直线电机驱动并联XY平台的控制
摘要
随着科学技术进步,高速度、高精度成为机械加工的重要发展方向,高速精密驱动技术得到了很大发展,高速精密丝杠、直线电机、空气轴承以及先进控制方法等各种新技术都陆续被应用到驱动系统。本文以一个高加速度直线伺服系统——直线电机驱动的X-Y定位平台为研究对象,吸收相关学科的新思想、新理论、新技术,设计控制器使得平台能进行快速点到点高精度定位,并采用理论研究、计算机仿真与试验研究相结合的研究方法,系统地进行了动力学分析、控制和相应的技术基础研究与实验研究。
影响高加速度系统快速高精度定位性能的两个关键因素是负载变化和外界干扰。因为负载变化减慢了系统的响应速度,而外界干扰降低了定位精度。本文所提出的控制算法就是围绕如何处理负载变化和干扰的影响。首先了解了直线电机的工作原理以及各种扰动因素,并利用频率响应法建立了直线电机进给系统的动力学模型。然后基于控制系统的稳定性和抗扰动原则,设计了永磁直线同步电机进给系统H_∞控制器。针对直线电机模型不确定性及扰动力复杂状况,设计了稳定性与品质的混合H_∞鲁棒控制器;采用频域响应法对设计的H_∞鲁棒控制器进行了稳定性与抗扰动性能理论分析,分析表明设计的H_∞控制器对所有频率的扰动均具有抑制性能,尤其对低频率的扰动具有良好的抑制能力,同时具有很强的稳定性;并对H_∞鲁棒控制器进行了计算机仿真并在实验室样机上进行了初步试验,仿真结果及试验结果都表明H_∞鲁棒控制器在响应速度、超调量、抗扰动等方面均具有良好的运动性能。
The research theme of this dissertation is the feeding system of Permanent Magnet Linear Synchronous Motors (PMLSM) and its control scheme. Base on the original thoughts, new theories and technologies of correlative subjects, a PMLSM feeding system is established. The dynamics and control strategy as well as key technologies of PMLSM feeding system are studied systematically by combining theoretical analysis, computer simulation with experiments.
With the development of the technology, high-velocity and high-precision has become the important development trend of machining productivity, high-speed and high-precision drive system has developed a lot, high-speed and high-precision screw, linear motor, air-bearing and every kind of new technology are been used in dive system. At last, based on a servo system with high acceleration, an X-Y position platform driven by linear motors, a controller is proposed to make the platform position quickly with high precision.
The key factors on fast high-precision position control of high-acceleration systems are the load changing and the outside disturbances, since that the load changing slows down the system’s response and the disturbances degrade the position accuracy. Working in this dissertation is mainly about how to deal with these two factors. Firstly, we familiar with the work principle of linear motor and all the disturbance factors, and get the dynamical modeling of linear motor using the frequency response method. Then according to the stability and anti-interference law based on the system, we design a H_∞controller. Contraposing to the model uncertainty and complex disturbances, we design a mixed H_∞robust controller, and analysis this controller using frequency response method. The analysis results display that this controller can suppress the disturbances in all frequency domain, especially in low frequency, and the controller has good stability. H_∞controller has good performance in all parts like response velocity, anti-interference ability both simulation and real experiments.
影响高加速度系统快速高精度定位性能的两个关键因素是负载变化和外界干扰。因为负载变化减慢了系统的响应速度,而外界干扰降低了定位精度。本文所提出的控制算法就是围绕如何处理负载变化和干扰的影响。首先了解了直线电机的工作原理以及各种扰动因素,并利用频率响应法建立了直线电机进给系统的动力学模型。然后基于控制系统的稳定性和抗扰动原则,设计了永磁直线同步电机进给系统H_∞控制器。针对直线电机模型不确定性及扰动力复杂状况,设计了稳定性与品质的混合H_∞鲁棒控制器;采用频域响应法对设计的H_∞鲁棒控制器进行了稳定性与抗扰动性能理论分析,分析表明设计的H_∞控制器对所有频率的扰动均具有抑制性能,尤其对低频率的扰动具有良好的抑制能力,同时具有很强的稳定性;并对H_∞鲁棒控制器进行了计算机仿真并在实验室样机上进行了初步试验,仿真结果及试验结果都表明H_∞鲁棒控制器在响应速度、超调量、抗扰动等方面均具有良好的运动性能。
The research theme of this dissertation is the feeding system of Permanent Magnet Linear Synchronous Motors (PMLSM) and its control scheme. Base on the original thoughts, new theories and technologies of correlative subjects, a PMLSM feeding system is established. The dynamics and control strategy as well as key technologies of PMLSM feeding system are studied systematically by combining theoretical analysis, computer simulation with experiments.
