光辅助MOCVD法制备大面积高质量YBa_2Cu_3O_（6.9）高温超导膜
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摘要
高温超导体YBa2Cu3O6(.9简称YBCO)因具有较高的超导转变温度(Tc > 90K)能工作在液氮温度(77K)而受到广泛重视。其应用范围含盖了强电、弱电及抗磁应用。在弱电领域,YBCO外延膜可用来制作高性能的超导微波滤波器。在微波通讯频段内,77K时高温超导材料YBCO的表面电阻(Rs)值比Cu材料的要小2-3个量级,因而用YBCO为材料制作的超导微波滤波器与Cu材料制作的微波滤波器相比具有灵敏度高、抗干扰能力强、承载功率大等特点。
本论文论述了用光辅助MOCVD发制备用于制作高温超导微波滤波器的高质量YBCO双面膜的工艺探索过程。对比了垂直式反应室和倾斜进气口反应室在生长大面积膜时的区别。分析了MOCVD法制备的纯c轴向YBCO外延膜表面山头的形成过程及去除手段。通过两次生长的工艺制备出了两面超导质量都良好的纯c轴向1″YBCO双面膜。
High temperature superconductor (HTS) YBCO possesses very high critical current intensity and low surface resistance values (Rs), its Rs is 2-3 magnitude order lower than that of Cu. The microwave filters made of YBCO possess a few strong points, such as low insert loss, high sensitivity and small in size and thus are considered to be the“ideal microwave filters”. Making use of the kind of filters can greatly reduce band resources, power of communication equipment and inter-signal interference. Double-sized 2 inches HTS YBCO film with extremely high quality provides the basic material for HTS microwave filters. At present, there is no such technique entitled with independent property right for producing in large amount 2 inches YBCO films at home. YBCO epitaxial films grown by photo-assisted MOCVD technique possess high quality crystal, a thickness of several microns, and extremely fast growth rate. This thesis has made an attempt to study the epitaxial technique of doubled-sized 2 inches YBCO films by using the photo-assisted MOCVD and produced high-quality double-sized 1 inch YBCO films. Besides it has analyzed and processed the hill-like deposition, populating the surface of purely c-axis oriented YBCO epitaxial films made by MOCVD.
This thesis has designed two kinds of photo-assisted MOCVD reactors, with one for vertical air current intake and the other for canted intake. A three-dimensional computer simulation for air flow patterns and temperature from the two reactors has been conducted and results thus obtained have been illustrated and compared. With two self-designed and assembled MOCVD systems, experiments for one-sided 1 inch YBCO films have been done in the respective reactors and the growth conditions have been optimized respectively. The films grown in the two reactors under optimal growth conditions have been compared in detail, finding that the orientation of 1 inch YBCO films grown in the reactor of vertical intake is uneven, with the center of the film a-axis oriented and the edge of the film c-axis oriented, resulting in poor quality of the superconductors. While the orientation and thickness of 1 inch YBCO films grown in the reactor of canted intake is quite even, resulting in high quality of the superconductors. Mean value of Jc may be1.5MA/cm2 or even above possibly and its even degree may be above 90%. The surface resistant value (Rs) can be below 0.5m?.
The present thesis has also analyzed the forming process of the hill-like depositions populating on the surface of the purely c-axis oriented YBCO epitaxial films, made by MOCVD and investigated the techniques for removing the hill-like depositions. With long time experimental observation, analysis has been made on the shape and composition of the hill-like depositions populating on the surface of the purely c-axis oriented YBCO epitaxial films, which are with different thickness and length of grown-time. An attempted conclusion has been made that the liquid deposition comes into being along with the forming of the epitaxial films and the deposition exists in the form of liquid drop, which will remain on the surface of the film when the latter grows thicker and thicker. With the temperature dropping, the substances inside of the liquid drop will finally and gradually crystallized, forming the hill-like depositions, which stick to the surface of the purely c-axis oriented YBCO epitaxial films. The attachment of hill-like deposition to the surface of the films is not very strong so that it can be removed easily simply by polishing. The thesis also conducts a contrastive study on the characteristics of 1 inch YBCO films before and after the deposition is removed, finding that polishing almost exerts no effect on the characteristics of the YBCO epitaxial films and thus YBCO epitaxial films made by photo-assisted MOCVD can be applied to practice, after the deposition has been removed by polishing.
The present thesis has also discussed the producing techniques of the double-sided photo-assisted MOCVD YBCO films and holds that these films can grow in two ways: one is that the two sides of the films grow simultaneously, the other is that the two sides grow side by side. As to the former way of growing, the grown-time is short and the differences between the characteristics of the two sides are slight, but it is hard to put into practice since a re-designed photo-assisted MOCVD reactor is required. While as to the latter way, the grown-time is comparatively long and the differences are relatively big, but it can be easily applied by using the existing equipment. At a result, the second producing technique has been employed in the present thesis to produce double-sided YBCO epitaxial films.
