Extremely High Barrier Performance of Organic–Inorganic Nanolaminated Thin Films for Organic Light-Emitting Diodes

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• 作者：Kwan Hyuck Yoon ; Harrison S. Kim ; Kyu Seok Han ; Seung Hun Kim ; Yong-Eun Koo Lee ; Nabeen K. Shrestha ; Seung Yong Song ; Myung Mo Sung
• 刊名：ACS Applied Materials & Interfaces
• 出版年：2017
• 出版时间：February 15, 2017
• 年：2017
• 卷：9
• 期：6
• 页码：5399-5408
• 全文大小：608K
• ISSN：1944-8252

文摘

This work presents a novel barrier thin film based on an organic–inorganic nanolaminate, which consists of alternating nanolayers of self-assembled organic layers (SAOLs) and Al₂O₃. The SAOLs-Al₂O₃ nanolaminated films were deposited using a combination of molecular layer deposition and atomic layer deposition techniques at 80 °C. Modulation of the relative thickness ratio of the SAOLs and Al₂O₃ enabled control over the elastic modulus and stress in the films. Furthermore, the SAOLs-Al₂O₃ thin film achieved a high degree of mechanical flexibility, excellent transmittance (>95%), and an ultralow water-vapor transmission rate (2.99 × 10^–7 g m^–2 day^–1), which represents one of the lowest permeability levels ever achieved by thin film encapsulation. On the basis of its outstanding barrier properties with high flexibility and transparency, the nanolaminated film was applied to a commercial OLEDs panel as a gas-diffusion barrier film. The results showed defect propagation could be significantly inhibited by incorporating the SAOLs layers, which enhanced the durability of the panel.