集成绕组结构短行程直流平面电机的研究
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摘要
平面电机是直接利用电磁能产生平面运动的新型电机,由于省去了中间转换装置,因此具有二维直接驱动、出力密度高、低热耗、高精度等特点。平面电机在二维平面定位装置特别是精密二维平面定位装置中具有广阔的应用前景,受到学术界和工业界的广泛关注。本文提出了一种集成绕组结构短行程直流平面电机,通过解析分析和有限元仿真计算相结合的方法,对电机特性进行了研究,提出了电机的设计方法并研制了一台实验样机。
首先,基于磁荷法和镜像法推导出了二维永磁阵列产生气隙磁场的解析表达式,进而得到直流平面电机的推力、反电势以及方形线圈电感的解析表达式,建立了电机的动态数学模型。
然后,对直流平面电机的设计方法进行了研究。包括主要尺寸关系式的推导和永磁体尺寸、背铁板厚度、线圈尺寸的确定。另外,还对电机主要参数进行了优化分析,考察了电磁推力、推力密度和加速度随电机主要尺寸的变化规律。
最后,建立了直流平面电机的有限元分析模型。通过仿真计算,得到了三维气隙磁场的分布情况以及电磁推力和偏转转矩的变化情况。根据分析和仿真结果,设计并研制了实验样机,并对其进行了实验研究。解析结果和仿真结果与实验数据基本吻合,从而验证了数学模型和有限元仿真的正确性。
Planar motor is a kind of two-dimensional motor which can directly driven by electromagnetic energy. The features of planar motor are two-dimensional direct-drive, high thrust density, low heat consumption, high accuracy and so on because of omitting a series of converting sets. The planar motor has received wider and wider attention in the academic field and in the industrial field because of the board prospect of its application in the planar 2-D position device, especially in the precision 2-D positioning device. This thesis presents an integrated winding structure short-stroke DC planar motor (IWSDCPM). Based on the combination approach of analysis method and finite element method, this thesis analyzes the motor characteristic, proposes the design method and develops an experimental prototype.
First, we derive the analytical expression of air-gap magnetic field generated by permanent magnet arrays based on the magnetic charge method and image method. Furthermore, the analytical expression of thrust force, back electromotive force and self-inductance of coils are obtained. Besides, the dynamic mathematical model of DC planar motor is established.
Second, this thesis deals with the electromagnetic design method of DC planar motor. It involves the relation between the main sizes and the dimension of permanent magnets, irons and coils. In addition, we test the variation of thrust force, thrust density and acceleration with different main sizes by optimization.
Last, this thesis establishes the FEM model of DC planar motor. The 3-D air-gap magnetic field, thrust force and deflection torque are calculated by finite element analysis. Based on the analysis and simulation, a prototype model is designed and made, and the experiment is done. The experimental results agree with the simulation ones, proving the validity of the experimental prototype and simulations.
首先,基于磁荷法和镜像法推导出了二维永磁阵列产生气隙磁场的解析表达式,进而得到直流平面电机的推力、反电势以及方形线圈电感的解析表达式,建立了电机的动态数学模型。
然后,对直流平面电机的设计方法进行了研究。包括主要尺寸关系式的推导和永磁体尺寸、背铁板厚度、线圈尺寸的确定。另外,还对电机主要参数进行了优化分析,考察了电磁推力、推力密度和加速度随电机主要尺寸的变化规律。
最后,建立了直流平面电机的有限元分析模型。通过仿真计算,得到了三维气隙磁场的分布情况以及电磁推力和偏转转矩的变化情况。根据分析和仿真结果,设计并研制了实验样机,并对其进行了实验研究。解析结果和仿真结果与实验数据基本吻合,从而验证了数学模型和有限元仿真的正确性。
Planar motor is a kind of two-dimensional motor which can directly driven by electromagnetic energy. The features of planar motor are two-dimensional direct-drive, high thrust density, low heat consumption, high accuracy and so on because of omitting a series of converting sets. The planar motor has received wider and wider attention in the academic field and in the industrial field because of the board prospect of its application in the planar 2-D position device, especially in the precision 2-D positioning device. This thesis presents an integrated winding structure short-stroke DC planar motor (IWSDCPM). Based on the combination approach of analysis method and finite element method, this thesis analyzes the motor characteristic, proposes the design method and develops an experimental prototype.
