多光束干涉对波片性能的影响及实验测试
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摘要
光相位延迟器,是偏光技术和激光技术领域中极为重要的光学器件,也是最基本的光相位调制器。它能使透过它的振动方向相互垂直的两束光波彼此之间产生一定的相位差,故称光相位延迟器。常用的有λ/4相位延迟器和λ/2相位延迟器。光相位延迟器同其他偏光器件相配合,可以实现光的各种偏振态之间的相互转换、偏振面的旋转以及各类光波的调制。可以说几乎所有应用偏光技术的地方都离不开光相位延迟器。
常规的相位延迟器,其延迟量都是对某一波长而言的,当入射波长改变时其延迟量也要发生相应的变化,并且对其延迟量对温度和入射方位的变化敏感。为了克服这种敏感变化,提高器件的性能,国内外科研机构陆续推出复合波片.复合波片满足一定的复合条件时,复合波片可以实现消色差的目的,并且可以减轻温度效应和方位效应,应用前景十分广阔.消色差延迟器能用各种方法制作,设计形式多种多样,设计思路也不尽相同,但它们的共同之处是努力提高消色差范围和延迟量精度。消色差相位延迟器,根据设计的机理不同可以分成两大类:一是全内反射型消色差相位延迟器,二是双折射型消色差相位延迟器。实践证明,理想的消色差波片应当以简便片状双折射型设计为主,在此基础上考虑其他方面因素的影响,提高其设计精度,避免光路系统偏折,降低插入损耗,从而提高器件的可操作性。
由于制作相位延迟器的波片有的比较薄,并且表面光滑其表面的反射率较高所以波片内部以及复合波片间存在光束多次反射引起的干涉.(零级云母四分之一波片,其厚度大约在0.032～0.035mm之间,这样薄的厚度会使透射光产生强烈的干涉),这些缺点将会影响波片延迟量、透射比等等,进而影响到复合波片的使用。虽然目前对单元波片,复合波片的研究理论,试验比较成熟,但是都未考虑波片内部,以及波片间多光束反射引起的干涉的影响,为了更好的利用波片,提高波片(单元波片,复合波片等)的性能,研究单元波片的干涉效应非常有意义。
目前,测量的波片相位延迟量的方法主要有光电调制法、补偿法及光谱法等。但是有的方法过于复杂,有的只能用于测量1/4波片的相位延迟。并且很多方法只能对单个波长进行测量,不能得出在波长改变时的结果。针对这一问题,通过理论,试验等的反复比较,本文选用椭偏光谱法一种能连续测量波片在一定光谱范围内的延迟量的方法。该方法具有测量方便、周期短、精度高等特点。
1945年,A.Rothen设计和描述了第一台椭圆偏振测量仪,用于测量和研究薄膜表面的光学性质(如折射率和厚度)。自此以后椭圆偏振测量技术开始应用到越来越广泛的领域,椭偏仪也得到了长足的发展,由开始的手动测量变成自动测量,光谱范围逐渐变宽,测量精度也越来越高。本文使用法国Jobin-Yvon公司生产的UVISAL型椭偏仪,利用其透射形式对石英波片和云母波片在一定光谱范围内的延迟量进行了测量。用UV-3101Pc分光光度计对石英波片和云母波片在一定光谱范围内的透射比进行了测量。全文概括起来有以下几个方面的内容:
第一章主要介绍了选题依据、目的、所做工作以及意义。
第二章介绍了单元波片的基础理论,并介绍了两种常用波片,石英和云母两种材料的基本知识。
第三章介绍了光的干涉理论,介质膜的干涉理论,并理论推导和分析了波片表面多次相干反射对延迟量和光强透射比的影响。
第四章利用椭偏测量法从实验上给出了石英波片和云母波片在一定光谱范围内的延迟量随波长的变化,利用UV-3101PC分光光度计给出了石英波片和云母波片在一定光谱范围内的透射比随波长的变化。
论文工作的创新之处:用矩阵方法推导出了单元波片的由于多光束反射引起的干涉理论,即推导了考虑多光束反射引起的干涉后单波片的相位延迟量,光强透射比公式,以及波片的相位延迟量和透射比的关系式。选用了一种精确测量波片延迟量的方法,并测得了石英波片和云母波片的精确延迟量。测量了度上宽带增透膜后,波片的精确延迟量。
本论文为单元波片,复合波片的设计使用提供很好的理论依据,为进一步提高复合波片的性能奠定了理论依据,因此我们的研究工作具有一定的使用参考价值。通过上述工作,作者认为今后可以研究一下二元,三元波片的干涉效应,因为二元,三元波片涉及到波片间的多光束反射引起的干涉。使这一方面的工作更完善,取得更大突破。
Optical Phase Retarders are not only important optical components in laser technique and polarized light technique fields,but also the basic optical phase modulators that introduce a phase shift between orthogonal and linearly polarized component when light transmits through them.The common are quarter-wave plate and half-wave plate.Fitted with other polafimetric elements,they can realize converting and rotating of polarization states,and modifying of all kinds of light wave.So we can say that everywhere use polarized light technique can hardly work without optical phase retarders.
