高精度位移测量系统的硬件在环仿真

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英文篇名：Hardware-in-the-Loop Simulation of High Precision Displacement Measurement System 作者：张文涛 ; 杜浩 ; 熊显名 ; 谢仁飚 ; 王献英 英文作者：Zhang Wentao;Du Hao;Xiong Xianming;Xie Renbiao;Wang Xianying;Guilin University of Electronic Technology;Shanghai Micro Electronics Equipment (Group)Co.,Ltd.; 关键词：测量 ; 精密测量 ; 二维光栅 ; 硬件在环 ; 光刻机 英文关键词：measurement;;precision position measurement;;two-dimensional grating;;hardware-in-the-loop;;lithography machine 中文刊名：JJZZ 英文刊名：Chinese Journal of Lasers 机构：桂林电子科技大学电子工程与自动化学院;上海微电子装备(集团)股份有限公司; 出版日期：2018-10-29 07:04 出版单位：中国激光 年：2019 期：v.46;No.506 基金：国家科技重大专项(2017ZX02101007-003) 语种：中文; 页：JJZZ201902011 页数：7 CN：02 ISSN：31-1339/TN 分类号：86-92

摘要

设计了一个基于二维光栅的高精度位置测量系统的硬件在环仿真平台,分析了测量模型在编程过程中产生误差的原因,并使用该仿真平台测试了模型的精度和运算时间。结果表明,当计算频率为20 kHz时,测量模型的编程精度优于0.79 nm,测量机箱引起的误差为8.84×10~(-7) nm。该仿真平台能够有效地检测基于二维光栅的测量模型在编程过程中产生的误差,并测试模型运算时间。
        A hardware-in-the-loop simulation platform for high-precision position measurement system based on two-dimensional grating is designed. The reasons for the error of the measurement model in the programming process are analyzed, and the simulation platform is used to test the accuracy and operation time of the measurement model. The results show that the accuracy of the measurement model is better than 0.79 nm when the calculated frequency is 20 kHz, and the error caused by simulation platform is 8.84×10~(-7) nm. The simulation platform can effectively detect the errors generated by the measurement model based on the two-dimensional grating in the process of program realization, and test the operation time of the model.

引文

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