有机聚合物波导及电光开关的制备与研究
|
摘要
当今社会光纤通讯技术的飞速发展,离不开光分插复用(OADM)和光交叉互联(OXC)模块的应用研究。光开关作为OADM和OXC的核心器件,在整个光纤通信系统中起着上下路信号和不同光路间交叉互联的重要作用。所以研制速度更快、性能更高、成本更低的光开关及其开关阵列对于光纤通信技术具有重要的意义。
有机聚合物具有介电常数小、调制速率高、非线性系数大、成本低廉、易于加工等许多优点,在现代通信技术中占有着广泛的应用,被很多学者预测为目前最具有发展前景的一类新型非线性光学材料。
本论文围绕极化聚合物波导及其电光开关的制备与测试展开研究。首先利用基本的半导体平面工艺技术制备了加载条形结构的M-Z干涉仪波导,并对其近场输出光斑进行了测试。然后又自主合成了交联型DR1/SU-8极化聚合物材料,利用这种材料制备了完整的极化聚合物电光开关,获得了很好的开关特性。为了得到性能更好的极化聚合物电光开关,本论文提出了可行的改良方案。
Today, as the rapid development of optical communication technology, more and more electro-optic switches are demanded in communication. Currently high-speed Dense Wavelength Division Multiplexing (DWDM) optical communication network technology has took a great part in high-speed communication. In order to fit the high requirements of communication, new types of optoelectronic devices are required to proceed. More and more attention focuses on the high-speed electro-optical switches which are a key component in optical communication system.
Polymer waveguide devices are studied all over the world with its merits that inorganic materials and traditional semiconductor materials do not have. Organic polymer has a low dielectric constant, high electro-optic coefficient, low loss, simple process, and low cost. So it is the best choice of material of higher-speed electro-optical device.
The main work of this thesis focuses on the poled polymer waveguide and electro-optic switch, which is summarized as follows:
The first part analyses the importance and value of electro-optical switch which is one of the key components of optical switches widely used in the optical communication technology.
Second part focuses on theory the Mach-Zehnder type optical switch. The working principle and application of the various types of optical switching are referred in this part.
Third, two types of electro-optic polymer materials were synthesized and characterized and its properties were optimized. According to the understanding of sol-gel technology organic / inorganic hybrid DR1/SiO2/TiO2 optic materials were synthesized. Details of the fabrication process of this material are the main comment of this part.
Then two types of waveguide are presented utilizing these two electro-optic materials. A strip loaded optical waveguides, such as M-Z, 1×8 branches, 1×5 branches, Y branches, 3×3MMI, etc, were designed and fabricated respectively using of organic/inorganic hybrid materials, and their optical properties are tested through the measurement instrument. And a rectangular structure waveguide and polymer electro-optic switch were designed and fabricated with cross-linked DR1/SU-8 material. In the process, spin-coating, photolithography, vacuum deposition, etching, and other basic semiconductor planar process, combined with high-temperature corona poling technique are applied. Electrode is the final step of the process of electro-optic switch the principles and the fabrication process of which are introduced in the thesis.
Finally, we choose a sample to test, and analysis the test results in the detail. The electro-optical switch test system is set up including light source, observation and data processing systems in the laboratory. In the test, we apply the electrode and waveguide with a DC bias and the square wave signal respectively. The best result in the thesis is the largest response frequency electro-optic switch with 10MHz in which the curve wave of signal response in the oscilloscope still is very clear, and the switching time of the optical switch is about 10 nanoseconds.
有机聚合物具有介电常数小、调制速率高、非线性系数大、成本低廉、易于加工等许多优点,在现代通信技术中占有着广泛的应用,被很多学者预测为目前最具有发展前景的一类新型非线性光学材料。
本论文围绕极化聚合物波导及其电光开关的制备与测试展开研究。首先利用基本的半导体平面工艺技术制备了加载条形结构的M-Z干涉仪波导,并对其近场输出光斑进行了测试。然后又自主合成了交联型DR1/SU-8极化聚合物材料,利用这种材料制备了完整的极化聚合物电光开关,获得了很好的开关特性。为了得到性能更好的极化聚合物电光开关,本论文提出了可行的改良方案。
Today, as the rapid development of optical communication technology, more and more electro-optic switches are demanded in communication. Currently high-speed Dense Wavelength Division Multiplexing (DWDM) optical communication network technology has took a great part in high-speed communication. In order to fit the high requirements of communication, new types of optoelectronic devices are required to proceed. More and more attention focuses on the high-speed electro-optical switches which are a key component in optical communication system.