Conventional optical phase retarders are mostly designed by birefringent material.The refractive indices depend on the wavelength so strongly that the retardation is close to wavelength,here we call this dependent relationship the birefringent dispersion of material.This is the reason why conventional optical phase retarders are mostly applied to a single wavelength but can' t be used to varied wavelength,so they are inconvenient to handle.Therefore somebody put forward the design of achromatic optical phase retarders whose retardation are insensitive to wavelength.Due to the less dependence on wavelength,this kind of optical phase retarders have an extensive used perspective.
Achromatic optical phase retarders can be made by different methods and by miscellaneous design forms,while the common aim is to improve the achromatic spectral range and precision. Achromatic optical phase retarders can be divided into two main types according to design mechanics,birefringence and total internal reflection.The simple fiat-plate birefringent ones have been proved to be ideal by experience.Considering the contribution of other factors,to improve design accuracy,avoid optical path deviation,reduce insert dissipation and increase the manipuility of the device is our purpose.
Because some wave plate manufactures are quite thin,the superficial is smooth and its index of surface reflection is high,interior of the wave plate as well as between the compound wave plates have the interference which the light beam reflects many times causes.(zero order mica 1/4 wave plates,its thickness is between 0.032-0.035mm,such a thin thickness will probably cause transmitted light to have intense interference).These shortcomings will affect the retard quantity of wave plate,transmissivity and so on,will then affect the compound wave plates' uses.Although at present the theory of unit wave plate and the compound wave plates as well as the experiment is quite mature,but it has not considered interior plate,as well as between the wave plate the multi-light beam reflection which causes the interference influence.For the better use of wave plate,and enhancing the the performance of wave plate(unit wave plate, compound wave plates and so on),the research of unit wave plate's interference effect is meaningful.
At present,there are some methods such as the photoelectricity modulation method,the compensation method and the spectrographic method and so on.But some methods are too complex,some can only been used to measure the phase delay of 1/4 wave plate.What's more, many methods can only measure the phase retardation at a single wave length and cannot obtain the result as the wave length changes.In view of this question,this article put forward one ellipsometric spectrum method which can measure the wave plate's phase retardation in a certain spectrum range.This method has the following merits:convenient survey,the periodic time is short,high accuracy.
In 1945,A.Rothen designed and described the first elliptical polarization measuring instrument,used to measure and the research the thin film's surface optical quality(for example refractive index and thickness).From now on the elliptical polarization survey technology has been applied to more and more widespread field.The ellipsometer also obtained a considerable development.The original manual survey turned into automatic survey,the spectrum scope gradually broadens,the measurement accuracy becomes more and more higher.This thesis use the UVISAL ellipsometer which is produced by the French Jobin-Yvon Corporation to measure the phase retardation of quartz wave plate and mica wave plate in a certain spectrum scope.What the experiment uses is the transmission type of this ellipsometer.
The full text has the following several aspects.The first chapter mainly introduced the selected topic basis,the purpose,my work as well as the significance.The second chapter introduced the unit wave plate's basic theory,and introduced two kind of commonly used wave plates,the quartz and the mica and the elementary knowledge of the two material.The third chapter introduced the light interference theory,the medium membrane's interference theory,and inferred and analyzed the theory of the wave plate surface coherent reflection to retard the quantity and the transmissibility influence many times.The fourth chapter,surveyed the law using the ellipse to give the quartz wave plate and the mica wave plate's in certain spectral region detention quantity from the experiment along with the wave length change,has given the quartz wave plate and the mica wave plate's in certain spectral region transmissivity using the UV-3101PC spectrophotometer along with the wave length changes.
Originality innovation places:Inferred the interference theory of the unit wave plate with the matrix method,which the multi-light beam reflection caused,namely inferred single wave plate's phase delay quantity,luminous intensity transmissivity formula,as well as wave plate's phase delay quantity and transmissivity relationship after considering the multi-light beam reflection which caused the interference,.Selected one kind of precision measuring wave plate to retard the quantity the method,and has obtained the quartz wave plate and the mica wave plate's precise detention quantity.After having surveyed on the wide band anti-reflection film,we also obtained the wave plate's precise detention quantity.
