有机无机复合光波导的研究
|
摘要
21世纪是以高容量、宽带宽、高速度为特征的信息时代,而集成光学和光通讯以具有信息容量大、损耗低等特点得到了前所未有的飞速发展。光波导是集成光学和光通讯的基础元件,研制高性能低成本的新型光波导材料已成为当今材料的研究热点之一。而有机无机复合材料作为一种新型光波导材料,以其高灵活性、多功能性、可集成性和经济性等特点在光波导材料方面具有重要的应用价值。本文的主要工作是采用溶胶-凝胶技术制备PMMA包层膜和有机无机复合SiO_2/ZrO_2芯层膜,实现包芯层复合。
本文结合溶胶-凝胶技术和浸渍提拉法,在硅基板和石英基板上制备出厚度达17μm、表面平整的PMMA包层膜,并采用光度法计算出其光照热处理前折射率约1.49,经光照热处理后其折射率最大变化到1.54,满足包层低折射率的要求;同时采用γ-甲基丙烯酰氧丙基三甲氧基硅烷(H_2C=C(CH_3)COO(CH_2)_3Si(OCH_3)_3,KH-570)对PMMA进行改性,可使折射率降低到1.47,这与常用包层材料SiO_2的折射率1.46更为接近。
利用溶胶-凝胶技术与化学修饰相结合的方法,配制了三种不同配比的稳定溶胶,通过比较选用综合性能较好的SiO_2/ZrO_2溶胶进行深入研究。在进一步研究过程中获得了紫外感光性良好的SiO_2/ZrO_2溶胶并制备出厚度可达2.02μm的凝胶膜,经光照和热处理后折射率在1.69～1.72之间,完全满足光波导芯层高折射率的要求。
最后以膜厚为12.98μm的PMMA薄膜为包层,以膜厚为2.02μm的SiO_2/ZrO_2凝胶膜为芯层,在硅基片上实现了光波导包芯层的复合,并制备出条形复合波导结构;依据光波导理论分析表明:该波导结构能够实现多模数通光。
As we know,21st century is an information epoch with the features of high capacity,high broadband and high velocity,at which the integrated optics and optical communication develop at an unprecedented fast speed.So,the development of new optical materials with high performance and low cost for optical waveguides which are the basic devices of the integrated optics and optical communication,has become one of the research hotspots.The organic/inorganic material,a new type material for optical waveguide,possesses many features such as high flexibility,high effectiveness,integrity and economy.This paper aims at the preparation of PMMA and organic/inorganic SiO_2/ZrO_2 film using the sol-gel method and the fabrication of composite optical waveguide with PMMA and SiO_2/ZrO_2 film as the cladding and core layers respectively.
PMMA cladding film has been successfully fabricated with smooth surface and the thickness of 17μm,whose refractive index is 1.49 and up to 1.54 via UV exposure and heat-treatment,which is low enough for the requirement of coat layer.Furthermore,the KH-570 which was added to PMMA could enable the refractive index of PMMA to reduce to 1.47, which is close to that of quartz(about 1.46).
Three types of sols with different ingredient proportion have been prepared with sol-gel technology to select one with the best performance for further study.And organic/inorganic SiO_2/ZrO_2 gel film with good photosensitivity and thickness of 2.02μm has been obtained, which possesses high refractive index from 1.69 to 1.72,respecitively before and after UV exposure and heat-treatment,which is high enough to be used as the core layer of waveguide.
At last,the optical composite waveguide has been successfully fabricated using the PMMA film with a thickness of 12.98μm as cladding layer and the SiO_2/ZrO_2 gel film with a thickness of 2.02μm as core layer respectively,and a strip waveguide structure has also been obtained.The optical waveguide theoretic analyses indicate that this structure can realize multi-mode light transmission.
本文结合溶胶-凝胶技术和浸渍提拉法,在硅基板和石英基板上制备出厚度达17μm、表面平整的PMMA包层膜,并采用光度法计算出其光照热处理前折射率约1.49,经光照热处理后其折射率最大变化到1.54,满足包层低折射率的要求;同时采用γ-甲基丙烯酰氧丙基三甲氧基硅烷(H_2C=C(CH_3)COO(CH_2)_3Si(OCH_3)_3,KH-570)对PMMA进行改性,可使折射率降低到1.47,这与常用包层材料SiO_2的折射率1.46更为接近。
利用溶胶-凝胶技术与化学修饰相结合的方法,配制了三种不同配比的稳定溶胶,通过比较选用综合性能较好的SiO_2/ZrO_2溶胶进行深入研究。在进一步研究过程中获得了紫外感光性良好的SiO_2/ZrO_2溶胶并制备出厚度可达2.02μm的凝胶膜,经光照和热处理后折射率在1.69～1.72之间,完全满足光波导芯层高折射率的要求。
最后以膜厚为12.98μm的PMMA薄膜为包层,以膜厚为2.02μm的SiO_2/ZrO_2凝胶膜为芯层,在硅基片上实现了光波导包芯层的复合,并制备出条形复合波导结构;依据光波导理论分析表明:该波导结构能够实现多模数通光。
As we know,21st century is an information epoch with the features of high capacity,high broadband and high velocity,at which the integrated optics and optical communication develop at an unprecedented fast speed.So,the development of new optical materials with high performance and low cost for optical waveguides which are the basic devices of the integrated optics and optical communication,has become one of the research hotspots.The organic/inorganic material,a new type material for optical waveguide,possesses many features such as high flexibility,high effectiveness,integrity and economy.This paper aims at the preparation of PMMA and organic/inorganic SiO_2/ZrO_2 film using the sol-gel method and the fabrication of composite optical waveguide with PMMA and SiO_2/ZrO_2 film as the cladding and core layers respectively.