Polymer waveguide devices are studied all over the world with its merits that inorganic materials and traditional semiconductor materials do not have. Organic polymer has a low dielectric constant, high electro-optic coefficient, low loss, simple process, and low cost. So it is the best choice of material of higher-speed electro-optical device.
The main work of this thesis focuses on the poled polymer waveguide and electro-optic switch, which is summarized as follows:
The first part analyses the importance and value of electro-optical switch which is one of the key components of optical switches widely used in the optical communication technology.
Second part focuses on theory the Mach-Zehnder type optical switch. The working principle and application of the various types of optical switching are referred in this part.
Third, two types of electro-optic polymer materials were synthesized and characterized and its properties were optimized. According to the understanding of sol-gel technology organic / inorganic hybrid DR1/SiO2/TiO2 optic materials were synthesized. Details of the fabrication process of this material are the main comment of this part.
Then two types of waveguide are presented utilizing these two electro-optic materials. A strip loaded optical waveguides, such as M-Z, 1×8 branches, 1×5 branches, Y branches, 3×3MMI, etc, were designed and fabricated respectively using of organic/inorganic hybrid materials, and their optical properties are tested through the measurement instrument. And a rectangular structure waveguide and polymer electro-optic switch were designed and fabricated with cross-linked DR1/SU-8 material. In the process, spin-coating, photolithography, vacuum deposition, etching, and other basic semiconductor planar process, combined with high-temperature corona poling technique are applied. Electrode is the final step of the process of electro-optic switch the principles and the fabrication process of which are introduced in the thesis.
Finally, we choose a sample to test, and analysis the test results in the detail. The electro-optical switch test system is set up including light source, observation and data processing systems in the laboratory. In the test, we apply the electrode and waveguide with a DC bias and the square wave signal respectively. The best result in the thesis is the largest response frequency electro-optic switch with 10MHz in which the curve wave of signal response in the oscilloscope still is very clear, and the switching time of the optical switch is about 10 nanoseconds.
引文
[1]Peng Jihu, Li Dejie, Shen Lei, Wang Weidong, A novel BOA type polarization independent optical switch[R].1990 IEEE Region 10 Conference on Computer and Communication Systems, IEEE TENCON'90. 1990, l, 128-129.
[2]W.K. Burns, T.G. Gialliorenzi, R.P. Moeller and E.J. West. Inter fero metric waveguide modulator with polarization-independent operation[J].Appl.Phys.Lett., 1978,33(11):944-947.
[3]董小伟,裴丽,李彬,简伟,简水生.有机聚合物电光调制器[J].光子技术. 2003.(1):11-14.
[4]程晓飞,方来付,王健全等.光开关技术综述[J].通讯世界,2001,7:11 16.
[5]E. V. Tomme, P. E. Lagasse. Integrated optic devices based on nonlinear optical polymers[J].IEEE. Quantum Electronics, 1991, 27(3):778-786.
[6]L. R. Dalton. Polymeric electro-optic modulators[J]. Chemistry & Industry, 1997, 7:510-519.
[7]张旭萍,鲁学军,史赞,Ray T. Chen.聚合物波导电光调制器[J].光电子技术,2001,22(1): 5-10.
[8]宋琼,吴伯翰,张兵等.高速聚合物电光调制器的进展[J].激光与红外. 2003.33(1): 13-16.
[9]Xu J , Zhou L , Thakur M. Electro-optic modulation using an organic single crystal film in a Fabry-Perot cavity[J].Appl.Phys.Lett.,1998,72(2): 1532154.
[10]刘骋,李勇.高速光调制器[J].光通信研究,2003,3:43-46.
[11]杨斌,王磊,裴丽.新型电光调制器[M].科技资讯, 2006, 35: 175-176.
[12]于荣金.集成光学和光子学[J].光电子激光, 1998, 9(2)2: 162-165.
