多腔串联压电泵的设计及其在直线马达中的试验研究
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摘要
压电泵是利用压电振子的振动来改变腔体体积,并配合使用单向截止阀,从而实现对流体定向驱动的新型微小泵。本文在总结国内外压电流体泵研究现状的基础上,提出设计制作多腔串联压电泵,探讨腔体数量对压电泵输出性能的影响规律。为充分利用压电振子的振动能量,提出双作用压电泵的设计理论,并设计制作双作用式压电泵。将压电驱动技术与液压传动技术相结合,利用本文设计的压电泵制作压电液压直线马达,从而产生直线精密运动。主要工作如下:
1.对泵用圆形压电振子进行理论建模,推导出其变形量与结构尺寸之间的关系,根据需要选择最佳尺寸的圆形压电振子。建立圆形压电振子性能的测试系统,对其工作性能进行试验测试。
2.以单腔体有阀压电泵的设计理论为基础,通过腔体串联的方式设计多腔体压电泵,并对其工作原理及工作方式进行分析。试验测试多腔串联压电泵的输出性能,测试结果表明,随着串联腔体数量的增加,泵的输出压力可以显著提高,但对输出流量的影响不大。
3.提出双作用式压电泵的设计理论,利用圆形双晶片压电振子的两个侧面同时进行工作,并设计制作单腔体及双腔串联式双作用压电泵,试验测试表明双作用压电泵可以有效提高压电泵的输出性能。
4.结合液压传动技术,利用本文设计的三腔串联压电泵,设计制作压电液压直线马达,将压电泵用于直线精密驱动系统中;通过试验测试得出压电液压直线马达的输出性能与驱动信号间的关系及其最大输出功率,并与理论输出性能进行比较分析,得出其机械效率。
Piezoelectric pump is a new type of fluid pump, which is developed in recent years. It is a new actuator that driven by the converse piezoelectric effect of piezoelectric ceramics. Accompanied by the quickly developing of MEMS, piezoelectric pump which is an important branch of Mini-pump, has been researched all over the world. This article based on the domestic and foreign present research situation of piezoelectric pump, used the design theory of single chamber piezoelectric pump, designed and manufactured multi-chamber series and double acting piezoelectric pump, analyzed their working principle and driving mode, tested their output performance. Obtained the influence law of chamber series and piezoelectric pump’s output performance, double acting pump will improve the output performance effectively. Funded by the National Natural Science Foundation Project (No.50775093), designed piezoelectric hydraulic linear motor, which can generated precision linear stepping driving. Put up the testing system and tested the relationship between it’s output performance and the driving single of piezoelectric pump, and then calculated it’s max Theoretical output power.
The main work of this article is as follows:
1. Domestic and foreign present research situation of piezoelectric pump By studying the related data of China and foreign countries, obtained that the principal achievements of the study on piezoelectric pump are piezoelectric pump with check valve, piezoelectric pump without check valve, piezoelectric stack pump, and peristaltic piezoelectric pump, They are already widely used in drug injection, Biomedical Engineering, chip water cooling system, fuel cells and aerospace areas depended on their own peculiar advantages. Based on the summarization of the technology development and current application status of piezoelectric pump, this article put forward designed and manufactured multi-chamber series piezoelectric pump, in order to enhance the pump’s output performance and find out the influence law of chamber series and piezoelectric pump’s output performance. Meanwhile put forward a way to make full use of the vibration energy of piezoelectric bimorph, designed and manufactured double acting piezoelectric pump using this method.
2. Theory analysis and performance testing of the piezoelectric bimorph
The fundamental theoretical knowledge of piezoelectric ceramics is introduced, including piezoelectric effect, the development of piezoelectric materials, the kind of piezoelectric actuators etc. The relationship between the deformation of piezoelectric bimorph and its structural parameters, external driving signal was found out by building the theoretical model based on the basic hypothesis of Kirchhoff. According to the result and the demand of the pump structure, the suitable piezoelectric bimorph used in the pump is selected. Put up the testing system, test the relationship between the amplitude of piezoelectric bimorph and the magnitude and frequency of the signal, the pre-tightening force. Lay a foundation for the designing and manufacturing of multi-chamber series piezoelectric pump.
