陶瓷基微反应器制备的研究进展
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摘要
微反应器中亚毫米级的流体通道具有高效的传质传热效应,使其能够强化反应过程。随着微细加工技术的发展,制备出了耐高温耐腐蚀的陶瓷基微反应器,适用于更严苛的反应条件,然而陶瓷基微反应器的制备存在微结构成型工艺复杂、密封难度较大等问题。本文主要介绍不同陶瓷材料微反应器的制备工艺,重点论述陶瓷基微反应器制备过程中常规微加工技术的优化和新型微加工技术的引入,对比这些技术对微结构成型的改善效果。列举常用的陶瓷微通道密封连接方法,概述其特点和适用范围。并提出在陶瓷基微反应器制备的后续研究过程中,应注重陶瓷基微反应器制备的成功率和新技术的开发,完善陶瓷基微反应器的性能,将陶瓷基微反应器引入到更广泛的应用体系中。
The microchannel of the microreactor enables it to have high efficient mass and heat transfer,which can strengthen the reaction process. With the development of micromachining technology, the ceramic microreactors with the advantages of overcoming high temperature and chemical resistance have been processed, which can be applied to more severe reaction conditions. However, ceramic microreactors need complicated producting process. In this paper, the microfabrication of different materials was mainly introduced. The conventional microfabrication technology and the new microfabrication technology were discussed in detail, which improve the microfabrication of the microchannels. At the same time, the sealed connection methods of ceramic microchannels were briefly listed, and their characteristics and application ranges were summarized. It was proposed to focus on the qualified rate of ceramic microreactors and the development of new technology in the future study. The performance of ceramic microreactors should be improved, and expands the application range of ceramic microreactors.
The microchannel of the microreactor enables it to have high efficient mass and heat transfer,which can strengthen the reaction process. With the development of micromachining technology, the ceramic microreactors with the advantages of overcoming high temperature and chemical resistance have been processed, which can be applied to more severe reaction conditions. However, ceramic microreactors need complicated producting process. In this paper, the microfabrication of different materials was mainly introduced. The conventional microfabrication technology and the new microfabrication technology were discussed in detail, which improve the microfabrication of the microchannels. At the same time, the sealed connection methods of ceramic microchannels were briefly listed, and their characteristics and application ranges were summarized. It was proposed to focus on the qualified rate of ceramic microreactors and the development of new technology in the future study. The performance of ceramic microreactors should be improved, and expands the application range of ceramic microreactors.
引文
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[22]陈俊,王振辉,王玮,等.超疏水表面材料的制备与应用[J].中国材料进展,2013,32(7):399-405.CHEN J,WANG Z H,WANG W,et al.Preparation and application of super hydrophobic surfaces[J].Materials China,2013,32(7):399-405.
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[25]DRIESCHE S V D,LUCKLUM F,BUNGE F,et al.3D printing solutions for microfluidic chip-to-world connections[J].Micromachines,2018,9(2):71.
[26]KNITTER R,G?HRING D,RISTHAUS P,et al.Microfabrication of ceramic microreactors[J].Microsystem Technologies,2001,7(3):85-90.
[27]KNITTER R,LIAUW M A.Ceramic microreactors for heterogeneously catalysed gas-phase reactions[J].Lab on a Chip,2004,4(4):378-383.
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[29]KEE R J,ALMAND B B,BLASI J M,et al.The design,fabrication,and evaluation of a ceramic counter-flow microchannel heat exchanger[J].Applied Thermal Engineering,2011,31(11/12):2004-2012.
[30]MURPHY D M,MANERBINO A,PARKER M,et al.Methane steam reforming in a novel ceramic microchannel reactor[J].International Journal of Hydrogen Energy,2013,38(21):8741-8750.
[31]MURPHY D M,PARKER M,SULLIVAN N P.The interplay of heat transfer and endothermic chemistry within a ceramic microchannel reactor[J].Journal of Thermal Science&Engineering Applications,2014,6(3):031007.
[32]BLAKELEY B,SULLIVAN N.Fuel processing in a ceramic microchannel reactor:expanding operating windows[J].International Journal of Hydrogen Energy,2016,41(6):3794-3802.
[33]ARAN H C,CHINTHAGINJALA J K,GROOTE R,et al.Porous ceramic mesoreactors:a new approach for gas-liquid contacting in multiphase microreaction technology[J].Chemical Engineering Journal,2011,169(1/2/3):239-246.
[34]ARAN H C,SALAMON D,RIJNAARTS T,et al.Porous photocatalytic membrane microreactors(P2M2):a new reactor concept for photochemistry[J].Journal of Photochemistry&Photobiology A:Chemistry,2011,225(1):36-41.
[35]MESCHKE F,RIEBLER G,HESSEL V,et al.Hermetic gas-tight ceramic microreactors[J].Chemical Engineering&Technology,2005,28(4):465-473.
[36]NEWMAN S G,GU L,LESNIAK C,et al.Rapid Wolff-Kishner reductions in a silicon carbide microreactor[J].Green Chemistry,2013,16(1):176-180.
[37]BELAVIC D,HROVAT M,DOLANC G,et al.Design of LTCC-based ceramic structure for chemical microreactor[J].Radio Engineering,2012,21(1):195-200.
[38]OKAMASA T,LEE G G,SUZUKI Y,et al.Development of a micro catalytic combustor using high-precision ceramic tape casting[J].Journal of Micromechanics&Microengineering,2006,16(9):198-205.
[39]MALECHA K,MAEDER T,JACQ C.Fabrication of membranes and microchannels in low-temperature co-fired ceramic(LTCC)substrate using novel water-based sacrificial carbon pastes[J].Journal of the European Ceramic Society,2012,32(12):3277-3286.
[40]KHOONG L E,TAN Y M,LAM Y C.Overview on fabrication of threedimensional structures in multi-layer ceramic substrate[J].Journal of the European Ceramic Society,2010,30(10):1973-1987.
[41]JIANG B,HABER J,RENKEN A,et al.Fine structuration of lowtemperature co-fired ceramic(LTCC)microreactors[J].Lab on a Chip,2014,15(2):563-74.
[42]GóMEZDE P S,PUYOL M,IZQUIERDO D,et al.A ceramic microreactor for the synthesis of water soluble CdS and CdS/ZnSnanocrystals with on-line optical characterization.[J].Nanoscale,2012,4(4):1328-1335.
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