[13]Eldering C A, Brinkley P F. Electro-optic polymer materials anddevices for global optical interconnects[J]. Appl.Opt., 1990,29(8): 114221145.
[14]马春生,刘式墉.光波导模式理论[M].长春:吉林大学出版社,2006,417.
[15]高磊.聚合物平面波导电光开关的设计[M].长春:吉林大学电子科学与工程学院,2007.
[16]吴重庆.光波导理论[M].北京:清华大学出版社. 2000.
[17]王小龙,余金中.光波导开关的最新进展[J].物理,2003,32(3):165 166.
[18]J.W.Wu. Birefringent and electro-optic effects in poled polymer films: steady-state and transient properties [J]. J. Opt. Soc. Am. B., 1991, 8(1): 142-152.
[19]张兵,吴伯瑜.聚合物脊形光波导设计[J].光电子激光,2003,14(5),445-448.
[20]李梅.极化聚合物的电光特性研究及其应用[D].长春:吉林大学,2008:22.
[21]B. Bortnik, Y. Hung, H. Tazawa. Electro-optic polymer ring resonator modulation up to 165GHz[J].Selected Topics in Quantum Electronics, 2007, 13(1): 104-110.
[22]Larry Dalton. Nonlinear Optical Polymeric Materials: From Chromophore Design to Commercial Applications[J].Advances in Polymer Science,2002,158:261-263.
[23]W. Wensheng, C. Datong. Optical heterodyne detection of 60GHz electro-optic modulation from polymer waveguide modulators [J].Appl.Phys.Lett.,1995,67(13): 1806-1808.
[24]揣晓红.有机/无机杂化非线性材料的合成与调制器波导器件的制备[R].吉林大学博士后出站报告,2003: 40-41.
[25]李彬.溶胶-凝胶法及其在无机材料合成中的应用[J].材料科学与工程学报,1990(02):26-30.
[26]黄剑锋.溶胶-凝胶原理与技术[M].北京:化学工业出版社,2005,58.
[27]孙杰.基于加载条形光波导的极化聚合物调制器的研究[D].长春:吉林大学,2009:22.
[28]单智博.基于极化聚合物DR1_SU_8的电光开关基础研究[M].长春:吉林大学,2009
[29]W. Yuan, S. Kim, G. Sadowy, C. Zhang, C. Wang, W.H. Steier and H.R. Fetterman , Polymeric electro-optic digital optical switches with low switching voltage[J]. Electronics Letters,2004, 40(3): 195-197.
[30]Ellsworth, M.W. Novak, B.M. Mutually Interpenetrating Inorganic-Organic Networks. New Routes into Non-Shrinking Sol-Gel Composite Materials[J]. J.Am.Chem.Soc., 1991, 113: 2756.
[31]D. Jungbauer, B. Reck, R. Twieg, et al. Highly efficient and stable nonlinear optical polymers via chemical cross-linking under electric field[J].Applied Physics Letters.,1990, 56(26): 2610-2612.
[32]高伟南.极化聚合物电光开关的基础研究[D].长春:吉林大学,2009.
[33]鹿飞,梁琨,宋琼,等.聚合物电光调制器行波电极系统[J].光电子激光, 2005, 16: 267-270.
[34]D. Chen, H. R. Fetterman, W. Wang, Y. Shi, Demonstration of 110 GHz electro-optic polymer modulators[J]. Appl.Phys.Lett., 1997, 70: 3335.
[2]W.K. Burns, T.G. Gialliorenzi, R.P. Moeller and E.J. West. Inter fero metric waveguide modulator with polarization-independent operation[J].Appl.Phys.Lett., 1978,33(11):944-947.
[3]董小伟,裴丽,李彬,简伟,简水生.有机聚合物电光调制器[J].光子技术. 2003.(1):11-14.
[4]程晓飞,方来付,王健全等.光开关技术综述[J].通讯世界,2001,7:11 16.
[5]E. V. Tomme, P. E. Lagasse. Integrated optic devices based on nonlinear optical polymers[J].IEEE. Quantum Electronics, 1991, 27(3):778-786.
[6]L. R. Dalton. Polymeric electro-optic modulators[J]. Chemistry & Industry, 1997, 7:510-519.