PMMA cladding film has been successfully fabricated with smooth surface and the thickness of 17μm,whose refractive index is 1.49 and up to 1.54 via UV exposure and heat-treatment,which is low enough for the requirement of coat layer.Furthermore,the KH-570 which was added to PMMA could enable the refractive index of PMMA to reduce to 1.47, which is close to that of quartz(about 1.46).
Three types of sols with different ingredient proportion have been prepared with sol-gel technology to select one with the best performance for further study.And organic/inorganic SiO_2/ZrO_2 gel film with good photosensitivity and thickness of 2.02μm has been obtained, which possesses high refractive index from 1.69 to 1.72,respecitively before and after UV exposure and heat-treatment,which is high enough to be used as the core layer of waveguide.
At last,the optical composite waveguide has been successfully fabricated using the PMMA film with a thickness of 12.98μm as cladding layer and the SiO_2/ZrO_2 gel film with a thickness of 2.02μm as core layer respectively,and a strip waveguide structure has also been obtained.The optical waveguide theoretic analyses indicate that this structure can realize multi-mode light transmission.
引文
[1]刘昊.有机聚合物光波导的研究[D].南京:东南大学,2004:5.
[2]小林功郎.光集成器件[M].北京:科学出版社,2002:19-101.
[3]Marika P.Immoen,Mikko Kikko Karppinen,Jorma K.Kivilahti.Investigation of environmental reliability of optical polymer waveguides embedded on printed circuit boards[J].Microelectronics Reliability,2007,47:363-371.
[4]刘晨.物理光学[M].合肥:合肥工业大学出版社,2007:1-81.
[5]张景伟.光波导理论简述[J].江苏电机工程,1996,15(4):11-15.
[6]Jesus Linares,Maria C.Nistal.Quantization of coupled modes propagation in integrated optical waveguides[J].Journal of Modern Optics,2003,50(5):781-790.
[7]J.Rodriquez,S.Fernandez,M.Garcia,D.Pozo.Photonic effects caused by multiple discontinuitied in optical waveguides[J].IEE Proc,Optoelectron,2003,152(5):263-269.
[8]R.Bemini,E.De Nuccio,F.Brescia,A.Minardo,etc.Development and characterization of an integrated silicon micro flow cytometer[J].Anal Bioanal Chem,2006,386:1267-1272.
[9]Sudhir,Kumar,Sharma.Polycyanurate thin film optical waveguide for integrated optics applications[J].Journal of Nonlinear Optical Physics & Materials,2003,12(1):1-5.
[10]张彤,崔一平.集成光学国际研究进展[J].电子器件,2004,27(1):196-201.
[11]A.V.Tran,C.J.Chae,R.S.Tucker.Cascadability perfoumance of remote-repeater-based FTTP systems[J].Electronics Letters,2006,42(24):5-7.
[12]鲁平.新型阵列波导器件的理论与实验研究[D].武汉:华中科技大学,2005:9.
[13]徐永清,梁春广,杨拥军,赵彤.硅基SiO_2光波导[J].半导体学报,2001,22(12):1546-1550.
[14]肖丙刚.面向光集成的光波导材料制备与参数测量方法研究[D].杭州:浙江大学,2004:7.
[15]L.S.Yu,Z.F.Guan,Q.Z.Liu,S.S.Lau.Silicon on insulator photoelastic optical waveguide and polarize r[J].Apply Physic Letter,1995,66(6):2016-2018.
[16]A.F.Evans,D.G.Hall,W.P.Maszara.Propagation loss measurements in silicon-on-insulator optical waveguides formed by the bond-and-etchback process[J].Appled Physics Letters,1991,59(14):1667-1669.
[17]Fengnian Xia,Lidija Sekaric,Martin O'Boyle,Yurii Vlasov.Coupled resonator optical waveguides based on silicon-on-insulator photonic wires[J].Appled Physics Letters,2006,89:21-24.
