摘要
氦质谱检漏具有灵敏性好、精准性高的优点。将氦质谱应用于电气设备SF6气体的检漏中,较传统的检漏方法具有定性检漏、定量测量的优势。通过应用方案的介绍、理论计算以及实例分析,体现了氦质谱在电气设备检漏工作中较大的应用价值。
Helium mass spectrometry leak detection has the advantages of good sensitivity and high precision. Application of helium mass spectrometry to the leakage detection of sulfur hexafluoride gas in electrical equipment has the advantage of qualitative leak detection and quantitative measurement compared with the traditional leak detection method. Through the introduction of application scheme, theoretical calculation and case analysis,the paper demonstrates the application value of helium mass spectrometry in the leak detection of electrical equipment.
引文
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