飞秒激光对透明电介质材料的烧蚀与微加工研究
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摘要
本论文对飞秒激光烧蚀透明电介质材料的特性以及飞秒激光微细加工技术进行了理论和实验研究。论文的主要内容包括:
(1)总结了飞秒激光与电介质材料相互作用的物理机制,重点讨论了雪崩电离和多光子电离过程,并以熔融石英玻璃材料为例分析了碰撞电离系数和多光子电离系数随着激光入射强度不同的变化情况。对飞秒激光烧蚀电介质材料的烧蚀阈值、烧蚀深度与脉冲宽度和光子能量之间的关系进行了分析。
(2)实验研究了飞秒激光烧蚀MgAl_2O_4透明陶瓷的机理和损伤规律。理论分析并实验测量了MgAl_2O_4透明陶瓷的单脉冲烧蚀阈值、多脉冲烧蚀阈值和多脉冲烧蚀的累积效应。对于MgAl_2O_4透明陶瓷在飞秒激光作用后的微区结构改变进行了场发射扫描电子显微镜、原子力显微镜和傅立叶变换显微红外/拉曼光谱仪的测试,研究了飞秒激光烧蚀MgAl_2O_4透明陶瓷的形貌特征,重点讨论了飞秒激光烧蚀得到的周期为300 nm,宽度为200 nm的周期性波纹状微纳米结构。对烧蚀后的区域在波数为2500-7000 cm-1范围内的透过率进行了分析,结果表明能流密度在烧蚀阈值附近的飞秒激光辐照MgAl_2O_4透明陶瓷后可以使其红外透过率由82%提高到86%左右。
(3)实验研究了飞秒激光与LiNbO_3晶体的相互作用。采用不同能量的单脉冲和多脉冲飞秒激光对LiNbO_3晶体进行烧蚀,发现利用单束飞秒激光作用LiNbO_3晶体,只要激光脉冲的能量和数量选择合适,都可以得到小于系统衍射极限的烧蚀点,并对超衍射极限加工的机理进行了分析。研究了不同能流密度的飞秒激光对LiNbO_3晶体拉曼光谱的影响,在激光能流密度较低时,飞秒激光的烧蚀对铌酸锂晶体的结构没有显著影响,较高能流密度的飞秒脉冲烧蚀后可以使铌酸锂晶体的原子平衡键距增大,原子间作用力减弱,平衡键距和键角呈现具有一定宽度的分布,并使铌酸锂形成了非晶化组织。
(4)选择不同的加工参数,采用飞秒激光直写技术在LiNbO_3晶体上制备了表面衍射光栅,实验和理论分析结果表明,可以通过提高烧蚀速率、降低激光脉冲能量和增大光栅常数来提高飞秒激光加工光栅的衍射效率。采用垂直方式在LiNbO_3晶体内部加工了直线光波导,实验研究了脉冲能量和烧蚀速率对光波导折射率的影响,结果表明利用飞秒激光加工光波导,在不引起烧蚀的情况下,能量较高、加工速率较低可以得到比较好的效果。
In this dissertation, theoretical and experimental studies on the femtosecond laser ablation of dielectrics and fabrication of micro-optics devices based on femtosecond laser micromachining are presented. The main contents are classified as follows.
(1) The ionization processes of multi-photon ionization and avalanche ionization in laser-induced damage are studied. The changes of avalanche ionization rate and multi-photon ionization rate with the changes of laser intensity are investigated by taking the silica glass as an example. The relation between damage threshold and laser pulse duration, photon energy is studied.
(2) Microstructural modifications of MgAl_2O_4 transparent ceramic induced by femtosecond laser pulse with a wavelength of 800 nm have been investigated by experiments. The ablation thresholds of MgAl_2O_4 transparent ceramic for single-pulse and multiple-pulse are studied. It was found that the periodic ripples about 200 nm in width and 300 nm in neighbouring ripples distance are formed on the bottom surfaces of ablation holes. The ablated spot under optimized energy pulses (near the damage threshold energy) can improve the IR transmission from 82% to 86% in the band of 2500-7000 cm-1 for MgAl_2O_4 transparent ceramic. When the pulses energy exceeds the threshold energy, the transmission of MATC decreases rapidly.
(3) The morphology of structural changes of lithium niobate (LiNbO_3) single crystal ablated by a femtosecond laser pulse has been investigated. Sub-wavelength spots in LiNbO_3 crystal ablated by femtosecond laser focused with 20×(NA=0.5) microscope objective have been achieved. The spot-size is about 400 nm and 800 nm with 170 nJ single-pulse and 100 nJ, 17 pulses ablation, respectively. Raman analysis indicates some loss of crystallinity of the material after ablation with femtosecond laser. This indicates that LiNbO_3 suffers some change in chemical structure at the superficial layer, but remains largely unchanged in the bulk.
(4) Diffraction gratings were written at the surface of LiNbO_3 single crystal under irradiation with femtosecond laser pulses. The experimental and theoretical results show that the diffraction efficiencies of gratings can be improved by increase of ablation speed and grating constant or decrease of pulse energy. The waveguide structure was fabricated with different parameters by vertical illumination method in LiNbO_3 single crystal. The influences of refractive index on laser intensity and ablation rate are investigated by experiments.