[18]Fei Lu,Gang Fu,Chuanlei Jia,Keming Wang,Hongji Ma and Dingyu Shen.Lithium niobate channel waveguide at optical communication wavelength formed by multienergy implantation[J].Optical Society of America,2005,13(23)748-753.
[19]余金中,陈少武,夏金松,王章涛等.SOI光波导器件和集成光开关矩阵的研究进展[J].中国科学E辑 信息科学,2004,34(10):1081-1093.
[20]王永进.SOI光波导器件及其增透膜的研究[D].上海:中国科学院上海微系统与信息技术研究所,2005:8.
[21]禹忠,汪敏强,姚熹.光通讯波段聚合物光波导材料的研究进展[J].化学通报,2001,1:5-10.
[22]William M.Diffey,Rebecca H.Trimm,Mark G.Temmen,etc.Fabrication of Low-Loss Optical-Quality Polymer Waveguide Facets in Multilayer Polymer Devices Using an Inductively Coupled Plasma[J].Journal of Lightwave Technology,2005,23(4):27-32.
[23]G.K.Singh,V.K.Sharma,A.Kapoor,K.N.Tripathi.Four layer polymeric mode polarization filter for integrated optics[J].Optics and laser Technology,2001,33:455-459.
[24]张希珍.1.55μm波段聚合物光波导放大器的基础研究[D].长春:吉林大学,2007:10.
[25]L.H.Slooff,A.Polman,S.I.Kink,G.A.Hebbink,etc.Optical properties of lissamine functionalized Nd3+ complexes in polymer waveguides and solution[J].Optical Materials,2000,14:101-107.
[26]Neha Sharma,V.K.Sharma,K.N.Tripathi.Multilayer polymeric mode and polarization filters for integrated optics[J].Optics and Laser Technology,2007,39:939-945.
[27]周华健,游佰强,肖磊,王静,王晨.PMMA改性聚合物薄膜的光学性能研究[J].光学材料,2006,43(12):18-22.
[28]Soo-Jin Park,Ki-Sook Cho,and Choon-Gi Choi.Effect of fluorine plasma treatment on PMMA and their application to passive optical waveguidesEffect of fluorine plasma treatment on PMMA and their application to passive optical waveguides[J].Journal of Colloid and Interface Science,2003,258:424-426.
[29]Xiaobo Deng,Bailing Liu,Shunsheng Cao,Rong Luo,Hualin Chen.A novel approach for the preparation of PMMA-PDMS core-shell particles with PDMS in the shell[J].Applied Surface Science,2007,253:4823-4829.
[30]费旭,傅娜,王耀等.可交联聚甲基丙烯酸甲酯的合成表征及在陈列式波导光栅中的应用[J].高等学校化学学报,2006,27(3):27-33.
[31]Muhammad Ali Zulfikar,A.Wahab Mohammad,Abdul Amir Kadhum,Nidal Hilal.Synthesis and characterization of poly(methylmethacrylate)/SiO_2 hybrid membrane[J].Materials Science and Engineering A,2007,452-453:422-426.
[32]S.Diankov,D.Barth,A.Vega-Gonzalez,I.Pentchev,P.Subra-Paternault.Impregnation isotherms of hydroxybenzoic acid on PMMA in supercritical carbon dioxide[J].J.of Supercritical Fluids,2007,41:164-172.
[33]刘建平,郭斌,何平笙,张其锦.微模塑法制备PMMA/SiO_2二氧化硅杂化材料微结构[J].化学物理学报,2004,17(6):779-782.
[34]陶华锋,张林,王金凤,袁斯华,杨忠孝.溶胶凝胶法制备PMMA/SiO_2杂化材料[J].强激光与粒子束,2006,18(2):223-226.
[35]王华林,余锡宾,訾振军.PMMA/SiO_2有机-无机杂化玻璃的研究[J].高分子材料科学与工程,2000,16(4):114-116.
[36]张军丽,叶文玉.溶胶凝胶法聚合物/无机复合材料的研究应用[J].云南化工,2005,32(4):57-63.
[37]熊华山,陈宁,张清华,王克,殷勤俭,江波.Sol-Gel制备SiO_2增透膜的研究[J].功能材料,2004,4(35):485-486.
[38]江国栋,王庭慰,沈晓冬.Sol-Gel法制备纳米SnO掺杂PMMA透明复合材料[J].化学学报,2005,13(5):544-547.
[39]邬润德,童筱莉,周安安.原位复合PMMA/MS杂化材料的研究[J].现代塑料加工应用,2001,13(2):1-4.
[40]董相廷,孙晶,刘桂霞,王广洪,闫景辉,何颖,刘钟馨.纳米CeO_2/PMMA杂化材料的制备与表征[J].化学学报,2003,61(1):122-125.