The substrate temperature of tow sides when grown 1 inch double-sides YBCO films by tow-step method were analyzed and compared. Generally, the first-grown side of the 1 inch double-sided YBCO film is always a-axis oriented, while the latter-grown side is always c-axis oriented, resulting in poor superconductor characteristics of the former side, when the substrate temperature of the tow sides were same. Both sides of the double-sided YBCO film are purely c-axis oriented and thus both sides are with good superconductor characteristics while the substrate temperature of the first-grown side was higher than that of the latter-grown side. The Jc value of thus produced double-sided 1 inch YBCO films is always above 1.5MA/cm2 and the value of Rs is unusually below 1m?.
本论文论述了用光辅助MOCVD发制备用于制作高温超导微波滤波器的高质量YBCO双面膜的工艺探索过程。对比了垂直式反应室和倾斜进气口反应室在生长大面积膜时的区别。分析了MOCVD法制备的纯c轴向YBCO外延膜表面山头的形成过程及去除手段。通过两次生长的工艺制备出了两面超导质量都良好的纯c轴向1″YBCO双面膜。
High temperature superconductor (HTS) YBCO possesses very high critical current intensity and low surface resistance values (Rs), its Rs is 2-3 magnitude order lower than that of Cu. The microwave filters made of YBCO possess a few strong points, such as low insert loss, high sensitivity and small in size and thus are considered to be the“ideal microwave filters”. Making use of the kind of filters can greatly reduce band resources, power of communication equipment and inter-signal interference. Double-sized 2 inches HTS YBCO film with extremely high quality provides the basic material for HTS microwave filters. At present, there is no such technique entitled with independent property right for producing in large amount 2 inches YBCO films at home. YBCO epitaxial films grown by photo-assisted MOCVD technique possess high quality crystal, a thickness of several microns, and extremely fast growth rate. This thesis has made an attempt to study the epitaxial technique of doubled-sized 2 inches YBCO films by using the photo-assisted MOCVD and produced high-quality double-sized 1 inch YBCO films. Besides it has analyzed and processed the hill-like deposition, populating the surface of purely c-axis oriented YBCO epitaxial films made by MOCVD.
This thesis has designed two kinds of photo-assisted MOCVD reactors, with one for vertical air current intake and the other for canted intake. A three-dimensional computer simulation for air flow patterns and temperature from the two reactors has been conducted and results thus obtained have been illustrated and compared. With two self-designed and assembled MOCVD systems, experiments for one-sided 1 inch YBCO films have been done in the respective reactors and the growth conditions have been optimized respectively. The films grown in the two reactors under optimal growth conditions have been compared in detail, finding that the orientation of 1 inch YBCO films grown in the reactor of vertical intake is uneven, with the center of the film a-axis oriented and the edge of the film c-axis oriented, resulting in poor quality of the superconductors. While the orientation and thickness of 1 inch YBCO films grown in the reactor of canted intake is quite even, resulting in high quality of the superconductors. Mean value of Jc may be1.5MA/cm2 or even above possibly and its even degree may be above 90%. The surface resistant value (Rs) can be below 0.5m?.
The present thesis has also analyzed the forming process of the hill-like depositions populating on the surface of the purely c-axis oriented YBCO epitaxial films, made by MOCVD and investigated the techniques for removing the hill-like depositions. With long time experimental observation, analysis has been made on the shape and composition of the hill-like depositions populating on the surface of the purely c-axis oriented YBCO epitaxial films, which are with different thickness and length of grown-time. An attempted conclusion has been made that the liquid deposition comes into being along with the forming of the epitaxial films and the deposition exists in the form of liquid drop, which will remain on the surface of the film when the latter grows thicker and thicker. With the temperature dropping, the substances inside of the liquid drop will finally and gradually crystallized, forming the hill-like depositions, which stick to the surface of the purely c-axis oriented YBCO epitaxial films. The attachment of hill-like deposition to the surface of the films is not very strong so that it can be removed easily simply by polishing. The thesis also conducts a contrastive study on the characteristics of 1 inch YBCO films before and after the deposition is removed, finding that polishing almost exerts no effect on the characteristics of the YBCO epitaxial films and thus YBCO epitaxial films made by photo-assisted MOCVD can be applied to practice, after the deposition has been removed by polishing.