We provided the very good theory basis in the present paper for the design and the use of the unit wave plate,the compound wave plates,and for further enhancing the compound wave plate's performance to establish the theory basis,therefore our research work had certain reference value for use.Through the above work,the author thought that from now on we may study dual,three Yuan wave plates' interference effects,because dual,three Yuan wave plates involve the interference which causes multi-light beam reflection between wave plate's.It will make the work more perfect,and it may make a bigger breakthrough.
常规的相位延迟器,其延迟量都是对某一波长而言的,当入射波长改变时其延迟量也要发生相应的变化,并且对其延迟量对温度和入射方位的变化敏感。为了克服这种敏感变化,提高器件的性能,国内外科研机构陆续推出复合波片.复合波片满足一定的复合条件时,复合波片可以实现消色差的目的,并且可以减轻温度效应和方位效应,应用前景十分广阔.消色差延迟器能用各种方法制作,设计形式多种多样,设计思路也不尽相同,但它们的共同之处是努力提高消色差范围和延迟量精度。消色差相位延迟器,根据设计的机理不同可以分成两大类:一是全内反射型消色差相位延迟器,二是双折射型消色差相位延迟器。实践证明,理想的消色差波片应当以简便片状双折射型设计为主,在此基础上考虑其他方面因素的影响,提高其设计精度,避免光路系统偏折,降低插入损耗,从而提高器件的可操作性。
由于制作相位延迟器的波片有的比较薄,并且表面光滑其表面的反射率较高所以波片内部以及复合波片间存在光束多次反射引起的干涉.(零级云母四分之一波片,其厚度大约在0.032～0.035mm之间,这样薄的厚度会使透射光产生强烈的干涉),这些缺点将会影响波片延迟量、透射比等等,进而影响到复合波片的使用。虽然目前对单元波片,复合波片的研究理论,试验比较成熟,但是都未考虑波片内部,以及波片间多光束反射引起的干涉的影响,为了更好的利用波片,提高波片(单元波片,复合波片等)的性能,研究单元波片的干涉效应非常有意义。
目前,测量的波片相位延迟量的方法主要有光电调制法、补偿法及光谱法等。但是有的方法过于复杂,有的只能用于测量1/4波片的相位延迟。并且很多方法只能对单个波长进行测量,不能得出在波长改变时的结果。针对这一问题,通过理论,试验等的反复比较,本文选用椭偏光谱法一种能连续测量波片在一定光谱范围内的延迟量的方法。该方法具有测量方便、周期短、精度高等特点。
1945年,A.Rothen设计和描述了第一台椭圆偏振测量仪,用于测量和研究薄膜表面的光学性质(如折射率和厚度)。自此以后椭圆偏振测量技术开始应用到越来越广泛的领域,椭偏仪也得到了长足的发展,由开始的手动测量变成自动测量,光谱范围逐渐变宽,测量精度也越来越高。本文使用法国Jobin-Yvon公司生产的UVISAL型椭偏仪,利用其透射形式对石英波片和云母波片在一定光谱范围内的延迟量进行了测量。用UV-3101Pc分光光度计对石英波片和云母波片在一定光谱范围内的透射比进行了测量。全文概括起来有以下几个方面的内容:
第一章主要介绍了选题依据、目的、所做工作以及意义。
第二章介绍了单元波片的基础理论,并介绍了两种常用波片,石英和云母两种材料的基本知识。
第三章介绍了光的干涉理论,介质膜的干涉理论,并理论推导和分析了波片表面多次相干反射对延迟量和光强透射比的影响。
第四章利用椭偏测量法从实验上给出了石英波片和云母波片在一定光谱范围内的延迟量随波长的变化,利用UV-3101PC分光光度计给出了石英波片和云母波片在一定光谱范围内的透射比随波长的变化。
论文工作的创新之处:用矩阵方法推导出了单元波片的由于多光束反射引起的干涉理论,即推导了考虑多光束反射引起的干涉后单波片的相位延迟量,光强透射比公式,以及波片的相位延迟量和透射比的关系式。选用了一种精确测量波片延迟量的方法,并测得了石英波片和云母波片的精确延迟量。测量了度上宽带增透膜后,波片的精确延迟量。
本论文为单元波片,复合波片的设计使用提供很好的理论依据,为进一步提高复合波片的性能奠定了理论依据,因此我们的研究工作具有一定的使用参考价值。通过上述工作,作者认为今后可以研究一下二元,三元波片的干涉效应,因为二元,三元波片涉及到波片间的多光束反射引起的干涉。使这一方面的工作更完善,取得更大突破。
Optical Phase Retarders are not only important optical components in laser technique and polarized light technique fields,but also the basic optical phase modulators that introduce a phase shift between orthogonal and linearly polarized component when light transmits through them.The common are quarter-wave plate and half-wave plate.Fitted with other polafimetric elements,they can realize converting and rotating of polarization states,and modifying of all kinds of light wave.So we can say that everywhere use polarized light technique can hardly work without optical phase retarders.