[41]Zhi-qiang Zheng,Hao Liang,etc.Optical Properties of Nd~(3+)in Nd(DBM)_3Phen-doped Poly(methylmethacrylate)[J].Chinese Journal Chemical Physics,2006,19(3):458-461.
[42]董相廷,何颖,闫景辉,薛勃飞,冯秀丽,洪广言.纳米AgBr/PMMA光致变色杂化材料制备与表征[J].物理化学学报,2003,19(12):1159-1162.
[43]郑幸存,吴礼光,汪锰,裘俊红,高从堦.氯化银/聚甲基丙烯酸甲酯有机-无机杂化膜的研究[J].水处理技术,2007,33(5):25-27.
[44]王志鹏.基于“Diels-Alder”可逆反应的高热稳定性交联型电光聚合物以及半导体纳米复合材料ZnS/PMMA的制备及其性质的研究[D].北京:中国科学院理化技术研究所,2007:10.
[45]Feng Chen,Xue-Lin Wang,Ke-Ming Wang.Development of ion-implanted optical waveguides in optical materials A review[J].Optical materials,2006,8:1-20.
[46]S.Kimura,T.Kato,T.Hyodo,Shimizu,M.Egashira.Electromagnetic wave absorption properties of carbonyl iron-ferrite/PMMA composites fabricated by hybridization method[J].Journal of Magnetism and Magnetic Materials,2007,312:181-186.
[47]李维来,李英,李伟.157nm激光刻蚀晶体光纤SiO_2机理的研究[J].激光技术,2006,30(6):601-604.
[48]Namkhum Srisanit,Zhiqiang liu,Xianjun Ke,Michaea R,Wang.Laser writing correction of polymer waveguide fanouts[J].Optics Communications,2005,244:171-179.
[49]Markus Pollnau,Yaroslav E.Pomanyuk.Optical waveguides in laser crystals[J].C.R.Physique,2007,8:123-137.
[50]Jung-Gyu Lim,Sang-Shin Lee,Ki-Dong Lee.Polymeric arrayed waveguide grating using imprint method incorporating a flexible PDMS stamp[J].Optics Communications,2007,272:97-101.
[51]Yi-Wer Shi,Yukio Abe,Yuji Matsuura,Mitsunobu Miyagi.Low loss smart hollow waveguides with new polymer coating material[J].Optics and Laser Technology,1999,31:135-140.
[52]钱国栋,王民权.若干无机/有机复合光功能材料及相关器件研究进展[J].硅酸盐学报,2001,29(6):596-603.
[53]徐键,夏海平,张约品,章践立,王金浩.有机-无机复合ZrO_2-SiO_2平面光波导[J].光学学报,2005,25(4):506-510.
[54]C.Sanchez,B.Ledeau,F.Ribot and M.In.Molecular Design of Sol-Gel Derived Hybrid Organic-Inorbanic Nanocomposites[J].Journal of Sol-Gel Science and Technology,2000,19:31-38.
[55]Jacques Livage.Sol-gel processes[J].Current Opinion in Solid State and Materials Science,1997,2:132-138.
[56]S.Karatas,C.Kizilkaya,N.Kayaman-Apohan,A.Gungor.Preparation and characterization of sol-gel derived UV-curable organo-silica-titania hybrid coatings[J].Progress in Organic Coatings,2007,60:140-147.
[57]Dire,G.Brusatin,M.L.DiVona,P.Egger,M.Ferrari,P.Innocenzi,S.Licoccia,P.Romagnoli,M.Trombetta,L.Zampedri.Hybrid organic-inorganic films by assembling of Si-Zr-based nanobuilding blocks[J].Journal of the Eruopean Ceramic Society,2005,25:2051-2054.
[58]C.Sanchez,F.Ribot and B.Ledeau.Molecular design of hybrid organic-inorganic nanocomposites synthesized via sol-gel chemistry[J].Journal of Materials Chemistry,1999,9:35-44.
[59]王玥,吴远大,李建光,王红杰,胡雄伟.有机/无机杂化SiO_2/Si光波导薄膜的制备及表征[J].半导体光电,2007,28(4):525-527.
[60]李小甫,余海湖,姜德生.光波导用TiO_2/SiO_2复合薄膜的制备及其性能研究[J].光电子技术与信息,2003,16(2):20-25.
[61]徐翔,周斌,沈军等.紫外曝光在ZrO_2薄膜上引入微结构的研究[J].材料导报,2005,19(9):126-130.
[62]华斌,钱国栋,徐静,何赛灵,王民权.ZrO_2-SiO_2二元系统平面光波导薄膜的制备与性能表征[J].硅酸盐通报,2004,3:35-37.