With the development of the technology, high-velocity and high-precision has become the important development trend of machining productivity, high-speed and high-precision drive system has developed a lot, high-speed and high-precision screw, linear motor, air-bearing and every kind of new technology are been used in dive system. At last, based on a servo system with high acceleration, an X-Y position platform driven by linear motors, a controller is proposed to make the platform position quickly with high precision.
The key factors on fast high-precision position control of high-acceleration systems are the load changing and the outside disturbances, since that the load changing slows down the system’s response and the disturbances degrade the position accuracy. Working in this dissertation is mainly about how to deal with these two factors. Firstly, we familiar with the work principle of linear motor and all the disturbance factors, and get the dynamical modeling of linear motor using the frequency response method. Then according to the stability and anti-interference law based on the system, we design a H_∞controller. Contraposing to the model uncertainty and complex disturbances, we design a mixed H_∞robust controller, and analysis this controller using frequency response method. The analysis results display that this controller can suppress the disturbances in all frequency domain, especially in low frequency, and the controller has good stability. H_∞controller has good performance in all parts like response velocity, anti-interference ability both simulation and real experiments.
引文
1 Chintae Choi and Tsu-Chin Tsao,“Control of Linear Motor Machine Tool Feed Drives for End Milling: Robust MIMO Approach”, Mechatronics, 15(2005):1207~1224, 2005
2 T.H.Lee, K.K.tan, S.Y.Lim and H.F.Dou,“Iterative Learning Control of Permanent Magnet Linear Motor with Rrelay Automatic Tuning”, Mechatronics, 10(2000):169~190, 1999
3 D.Renton and M.A.Elbestawi,“Motion Control for Linear Motor Feed Drives in Advanced Machine Tools”, International Journal of Machine Tools & Manufacture, 41(2001):479~507, 2000
4 Zuo Zong Liu , Fang Lin Luo and M.Azizur Rahman,“Robust and Precision Control System of Linear Motor Direct Drive for Digh-speed X-Y Table Positioning Mechanism”, IEEE Transactions on Industrial Electronics, vol.52. NO.5,2005
5 Z.Z.Liu, F.L.Luo and M.H.Rashid,“Robust High Speed and High Precision Linear Motor Direct Drive XY Table Motion Mystem”, IEEE Transactions on Industrial Electronics, 2004
6 Bong Keun Kim, Wan Kyun Chung and Hyun-Taek Choi,“Robust Internal Loop Compensator Design Motion Control of Precision Linear Motor”, IEEE Transactions on Industrial Electronics, 1999
7 van den Braembussche, P., J. Swevers, H. Van Brussel, and P. Vanherck,“Accurate Tracking Control of Linear Synchronous Motor Machine Tool Axes,”Mechatronics, Vo1. 6, No. 5, pp. 507-521 (1996).
8 T.M.Jahns and W.L. Soong,“Pulsating Torque Minimization Techniques for Permanent Magnet AC Motor Drives-A Review,”IEEE Trans. Ind. Electron., Vo1. 43, No. 2, pp. 321-330 (1996).
9 G.Otten, T.J.A. de Vries, J. van Amerongen, A.M. Rankers, and E.W. Gaal,“Linear Motor Motion Control Using a Learning Feedforward Controller,”IEEE/ASME Trans. Mechatron., Vo1. 2, No. 3, pp. 179-187 (1997).
10 E.Schrijver and J. van Dijk.“H∞Design of Disturbance Compensators forCogging Forces in a Linear Permanent Magnet Motor,”J. A, Vo1. 40, No. 4, pp. 36-41 (1999).