The present thesis has also discussed the producing techniques of the double-sided photo-assisted MOCVD YBCO films and holds that these films can grow in two ways: one is that the two sides of the films grow simultaneously, the other is that the two sides grow side by side. As to the former way of growing, the grown-time is short and the differences between the characteristics of the two sides are slight, but it is hard to put into practice since a re-designed photo-assisted MOCVD reactor is required. While as to the latter way, the grown-time is comparatively long and the differences are relatively big, but it can be easily applied by using the existing equipment. At a result, the second producing technique has been employed in the present thesis to produce double-sided YBCO epitaxial films.
The substrate temperature of tow sides when grown 1 inch double-sides YBCO films by tow-step method were analyzed and compared. Generally, the first-grown side of the 1 inch double-sided YBCO film is always a-axis oriented, while the latter-grown side is always c-axis oriented, resulting in poor superconductor characteristics of the former side, when the substrate temperature of the tow sides were same. Both sides of the double-sided YBCO film are purely c-axis oriented and thus both sides are with good superconductor characteristics while the substrate temperature of the first-grown side was higher than that of the latter-grown side. The Jc value of thus produced double-sided 1 inch YBCO films is always above 1.5MA/cm2 and the value of Rs is unusually below 1m?.
引文
[1] Onnes.H. K, The resistance of pure mercury at helium temperatures, Comm. Phys. Lab. Univ. Leiden1911,120b.
[2]沈致远著盛克敏译王家素校“高温超导微波电路”国防工业出版社2000年1月第一版
[3] Cristina Buzea, Kevin Robbie, Assembling the puzzle of superconducting elements: A Review[J], Supercond. Sci. Technol. 2005, 18(1): R1-R8
[4] J.G. Bednorz, K.A.Müller, Possible high Tc superconductivity in the Ba-La-Cu-O system, Z. Phys.B 1986, 64(2):189-193.
[5] Bardeen.J., L.N.Cooper, J.R.Schirefer, Microscopic Theory of Superconductivity [J]. Phys.Rev. 1957, 108, l175
[6] M.K.Wu, J.R.Ashburn, C.J.Torng, P.H.Hor, R.L.Meng,L.Gao, Z.J.Huang, Y.Q.Wang, C.W.Chu, Superconductivity at 93K in a new mixed-phase Y-Ba-Cu-O Compound system at ambient pressure[J]. Phys. Rev. Lett. 1987 58:908.
[7] P. H. Hor, L. Gao, R. L. Meng, Z. J. Huang, Y. Q. Wang, K. Forster, J. Vassilious, C. W. Chu, M. K. Wu, J. R. Ashburn, and C. J. Torng, High-pressure study of the new Y-Ba-Cu-O superconducting compound system [J]. Phys. Rev. Lett. 1987, 58:911-912.
[8]赵忠贤,陈立泉,杨乾声,黄玉珍,陈赓华,唐汝明,刘贵荣,崔长庚,陈烈,王连忠,郭树权,李山林,毕建清,Ba-Y-Cu氧化物液氮温区的超导电性[J],科学通报, 1987年第06期.
[9]赵忠贤,陈立泉,杨乾声,黄玉珍,陈赓华,唐汝明,刘贵荣,倪泳明,崔长庚,陈烈,王连忠,郭树权,李山林,毕建清,王昌庆,液氮温区的新氧化物超导体[J],科学通报,1987年11期.
[10] J. M. Tarascon, Y. LePage, L. H. Greene, B. G. Bagley, P. Barboux, D. M. Hwang, G. W. Hull, W. R. McKinnon, and M. Giroud, Origin of the 110-K superconducting transition in the Bi-Sr-Ca-Cu-O system [J]. Phys. Rev. B. 1988,38:2504-2508.
[11] Y. J. Uemura et al., Universal Correlations between Tc and ns/m* (Carrier Density over Effective Mass) in High-Tc Cuprate Superconductors[J]. Phys. Rev. Lett. 1989, 62:2317-2320.
[12] A. Tokiwa-Yamamoto, K.Isawa, M. Itoh, et al., Composition, crystal structure and superconducting properties of Hg-Ba-Ca-Cu-O superconductors [J]. Physica C, 1993, 216:250-256.
[13]Chu,C.W., L.Gao, F.Chen, Z.J. Huang, R.L.Meng and Y.Y.Xue, Superconductivity above 150K in HgBa2Ca2Cu3O8+δat high pressures, Nature, 1993, 365:323-325.
[14] Zhi Yuan Shen, High-Temperature Superconducting Microwave Circuits, Artech House,1994.