[63]孙淼,时尧成,戴道梓,刘柳.减少SiO_2光波导表面粗糙度的ICP干法刻蚀工艺研究[J].光学仪器,2007,29(1):71-74.
[64]王学忠,阮驰,高应俊.低损耗阶跃型塑料光纤(SI-POF)工艺的研究[J].光子学报,2002,31(7):7-12
[65]Tomaso Villa,Davide Carnelli.Experimental evaluation of the biomechanical performances of a PMMA-based knee spacer[J].The Knee,2007,14:145-153.
[66]Louay Eldada,Senior Member,IEEE,and Lawrence W.Shacklette.Advances in Polymer Integrated Optics[J].IEEE Journal of selected Topics In Quantum Electronics,2003,6(1):54-68.
[67]Jae-Sun Koo,Peter G.R.Smith,Richard B.Williams,Christos Riziotis,Martin C.Grossel.UV written waveguides using crosslinkable PMMA-based copolymers[J].Optical materials,2003,23:583-592.
[68]I.Rajta,S.Z.Szilasi,J.Budai,Z.Toth,P.Petrik,E.Baradacs.Refractive index depth profile in PMMA due to proton irradiation[J].Nuclear Instruments and Methods in Physics Research B,2007,25:432-438.
[69]陈益新.集成光学[M].上海:上海交通大学出版社,1985:19-27.
[70]林金辉,李金涛,叶巧明,刘菁.铝酸酯DL-411与硅烷KH-570偶联剂复合改性粉石英研究[J].非金属矿,2006,29(3):78-83.
[71]刘兵,赵若飞,戴干策,胡春圃.St/BA/KH-570三元共聚物的合成及其在云母增强聚丙烯中的应用[J].功能高分子学报,2001,14(3):51-54.
[72]陆荣,景强,王吉荣.KH-570对Al_2O_3粉体的改性研究[J].盐城工学院学报,2005,18(4):21-25.
[73]Gaoyang Zhao,Noboru Tohge.Preparation of photosensitive gel film and fine patteming of amorphous Al_2O_3-SiO_2 thin films[J].Materials Research Bulletin,1998,33(1):21-30.
[74]Anna Lukowiak,Rafal Dylewicz,Sergiusz Patela,Wieslaw Strek,Krzyszt of Maruszewski.Optical properties of SiO_2-TiO_2 thin film waveguides obtained by the sol-gel method and their applications for sensing purposes[J].Optical Materials,2005,27:1501-1505.
[75]R.Mechiakh,F.Meriche,R.Kremer,R.Bensaha,B.Boudine,A.Boudrioua.TiO_2 thin films prepared by sol-gel method for waveguiding applications:Correlation between the structural and optical properties[J].Optical Materials,2007,12:1541-5146.
[76]Gaoyang Zhao,Zhezhe Wang,Weihua Zhang.Fabrication of gratings using photosensitive gel films by He-Cd lasers[J].Optical Engineering,2007,46(2):1-4.
[77]赵桂荣,赵高扬.化学修饰法制备的ZrO_2-SiO_2系凝胶薄膜的感光特性研究[J].功能材料,2002,33(2):207-211.
[78]B.C.Gibson,P.M.Dower.Refractive index design and validation for evanescent field power maximization in optical fibre sensors[J].Optics Communications,2007,279:303-312.
[79]孙雨南,王茜蒨,武剑,杨爱英.光纤技术理论基础与应用[M].北京:北京理工大学出版社,2006:85-169.
[80]吴重庆.光波导理论[M].北京:清华大学出版社,2005:19-87.
[2]小林功郎.光集成器件[M].北京:科学出版社,2002:19-101.
[3]Marika P.Immoen,Mikko Kikko Karppinen,Jorma K.Kivilahti.Investigation of environmental reliability of optical polymer waveguides embedded on printed circuit boards[J].Microelectronics Reliability,2007,47:363-371.
[4]刘晨.物理光学[M].合肥:合肥工业大学出版社,2007:1-81.
[5]张景伟.光波导理论简述[J].江苏电机工程,1996,15(4):11-15.
[6]Jesus Linares,Maria C.Nistal.Quantization of coupled modes propagation in integrated optical waveguides[J].Journal of Modern Optics,2003,50(5):781-790.
[7]J.Rodriquez,S.Fernandez,M.Garcia,D.Pozo.Photonic effects caused by multiple discontinuitied in optical waveguides[J].IEE Proc,Optoelectron,2003,152(5):263-269.
[8]R.Bemini,E.De Nuccio,F.Brescia,A.Minardo,etc.Development and characterization of an integrated silicon micro flow cytometer[J].Anal Bioanal Chem,2006,386:1267-1272.
[9]Sudhir,Kumar,Sharma.Polycyanurate thin film optical waveguide for integrated optics applications[J].Journal of Nonlinear Optical Physics & Materials,2003,12(1):1-5.
