超声激励的气体挤压膜线型导轨理论及实验研究
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摘要
近场超声悬浮是一种基于气体挤压膜原理的新型支承方式,有着重要的应用前景,但到目前为止,其悬浮机理还没有完全被解释清楚。通过理论研究和实验分析阐述了超声波激励的挤压膜的特性。证明了超声激励的挤压膜具有较大的承载能力,能够支承自由悬浮的物体。
压电气体挤压膜装置由压电堆、聚能装置、激励托盘、超声挤压膜、悬浮物体五部分构成,其工作机理涉及到电、固、气、声等多场的耦合作用。各元素的耦合特性决定着挤压膜的特性。本文首先建立了和模型相适应的气体挤压膜压力方程、压电换能器机电耦合方程、聚能器的振动方程、以及自由悬浮体的运动方程,确定了较为切合实际的各场定解问题的边界条件及初始条件。在此基础上,通过应用ANSYS软件和MATLAB程序对各控制方程进行了耦合求解。在数值求解过程中,通过挤压膜厚的变化将激励托盘和悬浮体联系起来,实现了各场的耦合作用。
实验研究分为悬浮验证实验及线型导轨设计两部分。其中悬浮实验是对所做的理论研究结论的验证。包括压电堆的制作、聚能变幅杆的设计与加工,激励电源、位移传感器及放大器的选择与调试,传感器信号的数据采集与数据后处理。线型导轨是能够应用在生产实践领域的一种无摩擦或极少摩擦的承载运输装置,它利用压电陶瓷和弹性铰链产生的超声挤压膜具有承载能力,它是超声挤压膜悬浮理论应用的一种探索和实践。
NFAL(near-field-acoustic-levitation)is a new supporting method based on the gas squeeze film theory, which has significant prospect. However the mechanism of this kind of levitating methods is not clear by now. The characteristic of the squeeze film using ultrasonic excited has been investigated by the analysis and experiment. It is verified that the squeeze film has considerable carrying capacity and could support the objects well.
The whole system is made up by the piezo-stack,the horn,the excited plate, the squeeze-film with ultrasonic excited and the specimen suspended. Four coupled fields are involved which include the electrical,solid,fluid,sound. The components of the system coupled each other decide the properties of squeeze-film with ultrasonic excited. Equations including the pressure equation of gas film, the electromechanical coupling equation of the transducer, the vibrating equation of horn and the kinetic equation of free objects have been set up. The proper boundary conditions and initial conditions have been decided. Then the coupled govern equations were solved by the use of software such as ANSYS or MATLAB with value methods. In the numeric calculation, the film thickness is the sum of the defection of excited and exciting plate as well as mean film thickness, so the coupled fields could be calculated.
The experimental study consists in two parts. The one is to test and prove the capacity of the squeeze film, the other is to design a linear guide. The experiment of the carrying capacity of the film is used to contrast to the theoretical results. The main contents of the experiment is including the make of the piezo stack and the horn, the selection of the stimulating generator, the displacement sensor, the amplifier as well as the acquisition and process of the signal system. The linear guide is a transport equipment with little or no friction,which could be applied on the field of production. It is proved that the linear guide support on the squeeze-film generated by the piezo ceramics and elastic hinges has considerable load carrying capacity. This study is the explore and practice of the usage of squeeze-film levitation theory.
压电气体挤压膜装置由压电堆、聚能装置、激励托盘、超声挤压膜、悬浮物体五部分构成,其工作机理涉及到电、固、气、声等多场的耦合作用。各元素的耦合特性决定着挤压膜的特性。本文首先建立了和模型相适应的气体挤压膜压力方程、压电换能器机电耦合方程、聚能器的振动方程、以及自由悬浮体的运动方程,确定了较为切合实际的各场定解问题的边界条件及初始条件。在此基础上,通过应用ANSYS软件和MATLAB程序对各控制方程进行了耦合求解。在数值求解过程中,通过挤压膜厚的变化将激励托盘和悬浮体联系起来,实现了各场的耦合作用。
实验研究分为悬浮验证实验及线型导轨设计两部分。其中悬浮实验是对所做的理论研究结论的验证。包括压电堆的制作、聚能变幅杆的设计与加工,激励电源、位移传感器及放大器的选择与调试,传感器信号的数据采集与数据后处理。线型导轨是能够应用在生产实践领域的一种无摩擦或极少摩擦的承载运输装置,它利用压电陶瓷和弹性铰链产生的超声挤压膜具有承载能力,它是超声挤压膜悬浮理论应用的一种探索和实践。
NFAL(near-field-acoustic-levitation)is a new supporting method based on the gas squeeze film theory, which has significant prospect. However the mechanism of this kind of levitating methods is not clear by now. The characteristic of the squeeze film using ultrasonic excited has been investigated by the analysis and experiment. It is verified that the squeeze film has considerable carrying capacity and could support the objects well.