[15] Yoichi Kamihara, Takumi Watanabe, Masahiro Hirano, and Hideo Hosono, Iron-Based Layered Superconductor La[O1-xFx]FeAs (x = 0.05?0.12) with Tc = 26 K[J], J. Am. Chem. Soc., 2008, 130 (11), pp 3296–3297
[16] Hai-Hu Wen, Gang Mu, Lei Fang, Huan Yang, Xiyu Zhu, Superconductivity at 25 K in hole doped La1-xSrxOFeAs, Europhysics Letters, 2008,82:17009.
[17] W. Meissner, R. Ochsenfeld,“A new effect in penetration of superconductors”, Die. Naturwissenschaften, 1933,21, 787.
[18] S. Isber and C. Madi, Superconducting properties of chromium Cr-YBCO grown by Pulsed Laser Deposition [J]. Journal of Physics: Conference Series, 2008, 97:012130.
[19] L Molina1, S Engel, K Knoth, R Hühne, B Holzapfel, O Eibl, Grain growth and biaxial texture of chemically deposited La2Zr2O7 buffer layers for YBCO-coated conductors [J]. Journal of Physics: Conference Series, 2008, 97:012-108.
[20] C. H. Stoessel, R. F. Bunshah, S. Prakash, H. R. Fetterman, Thin-Film Processing of High-To Superconductors[J]. Journal of Superconductivity, 1993, 6:1-17
[21] M Beshkova , B Blagoev , D Kovacheva , G Mladenov and T Nurgaliev, Deposition and characterization of high temperature superconductingYBa2Cu3O7-δfilms obtained by DC magnetron sputtering and thermal annealing modification [J], Journal of Physics: Conference Series, 2008, 113:012021.
[22] K. Ohki, N. Iwashit, K. Kikunag, T. Okud , K. Obar and N. Terad, Sputter Synthesis of c-axis YBCO Films with Excellent urface Smoothness and Fabrication of Sandwich type Junctions with Interface Engineered Barrier [J]. Journal of Physics: Conference Series, 2006, 43, 1159-1162.
[23] E. Gilioli, M. Baldini, M. Bindi, F. Bissoli, F. Pattini, S. Rampino, S. Ginocchio, A. Gauzzi, M. Rocca and S. Zannella, Co-evaporated YBCO/doped-CeO2/Ni-W coated conductors oxygen improved using a supersonic nozzle [J]. Physica C, 2007, 463-465:609-614.
[24]胡倾宇,路荣涛,郭玉良,用三源热共蒸发法制备的二十厘米长涂层导体及其显微结构[J].低温物理学报,2005, 27 (5): 789-773.
[25] H.Kinder, P.Berberich, B.Utz and W.Prusseit, Double sided YBCO films on 4" substrates by thermal reactive evaporation [J]. IEEE trans. Appl. Supercond., 1995, 5(2):1575.
[26] J.-K. Choi, B.-H. Jun and C.-J. Kim, Fabrication of YBCO coated conductors by MOCVD method using various templates [J]. Physica C 445-448 (2006): 521-524
[27] N. Amemiya, O. Maruyama, M. Mori, N. Kashima, T. Watanabe, S. Nagaya, Y. Shiohara, Lateral Jc distribution of YBCO coated conductors fabricated by IBAD/MOCVD process [J]. Physica C, 2006, 445-448:712-716
[28] Gustav Plesch, Peter Billik, Alexander Cigáň, Ján Maňka, YBa2Cu3O7 melt textured thick films grown by infiltration process on YSZ substrate prepared by sol-gel method [J]. Journal of Alloys and Compounds, 2008, 461:61-65.
[29] Ibrahim Halil Mutlu, Hediye Acun, Erdal Celik, Hasan Turkmen, Preparation of YBa2Cu3O7-x superconducting solutions and films from alkoxide-based precursors using sol-gel method and investigation of their chemical reaction mechanisms [J]. Physica C, 2007, 451:98-106.
[30] S Ghalsasi, Y X Zhou, J Chen, B Lv and K Salama, MOD multi-layer YBCO films on single-crystal substrate [J]. Supercond. Sci. Technol., 2008, 21 (4):045015.
[31] N Mori, M Mukaida, R Teranishi, K Yamada, T Tanaka and K Tada, Crystal growth process of Y123 film fabricated by modified TFA-MOD process [J]. J. Phys.: Conf. Ser., 2008, 97:012061.
[32] R. A. Hawsey , D. K. Christen, Progress in research, development, and pre-commercial deployment of second generation HTS wires in the USA[J] , Phys. C 445-448(2006) 488
[33] Donald U. Gubser, Superconducting motors and generators for naval applications[J], Physica C, 2003, 392-396:1192-1195.
[34] R.J. Abraham, D. Das, A. Patra, Automatic generation control of an interconnected hydrothermal power system considering superconducting magnetic energy storage, Electrical Power and Energy Systems[J], 2007, 29(8):571-579.