[10]张彤,崔一平.集成光学国际研究进展[J].电子器件,2004,27(1):196-201.
[11]A.V.Tran,C.J.Chae,R.S.Tucker.Cascadability perfoumance of remote-repeater-based FTTP systems[J].Electronics Letters,2006,42(24):5-7.
[12]鲁平.新型阵列波导器件的理论与实验研究[D].武汉:华中科技大学,2005:9.
[13]徐永清,梁春广,杨拥军,赵彤.硅基SiO_2光波导[J].半导体学报,2001,22(12):1546-1550.
[14]肖丙刚.面向光集成的光波导材料制备与参数测量方法研究[D].杭州:浙江大学,2004:7.
[15]L.S.Yu,Z.F.Guan,Q.Z.Liu,S.S.Lau.Silicon on insulator photoelastic optical waveguide and polarize r[J].Apply Physic Letter,1995,66(6):2016-2018.
[16]A.F.Evans,D.G.Hall,W.P.Maszara.Propagation loss measurements in silicon-on-insulator optical waveguides formed by the bond-and-etchback process[J].Appled Physics Letters,1991,59(14):1667-1669.
[17]Fengnian Xia,Lidija Sekaric,Martin O'Boyle,Yurii Vlasov.Coupled resonator optical waveguides based on silicon-on-insulator photonic wires[J].Appled Physics Letters,2006,89:21-24.
[18]Fei Lu,Gang Fu,Chuanlei Jia,Keming Wang,Hongji Ma and Dingyu Shen.Lithium niobate channel waveguide at optical communication wavelength formed by multienergy implantation[J].Optical Society of America,2005,13(23)748-753.
[19]余金中,陈少武,夏金松,王章涛等.SOI光波导器件和集成光开关矩阵的研究进展[J].中国科学E辑 信息科学,2004,34(10):1081-1093.
[20]王永进.SOI光波导器件及其增透膜的研究[D].上海:中国科学院上海微系统与信息技术研究所,2005:8.
[21]禹忠,汪敏强,姚熹.光通讯波段聚合物光波导材料的研究进展[J].化学通报,2001,1:5-10.
[22]William M.Diffey,Rebecca H.Trimm,Mark G.Temmen,etc.Fabrication of Low-Loss Optical-Quality Polymer Waveguide Facets in Multilayer Polymer Devices Using an Inductively Coupled Plasma[J].Journal of Lightwave Technology,2005,23(4):27-32.
[23]G.K.Singh,V.K.Sharma,A.Kapoor,K.N.Tripathi.Four layer polymeric mode polarization filter for integrated optics[J].Optics and laser Technology,2001,33:455-459.
[24]张希珍.1.55μm波段聚合物光波导放大器的基础研究[D].长春:吉林大学,2007:10.
[25]L.H.Slooff,A.Polman,S.I.Kink,G.A.Hebbink,etc.Optical properties of lissamine functionalized Nd3+ complexes in polymer waveguides and solution[J].Optical Materials,2000,14:101-107.
[26]Neha Sharma,V.K.Sharma,K.N.Tripathi.Multilayer polymeric mode and polarization filters for integrated optics[J].Optics and Laser Technology,2007,39:939-945.
[27]周华健,游佰强,肖磊,王静,王晨.PMMA改性聚合物薄膜的光学性能研究[J].光学材料,2006,43(12):18-22.
[28]Soo-Jin Park,Ki-Sook Cho,and Choon-Gi Choi.Effect of fluorine plasma treatment on PMMA and their application to passive optical waveguidesEffect of fluorine plasma treatment on PMMA and their application to passive optical waveguides[J].Journal of Colloid and Interface Science,2003,258:424-426.
[29]Xiaobo Deng,Bailing Liu,Shunsheng Cao,Rong Luo,Hualin Chen.A novel approach for the preparation of PMMA-PDMS core-shell particles with PDMS in the shell[J].Applied Surface Science,2007,253:4823-4829.
[30]费旭,傅娜,王耀等.可交联聚甲基丙烯酸甲酯的合成表征及在陈列式波导光栅中的应用[J].高等学校化学学报,2006,27(3):27-33.
[31]Muhammad Ali Zulfikar,A.Wahab Mohammad,Abdul Amir Kadhum,Nidal Hilal.Synthesis and characterization of poly(methylmethacrylate)/SiO_2 hybrid membrane[J].Materials Science and Engineering A,2007,452-453:422-426.
[32]S.Diankov,D.Barth,A.Vega-Gonzalez,I.Pentchev,P.Subra-Paternault.Impregnation isotherms of hydroxybenzoic acid on PMMA in supercritical carbon dioxide[J].J.of Supercritical Fluids,2007,41:164-172.