[7]张旭萍,鲁学军,史赞,Ray T. Chen.聚合物波导电光调制器[J].光电子技术,2001,22(1): 5-10.
[8]宋琼,吴伯翰,张兵等.高速聚合物电光调制器的进展[J].激光与红外. 2003.33(1): 13-16.
[9]Xu J , Zhou L , Thakur M. Electro-optic modulation using an organic single crystal film in a Fabry-Perot cavity[J].Appl.Phys.Lett.,1998,72(2): 1532154.
[10]刘骋,李勇.高速光调制器[J].光通信研究,2003,3:43-46.
[11]杨斌,王磊,裴丽.新型电光调制器[M].科技资讯, 2006, 35: 175-176.
[12]于荣金.集成光学和光子学[J].光电子激光, 1998, 9(2)2: 162-165.
[13]Eldering C A, Brinkley P F. Electro-optic polymer materials anddevices for global optical interconnects[J]. Appl.Opt., 1990,29(8): 114221145.
[14]马春生,刘式墉.光波导模式理论[M].长春:吉林大学出版社,2006,417.
[15]高磊.聚合物平面波导电光开关的设计[M].长春:吉林大学电子科学与工程学院,2007.
[16]吴重庆.光波导理论[M].北京:清华大学出版社. 2000.
[17]王小龙,余金中.光波导开关的最新进展[J].物理,2003,32(3):165 166.
[18]J.W.Wu. Birefringent and electro-optic effects in poled polymer films: steady-state and transient properties [J]. J. Opt. Soc. Am. B., 1991, 8(1): 142-152.
[19]张兵,吴伯瑜.聚合物脊形光波导设计[J].光电子激光,2003,14(5),445-448.
[20]李梅.极化聚合物的电光特性研究及其应用[D].长春:吉林大学,2008:22.
[21]B. Bortnik, Y. Hung, H. Tazawa. Electro-optic polymer ring resonator modulation up to 165GHz[J].Selected Topics in Quantum Electronics, 2007, 13(1): 104-110.
[22]Larry Dalton. Nonlinear Optical Polymeric Materials: From Chromophore Design to Commercial Applications[J].Advances in Polymer Science,2002,158:261-263.
[23]W. Wensheng, C. Datong. Optical heterodyne detection of 60GHz electro-optic modulation from polymer waveguide modulators [J].Appl.Phys.Lett.,1995,67(13): 1806-1808.
[24]揣晓红.有机/无机杂化非线性材料的合成与调制器波导器件的制备[R].吉林大学博士后出站报告,2003: 40-41.
[25]李彬.溶胶-凝胶法及其在无机材料合成中的应用[J].材料科学与工程学报,1990(02):26-30.
[26]黄剑锋.溶胶-凝胶原理与技术[M].北京:化学工业出版社,2005,58.
[27]孙杰.基于加载条形光波导的极化聚合物调制器的研究[D].长春:吉林大学,2009:22.
[28]单智博.基于极化聚合物DR1_SU_8的电光开关基础研究[M].长春:吉林大学,2009
[29]W. Yuan, S. Kim, G. Sadowy, C. Zhang, C. Wang, W.H. Steier and H.R. Fetterman , Polymeric electro-optic digital optical switches with low switching voltage[J]. Electronics Letters,2004, 40(3): 195-197.
[30]Ellsworth, M.W. Novak, B.M. Mutually Interpenetrating Inorganic-Organic Networks. New Routes into Non-Shrinking Sol-Gel Composite Materials[J]. J.Am.Chem.Soc., 1991, 113: 2756.
[31]D. Jungbauer, B. Reck, R. Twieg, et al. Highly efficient and stable nonlinear optical polymers via chemical cross-linking under electric field[J].Applied Physics Letters.,1990, 56(26): 2610-2612.
[32]高伟南.极化聚合物电光开关的基础研究[D].长春:吉林大学,2009.
[33]鹿飞,梁琨,宋琼,等.聚合物电光调制器行波电极系统[J].光电子激光, 2005, 16: 267-270.
[34]D. Chen, H. R. Fetterman, W. Wang, Y. Shi, Demonstration of 110 GHz electro-optic polymer modulators[J]. Appl.Phys.Lett., 1997, 70: 3335.