[35]H.G. Cheon, D.S. Kwag, J.H. Choi, S.H. Kim, The insulation design for transmission class HTS transformer with continuous disk winding [J]. Physica C, 2007, 462-465:1218-1222.
[36]尹哲胜,魏斌,曹必松,郭旭波,张晓平,何文俊,何山,郜龙马,朱美红,高葆新,一种800MHz无线通信用高温超导滤波器的研究,低温物理学报[J],2006, 28(3):272-274.
[37] Y. Shimazu, T. Niizeki, Y. Wada, Fabrication and characterization of a switchable flux transformer using a DC-SQUID[J], Physica C, 2006, 445-448:971-974.
[38] A.M. Zagoskin, d-Wave superconductors and quantum computers[J], Physica C, 2002, 368(1-4):305-309.
[39] A. Ignatiev, Q. Zhong, P.C. Chou, X. Zhang, J.R. Liu and W.K. Chu, 'Large Jc Enhancement by Ion-irradiation for Thick YBCO Films Prepared by Photo-assisted MOCVD,' Applied Phys Letters 1997, 70:1474.
[40] A.Ignative, P.C.Chou, Yimin Chen,Xin Zhang, Z.Tang“Coated ConductorDevelopment by Photo-Assisted MOCVD Growth of YBCO Thick Films and Buffer Layers”Physica C, 2000, 341-348, 2309.
[41] H.M. Manasevit, Single-crystal gallium arsenide on insulating substrates[J]. Appl. Phys. Lett. 1968, 12(4):156-159.
[42] H.M. Manasevit and W. I. Simpson, The Use of Metal-Organics in the Preparation of Semiconductor Materials[J]. J. Electrochem. Soc. 1969, 116(12):1725-1732.
[43] R. Singh, F. Radpour, P. Chou, Comparative study of dielectric formation by furnace and rapid isothermal processing[J], J. Vac. Sci. Technol. 1989,A 7(3):1456-1460.
[44] R. Singh, P. Chou, F. Radpour, A. J. Nelson and H. S. Ullal, Oxidation of tin on silicon substrate by rapid isothermal processing[J], J. Appl. Phys. 1989, 66(6):2381-2387.
[45]林良真,张金龙,李传义,夏平畴,杨乾声,超导电性及其应用,北京工业大学出版社[M],1998.
[46] P.C. Chou, Q. Zhong, Q.L. Li, K. Abazajian, A. Ignatiev, C.Y. Wang, E.E. Deal, J.G. Chen, Optimization of Jc of YBCO thin films prepared by photo-assisted MOCVD through statistical robust design[J], Physica C, 1995, 254(1-2):93-112.
[47]杜希文,原续波,材料分析方法[M],天津大学出版社,2006.
[48]李国兴,以光辅助MOCVD法制备大面积YBa2Cu3O7-x高质量高温超导外延膜的初步研究[D],长春:吉林大学,2008
[49]方秀军,采用光辅助MOCVD方法生长YBCO薄膜和厚膜及其特性研究[D],长春:吉林大学,2008
[50] Xiujun Fang, Guoxing Li, Shanwen Li, Lei Zhao, Wancheng Li, Baolin Zhang, Guotong Du, Penchu Chou, Hui Li, Ran Zuo, Lin He, Chinping Chen, The effect of susceptor inclination angle on the quality of superconducting YBCO thin films prepared by a photo-assisted MOCVD system[J],Physica C,2008,468(14):1053-1059
[51] Guoxing Li,Xiujun Fang,Lei Zhao,Shanwen Li,Zhongmin Gao,WanchengLi,Jingzhi Yin,Baolin Zhang,Guotong Du,Penchu Chou,Lin He,Chinping Chen,Precisely determined temperature window size for the growth of high quality c-axis oriented YBCO films by photo-assisted MOCVD[J],Physica C,2008,468(21):2213-2218
[52] Q.Zhong, P.C.Chou, Q.L.Li, G.S.Taraldsen, A.Ignatiev, High-rate growth of purely a-axis oriented YBCO high-Tc thin films by photo-assisted MOCVD. Physica C,1995, 246(3-4):288-296.
[53] Jianming Zeng, Jie Lian, Luming Wang, P.C.Chou, Alex Ignatiev,“HRTEM characterization of Yba2Cu3O7-δthick films on LaAlO3 substrates”Physica C 2004, 405: 127.
[54] D.W.MURPHY,D.W.JOHNSON JR.,S.JIN,R.E.HOWARD,Processing Techniques for the 93K Superconductor Ba2YCu3O7 [J].Science, 1988,241(4868):922-930
[55] R.H.Hammond and R.Bormann, Correlation between the in situ growth conditons of YBCO thin films and the thermodynamic stability criteria, Physica C, 1989,162-164(1):703-703.