11 T.H.Lee, K.K. Tan, S.Y. Lim, and H.F. Dou,“Iterative Learning of Permanent Magnet Linear Motor with Relay Automatic Tuning,”Mechatronics, Vo1. 10, No. 1-2, pp. 169-190 (2000).
12 L.Xu and B. Yao,“Adaptive Robust Precision Motion Control of Linear Motors with Ripple Force Compensations: Theory and Experiments,”Proc. IEEE Conf. Contr. Appl., Anchorage, USA, pp. 373-378 (2000).
13 C.Rrig and A. Jochheim,“Identification and Compensation of Force Ripple in Linear Permanent Magnet Motors,”Proc. Amer. Contr. Conf., Arlington, USA, pp. 2161-2166 (2001).
14 KK,Tan. Precision Motion Control With Disturbance Observer for Pulsewidth-Modulated-Driven Permanent-Magnet Linear Motors. IEEE Transaction on magnetics Vol.39.No.3, May,2003.
15 Matlab Data-Fitting Toolbox User Guide.2004
16 Lennart and Ljung, System Identification—Theory for the User, Second Edition, Prentice-hall, Jan.2002
17 K. Zhou, J. C. Doyle, and K. Glover, Robust and Optimal Robust Control. Upper Saddle River, NJ: Prentice-Hall, 1996.
18 Zhongming Li, Weiguo Liu, Rear Earth Permanent Magnet Electrical Machines, Beijing: National Defense Industry Press, 1999.
19 Ronald Rohner, Linear Motor. US 6316848 B1,Nov 13,2001.
20 Danaher Motion, Platinum DDL Motors Catlaog, November 2004.
21 K V. I. Johannes, M. A. Green, and C. A. Brockley. The Role of the Rate of Application of the Tangential Force in Determining the Static Friction Coefficient. Wear, 24:381–385, 1973.
22 Ernest Rabinowicz. The Nature of the Static and Kinetic Coefficients of Friction. Journal of Applied Physics, 22H11I:1373–79, 1951.
23 R. S. H. Richardson and H. Nolle. Surface Friction under Time-dependent Lloads. Wear, 37H1I:87–101, 1976.
24 J. Courtney-Pratt and E. Eisner. The Effect of a Tangential Force on the Contact of Metallic Dodies. In Proceedings of the Royal Society, volume A238, pages 529–550, 1957.
25 THK Product Catalog.2008
26 Danaher Motion Control Reference.2006.
27 Yu Xinlu, Jiang Hairong, Controller Optimization with CRS Algorithm for Linear Motor Driven XY Table, Mechanical and Electronics, Vol1, 2009
28 Toshimasa Miyazaki,Daiichi Koide,Koichi Inomata,Haruki Tokumaru,Kiyoshi Ohishi.Robust feedforward Tracking Control Based on Sudden Disturbance Observer and Zpetc control for Optical Disk Recording System[J]. AMC-Kawasaki Japan,2004.
29 Z. W. Zheng. Research on Servo Control of High Precision Machine: (Dissertation for the PhD Degree). National University of Defense Technology, 2001.
30胡佑德,马东升,张莉松.伺服系统原理与设计(修订版)[M].北京理工大学出版社,1999.
31 H.S.Lee, Masayoshi Tomizuka. Robust Motion Controller Design for High-accuracy Positioning System[J]. Industrial electronics, Vol.43, No.1, 1996.
32 H.T.Choi, B.K.Kim, II Hong Suh, Wan Kyun Chung. Design of Robust High-speed Motion Controller for a Plant with Actuator Saturation [J]. Dynamic systems, Measurement, and Control, Vol.122/535, 2002.
33叶云岳.国内外直线电机技术的发展与应用综述.电器工业.2003, 1:12-15
34丁汉.高加速度运动控制系统的建模与控制.航空制造技术.2005, 8:26-30
35杜伟涛.面向芯片封装的高速精密定位平台控制系统设计.天津大学硕士毕业论文.2006, 1:1-6
36 Rohrig, Christof. Motion Control of Linear Permanent Magnet Motors with Force Ripple Compensation. Department of Electrical Engineering and Information Technology.2001, 5:1-5
37 H.S.Lee, M.Tomizuka, Robust Motion Controller Design for High-accuracy Positioning Systems, IEEE Transactions on Industrial Electronics, Vol. 43, No.1, 1996, pp.48-55.