[33]刘建平,郭斌,何平笙,张其锦.微模塑法制备PMMA/SiO_2二氧化硅杂化材料微结构[J].化学物理学报,2004,17(6):779-782.
[34]陶华锋,张林,王金凤,袁斯华,杨忠孝.溶胶凝胶法制备PMMA/SiO_2杂化材料[J].强激光与粒子束,2006,18(2):223-226.
[35]王华林,余锡宾,訾振军.PMMA/SiO_2有机-无机杂化玻璃的研究[J].高分子材料科学与工程,2000,16(4):114-116.
[36]张军丽,叶文玉.溶胶凝胶法聚合物/无机复合材料的研究应用[J].云南化工,2005,32(4):57-63.
[37]熊华山,陈宁,张清华,王克,殷勤俭,江波.Sol-Gel制备SiO_2增透膜的研究[J].功能材料,2004,4(35):485-486.
[38]江国栋,王庭慰,沈晓冬.Sol-Gel法制备纳米SnO掺杂PMMA透明复合材料[J].化学学报,2005,13(5):544-547.
[39]邬润德,童筱莉,周安安.原位复合PMMA/MS杂化材料的研究[J].现代塑料加工应用,2001,13(2):1-4.
[40]董相廷,孙晶,刘桂霞,王广洪,闫景辉,何颖,刘钟馨.纳米CeO_2/PMMA杂化材料的制备与表征[J].化学学报,2003,61(1):122-125.
[41]Zhi-qiang Zheng,Hao Liang,etc.Optical Properties of Nd~(3+)in Nd(DBM)_3Phen-doped Poly(methylmethacrylate)[J].Chinese Journal Chemical Physics,2006,19(3):458-461.
[42]董相廷,何颖,闫景辉,薛勃飞,冯秀丽,洪广言.纳米AgBr/PMMA光致变色杂化材料制备与表征[J].物理化学学报,2003,19(12):1159-1162.
[43]郑幸存,吴礼光,汪锰,裘俊红,高从堦.氯化银/聚甲基丙烯酸甲酯有机-无机杂化膜的研究[J].水处理技术,2007,33(5):25-27.
[44]王志鹏.基于“Diels-Alder”可逆反应的高热稳定性交联型电光聚合物以及半导体纳米复合材料ZnS/PMMA的制备及其性质的研究[D].北京:中国科学院理化技术研究所,2007:10.
[45]Feng Chen,Xue-Lin Wang,Ke-Ming Wang.Development of ion-implanted optical waveguides in optical materials A review[J].Optical materials,2006,8:1-20.
[46]S.Kimura,T.Kato,T.Hyodo,Shimizu,M.Egashira.Electromagnetic wave absorption properties of carbonyl iron-ferrite/PMMA composites fabricated by hybridization method[J].Journal of Magnetism and Magnetic Materials,2007,312:181-186.
[47]李维来,李英,李伟.157nm激光刻蚀晶体光纤SiO_2机理的研究[J].激光技术,2006,30(6):601-604.
[48]Namkhum Srisanit,Zhiqiang liu,Xianjun Ke,Michaea R,Wang.Laser writing correction of polymer waveguide fanouts[J].Optics Communications,2005,244:171-179.
[49]Markus Pollnau,Yaroslav E.Pomanyuk.Optical waveguides in laser crystals[J].C.R.Physique,2007,8:123-137.
[50]Jung-Gyu Lim,Sang-Shin Lee,Ki-Dong Lee.Polymeric arrayed waveguide grating using imprint method incorporating a flexible PDMS stamp[J].Optics Communications,2007,272:97-101.
[51]Yi-Wer Shi,Yukio Abe,Yuji Matsuura,Mitsunobu Miyagi.Low loss smart hollow waveguides with new polymer coating material[J].Optics and Laser Technology,1999,31:135-140.
[52]钱国栋,王民权.若干无机/有机复合光功能材料及相关器件研究进展[J].硅酸盐学报,2001,29(6):596-603.
[53]徐键,夏海平,张约品,章践立,王金浩.有机-无机复合ZrO_2-SiO_2平面光波导[J].光学学报,2005,25(4):506-510.
[54]C.Sanchez,B.Ledeau,F.Ribot and M.In.Molecular Design of Sol-Gel Derived Hybrid Organic-Inorbanic Nanocomposites[J].Journal of Sol-Gel Science and Technology,2000,19:31-38.
[55]Jacques Livage.Sol-gel processes[J].Current Opinion in Solid State and Materials Science,1997,2:132-138.
[56]S.Karatas,C.Kizilkaya,N.Kayaman-Apohan,A.Gungor.Preparation and characterization of sol-gel derived UV-curable organo-silica-titania hybrid coatings[J].Progress in Organic Coatings,2007,60:140-147.