The whole system is made up by the piezo-stack,the horn,the excited plate, the squeeze-film with ultrasonic excited and the specimen suspended. Four coupled fields are involved which include the electrical,solid,fluid,sound. The components of the system coupled each other decide the properties of squeeze-film with ultrasonic excited. Equations including the pressure equation of gas film, the electromechanical coupling equation of the transducer, the vibrating equation of horn and the kinetic equation of free objects have been set up. The proper boundary conditions and initial conditions have been decided. Then the coupled govern equations were solved by the use of software such as ANSYS or MATLAB with value methods. In the numeric calculation, the film thickness is the sum of the defection of excited and exciting plate as well as mean film thickness, so the coupled fields could be calculated.
The experimental study consists in two parts. The one is to test and prove the capacity of the squeeze film, the other is to design a linear guide. The experiment of the carrying capacity of the film is used to contrast to the theoretical results. The main contents of the experiment is including the make of the piezo stack and the horn, the selection of the stimulating generator, the displacement sensor, the amplifier as well as the acquisition and process of the signal system. The linear guide is a transport equipment with little or no friction,which could be applied on the field of production. It is proved that the linear guide support on the squeeze-film generated by the piezo ceramics and elastic hinges has considerable load carrying capacity. This study is the explore and practice of the usage of squeeze-film levitation theory.
引文
[1]党根茂.气体润滑技术.南京:东南大学出版社,1990
[2]Gross.W.A. .Gas Film Lubrication,New York :Wiley,1962
[3]Salbu EOJ.Compressible squeeze films and squeeze bearings.ASME J of Basic Eng,, 1964,86(3):355-366
[4]Beck JV. ,Holiday WG. ,Strodtman CL..Experimental and analysis of a flat disk squeeze-film bearing including effects of supported mass motion. ASME J of Lubr ,1969,91(1):138-148
[5]Yoshiki Hashimoto. Near field acoustic levitation of planar specimens using flexural vibration. J.Acoust.Soc,1996,100(4):2057-2061
[6]Adi Minikes,I Bucher. Levitation force induced by pressure radiation in gas squeeze films. J.Acoust.Soc,2004,116(1):217-226
[7]魏彬,马希直.考虑激振模态的挤压膜悬浮导轨特性分析.润滑与密封,2010,2:211-216
[8]A. Minikes,I. Bucher. Coupled dynamics of a squeeze-.lm levitated mass and a vibrating piezoelectric disc: numerical analysis and experimental study. Journal of Sound and Vibration,2003,263: 241-268
[9]Shigeka Yoshimoto, Hiroyuki Kobayashi, Masaaki Miyatake. Float characteristics of a squeeze-film air bearing for a linear motion guide using ultrasonic vibration .J of Tribology International ,2007,40(3):503-511
[10]T.A.Stolarski. Load-carrying capacity generation in squeeze film action. International of Mechanical Sciences,2006,48(1):736-741
[11]T.A Stolarski. Numerical modeling and experimental verification of compressible squeeze film pressure .Tribology International, 2010,43:356-360
[12]Yuji ono, Shigeka Yoshimoto, Masaaki Miyatake Impulse-load dynamics of squeeze film gas bearings for a linear motion guide. J of Tribology, 2009,131:1-6
[13]朱均,虞烈.流体润滑理论.西安:西安交通大学润滑理论及轴承研究所,1991
[14](英)O.平克斯,B.斯德因李希特.流体动力润滑理论.北京:机械工业出版社,1980
[15]池长青.流体力学润滑.北京:国防工业出版社,1998