38 Kaan Erkorkmaz,Yusuf Altintas.High speed CNC system design. PartⅡ: Modeling and Identification of Feed Drives. International Journal of Machine Tools & Manufacture.2001, 41:1487-1509
39 Lennart Ljung. System Identification Theory for the User.第三版.清华大学出版社,2002:1-563
40 Dr.Brian,M.Perreault. Control Strategies for Linear Synchronous Motors. IEEE.2007, 1:969-971
41 M.J.Jang, K.C.Lin, C.L.Chen. Modeling and Positioning Control of a Ball Screw Driven Stage. International Conference on Networking, Sensing & Control.2004,3:21-23
42 [美]George Ellis.控制系统设计指南.刘君华,汤晓君译.第三版.电子工业出版社,2006:72-128
2 T.H.Lee, K.K.tan, S.Y.Lim and H.F.Dou,“Iterative Learning Control of Permanent Magnet Linear Motor with Rrelay Automatic Tuning”, Mechatronics, 10(2000):169~190, 1999
3 D.Renton and M.A.Elbestawi,“Motion Control for Linear Motor Feed Drives in Advanced Machine Tools”, International Journal of Machine Tools & Manufacture, 41(2001):479~507, 2000
4 Zuo Zong Liu , Fang Lin Luo and M.Azizur Rahman,“Robust and Precision Control System of Linear Motor Direct Drive for Digh-speed X-Y Table Positioning Mechanism”, IEEE Transactions on Industrial Electronics, vol.52. NO.5,2005
5 Z.Z.Liu, F.L.Luo and M.H.Rashid,“Robust High Speed and High Precision Linear Motor Direct Drive XY Table Motion Mystem”, IEEE Transactions on Industrial Electronics, 2004
6 Bong Keun Kim, Wan Kyun Chung and Hyun-Taek Choi,“Robust Internal Loop Compensator Design Motion Control of Precision Linear Motor”, IEEE Transactions on Industrial Electronics, 1999
7 van den Braembussche, P., J. Swevers, H. Van Brussel, and P. Vanherck,“Accurate Tracking Control of Linear Synchronous Motor Machine Tool Axes,”Mechatronics, Vo1. 6, No. 5, pp. 507-521 (1996).
8 T.M.Jahns and W.L. Soong,“Pulsating Torque Minimization Techniques for Permanent Magnet AC Motor Drives-A Review,”IEEE Trans. Ind. Electron., Vo1. 43, No. 2, pp. 321-330 (1996).
9 G.Otten, T.J.A. de Vries, J. van Amerongen, A.M. Rankers, and E.W. Gaal,“Linear Motor Motion Control Using a Learning Feedforward Controller,”IEEE/ASME Trans. Mechatron., Vo1. 2, No. 3, pp. 179-187 (1997).
10 E.Schrijver and J. van Dijk.“H∞Design of Disturbance Compensators forCogging Forces in a Linear Permanent Magnet Motor,”J. A, Vo1. 40, No. 4, pp. 36-41 (1999).
11 T.H.Lee, K.K. Tan, S.Y. Lim, and H.F. Dou,“Iterative Learning of Permanent Magnet Linear Motor with Relay Automatic Tuning,”Mechatronics, Vo1. 10, No. 1-2, pp. 169-190 (2000).
12 L.Xu and B. Yao,“Adaptive Robust Precision Motion Control of Linear Motors with Ripple Force Compensations: Theory and Experiments,”Proc. IEEE Conf. Contr. Appl., Anchorage, USA, pp. 373-378 (2000).
13 C.Rrig and A. Jochheim,“Identification and Compensation of Force Ripple in Linear Permanent Magnet Motors,”Proc. Amer. Contr. Conf., Arlington, USA, pp. 2161-2166 (2001).
14 KK,Tan. Precision Motion Control With Disturbance Observer for Pulsewidth-Modulated-Driven Permanent-Magnet Linear Motors. IEEE Transaction on magnetics Vol.39.No.3, May,2003.