[56]杨德林,孟令启,李志成,胡行,郭益群,高之爽,YBa2Cu3O 7- x的高温氧呼吸特性[J],低温与超导,2001,29(1):48-50
[57] Zhili Zhu, Delin Yang, Yiqun Guo, Qingqing Liu, Zhishuang Gao, Xing Hu, Oxygen desorption activation energy of YBa2Cu3O7-x btained by thermogravimetry with dierent heating rates, Physica C, 2002, 383: 169–174
[2]沈致远著盛克敏译王家素校“高温超导微波电路”国防工业出版社2000年1月第一版
[3] Cristina Buzea, Kevin Robbie, Assembling the puzzle of superconducting elements: A Review[J], Supercond. Sci. Technol. 2005, 18(1): R1-R8
[4] J.G. Bednorz, K.A.Müller, Possible high Tc superconductivity in the Ba-La-Cu-O system, Z. Phys.B 1986, 64(2):189-193.
[5] Bardeen.J., L.N.Cooper, J.R.Schirefer, Microscopic Theory of Superconductivity [J]. Phys.Rev. 1957, 108, l175
[6] M.K.Wu, J.R.Ashburn, C.J.Torng, P.H.Hor, R.L.Meng,L.Gao, Z.J.Huang, Y.Q.Wang, C.W.Chu, Superconductivity at 93K in a new mixed-phase Y-Ba-Cu-O Compound system at ambient pressure[J]. Phys. Rev. Lett. 1987 58:908.
[7] P. H. Hor, L. Gao, R. L. Meng, Z. J. Huang, Y. Q. Wang, K. Forster, J. Vassilious, C. W. Chu, M. K. Wu, J. R. Ashburn, and C. J. Torng, High-pressure study of the new Y-Ba-Cu-O superconducting compound system [J]. Phys. Rev. Lett. 1987, 58:911-912.
[8]赵忠贤,陈立泉,杨乾声,黄玉珍,陈赓华,唐汝明,刘贵荣,崔长庚,陈烈,王连忠,郭树权,李山林,毕建清,Ba-Y-Cu氧化物液氮温区的超导电性[J],科学通报, 1987年第06期.
[9]赵忠贤,陈立泉,杨乾声,黄玉珍,陈赓华,唐汝明,刘贵荣,倪泳明,崔长庚,陈烈,王连忠,郭树权,李山林,毕建清,王昌庆,液氮温区的新氧化物超导体[J],科学通报,1987年11期.
[10] J. M. Tarascon, Y. LePage, L. H. Greene, B. G. Bagley, P. Barboux, D. M. Hwang, G. W. Hull, W. R. McKinnon, and M. Giroud, Origin of the 110-K superconducting transition in the Bi-Sr-Ca-Cu-O system [J]. Phys. Rev. B. 1988,38:2504-2508.
[11] Y. J. Uemura et al., Universal Correlations between Tc and ns/m* (Carrier Density over Effective Mass) in High-Tc Cuprate Superconductors[J]. Phys. Rev. Lett. 1989, 62:2317-2320.
[12] A. Tokiwa-Yamamoto, K.Isawa, M. Itoh, et al., Composition, crystal structure and superconducting properties of Hg-Ba-Ca-Cu-O superconductors [J]. Physica C, 1993, 216:250-256.
[13]Chu,C.W., L.Gao, F.Chen, Z.J. Huang, R.L.Meng and Y.Y.Xue, Superconductivity above 150K in HgBa2Ca2Cu3O8+δat high pressures, Nature, 1993, 365:323-325.
[14] Zhi Yuan Shen, High-Temperature Superconducting Microwave Circuits, Artech House,1994.
[15] Yoichi Kamihara, Takumi Watanabe, Masahiro Hirano, and Hideo Hosono, Iron-Based Layered Superconductor La[O1-xFx]FeAs (x = 0.05?0.12) with Tc = 26 K[J], J. Am. Chem. Soc., 2008, 130 (11), pp 3296–3297
[16] Hai-Hu Wen, Gang Mu, Lei Fang, Huan Yang, Xiyu Zhu, Superconductivity at 25 K in hole doped La1-xSrxOFeAs, Europhysics Letters, 2008,82:17009.
[17] W. Meissner, R. Ochsenfeld,“A new effect in penetration of superconductors”, Die. Naturwissenschaften, 1933,21, 787.
[18] S. Isber and C. Madi, Superconducting properties of chromium Cr-YBCO grown by Pulsed Laser Deposition [J]. Journal of Physics: Conference Series, 2008, 97:012130.
