用户名: 密码: 验证码:
电解射流—激光复合加工技术基础研究
详细信息    本馆镜像全文|  推荐本文 |  |   获取CNKI官网全文
摘要
电解射流-激光复合加工技术是一项同时具备激光加工高效率及电解射流高表面质量的新型复合加工技术。其特点是借助电解射流加工“在线”消除激光加工产生的再铸层、残余应力、微裂纹,由于激光对待加工部位的辐照,使得电解液局部温度升高,进一步促进该区域的电化学作用,加强了电解射流加工的定域性,并伴随热化学及其它作用的影响去除材料。本文针对这项复合加工技术进行了以下研究:
     (1)深入研究激光在介质中的传输特性,并对激光在空气、纯水和中性盐溶液中加工的力学效应进行了试验研究。试验结果表明:激光在短距离的液体介质中作用于靶材的力学效应是空气条件下的3倍以上,有利于去除金属熔化物;且激光在精细过滤后的工业盐溶液中传输可以达到与在纯水中接近的衰减效果。
     (2)基于激光在中性盐溶液中衰减特性的研究、激光在射流中的传输原理和射流的稳定原理,并结合CFD仿真技术对喷射耦合腔体及喷嘴的流场特性进行了流体动力学仿真,研制了专用的电解射流-激光复合加工系统。
     (3)利用电解射流-激光复合加工系统进行了复合加工成形规律研究。首先对电解射流加工进行了相关工艺试验,初步研究了各加工参数对加工效率和加工质量的影响,分析了电解射流加工的成形规律;其次,在电解射流加工试验的基础上,对脉冲电解射流-激光复合加工进行了试验研究,研究结果表明:复合加工孔孔壁具有较高的表面质量,基本无再铸层、微裂纹及热影响区等缺陷。
     通过上述理论分析和试验研究,证实了电解射流-激光复合加工的可行性,为电解射流-激光复合加工工艺的进一步发展提供了试验依据。
Hybrid processing of electrochemical jet machining (EJM) and laser beam machining (LBM) is a new processing method, which obtains high efficiency of LBM and high surface quality of EJM. The course of EJM-LBM are that: the recast layer, heat affected zone and microcrack caused by LBM are removed by EJM, and radicalization of laser can accelerate the electrochemistry effect and enhance the localization of EJM, and besides LBM and electrochemical machining , action of thermochemistry and other effect may remove the material. The main research contents are as follows:
     (1) The transmission properties of laser in medium are investigated, and experimental research on laser-induced mechanical effect in air, pure water and electrolyte is carried out. The results indicate that: laser-induced mechanical effect of metal target in the short distance liquid is three times more than that in air, and this is beneficial to remove the melt; the transmission effect of laser in the filtrated electrolyte approaches that in pure water.
     (2) Based on the properties of laser attenuation in the electrolyte, the transmission properties of laser in jet and principle of jet stability, the special EJM-LBM test system is designed and manufactured, and the fluid dynamics properties of coupling jet cavity and nozzle are simulated by CFD software.
     (3) The experimental study of shaping law is carried out by using the EJM-LBM test system,. First, the basic EJM experiment is conducted, and the influences of the machining parameters on surface quality and machining efficiency are investigated, and the shaping law of EJM is analyzed. Second, based on the experimental study of EJM, the basic experiment of EJM-LBM is carried out, and the results indicate that: the cliffs of holes obtain high surface quality and the recast layer, heat affected zone and micro-cracking are eliminated basically.
     According to the above theoretical analysis and experimental investigation, the feasibility of EJM-LBM is verified. The research provides the experimental foundation for the further development.
引文
[1] T.Masuzawa.Three-Dimensional Micro machining by Machine Tools[J].Annuals of the CIRP. 1997, 46(2):621-628
    [2] Workshop on Micro/ Meso-Mechanical Manufacturing (M4).WorkshopReport.Northwestern University, Evanston, Illinois,US,2000.
    [3] E.Wills.Surface Finish in Relation to Cylinder Liners.Wear,1986,109(1-4):p.351-366.
    [4] L.Li,C.Diver,J.Atkinson,Sequential laser and EDM micro-drilling for next generation fuel injection nozzle manufacture[J].Annuals of the CIRP,2006,55(1):179-182.
    [5] Z.Yu, X.Hu, K.P.Rajurkar. Influence of debris accumulation on material removal and surface roughness in micro ultrasonic machining of silicon.Annuals of the CIRP,2006,55(1):201-204.
    [6]郭文渊,王茂才,张晓兵.镍基超合金激光打孔再铸层及其控制研究进展[J] .激光杂志,2003,24(4):1-3.
    [7] A.J.Murray, J.R.Tyrer. Nd:YAG laser drilling of 8.3mm thick partially stabilizedtetragonal zirconia-control of recast layer microcracking using localized heating techniques[J],Journal of Laser Applications,1999,11(4):179-184.
    [8]施文轩,张明岐,殷旻.电液束加工工艺的研究及其发展[J].航空制造技术,2001(6):25-27
    [9]施文轩,张明岐等.电射流加工工艺研究及发展.电加工与模具[J],2001. 1: 36-39.
    [10]刘明,谢常青,王从舜等编著.微细加工技术[M].北京:化学工业出版社,2004.