[57]Dire,G.Brusatin,M.L.DiVona,P.Egger,M.Ferrari,P.Innocenzi,S.Licoccia,P.Romagnoli,M.Trombetta,L.Zampedri.Hybrid organic-inorganic films by assembling of Si-Zr-based nanobuilding blocks[J].Journal of the Eruopean Ceramic Society,2005,25:2051-2054.
[58]C.Sanchez,F.Ribot and B.Ledeau.Molecular design of hybrid organic-inorganic nanocomposites synthesized via sol-gel chemistry[J].Journal of Materials Chemistry,1999,9:35-44.
[59]王玥,吴远大,李建光,王红杰,胡雄伟.有机/无机杂化SiO_2/Si光波导薄膜的制备及表征[J].半导体光电,2007,28(4):525-527.
[60]李小甫,余海湖,姜德生.光波导用TiO_2/SiO_2复合薄膜的制备及其性能研究[J].光电子技术与信息,2003,16(2):20-25.
[61]徐翔,周斌,沈军等.紫外曝光在ZrO_2薄膜上引入微结构的研究[J].材料导报,2005,19(9):126-130.
[62]华斌,钱国栋,徐静,何赛灵,王民权.ZrO_2-SiO_2二元系统平面光波导薄膜的制备与性能表征[J].硅酸盐通报,2004,3:35-37.
[63]孙淼,时尧成,戴道梓,刘柳.减少SiO_2光波导表面粗糙度的ICP干法刻蚀工艺研究[J].光学仪器,2007,29(1):71-74.
[64]王学忠,阮驰,高应俊.低损耗阶跃型塑料光纤(SI-POF)工艺的研究[J].光子学报,2002,31(7):7-12
[65]Tomaso Villa,Davide Carnelli.Experimental evaluation of the biomechanical performances of a PMMA-based knee spacer[J].The Knee,2007,14:145-153.
[66]Louay Eldada,Senior Member,IEEE,and Lawrence W.Shacklette.Advances in Polymer Integrated Optics[J].IEEE Journal of selected Topics In Quantum Electronics,2003,6(1):54-68.
[67]Jae-Sun Koo,Peter G.R.Smith,Richard B.Williams,Christos Riziotis,Martin C.Grossel.UV written waveguides using crosslinkable PMMA-based copolymers[J].Optical materials,2003,23:583-592.
[68]I.Rajta,S.Z.Szilasi,J.Budai,Z.Toth,P.Petrik,E.Baradacs.Refractive index depth profile in PMMA due to proton irradiation[J].Nuclear Instruments and Methods in Physics Research B,2007,25:432-438.
[69]陈益新.集成光学[M].上海:上海交通大学出版社,1985:19-27.
[70]林金辉,李金涛,叶巧明,刘菁.铝酸酯DL-411与硅烷KH-570偶联剂复合改性粉石英研究[J].非金属矿,2006,29(3):78-83.
[71]刘兵,赵若飞,戴干策,胡春圃.St/BA/KH-570三元共聚物的合成及其在云母增强聚丙烯中的应用[J].功能高分子学报,2001,14(3):51-54.
[72]陆荣,景强,王吉荣.KH-570对Al_2O_3粉体的改性研究[J].盐城工学院学报,2005,18(4):21-25.
[73]Gaoyang Zhao,Noboru Tohge.Preparation of photosensitive gel film and fine patteming of amorphous Al_2O_3-SiO_2 thin films[J].Materials Research Bulletin,1998,33(1):21-30.
[74]Anna Lukowiak,Rafal Dylewicz,Sergiusz Patela,Wieslaw Strek,Krzyszt of Maruszewski.Optical properties of SiO_2-TiO_2 thin film waveguides obtained by the sol-gel method and their applications for sensing purposes[J].Optical Materials,2005,27:1501-1505.
[75]R.Mechiakh,F.Meriche,R.Kremer,R.Bensaha,B.Boudine,A.Boudrioua.TiO_2 thin films prepared by sol-gel method for waveguiding applications:Correlation between the structural and optical properties[J].Optical Materials,2007,12:1541-5146.
[76]Gaoyang Zhao,Zhezhe Wang,Weihua Zhang.Fabrication of gratings using photosensitive gel films by He-Cd lasers[J].Optical Engineering,2007,46(2):1-4.
[77]赵桂荣,赵高扬.化学修饰法制备的ZrO_2-SiO_2系凝胶薄膜的感光特性研究[J].功能材料,2002,33(2):207-211.
[78]B.C.Gibson,P.M.Dower.Refractive index design and validation for evanescent field power maximization in optical fibre sensors[J].Optics Communications,2007,279:303-312.
[79]孙雨南,王茜蒨,武剑,杨爱英.光纤技术理论基础与应用[M].北京:北京理工大学出版社,2006:85-169.
[80]吴重庆.光波导理论[M].北京:清华大学出版社,2005:19-87.