(1)总结了飞秒激光与电介质材料相互作用的物理机制,重点讨论了雪崩电离和多光子电离过程,并以熔融石英玻璃材料为例分析了碰撞电离系数和多光子电离系数随着激光入射强度不同的变化情况。对飞秒激光烧蚀电介质材料的烧蚀阈值、烧蚀深度与脉冲宽度和光子能量之间的关系进行了分析。
(2)实验研究了飞秒激光烧蚀MgAl_2O_4透明陶瓷的机理和损伤规律。理论分析并实验测量了MgAl_2O_4透明陶瓷的单脉冲烧蚀阈值、多脉冲烧蚀阈值和多脉冲烧蚀的累积效应。对于MgAl_2O_4透明陶瓷在飞秒激光作用后的微区结构改变进行了场发射扫描电子显微镜、原子力显微镜和傅立叶变换显微红外/拉曼光谱仪的测试,研究了飞秒激光烧蚀MgAl_2O_4透明陶瓷的形貌特征,重点讨论了飞秒激光烧蚀得到的周期为300 nm,宽度为200 nm的周期性波纹状微纳米结构。对烧蚀后的区域在波数为2500-7000 cm-1范围内的透过率进行了分析,结果表明能流密度在烧蚀阈值附近的飞秒激光辐照MgAl_2O_4透明陶瓷后可以使其红外透过率由82%提高到86%左右。
(3)实验研究了飞秒激光与LiNbO_3晶体的相互作用。采用不同能量的单脉冲和多脉冲飞秒激光对LiNbO_3晶体进行烧蚀,发现利用单束飞秒激光作用LiNbO_3晶体,只要激光脉冲的能量和数量选择合适,都可以得到小于系统衍射极限的烧蚀点,并对超衍射极限加工的机理进行了分析。研究了不同能流密度的飞秒激光对LiNbO_3晶体拉曼光谱的影响,在激光能流密度较低时,飞秒激光的烧蚀对铌酸锂晶体的结构没有显著影响,较高能流密度的飞秒脉冲烧蚀后可以使铌酸锂晶体的原子平衡键距增大,原子间作用力减弱,平衡键距和键角呈现具有一定宽度的分布,并使铌酸锂形成了非晶化组织。
(4)选择不同的加工参数,采用飞秒激光直写技术在LiNbO_3晶体上制备了表面衍射光栅,实验和理论分析结果表明,可以通过提高烧蚀速率、降低激光脉冲能量和增大光栅常数来提高飞秒激光加工光栅的衍射效率。采用垂直方式在LiNbO_3晶体内部加工了直线光波导,实验研究了脉冲能量和烧蚀速率对光波导折射率的影响,结果表明利用飞秒激光加工光波导,在不引起烧蚀的情况下,能量较高、加工速率较低可以得到比较好的效果。
In this dissertation, theoretical and experimental studies on the femtosecond laser ablation of dielectrics and fabrication of micro-optics devices based on femtosecond laser micromachining are presented. The main contents are classified as follows.
(1) The ionization processes of multi-photon ionization and avalanche ionization in laser-induced damage are studied. The changes of avalanche ionization rate and multi-photon ionization rate with the changes of laser intensity are investigated by taking the silica glass as an example. The relation between damage threshold and laser pulse duration, photon energy is studied.
(2) Microstructural modifications of MgAl_2O_4 transparent ceramic induced by femtosecond laser pulse with a wavelength of 800 nm have been investigated by experiments. The ablation thresholds of MgAl_2O_4 transparent ceramic for single-pulse and multiple-pulse are studied. It was found that the periodic ripples about 200 nm in width and 300 nm in neighbouring ripples distance are formed on the bottom surfaces of ablation holes. The ablated spot under optimized energy pulses (near the damage threshold energy) can improve the IR transmission from 82% to 86% in the band of 2500-7000 cm-1 for MgAl_2O_4 transparent ceramic. When the pulses energy exceeds the threshold energy, the transmission of MATC decreases rapidly.
(3) The morphology of structural changes of lithium niobate (LiNbO_3) single crystal ablated by a femtosecond laser pulse has been investigated. Sub-wavelength spots in LiNbO_3 crystal ablated by femtosecond laser focused with 20×(NA=0.5) microscope objective have been achieved. The spot-size is about 400 nm and 800 nm with 170 nJ single-pulse and 100 nJ, 17 pulses ablation, respectively. Raman analysis indicates some loss of crystallinity of the material after ablation with femtosecond laser. This indicates that LiNbO_3 suffers some change in chemical structure at the superficial layer, but remains largely unchanged in the bulk.
(4) Diffraction gratings were written at the surface of LiNbO_3 single crystal under irradiation with femtosecond laser pulses. The experimental and theoretical results show that the diffraction efficiencies of gratings can be improved by increase of ablation speed and grating constant or decrease of pulse energy. The waveguide structure was fabricated with different parameters by vertical illumination method in LiNbO_3 single crystal. The influences of refractive index on laser intensity and ablation rate are investigated by experiments.
引文
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