First, we derive the analytical expression of air-gap magnetic field generated by permanent magnet arrays based on the magnetic charge method and image method. Furthermore, the analytical expression of thrust force, back electromotive force and self-inductance of coils are obtained. Besides, the dynamic mathematical model of DC planar motor is established.
Second, this thesis deals with the electromagnetic design method of DC planar motor. It involves the relation between the main sizes and the dimension of permanent magnets, irons and coils. In addition, we test the variation of thrust force, thrust density and acceleration with different main sizes by optimization.
Last, this thesis establishes the FEM model of DC planar motor. The 3-D air-gap magnetic field, thrust force and deflection torque are calculated by finite element analysis. Based on the analysis and simulation, a prototype model is designed and made, and the experiment is done. The experimental results agree with the simulation ones, proving the validity of the experimental prototype and simulations.
引文
1 B. A. Sawyer. Magnetic Positioning Device. US patent: 3,376,578. April, 1968
2 E. R. Pelta. Two-Axis Sawyer Motor for Motion Systems. IEEE Control Systems Mag. 1987, 7(5):20~24
3 S. K. Kuo, C. H. Menq. Modeling and Control of a Six-Axis Precision Motion Control Stage. IEEE/ASME Transactions on Mechatronics. 2005, 10(1):50~59
4 S. Verma, W. J. Kim, J. Gu. Six-Axis Nanopositioning Device with Precision Magnetic Levitation Technology. IEEE/ASME Transactions on Mechatronics. 2004, 9(2):384~391
5 Z. P. Zhang, C. H. Menq. Six-Axis Magnetic Levitation and Motion Control. IEEE/ASME Transactions on Robotics. 2007, 23(1):196~205
6 S. Dejima, W Gao, H. Shimizu, S. Kiyono, Y. Tomita. Precision Positioning of a Five Degree-of-Freedom Planar Motion Stage. Mechatronics. 2005, 15:969~987
7 M. Holmesa, R. Hockena, D. Trumperb. The Long-Range Scanning Stage: a Novel Platform for Scanned-Probe Microscopy. Precision Engineering. 2000, 24:191~209
8曹家勇,朱煜,汪劲松,尹文生,段广洪,张鸣.平面电动机设计、控制与应用技术综述.电工技术学报. 2005, 20(4):1~8
9杨金明,吴捷,张宙,潘剑飞.平面电动机的现状及发展.微特电机. 2003, (6):31~35
10马春燕,王振民,陈燕.平面电动机发展现状.微电机. 2008, 41(1):75~78
11郝晓红,梅雪松,张东升,陶涛,姜歌东.动磁型同步表面电机的磁场和推力.西安交通大学学报. 2006, 40(7):427~431
12刘学鹏,梅雪松,马腾,吴序堂.表面电机的不同结构的性能分析.机械科学与技术. 2004, 23(6):699~701
13 M. A. Soltz, Y. L. Yao, J. Ish-Shalom. Investigation of a 2-D Planar Motor Based Machine Tool Motion System. International Journal of Machine Tools & Manufacture. 1999, 39:1157~1169
14 T. B. Lauwers, Z. K. Edmondson, R. L. Hollis. Progress in Agile Assemble: Minifactory Couriers Baced on Free-roaming Planar Motors. 4th Int’l. Workshop on Microfactories, Shanghai. 2004:7~10
15 N. C. Cheung, J. F. Pan, J. M. Yang. Two-Dimensional Variable Reluctance Planar Motor. US patent: 2005/0248217A1. Nov, 2005
16 C. Y. Ma, Z. M. Wang, G. X. Li, Y. Chen, X. H. Liu. Design of a Novel Switched Reluctance Planar Motor. International Conference Electrical Machines and Systems. 2008:3370~3373
17杨金明,张宙,潘剑飞.开关磁阻式平面电动机及其控制.中国电机工程学报. 2005, 25(19):116~121
18 N. Fujii, M. Fujitake. Two-Dimensional Drive Characteristics by Circular Shaped Motor. IEEE Transactions on Industry Applications. 1999, 35(4):803~809
19 N. Fujii, T. Kihara. Surface Induction Motor for Two Dimensional Drive. Tran. of IEE of Japan. 1998, 118(2):221~228
20 P. Dittrich. 3-DOF Planar Induction Motor. IEEE International Conference on Electro/information Technology. 2006:81~86