[19] L Molina1, S Engel, K Knoth, R Hühne, B Holzapfel, O Eibl, Grain growth and biaxial texture of chemically deposited La2Zr2O7 buffer layers for YBCO-coated conductors [J]. Journal of Physics: Conference Series, 2008, 97:012-108.
[20] C. H. Stoessel, R. F. Bunshah, S. Prakash, H. R. Fetterman, Thin-Film Processing of High-To Superconductors[J]. Journal of Superconductivity, 1993, 6:1-17
[21] M Beshkova , B Blagoev , D Kovacheva , G Mladenov and T Nurgaliev, Deposition and characterization of high temperature superconductingYBa2Cu3O7-δfilms obtained by DC magnetron sputtering and thermal annealing modification [J], Journal of Physics: Conference Series, 2008, 113:012021.
[22] K. Ohki, N. Iwashit, K. Kikunag, T. Okud , K. Obar and N. Terad, Sputter Synthesis of c-axis YBCO Films with Excellent urface Smoothness and Fabrication of Sandwich type Junctions with Interface Engineered Barrier [J]. Journal of Physics: Conference Series, 2006, 43, 1159-1162.
[23] E. Gilioli, M. Baldini, M. Bindi, F. Bissoli, F. Pattini, S. Rampino, S. Ginocchio, A. Gauzzi, M. Rocca and S. Zannella, Co-evaporated YBCO/doped-CeO2/Ni-W coated conductors oxygen improved using a supersonic nozzle [J]. Physica C, 2007, 463-465:609-614.
[24]胡倾宇,路荣涛,郭玉良,用三源热共蒸发法制备的二十厘米长涂层导体及其显微结构[J].低温物理学报,2005, 27 (5): 789-773.
[25] H.Kinder, P.Berberich, B.Utz and W.Prusseit, Double sided YBCO films on 4" substrates by thermal reactive evaporation [J]. IEEE trans. Appl. Supercond., 1995, 5(2):1575.
[26] J.-K. Choi, B.-H. Jun and C.-J. Kim, Fabrication of YBCO coated conductors by MOCVD method using various templates [J]. Physica C 445-448 (2006): 521-524
[27] N. Amemiya, O. Maruyama, M. Mori, N. Kashima, T. Watanabe, S. Nagaya, Y. Shiohara, Lateral Jc distribution of YBCO coated conductors fabricated by IBAD/MOCVD process [J]. Physica C, 2006, 445-448:712-716
[28] Gustav Plesch, Peter Billik, Alexander Cigáň, Ján Maňka, YBa2Cu3O7 melt textured thick films grown by infiltration process on YSZ substrate prepared by sol-gel method [J]. Journal of Alloys and Compounds, 2008, 461:61-65.
[29] Ibrahim Halil Mutlu, Hediye Acun, Erdal Celik, Hasan Turkmen, Preparation of YBa2Cu3O7-x superconducting solutions and films from alkoxide-based precursors using sol-gel method and investigation of their chemical reaction mechanisms [J]. Physica C, 2007, 451:98-106.
[30] S Ghalsasi, Y X Zhou, J Chen, B Lv and K Salama, MOD multi-layer YBCO films on single-crystal substrate [J]. Supercond. Sci. Technol., 2008, 21 (4):045015.
[31] N Mori, M Mukaida, R Teranishi, K Yamada, T Tanaka and K Tada, Crystal growth process of Y123 film fabricated by modified TFA-MOD process [J]. J. Phys.: Conf. Ser., 2008, 97:012061.
[32] R. A. Hawsey , D. K. Christen, Progress in research, development, and pre-commercial deployment of second generation HTS wires in the USA[J] , Phys. C 445-448(2006) 488
[33] Donald U. Gubser, Superconducting motors and generators for naval applications[J], Physica C, 2003, 392-396:1192-1195.
[34] R.J. Abraham, D. Das, A. Patra, Automatic generation control of an interconnected hydrothermal power system considering superconducting magnetic energy storage, Electrical Power and Energy Systems[J], 2007, 29(8):571-579.
[35]H.G. Cheon, D.S. Kwag, J.H. Choi, S.H. Kim, The insulation design for transmission class HTS transformer with continuous disk winding [J]. Physica C, 2007, 462-465:1218-1222.
[36]尹哲胜,魏斌,曹必松,郭旭波,张晓平,何文俊,何山,郜龙马,朱美红,高葆新,一种800MHz无线通信用高温超导滤波器的研究,低温物理学报[J],2006, 28(3):272-274.
[37] Y. Shimazu, T. Niizeki, Y. Wada, Fabrication and characterization of a switchable flux transformer using a DC-SQUID[J], Physica C, 2006, 445-448:971-974.
