Wolter-I型反射镜的加工及表面粗糙度检测
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摘要
软X射线-极紫外波段复合型望远镜是空间天气预报以及科学研究的重要仪器。其中的掠入射成像系统主要应用于对太阳活动以及其它天体活动进行空间环境监测,系统采用Wolter-I型结构。本人的工作主要是围绕Wolter-I型反射镜的加工和表面粗糙度测量来进行的:
1.根据Wolter-I型反射镜的特殊结构,在现有的条件下研制一台内非球面反射镜数控研抛机,该系统集快速铣磨成型、研磨抛光、在线检测三项功能于一体。
2.根据Preston方程和Hertz接触理论,推导出旋偏动模式下弹性球状小磨头加工Wolter-I型反射镜的去除函数理论模型。模型有两个:一种是基于工件保持不动,而磨头旋转的情况;另一种是基于磨头和工件都做旋转运动的情况。
3.根据反射镜的旋转对称特性,确定以逐环带修正面形的方案加工Wolter-Ι型反射镜。研究了逐环带加工反射镜时的驻留算法,分析了不同驻留步长对加工面形精度的影响。当磨头-工件角速度比ρ=1.41时,两步加工法研抛后的表面质量最好。抛光时选择三明治结构的方弧形磨头,使其在工件轴向上做往复震荡运动以浸液式的方法去除研抛阶段残留的中高频误差。
4.研究掠入射X射线散射测量超光滑表面的方法,根据一级矢量微扰理论对各个样品所测量的散射分布进行处理;分析了系统误差中探测器接收狭缝的宽度和入射光束的发散度这两个因素对测量结果的影响。
最终加工出的Wolter-I型反射镜的面形精度为PV:1.39μm;RMS:0.34μm;表面粗糙度为RMS:2.38nm;圆度均方根误差优于0.1μm。结果表明:提出的加工方法完全可行,表面粗糙度测量方法有效,为进一步加工符合设计要求的掠入射反射镜奠定了基础。
The grazing imaging system in the complex space soft X-ray and EUV telescope is mainly applied to the spatial environment monitoring and scientific studies for the solar and other celestial activities. Wolter-I structure is adopted in this system. So the fabrication and roughness measurement of the Wolter-I type mirrors are becoming the undergoing task for us.
1) According to the special structure of Wolter-I type mirrors, a grinding&polishing system have been development for fabrication Wolter-I type mirrors, which has the functions of milling, grinding&polishing and in-situ inspection.
2) Derive the removal function of small elastic sphere tool impacting on Wolter-I type mirrors with deflected rotating mode on the basis of Preston equation and Hertz contact theory. One of the removal models is that tool rotates but workpiece keeps static; and other is both tool and workpiece rotate.
3) Correct the surface form by tools dwelling on each zone. Dwell algorithm for fabrication Wolter-Ιtype mirrors and the impacts of dwell steps on surface figure are investigated and analyzed. We choose the two step method for controlling the surface quality. When the ratio of tool-workpiece rotating angle velocity is 1.41, the surface quality is in the best state. In order to reduce the middle-high frequency errors, we adopt a arc shaped tool to polishing workpiece in oscillation motion with immersion type.
4) The principle of measurement of super-smooth surface by grazing X-ray scattering method is introduced. The scattering diagrams measured on different samples are treated by first-order vector perturbation theory. The results indicate that the calculated PSD all are in a good agreement with the results obtained from Atomic force microscope (AFM). We also analyze the effects of the slit width of detector and the divergence of incidence X-ray on roughness measurement.
The final surface figure of the mirror is 1.39μm (PV), 0.34μm (RMS) and surface roughness is 2.38nm (RMS) and the error of circularity is less than 0.1μm (RMS). Finally, the feasibility of fabrication Wolter-Ιgrazing mirror with deflected rotating mode method and method for measurement surface roughness are demonstrated by our experiments, benefiting to the advance of future work.
1.根据Wolter-I型反射镜的特殊结构,在现有的条件下研制一台内非球面反射镜数控研抛机,该系统集快速铣磨成型、研磨抛光、在线检测三项功能于一体。
2.根据Preston方程和Hertz接触理论,推导出旋偏动模式下弹性球状小磨头加工Wolter-I型反射镜的去除函数理论模型。模型有两个:一种是基于工件保持不动,而磨头旋转的情况;另一种是基于磨头和工件都做旋转运动的情况。
3.根据反射镜的旋转对称特性,确定以逐环带修正面形的方案加工Wolter-Ι型反射镜。研究了逐环带加工反射镜时的驻留算法,分析了不同驻留步长对加工面形精度的影响。当磨头-工件角速度比ρ=1.41时,两步加工法研抛后的表面质量最好。抛光时选择三明治结构的方弧形磨头,使其在工件轴向上做往复震荡运动以浸液式的方法去除研抛阶段残留的中高频误差。
4.研究掠入射X射线散射测量超光滑表面的方法,根据一级矢量微扰理论对各个样品所测量的散射分布进行处理;分析了系统误差中探测器接收狭缝的宽度和入射光束的发散度这两个因素对测量结果的影响。
最终加工出的Wolter-I型反射镜的面形精度为PV:1.39μm;RMS:0.34μm;表面粗糙度为RMS:2.38nm;圆度均方根误差优于0.1μm。结果表明:提出的加工方法完全可行,表面粗糙度测量方法有效,为进一步加工符合设计要求的掠入射反射镜奠定了基础。
The grazing imaging system in the complex space soft X-ray and EUV telescope is mainly applied to the spatial environment monitoring and scientific studies for the solar and other celestial activities. Wolter-I structure is adopted in this system. So the fabrication and roughness measurement of the Wolter-I type mirrors are becoming the undergoing task for us.
1) According to the special structure of Wolter-I type mirrors, a grinding&polishing system have been development for fabrication Wolter-I type mirrors, which has the functions of milling, grinding&polishing and in-situ inspection.
2) Derive the removal function of small elastic sphere tool impacting on Wolter-I type mirrors with deflected rotating mode on the basis of Preston equation and Hertz contact theory. One of the removal models is that tool rotates but workpiece keeps static; and other is both tool and workpiece rotate.
3) Correct the surface form by tools dwelling on each zone. Dwell algorithm for fabrication Wolter-Ιtype mirrors and the impacts of dwell steps on surface figure are investigated and analyzed. We choose the two step method for controlling the surface quality. When the ratio of tool-workpiece rotating angle velocity is 1.41, the surface quality is in the best state. In order to reduce the middle-high frequency errors, we adopt a arc shaped tool to polishing workpiece in oscillation motion with immersion type.
4) The principle of measurement of super-smooth surface by grazing X-ray scattering method is introduced. The scattering diagrams measured on different samples are treated by first-order vector perturbation theory. The results indicate that the calculated PSD all are in a good agreement with the results obtained from Atomic force microscope (AFM). We also analyze the effects of the slit width of detector and the divergence of incidence X-ray on roughness measurement.
The final surface figure of the mirror is 1.39μm (PV), 0.34μm (RMS) and surface roughness is 2.38nm (RMS) and the error of circularity is less than 0.1μm (RMS). Finally, the feasibility of fabrication Wolter-Ιgrazing mirror with deflected rotating mode method and method for measurement surface roughness are demonstrated by our experiments, benefiting to the advance of future work.
引文
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