21 Y. Ohira, W. Kawanisi. E. Masada. Control Characteristics of a Transportation-Switch Using X-Y Linear Induction Motor. Transaction of the Institute of Electrical Engineerings of Japan. 1988, 108(5):469~476
22 H. Noma, Y. Yanagida, N. Tetsutani. The Proactive Desk: A New Force Display System for a Digital Desk Using a 2-DOF Linear Induction Motor. Proceedings of the IEEE Virtual Reality 2003 (VR’03). ATR Media Information Science Laboratories, Kyoto, Japan
23 D. Ebihara, T. Watanobe, M. Watada. Characteristic Analysis of Surface Motor. IEEE Transactions on Magnetics. 1992, 28(5):3033~3035
24 K. Yamazaki, T. Shimizu, G. Kimura. Development of a New Type Surface Actuator. 20th International Conference on Industrial Electronics, Control and Instrumentation. 1994, 1:509~513
25 H. Ohtsuka, J. Tsuchiya, T. Shimizu, G. Kimura. Stator Design of Revolvable Surface Motor. Proceedings of the IEEE International Conference on Industrial Technology. 1996:634~637
26 A. F. Flores FiIho, A. A. Susin, M. A. Da Silveira. Development of a Novel Planar Actuator. Ninth International Conference on Electrical Machines and Drives. 1999:268~271
27 A. F. Flores FiIho, A. A. Susin, M. A. Da Silveira. Investigation of the ForcesProduced by a New Electromagnetic Planar Actuator. Electric Machines and Drives Conference. 2001:8~13
28 H. S. Cho, and H. K. Jung. Analysis and Design of Synchronous Permanent-Magnet Planar Motors. IEEE Transaction on Energy Conversion. 2002, 17(4):492~499
29 R. B. Owen. Implementation of High Precision Positioning Systems Using Contactless Magnetic Levitation. Master Thesis, Dept. of Electrical Engineering, University of Toronto, 2005
30 C. Fulford, M. Maggiore, J. Apkarian. Control of a 5DOF Magnetically Levitated Positioning Stage. American Control Conference, Washington, USA. 2008:2840~2845
31 W. J. Kim. High-Precision Planar Magnetic Levitation. Ph.D. Thesis, Massachusetts Institute of Technology, Cambridge, MA, June 1997
32 W. J. Kim, D. L Trumper. High-Precision Magnetic Levitation Stage for Photolithography. Precision Engineering. 1998, 22(2):66~77
33 J. W Jeon, M. Caraiani, Y. J. Kim; H. S. Oh, S. S. Kim. Development of Magnetic Levitated Stage for Wide Area Movements. International Conference on Electrical Machines and Systems, Seoul, Korea. 2007:1486~1491
34 J. C. Compter, P. C. M. Frissen, A. T. A. Peijnenburg. Development of an Electro-Dynamic Planar Motor. www.google.com
35 J. C. Compter. Electro-Dynamic Planar Motor. Precision Engineering. 2004, 28:171~180
36 H. Ohsaki, Y. Ueda. Numerical Simulation of Mover Motion of a Surface Motor Using Halbach Permanent Magnets. International Symposium on Power Electronics, Electrical Drives, Automation and Motion. 2006:364~367
37 J. H. Choi, J. H. Park, Y. S. Baek. Design and Experimental Validation of Performance for a Maglev Moving-Magnet-Type Synchronous PM Planar Motor. IEEE Transactions on Magnetics. 2006, 42(10):3419~3421
38 J. Y. Cao, Y Zhu, J. S Wang; W. S. Yin, G. H. Duan. A Novel Synchronous Permanent Magnet Planar Motor and Its Model for Control Applications. IEEE Transactions on Magnetics. 2005, 41(6):2156~2163
39 J. W. Jansen, C. M. M. van Lierop, E. A. Lomonova, A. J. A. Vandenput. Magnetically Levitated Planar Actuator With Moving Magnets. IEEETransactions on Industry Applications. 2008, 44(4):1108~1115
40 J. D. Boeij, E. Lomonova, J. Duarte. Contactless Planar Actuator with Manipulator: a Motion System without Cables and Physical Contact between the Mover and the Fixed World. IEEE Industry Applications Society Annual Meeting, 2008:1~8