[38] A.M. Zagoskin, d-Wave superconductors and quantum computers[J], Physica C, 2002, 368(1-4):305-309.
[39] A. Ignatiev, Q. Zhong, P.C. Chou, X. Zhang, J.R. Liu and W.K. Chu, 'Large Jc Enhancement by Ion-irradiation for Thick YBCO Films Prepared by Photo-assisted MOCVD,' Applied Phys Letters 1997, 70:1474.
[40] A.Ignative, P.C.Chou, Yimin Chen,Xin Zhang, Z.Tang“Coated ConductorDevelopment by Photo-Assisted MOCVD Growth of YBCO Thick Films and Buffer Layers”Physica C, 2000, 341-348, 2309.
[41] H.M. Manasevit, Single-crystal gallium arsenide on insulating substrates[J]. Appl. Phys. Lett. 1968, 12(4):156-159.
[42] H.M. Manasevit and W. I. Simpson, The Use of Metal-Organics in the Preparation of Semiconductor Materials[J]. J. Electrochem. Soc. 1969, 116(12):1725-1732.
[43] R. Singh, F. Radpour, P. Chou, Comparative study of dielectric formation by furnace and rapid isothermal processing[J], J. Vac. Sci. Technol. 1989,A 7(3):1456-1460.
[44] R. Singh, P. Chou, F. Radpour, A. J. Nelson and H. S. Ullal, Oxidation of tin on silicon substrate by rapid isothermal processing[J], J. Appl. Phys. 1989, 66(6):2381-2387.
[45]林良真,张金龙,李传义,夏平畴,杨乾声,超导电性及其应用,北京工业大学出版社[M],1998.
[46] P.C. Chou, Q. Zhong, Q.L. Li, K. Abazajian, A. Ignatiev, C.Y. Wang, E.E. Deal, J.G. Chen, Optimization of Jc of YBCO thin films prepared by photo-assisted MOCVD through statistical robust design[J], Physica C, 1995, 254(1-2):93-112.
[47]杜希文,原续波,材料分析方法[M],天津大学出版社,2006.
[48]李国兴,以光辅助MOCVD法制备大面积YBa2Cu3O7-x高质量高温超导外延膜的初步研究[D],长春:吉林大学,2008
[49]方秀军,采用光辅助MOCVD方法生长YBCO薄膜和厚膜及其特性研究[D],长春:吉林大学,2008
[50] Xiujun Fang, Guoxing Li, Shanwen Li, Lei Zhao, Wancheng Li, Baolin Zhang, Guotong Du, Penchu Chou, Hui Li, Ran Zuo, Lin He, Chinping Chen, The effect of susceptor inclination angle on the quality of superconducting YBCO thin films prepared by a photo-assisted MOCVD system[J],Physica C,2008,468(14):1053-1059
[51] Guoxing Li,Xiujun Fang,Lei Zhao,Shanwen Li,Zhongmin Gao,WanchengLi,Jingzhi Yin,Baolin Zhang,Guotong Du,Penchu Chou,Lin He,Chinping Chen,Precisely determined temperature window size for the growth of high quality c-axis oriented YBCO films by photo-assisted MOCVD[J],Physica C,2008,468(21):2213-2218
[52] Q.Zhong, P.C.Chou, Q.L.Li, G.S.Taraldsen, A.Ignatiev, High-rate growth of purely a-axis oriented YBCO high-Tc thin films by photo-assisted MOCVD. Physica C,1995, 246(3-4):288-296.
[53] Jianming Zeng, Jie Lian, Luming Wang, P.C.Chou, Alex Ignatiev,“HRTEM characterization of Yba2Cu3O7-δthick films on LaAlO3 substrates”Physica C 2004, 405: 127.
[54] D.W.MURPHY,D.W.JOHNSON JR.,S.JIN,R.E.HOWARD,Processing Techniques for the 93K Superconductor Ba2YCu3O7 [J].Science, 1988,241(4868):922-930
[55] R.H.Hammond and R.Bormann, Correlation between the in situ growth conditons of YBCO thin films and the thermodynamic stability criteria, Physica C, 1989,162-164(1):703-703.
[56]杨德林,孟令启,李志成,胡行,郭益群,高之爽,YBa2Cu3O 7- x的高温氧呼吸特性[J],低温与超导,2001,29(1):48-50
[57] Zhili Zhu, Delin Yang, Yiqun Guo, Qingqing Liu, Zhishuang Gao, Xing Hu, Oxygen desorption activation energy of YBa2Cu3O7-x btained by thermogravimetry with dierent heating rates, Physica C, 2002, 383: 169–174