3. Structural design of the multi-chamber series piezoelectric pump
Based on the design theory of single chamber piezoelectric pump, designed the double-chamber series and three-chamber series piezoelectric pump using umbrella-shape valves, analyzed their working principles and obtained their best driving modes. In order to make full use of the vibration energy of piezoelectric bimorph, put forward the working principle of double-acting piezoelectric pump: using the two surfaces of piezoelectric bimorph to form two chambers with the pump body, and making the fluid flowing through the two chambers before ejection. Designed the single-bimorph double-acting piezoelectric pump and double-chamber series double-acting piezoelectric pump, analyzed their working principle and obtained their best driving mode.
4. Output performance test of multi-chamber series piezoelectric pump
Prototypes of multi-chamber series and double-acting piezoelectric pumps for testing have been manufactured, and the testing system has been put up. Than tested the output performance of the pumps, obtained the relationships between the output performances of the pumps (including the flow rate and the pressure) and the voltage, the frequency of the driving signal, the best working frequency, the maximum flow rate and the highest pressure. Compared and analyzed the testing data, the result showed that chamber series can improve the output pressure, it will double increase the pressure when added one more chamber, but it didn’t have anything to do with the flow rate. Double-acting piezoelectric pumps can make full use of the vibration energy of piezoelectric bimorph, the performance will be improved without adding chambers, especially the output pressure.
5. Experimental study in the linear motor of piezoelectric pump
Combined the piezoelectric driving technology and hydraulic transmission technology, designed the hydraulic linear motor driven by piezoelectric pump, which using the three-chamber series piezoelectric pump and choosing a suitable hydraulic cylinder, to generate precision linear stepping driving. Built the testing system and tested its performance, acquired the relationship between the output velocity, force and the external signal. Obtained the best working frequency and the minimum working voltage by analyzed the testing data, and the relationship between output power and the external signal,calculated the maximum output power under the voltage of 90V. Compared the testing result and the theoretical performance, found out that the mechanical efficiency is low, analyzed the reason and proposed the improvement measures.
1.对泵用圆形压电振子进行理论建模,推导出其变形量与结构尺寸之间的关系,根据需要选择最佳尺寸的圆形压电振子。建立圆形压电振子性能的测试系统,对其工作性能进行试验测试。
2.以单腔体有阀压电泵的设计理论为基础,通过腔体串联的方式设计多腔体压电泵,并对其工作原理及工作方式进行分析。试验测试多腔串联压电泵的输出性能,测试结果表明,随着串联腔体数量的增加,泵的输出压力可以显著提高,但对输出流量的影响不大。
3.提出双作用式压电泵的设计理论,利用圆形双晶片压电振子的两个侧面同时进行工作,并设计制作单腔体及双腔串联式双作用压电泵,试验测试表明双作用压电泵可以有效提高压电泵的输出性能。
4.结合液压传动技术,利用本文设计的三腔串联压电泵,设计制作压电液压直线马达,将压电泵用于直线精密驱动系统中;通过试验测试得出压电液压直线马达的输出性能与驱动信号间的关系及其最大输出功率,并与理论输出性能进行比较分析,得出其机械效率。
Piezoelectric pump is a new type of fluid pump, which is developed in recent years. It is a new actuator that driven by the converse piezoelectric effect of piezoelectric ceramics. Accompanied by the quickly developing of MEMS, piezoelectric pump which is an important branch of Mini-pump, has been researched all over the world. This article based on the domestic and foreign present research situation of piezoelectric pump, used the design theory of single chamber piezoelectric pump, designed and manufactured multi-chamber series and double acting piezoelectric pump, analyzed their working principle and driving mode, tested their output performance. Obtained the influence law of chamber series and piezoelectric pump’s output performance, double acting pump will improve the output performance effectively. Funded by the National Natural Science Foundation Project (No.50775093), designed piezoelectric hydraulic linear motor, which can generated precision linear stepping driving. Put up the testing system and tested the relationship between it’s output performance and the driving single of piezoelectric pump, and then calculated it’s max Theoretical output power.