Conventional optical phase retarders are mostly designed by birefringent material.The refractive indices depend on the wavelength so strongly that the retardation is close to wavelength,here we call this dependent relationship the birefringent dispersion of material.This is the reason why conventional optical phase retarders are mostly applied to a single wavelength but can' t be used to varied wavelength,so they are inconvenient to handle.Therefore somebody put forward the design of achromatic optical phase retarders whose retardation are insensitive to wavelength.Due to the less dependence on wavelength,this kind of optical phase retarders have an extensive used perspective.
Achromatic optical phase retarders can be made by different methods and by miscellaneous design forms,while the common aim is to improve the achromatic spectral range and precision. Achromatic optical phase retarders can be divided into two main types according to design mechanics,birefringence and total internal reflection.The simple fiat-plate birefringent ones have been proved to be ideal by experience.Considering the contribution of other factors,to improve design accuracy,avoid optical path deviation,reduce insert dissipation and increase the manipuility of the device is our purpose.
Because some wave plate manufactures are quite thin,the superficial is smooth and its index of surface reflection is high,interior of the wave plate as well as between the compound wave plates have the interference which the light beam reflects many times causes.(zero order mica 1/4 wave plates,its thickness is between 0.032-0.035mm,such a thin thickness will probably cause transmitted light to have intense interference).These shortcomings will affect the retard quantity of wave plate,transmissivity and so on,will then affect the compound wave plates' uses.Although at present the theory of unit wave plate and the compound wave plates as well as the experiment is quite mature,but it has not considered interior plate,as well as between the wave plate the multi-light beam reflection which causes the interference influence.For the better use of wave plate,and enhancing the the performance of wave plate(unit wave plate, compound wave plates and so on),the research of unit wave plate's interference effect is meaningful.
At present,there are some methods such as the photoelectricity modulation method,the compensation method and the spectrographic method and so on.But some methods are too complex,some can only been used to measure the phase delay of 1/4 wave plate.What's more, many methods can only measure the phase retardation at a single wave length and cannot obtain the result as the wave length changes.In view of this question,this article put forward one ellipsometric spectrum method which can measure the wave plate's phase retardation in a certain spectrum range.This method has the following merits:convenient survey,the periodic time is short,high accuracy.
In 1945,A.Rothen designed and described the first elliptical polarization measuring instrument,used to measure and the research the thin film's surface optical quality(for example refractive index and thickness).From now on the elliptical polarization survey technology has been applied to more and more widespread field.The ellipsometer also obtained a considerable development.The original manual survey turned into automatic survey,the spectrum scope gradually broadens,the measurement accuracy becomes more and more higher.This thesis use the UVISAL ellipsometer which is produced by the French Jobin-Yvon Corporation to measure the phase retardation of quartz wave plate and mica wave plate in a certain spectrum scope.What the experiment uses is the transmission type of this ellipsometer.
The full text has the following several aspects.The first chapter mainly introduced the selected topic basis,the purpose,my work as well as the significance.The second chapter introduced the unit wave plate's basic theory,and introduced two kind of commonly used wave plates,the quartz and the mica and the elementary knowledge of the two material.The third chapter introduced the light interference theory,the medium membrane's interference theory,and inferred and analyzed the theory of the wave plate surface coherent reflection to retard the quantity and the transmissibility influence many times.The fourth chapter,surveyed the law using the ellipse to give the quartz wave plate and the mica wave plate's in certain spectral region detention quantity from the experiment along with the wave length change,has given the quartz wave plate and the mica wave plate's in certain spectral region transmissivity using the UV-3101PC spectrophotometer along with the wave length changes.
Originality innovation places:Inferred the interference theory of the unit wave plate with the matrix method,which the multi-light beam reflection caused,namely inferred single wave plate's phase delay quantity,luminous intensity transmissivity formula,as well as wave plate's phase delay quantity and transmissivity relationship after considering the multi-light beam reflection which caused the interference,.Selected one kind of precision measuring wave plate to retard the quantity the method,and has obtained the quartz wave plate and the mica wave plate's precise detention quantity.After having surveyed on the wide band anti-reflection film,we also obtained the wave plate's precise detention quantity.
We provided the very good theory basis in the present paper for the design and the use of the unit wave plate,the compound wave plates,and for further enhancing the compound wave plate's performance to establish the theory basis,therefore our research work had certain reference value for use.Through the above work,the author thought that from now on we may study dual,three Yuan wave plates' interference effects,because dual,three Yuan wave plates involve the interference which causes multi-light beam reflection between wave plate's.It will make the work more perfect,and it may make a bigger breakthrough.
引文
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