[16]张直明.滑动轴承的流体动力润滑理论.北京:高等教育出版社,1986
[17]魏彬,马希直.气体挤压膜的研究方法.江苏航空,2008,S1:145-148
[18]魏彬,马希直.挤压膜悬浮导轨机理研究.润滑与密封,2010,3:37-40
[19]W.E.Langlois. Isothermal Squeeze Films. Quarterly of Applied Mathematics, 1962,XX(2): 131-150
[20]魏彬,马希直.考虑激振模态的挤压膜悬浮导轨特性分析.润滑与密封,2010,2:56-59
[21]魏彬,马希直,唐伟坤.压电陶瓷激励下的超声悬浮的特性分析.压电与声光,2011,1:81-84
[22]刘涛,杨凤鹏等.精通ANSYS.北京:清华大学出版社,2002
[23]许洋,彭任喜,党沙沙等.ANSYS11.0/FLOTRAN流场分析实例指导实例教程.北京:机械工业出版社,2009
[24]胡国良,任继文,ANSYS 11.0有限元分析入门与提高[M]北京,国防工业出版社,2009
[25](美)贾菲.压电陶瓷.北京:科学出版社,1979
[26](英)范兰德拉特,(英)塞德林顿.压电陶瓷.北京:科学出版社,1981
[27](日)田中哲郎.压电陶瓷材料.北京:科学出版社,1982
[28]林书玉.超声换能器的原理及设计.北京:科学出版社,2004
[29]陈桂生.超声换能器设计.北京:海洋出版社,1984
[30]周传德.传感器与测试技术.重庆:重庆大学出版社,2009
[31]管爱红,张红梅,杨铁军.MATLAB基础及其应用教程,北京:电子工业出版社,2009
[32]赵书兰.MATLAB R2008接口技术程序设计实例教程.北京:化学工业出版社,2009
[33]宋叶志,贾东永.MATLAB数值分析与应用.北京:机械工业出版社,2009
[34]龙华伟,顾永刚.LabVIEW 8.2.1与DAQ[M]数据采集.北京:清华大学出版社,2008
[35]魏巍.MATLAB信息工程工具箱技术手册.北京:国防工业出版社,2000
[2]Gross.W.A. .Gas Film Lubrication,New York :Wiley,1962
[3]Salbu EOJ.Compressible squeeze films and squeeze bearings.ASME J of Basic Eng,, 1964,86(3):355-366
[4]Beck JV. ,Holiday WG. ,Strodtman CL..Experimental and analysis of a flat disk squeeze-film bearing including effects of supported mass motion. ASME J of Lubr ,1969,91(1):138-148
[5]Yoshiki Hashimoto. Near field acoustic levitation of planar specimens using flexural vibration. J.Acoust.Soc,1996,100(4):2057-2061
[6]Adi Minikes,I Bucher. Levitation force induced by pressure radiation in gas squeeze films. J.Acoust.Soc,2004,116(1):217-226
[7]魏彬,马希直.考虑激振模态的挤压膜悬浮导轨特性分析.润滑与密封,2010,2:211-216
[8]A. Minikes,I. Bucher. Coupled dynamics of a squeeze-.lm levitated mass and a vibrating piezoelectric disc: numerical analysis and experimental study. Journal of Sound and Vibration,2003,263: 241-268
[9]Shigeka Yoshimoto, Hiroyuki Kobayashi, Masaaki Miyatake. Float characteristics of a squeeze-film air bearing for a linear motion guide using ultrasonic vibration .J of Tribology International ,2007,40(3):503-511
[10]T.A.Stolarski. Load-carrying capacity generation in squeeze film action. International of Mechanical Sciences,2006,48(1):736-741
[11]T.A Stolarski. Numerical modeling and experimental verification of compressible squeeze film pressure .Tribology International, 2010,43:356-360
[12]Yuji ono, Shigeka Yoshimoto, Masaaki Miyatake Impulse-load dynamics of squeeze film gas bearings for a linear motion guide. J of Tribology, 2009,131:1-6
[13]朱均,虞烈.流体润滑理论.西安:西安交通大学润滑理论及轴承研究所,1991
[14](英)O.平克斯,B.斯德因李希特.流体动力润滑理论.北京:机械工业出版社,1980
[15]池长青.流体力学润滑.北京:国防工业出版社,1998
[16]张直明.滑动轴承的流体动力润滑理论.北京:高等教育出版社,1986
[17]魏彬,马希直.气体挤压膜的研究方法.江苏航空,2008,S1:145-148
[18]魏彬,马希直.挤压膜悬浮导轨机理研究.润滑与密封,2010,3:37-40
[19]W.E.Langlois. Isothermal Squeeze Films. Quarterly of Applied Mathematics, 1962,XX(2): 131-150
[20]魏彬,马希直.考虑激振模态的挤压膜悬浮导轨特性分析.润滑与密封,2010,2:56-59
[21]魏彬,马希直,唐伟坤.压电陶瓷激励下的超声悬浮的特性分析.压电与声光,2011,1:81-84
[22]刘涛,杨凤鹏等.精通ANSYS.北京:清华大学出版社,2002
[23]许洋,彭任喜,党沙沙等.ANSYS11.0/FLOTRAN流场分析实例指导实例教程.北京:机械工业出版社,2009
[24]胡国良,任继文,ANSYS 11.0有限元分析入门与提高[M]北京,国防工业出版社,2009
[25](美)贾菲.压电陶瓷.北京:科学出版社,1979
[26](英)范兰德拉特,(英)塞德林顿.压电陶瓷.北京:科学出版社,1981
[27](日)田中哲郎.压电陶瓷材料.北京:科学出版社,1982
[28]林书玉.超声换能器的原理及设计.北京:科学出版社,2004
[29]陈桂生.超声换能器设计.北京:海洋出版社,1984
[30]周传德.传感器与测试技术.重庆:重庆大学出版社,2009
[31]管爱红,张红梅,杨铁军.MATLAB基础及其应用教程,北京:电子工业出版社,2009
[32]赵书兰.MATLAB R2008接口技术程序设计实例教程.北京:化学工业出版社,2009
[33]宋叶志,贾东永.MATLAB数值分析与应用.北京:机械工业出版社,2009
[34]龙华伟,顾永刚.LabVIEW 8.2.1与DAQ[M]数据采集.北京:清华大学出版社,2008
[35]魏巍.MATLAB信息工程工具箱技术手册.北京:国防工业出版社,2000