41 W. Gao, S. Dejima, H. Yanai, K. Katakura, S. Kiyono, Y. Tomita. A Surface Motor-Driven Planar Motion Stage Integrated with an XYθZ Surface Encoder for Precision Positioning. Precision Engineering. 2004, 28:329~337
42 K. S. Jung, Y. S. Baek. Study on a Novel Contact-Free Planar System Using Direct Drive DC Coils and Permanent Magnets. IEEE/ASME Transactions on Mechatronics.2002, 7(1):35~43
43寇宝泉,张千帆.集成绕组结构短行程直流平面电机. 200910073492.6.国家发明专利
44罗敢,王岳环,张彪.光刻机光头调焦音圈电机的结构设计.微电机. 1998, 31(6):7~11
2 E. R. Pelta. Two-Axis Sawyer Motor for Motion Systems. IEEE Control Systems Mag. 1987, 7(5):20~24
3 S. K. Kuo, C. H. Menq. Modeling and Control of a Six-Axis Precision Motion Control Stage. IEEE/ASME Transactions on Mechatronics. 2005, 10(1):50~59
4 S. Verma, W. J. Kim, J. Gu. Six-Axis Nanopositioning Device with Precision Magnetic Levitation Technology. IEEE/ASME Transactions on Mechatronics. 2004, 9(2):384~391
5 Z. P. Zhang, C. H. Menq. Six-Axis Magnetic Levitation and Motion Control. IEEE/ASME Transactions on Robotics. 2007, 23(1):196~205
6 S. Dejima, W Gao, H. Shimizu, S. Kiyono, Y. Tomita. Precision Positioning of a Five Degree-of-Freedom Planar Motion Stage. Mechatronics. 2005, 15:969~987
7 M. Holmesa, R. Hockena, D. Trumperb. The Long-Range Scanning Stage: a Novel Platform for Scanned-Probe Microscopy. Precision Engineering. 2000, 24:191~209
8曹家勇,朱煜,汪劲松,尹文生,段广洪,张鸣.平面电动机设计、控制与应用技术综述.电工技术学报. 2005, 20(4):1~8
9杨金明,吴捷,张宙,潘剑飞.平面电动机的现状及发展.微特电机. 2003, (6):31~35
10马春燕,王振民,陈燕.平面电动机发展现状.微电机. 2008, 41(1):75~78
11郝晓红,梅雪松,张东升,陶涛,姜歌东.动磁型同步表面电机的磁场和推力.西安交通大学学报. 2006, 40(7):427~431
12刘学鹏,梅雪松,马腾,吴序堂.表面电机的不同结构的性能分析.机械科学与技术. 2004, 23(6):699~701
13 M. A. Soltz, Y. L. Yao, J. Ish-Shalom. Investigation of a 2-D Planar Motor Based Machine Tool Motion System. International Journal of Machine Tools & Manufacture. 1999, 39:1157~1169
14 T. B. Lauwers, Z. K. Edmondson, R. L. Hollis. Progress in Agile Assemble: Minifactory Couriers Baced on Free-roaming Planar Motors. 4th Int’l. Workshop on Microfactories, Shanghai. 2004:7~10
15 N. C. Cheung, J. F. Pan, J. M. Yang. Two-Dimensional Variable Reluctance Planar Motor. US patent: 2005/0248217A1. Nov, 2005
16 C. Y. Ma, Z. M. Wang, G. X. Li, Y. Chen, X. H. Liu. Design of a Novel Switched Reluctance Planar Motor. International Conference Electrical Machines and Systems. 2008:3370~3373
17杨金明,张宙,潘剑飞.开关磁阻式平面电动机及其控制.中国电机工程学报. 2005, 25(19):116~121
18 N. Fujii, M. Fujitake. Two-Dimensional Drive Characteristics by Circular Shaped Motor. IEEE Transactions on Industry Applications. 1999, 35(4):803~809
19 N. Fujii, T. Kihara. Surface Induction Motor for Two Dimensional Drive. Tran. of IEE of Japan. 1998, 118(2):221~228
20 P. Dittrich. 3-DOF Planar Induction Motor. IEEE International Conference on Electro/information Technology. 2006:81~86
21 Y. Ohira, W. Kawanisi. E. Masada. Control Characteristics of a Transportation-Switch Using X-Y Linear Induction Motor. Transaction of the Institute of Electrical Engineerings of Japan. 1988, 108(5):469~476
22 H. Noma, Y. Yanagida, N. Tetsutani. The Proactive Desk: A New Force Display System for a Digital Desk Using a 2-DOF Linear Induction Motor. Proceedings of the IEEE Virtual Reality 2003 (VR’03). ATR Media Information Science Laboratories, Kyoto, Japan
23 D. Ebihara, T. Watanobe, M. Watada. Characteristic Analysis of Surface Motor. IEEE Transactions on Magnetics. 1992, 28(5):3033~3035
