step interval. step number of PZT, gray level of CCD, and the error of PZT. The experiment instruments for measuring by scanning white-light interferometry is constructed, also the program to control the scan of PZT and sample images by CCD is implemented, then a three-dimensional surface profile is obtained through calculation. It is testified that the algorithm by analyzing white-light interferograms in the frequency domain can overcome the problems associated with phase ambiguities. Scanning white-light interferometry increases the portrait measurement range, and its measurement precision achieves the level of nanometer.
引文
1．周明宝，林大键，郭履容等．微结构表面形貌的测量．光学精密工程，1999，7(3)：7-13
2．高志山，陈进榜．表面微观形貌的显微干涉检测原理及干涉显微镜发展现状．光学仪器，1999，21(6)：36-42
3. Gordon S Kino, Stanley S C Chim. Mirau correlation microscope. Appl. Opt., 1990, 29(26): 3775-3783
4．刘泊，郑伟，强锡富，蒋剑峰．白光相移干涉法测量三维表面轮廓的算法及实现．哈尔滨理工大学学报，1999，4(3)：95-99
5. Chiayu Ai et al., Combination of white-light scanning and phase-shifting interferometry for surface profile measurements, US patent NO.5471303, 1995: 1-19
6. Peter de groot and Leslie deck. Surface profiling by analysis of white-light interferograms in the spatial frequency domain. J. Modern Opt. 1995, 42(2):389-401
7. Peter de Groot, Leslie Deck. Three-dimensional imaging by sub-Nyquist sampling of white-light inter-ferograms. Opt. Lett. 1993, 18(17):1462-1464
8．包学诚，周志尧．非接触式表面微观形貌光学测量技术的进展．
9．高宏，李庆祥，薛实福，顾晓渝．高分辨率光学轮廓仪．仪器仪表学报，1995，16(2)：135-138
10．周明宝，林大键，郭履容，郭永康．用白光相移干涉增大表面形貌可测范围的研究．光学学报，2000，20(8)：1065-1071
11．朱日宏．移相干涉术及PZT移相器分析与研究详细摘要．南京理工大学博士学位论文，1991，10
12．朱煜．高精度PZT微位移装置及FTIR技术原理研究．南京理工大学博士学位论文，1999，7
13．王青，陈进榜，陈磊．动态微位移量的自动干涉测量系统．南京理工大学学报，1998，22(2)：145-148
14. Akiko harasaki, Joanna Schmit, and James C. Wyant. Improved vertical-scanning interferometry. Appl. Opt. 2000, 39(13):2107-2115
15. Jiunn-Jong Wu. Simulation of rough surfaces with FFT. Tribology International. 2000,33:47-58
16. Akiko Harasaki and James C. Wyant. Fringe modulation skewing effect in white-light vertical scanning interferometry. Appl. Opt. 2000, 39(13):2101-2106
17. J.C. Wyant, C.L. Koliopoulos, B. Bhushan, D. Basila. Development of a Three-Dimaensional Noncontact Digital Optical Profiler. Journal of Tribology. 1986,108: 1-8
18. Bharat Bhushan, James C. Wyant, and Chris Koliopoulos. Measurement of surface topography of magnetic tapes by Mirau interferometry. Appl. Opt. 1985,24(10):1489-1497
19. Akira Hirabayashi, Yoji Nakayama, Hidemitsu Ogawa, and Katsuichi Kitagawa. Algorithm with optimum noise suppression for surface profiling by white-light interferometry. Proc. SPIE Int. Soc. Opt. Eng. 5180,365(2004)
20. Akira Hirabayashi, Hidemitsu Ogawa, and Katsuichi Kitagawa. Fast surface profiler by white-light interferometry using a new algorithm, the SEST algorithm. Proc. SPIE Int. Soc.Opt. Eng. 4451, 356(2001)
21. Seok-moon Ryoo and Tae-Sun Choi. 3D profilometry by analysis of noisy white-light interferograms. Proc. SPIE Int. Soc. Opt. Eng. 3919,152(2000)
22. Jose E. Calatroni, Carmen Sainz, Antonio L. Guerrero, and Rafael A. Escalona Z. Surface profilometry in the spectral domain. Proc. SPIE Int. Soc. Opt. Eng. 2730,367(1996)
23．张世亮．表面粗糙度参数的计算机辅助测量．湛江水产学院学报，1996，16(1)：61-66
24．Brian Bowe[爱尔兰]．表面轮廓的白光干涉测量法．云光技术，2001，33(5)：33-38
25．何永辉，蒋剑峰，赵万生．基于扫描白光干涉法的表面三维轮廓仪．光学技术，2001，27(2)：150-152
26．迟桂纯，周肇飞，周卫东．激光干涉轮廓测量技术的发展．光学及光电仪器．1996，4：33-35
27．惠梅，牛憨笨，许谊，徐毓娴，李庆祥．表面微观形貌测量中数字图像处理的应用．光子学报，2001，30(11)：1372-1374