15 Matlab Data-Fitting Toolbox User Guide.2004
16 Lennart and Ljung, System Identification—Theory for the User, Second Edition, Prentice-hall, Jan.2002
17 K. Zhou, J. C. Doyle, and K. Glover, Robust and Optimal Robust Control. Upper Saddle River, NJ: Prentice-Hall, 1996.
18 Zhongming Li, Weiguo Liu, Rear Earth Permanent Magnet Electrical Machines, Beijing: National Defense Industry Press, 1999.
19 Ronald Rohner, Linear Motor. US 6316848 B1,Nov 13,2001.
20 Danaher Motion, Platinum DDL Motors Catlaog, November 2004.
21 K V. I. Johannes, M. A. Green, and C. A. Brockley. The Role of the Rate of Application of the Tangential Force in Determining the Static Friction Coefficient. Wear, 24:381–385, 1973.
22 Ernest Rabinowicz. The Nature of the Static and Kinetic Coefficients of Friction. Journal of Applied Physics, 22H11I:1373–79, 1951.
23 R. S. H. Richardson and H. Nolle. Surface Friction under Time-dependent Lloads. Wear, 37H1I:87–101, 1976.
24 J. Courtney-Pratt and E. Eisner. The Effect of a Tangential Force on the Contact of Metallic Dodies. In Proceedings of the Royal Society, volume A238, pages 529–550, 1957.
25 THK Product Catalog.2008
26 Danaher Motion Control Reference.2006.
27 Yu Xinlu, Jiang Hairong, Controller Optimization with CRS Algorithm for Linear Motor Driven XY Table, Mechanical and Electronics, Vol1, 2009
28 Toshimasa Miyazaki,Daiichi Koide,Koichi Inomata,Haruki Tokumaru,Kiyoshi Ohishi.Robust feedforward Tracking Control Based on Sudden Disturbance Observer and Zpetc control for Optical Disk Recording System[J]. AMC-Kawasaki Japan,2004.
29 Z. W. Zheng. Research on Servo Control of High Precision Machine: (Dissertation for the PhD Degree). National University of Defense Technology, 2001.
30胡佑德,马东升,张莉松.伺服系统原理与设计(修订版)[M].北京理工大学出版社,1999.
31 H.S.Lee, Masayoshi Tomizuka. Robust Motion Controller Design for High-accuracy Positioning System[J]. Industrial electronics, Vol.43, No.1, 1996.
32 H.T.Choi, B.K.Kim, II Hong Suh, Wan Kyun Chung. Design of Robust High-speed Motion Controller for a Plant with Actuator Saturation [J]. Dynamic systems, Measurement, and Control, Vol.122/535, 2002.
33叶云岳.国内外直线电机技术的发展与应用综述.电器工业.2003, 1:12-15
34丁汉.高加速度运动控制系统的建模与控制.航空制造技术.2005, 8:26-30
35杜伟涛.面向芯片封装的高速精密定位平台控制系统设计.天津大学硕士毕业论文.2006, 1:1-6
36 Rohrig, Christof. Motion Control of Linear Permanent Magnet Motors with Force Ripple Compensation. Department of Electrical Engineering and Information Technology.2001, 5:1-5
37 H.S.Lee, M.Tomizuka, Robust Motion Controller Design for High-accuracy Positioning Systems, IEEE Transactions on Industrial Electronics, Vol. 43, No.1, 1996, pp.48-55.
38 Kaan Erkorkmaz,Yusuf Altintas.High speed CNC system design. PartⅡ: Modeling and Identification of Feed Drives. International Journal of Machine Tools & Manufacture.2001, 41:1487-1509
39 Lennart Ljung. System Identification Theory for the User.第三版.清华大学出版社,2002:1-563
40 Dr.Brian,M.Perreault. Control Strategies for Linear Synchronous Motors. IEEE.2007, 1:969-971
41 M.J.Jang, K.C.Lin, C.L.Chen. Modeling and Positioning Control of a Ball Screw Driven Stage. International Conference on Networking, Sensing & Control.2004,3:21-23
42 [美]George Ellis.控制系统设计指南.刘君华,汤晓君译.第三版.电子工业出版社,2006:72-128