The main work of this article is as follows:
1. Domestic and foreign present research situation of piezoelectric pump By studying the related data of China and foreign countries, obtained that the principal achievements of the study on piezoelectric pump are piezoelectric pump with check valve, piezoelectric pump without check valve, piezoelectric stack pump, and peristaltic piezoelectric pump, They are already widely used in drug injection, Biomedical Engineering, chip water cooling system, fuel cells and aerospace areas depended on their own peculiar advantages. Based on the summarization of the technology development and current application status of piezoelectric pump, this article put forward designed and manufactured multi-chamber series piezoelectric pump, in order to enhance the pump’s output performance and find out the influence law of chamber series and piezoelectric pump’s output performance. Meanwhile put forward a way to make full use of the vibration energy of piezoelectric bimorph, designed and manufactured double acting piezoelectric pump using this method.
2. Theory analysis and performance testing of the piezoelectric bimorph
The fundamental theoretical knowledge of piezoelectric ceramics is introduced, including piezoelectric effect, the development of piezoelectric materials, the kind of piezoelectric actuators etc. The relationship between the deformation of piezoelectric bimorph and its structural parameters, external driving signal was found out by building the theoretical model based on the basic hypothesis of Kirchhoff. According to the result and the demand of the pump structure, the suitable piezoelectric bimorph used in the pump is selected. Put up the testing system, test the relationship between the amplitude of piezoelectric bimorph and the magnitude and frequency of the signal, the pre-tightening force. Lay a foundation for the designing and manufacturing of multi-chamber series piezoelectric pump.
3. Structural design of the multi-chamber series piezoelectric pump
Based on the design theory of single chamber piezoelectric pump, designed the double-chamber series and three-chamber series piezoelectric pump using umbrella-shape valves, analyzed their working principles and obtained their best driving modes. In order to make full use of the vibration energy of piezoelectric bimorph, put forward the working principle of double-acting piezoelectric pump: using the two surfaces of piezoelectric bimorph to form two chambers with the pump body, and making the fluid flowing through the two chambers before ejection. Designed the single-bimorph double-acting piezoelectric pump and double-chamber series double-acting piezoelectric pump, analyzed their working principle and obtained their best driving mode.
4. Output performance test of multi-chamber series piezoelectric pump
Prototypes of multi-chamber series and double-acting piezoelectric pumps for testing have been manufactured, and the testing system has been put up. Than tested the output performance of the pumps, obtained the relationships between the output performances of the pumps (including the flow rate and the pressure) and the voltage, the frequency of the driving signal, the best working frequency, the maximum flow rate and the highest pressure. Compared and analyzed the testing data, the result showed that chamber series can improve the output pressure, it will double increase the pressure when added one more chamber, but it didn’t have anything to do with the flow rate. Double-acting piezoelectric pumps can make full use of the vibration energy of piezoelectric bimorph, the performance will be improved without adding chambers, especially the output pressure.
5. Experimental study in the linear motor of piezoelectric pump
Combined the piezoelectric driving technology and hydraulic transmission technology, designed the hydraulic linear motor driven by piezoelectric pump, which using the three-chamber series piezoelectric pump and choosing a suitable hydraulic cylinder, to generate precision linear stepping driving. Built the testing system and tested its performance, acquired the relationship between the output velocity, force and the external signal. Obtained the best working frequency and the minimum working voltage by analyzed the testing data, and the relationship between output power and the external signal,calculated the maximum output power under the voltage of 90V. Compared the testing result and the theoretical performance, found out that the mechanical efficiency is low, analyzed the reason and proposed the improvement measures.
引文
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