28．张红霞，张以谟，井文才，周革，李朝辉．微表面形貌检测中Mirau干涉物镜的优化设计．光电子激光，2003，14(12)：1292-1295
29. Paul J. Caber. Interferometric profiler for rough surfaces. Appl. Opt. 1993,32(19):3438-3441
30．童竞．几何量测量．机械工业出版社，1988
31．孙仲康．快速付里叶变换及其应用．人民邮电出版社，1982年11月
32．邓贤照，徐英凯．快速傅立叶变换浅谈．北京：水利电力出版社，1994
33．[美] H．J．威佛．离散和连续傅里叶分析理论．北京：北京邮电学院出版社，1991
2．高志山，陈进榜．表面微观形貌的显微干涉检测原理及干涉显微镜发展现状．光学仪器，1999，21(6)：36-42
3. Gordon S Kino, Stanley S C Chim. Mirau correlation microscope. Appl. Opt., 1990, 29(26): 3775-3783
4．刘泊，郑伟，强锡富，蒋剑峰．白光相移干涉法测量三维表面轮廓的算法及实现．哈尔滨理工大学学报，1999，4(3)：95-99
5. Chiayu Ai et al., Combination of white-light scanning and phase-shifting interferometry for surface profile measurements, US patent NO.5471303, 1995: 1-19
6. Peter de groot and Leslie deck. Surface profiling by analysis of white-light interferograms in the spatial frequency domain. J. Modern Opt. 1995, 42(2):389-401
7. Peter de Groot, Leslie Deck. Three-dimensional imaging by sub-Nyquist sampling of white-light inter-ferograms. Opt. Lett. 1993, 18(17):1462-1464
8．包学诚，周志尧．非接触式表面微观形貌光学测量技术的进展．
9．高宏，李庆祥，薛实福，顾晓渝．高分辨率光学轮廓仪．仪器仪表学报，1995，16(2)：135-138
10．周明宝，林大键，郭履容，郭永康．用白光相移干涉增大表面形貌可测范围的研究．光学学报，2000，20(8)：1065-1071
11．朱日宏．移相干涉术及PZT移相器分析与研究详细摘要．南京理工大学博士学位论文，1991，10
12．朱煜．高精度PZT微位移装置及FTIR技术原理研究．南京理工大学博士学位论文，1999，7
13．王青，陈进榜，陈磊．动态微位移量的自动干涉测量系统．南京理工大学学报，1998，22(2)：145-148
14. Akiko harasaki, Joanna Schmit, and James C. Wyant. Improved vertical-scanning interferometry. Appl. Opt. 2000, 39(13):2107-2115
15. Jiunn-Jong Wu. Simulation of rough surfaces with FFT. Tribology International. 2000,33:47-58
16. Akiko Harasaki and James C. Wyant. Fringe modulation skewing effect in white-light vertical scanning interferometry. Appl. Opt. 2000, 39(13):2101-2106
17. J.C. Wyant, C.L. Koliopoulos, B. Bhushan, D. Basila. Development of a Three-Dimaensional Noncontact Digital Optical Profiler. Journal of Tribology. 1986,108: 1-8
18. Bharat Bhushan, James C. Wyant, and Chris Koliopoulos. Measurement of surface topography of magnetic tapes by Mirau interferometry. Appl. Opt. 1985,24(10):1489-1497
19. Akira Hirabayashi, Yoji Nakayama, Hidemitsu Ogawa, and Katsuichi Kitagawa. Algorithm with optimum noise suppression for surface profiling by white-light interferometry. Proc. SPIE Int. Soc. Opt. Eng. 5180,365(2004)
20. Akira Hirabayashi, Hidemitsu Ogawa, and Katsuichi Kitagawa. Fast surface profiler by white-light interferometry using a new algorithm, the SEST algorithm. Proc. SPIE Int. Soc.Opt. Eng. 4451, 356(2001)
21. Seok-moon Ryoo and Tae-Sun Choi. 3D profilometry by analysis of noisy white-light interferograms. Proc. SPIE Int. Soc. Opt. Eng. 3919,152(2000)
22. Jose E. Calatroni, Carmen Sainz, Antonio L. Guerrero, and Rafael A. Escalona Z. Surface profilometry in the spectral domain. Proc. SPIE Int. Soc. Opt. Eng. 2730,367(1996)
23．张世亮．表面粗糙度参数的计算机辅助测量．湛江水产学院学报，1996，16(1)：61-66
24．Brian Bowe[爱尔兰]．表面轮廓的白光干涉测量法．云光技术，2001，33(5)：33-38
25．何永辉，蒋剑峰，赵万生．基于扫描白光干涉法的表面三维轮廓仪．光学技术，2001，27(2)：150-152
26．迟桂纯，周肇飞，周卫东．激光干涉轮廓测量技术的发展．光学及光电仪器．1996，4：33-35
27．惠梅，牛憨笨，许谊，徐毓娴，李庆祥．表面微观形貌测量中数字图像处理的应用．光子学报，2001，30(11)：1372-1374
28．张红霞，张以谟，井文才，周革，李朝辉．微表面形貌检测中Mirau干涉物镜的优化设计．光电子激光，2003，14(12)：1292-1295
29. Paul J. Caber. Interferometric profiler for rough surfaces. Appl. Opt. 1993,32(19):3438-3441
30．童竞．几何量测量．机械工业出版社，1988
31．孙仲康．快速付里叶变换及其应用．人民邮电出版社，1982年11月
32．邓贤照，徐英凯．快速傅立叶变换浅谈．北京：水利电力出版社，1994
33．[美] H．J．威佛．离散和连续傅里叶分析理论．北京：北京邮电学院出版社，1991
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