24 K. Yamazaki, T. Shimizu, G. Kimura. Development of a New Type Surface Actuator. 20th International Conference on Industrial Electronics, Control and Instrumentation. 1994, 1:509~513
25 H. Ohtsuka, J. Tsuchiya, T. Shimizu, G. Kimura. Stator Design of Revolvable Surface Motor. Proceedings of the IEEE International Conference on Industrial Technology. 1996:634~637
26 A. F. Flores FiIho, A. A. Susin, M. A. Da Silveira. Development of a Novel Planar Actuator. Ninth International Conference on Electrical Machines and Drives. 1999:268~271
27 A. F. Flores FiIho, A. A. Susin, M. A. Da Silveira. Investigation of the ForcesProduced by a New Electromagnetic Planar Actuator. Electric Machines and Drives Conference. 2001:8~13
28 H. S. Cho, and H. K. Jung. Analysis and Design of Synchronous Permanent-Magnet Planar Motors. IEEE Transaction on Energy Conversion. 2002, 17(4):492~499
29 R. B. Owen. Implementation of High Precision Positioning Systems Using Contactless Magnetic Levitation. Master Thesis, Dept. of Electrical Engineering, University of Toronto, 2005
30 C. Fulford, M. Maggiore, J. Apkarian. Control of a 5DOF Magnetically Levitated Positioning Stage. American Control Conference, Washington, USA. 2008:2840~2845
31 W. J. Kim. High-Precision Planar Magnetic Levitation. Ph.D. Thesis, Massachusetts Institute of Technology, Cambridge, MA, June 1997
32 W. J. Kim, D. L Trumper. High-Precision Magnetic Levitation Stage for Photolithography. Precision Engineering. 1998, 22(2):66~77
33 J. W Jeon, M. Caraiani, Y. J. Kim; H. S. Oh, S. S. Kim. Development of Magnetic Levitated Stage for Wide Area Movements. International Conference on Electrical Machines and Systems, Seoul, Korea. 2007:1486~1491
34 J. C. Compter, P. C. M. Frissen, A. T. A. Peijnenburg. Development of an Electro-Dynamic Planar Motor. www.google.com
35 J. C. Compter. Electro-Dynamic Planar Motor. Precision Engineering. 2004, 28:171~180
36 H. Ohsaki, Y. Ueda. Numerical Simulation of Mover Motion of a Surface Motor Using Halbach Permanent Magnets. International Symposium on Power Electronics, Electrical Drives, Automation and Motion. 2006:364~367
37 J. H. Choi, J. H. Park, Y. S. Baek. Design and Experimental Validation of Performance for a Maglev Moving-Magnet-Type Synchronous PM Planar Motor. IEEE Transactions on Magnetics. 2006, 42(10):3419~3421
38 J. Y. Cao, Y Zhu, J. S Wang; W. S. Yin, G. H. Duan. A Novel Synchronous Permanent Magnet Planar Motor and Its Model for Control Applications. IEEE Transactions on Magnetics. 2005, 41(6):2156~2163
39 J. W. Jansen, C. M. M. van Lierop, E. A. Lomonova, A. J. A. Vandenput. Magnetically Levitated Planar Actuator With Moving Magnets. IEEETransactions on Industry Applications. 2008, 44(4):1108~1115
40 J. D. Boeij, E. Lomonova, J. Duarte. Contactless Planar Actuator with Manipulator: a Motion System without Cables and Physical Contact between the Mover and the Fixed World. IEEE Industry Applications Society Annual Meeting, 2008:1~8
41 W. Gao, S. Dejima, H. Yanai, K. Katakura, S. Kiyono, Y. Tomita. A Surface Motor-Driven Planar Motion Stage Integrated with an XYθZ Surface Encoder for Precision Positioning. Precision Engineering. 2004, 28:329~337
42 K. S. Jung, Y. S. Baek. Study on a Novel Contact-Free Planar System Using Direct Drive DC Coils and Permanent Magnets. IEEE/ASME Transactions on Mechatronics.2002, 7(1):35~43
43寇宝泉,张千帆.集成绕组结构短行程直流平面电机. 200910073492.6.国家发明专利
44罗敢,王岳环,张彪.光刻机光头调焦音圈电机的结构设计.微电机. 1998, 31(6):7~11