测试因素对CVD金刚石膜断裂强度的影响

英文篇名：CORRELATION BETWEEN TESTING FACTORS AND THE FRACTURE STRENGTH OF CVD DIAMOND FILMS
中文刊名：理化检验(物理分册)
英文刊名：Physical Testing and Chemical Analysis Parta Physical Testing
作者：刘敬明 ; 蒋政 ; 张恒大 ; 唐伟忠 ; 吕反修
英文作者：LIU Jing ming ; JIANG Zheng ; ZHANG Heng da ; TANG Wei zhong ; LU Fan xiu (Material Science and Engineering School ; University of Science and Technology Beijing ; Beijing 100083 ; China)
中文关键词：三点弯曲 ; 断裂强度 ; 抛光 ; 加载方式
英文关键词：Fracture strength ; Polishing ; Loading configuration ; CVD diamond films
出版日期：2001-06-25
机构：北京科技大学材料科学与工程学院!北京100083,北京科技大学材料科学与工程学院!北京100083,北京科技大学材料科学与工程学院!北京100083,北京科技大学材料科学与工程学院!北京100083,北京科技大学材料科学与工程学院!北京100083
年：2001
期：06
出版单位：理化检验(物理分册)

摘要

利用三点弯曲测量CVD金刚石膜的断裂强度的方法 ,研究试样尺寸、抛光及加载方式对金刚石膜的断裂强度的影响。试样尺寸在一定范围内 ,试样大小、抛光与否对金刚石膜的断裂强度的影响不大 ;而 10mm× 2mm的试样对测量金刚石膜断裂强度具有意义。加载方式对金刚石膜的断裂强度影响较大 ,当金刚石膜形核面处于张应力时得到的断裂强度值要高于生长面处于张应力时得到的值 ,棱边加载方式得到断裂强度值处于两者之间 ,更具有代表性。
The relationship between the fracture strength values and sample size, surface polishing condition and loading configuration (the growth surface or nucleation surface in tension) of free standing CVD diamond films were investigated by 3 point bending method. The sample dimension has little effect on strength values. The dimension 10mm×2mm is effective for the strength test of CVD diamond films. Surface polishing make also no effect on strength values of diamond films. A much higher value of fracture strength was obtained when the samples were tested with its nucleation surface in tension than that when tested with growth surface in tension. As expected fracture strength obtained is much reasonable. When diamond films sample were tested with the edge surface in tensiton.

引文

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