    [11] K.Takahata, YB.Gianchandani. Batch Mode Micro-EDM for HIGH-density and High-thoughput micromachining[J].Journal of Microelectromechanical Systems, 2002, 11(4): 72-75.
    [12]赵万生,顾林等.微细电加工的最新发展与应用前景[A] .中国机械工程学会编,2005年中国机械工程学会年会论文集[C],重庆:中国机械工程学会,2005:4-9.
    [13]徐惠宇,朱荻.微细群缝的精密电解加工研究[J] .中国机械工程,2004,15 (21) 1912-1915.
    [14]朱荻,王明环,明平美,等.微细电化学加工技术[J] .纳米技术与精密工程,2005,3 (2): 151- 155.
    [15] R.Schuster, V.Kirchner, P.Allongue,et,al.Electrochemical Micromachining[J].Science, 2000,289: 98-101.
    [16]张朝阳,朱荻,王明环.纳秒脉冲微细电化学加工的理论及试验[J] .机械工程学报,2007, 43 (1) : 208-213.
    [17] J.Kozak, K.P.Rajurkar.Selected problems of micro-electrochemical machining[J].Journal ofMaterials Processing Technology.2004, 14:426-431.
    [18]巴瑞璋,张晓兵.激光加工密集群孔技术[J].航空制造技术,2003,7:68-71.
    [19]潘开林,陈子辰,傅键中.激光微细技工技术及其在MEMS为制造中的应用[J].制造技术与机床,2002,3:15-19.
    [20]朱荻,张朝阳等.微细电化学加工技术的研究与发展[A].中国机械工程学会编,2005年中国机械工程学会年会论文集[C],重庆:中国机械工程学会,2005:46-54.
    [21] Shang-Liang Chen. The effects of high-pressure assistant-gas flow on high-power CO2 laser cutting[J]. Journal of Materials Processing Technology, 199,88(1-3):57-66.
    [22]王智勇,陈铠,TH.Beck,等.辅助气体对激光打孔的影响[J].激光杂志,2000,21(6):44-46.
    [23] A.Kruusing. Underwater and water-assisted laser processing: Part 1—general features, steam cleaning and shock processing [J]. OPTICS and LASER ENGINEERING,41 (2004) 307–327
    [24]朱波,齐立涛,王扬.水辅助激光加工技术的实验研究[J].现代制造工程,2003, (12).
    [25] A.Kruusing,Seppo Leppavuori,Antti Uusimaki,et al. Micromachining of magnetic materials[J]. Sensor and Actuators A:Physical,1999,74(1-3):45-51.
    [26]林锦章.短脉冲激光水下打孔的研究. [硕士学位论文].武汉:华中科技大学,2003.
    [27]徐荣青,陈笑,沈中华,等.激光水下打靶力学效应的测试与分析[J].光电子·激光,2004,15, (5):599-603.
    [28]徐荣青,陈笑,沈中华,等.水中薄片激光打孔反常现象的分析[J].高压物理学报,2004,18(2):130-134.
    [29]陈笑,徐荣青,沈中华,等.激光对水和空气中靶材的作用机制研究[J].南京理工大学学报,2004,28(3):248-252.
    [30]郭文有等主编.航空制造工程手册发动机叶片工艺分册[M].北京:航空工业出版社,1997.
    [31]张晓兵.改善激光加工Ni3Al基合金小孔质量的研究[J] .航空制造技术,2004(zl):126-128.
    [32]陈长军,郭文渊,王茂才,等.镍基超合金再铸层化学研磨去除的实验研究[J].燃气涡轮试验与研究,2004,17(3):44-50.
    [33] L.Li, C.Achara. Chemical assisted laser machining for the minimization of recast and heat affected zone[J],CIRP Annals–Manufacturing Technology,2004,53(1):175-178.
    [34] Zhu Xiaoshan,Choi,Jin-Woo, et al. A new laser micromachining technique using a mixed-mode ablation approach[J],Proceedings of the IEEE Micro Mechanical Systems. (MEMS), 2002:152-155.
    [35] T.M.Yue,W.S.Lau, et al. Ultrasonic-aided laser machining of AL/Cu based SiCp metal matrix composites[J],American Society of Mechanical Engineers,Petroleum Division (Publication) PD,Integrated Design and Manufacturing of Composites,1994,64(2):51-55.
    [36] W.S.Lau, T.M.Yue,M.Wang.Ultrasonic-aided laser drilling of aluminium-based metal matrix composites[J], CIRP Annals,1994,43(1):177-180.
    [37] A.J.Murray, J.R.Tyrer. Nd:YAG laser cutting and drilling of PSTZ-Influence of substrate heating temperature on recast layer microcracking[J],Journal of Laser Applications,1999,11(3):128-135.
    [38] B.N.Chichkov, C.Momma, S.Nolte, et al. Femtosecond, piosecond and nanosecond laser ablation of solid[J]. Applied Physics A-Materials Science & Processing,1996,(63):109-115.
    [39] X.Zhu,D.M.Villeneuve,A.Yu.Naumov,et al. Experimental study of drilling sub-10μm holes in thin metal foils with femtosecond laser pulses[J].Applied Surface Science,1999,152 (3-4):138-148.
    [40]何飞,程亚.飞秒激光微加工:激光精密加工领域的新前沿[J].中国激光,2007,5.
    [41] H.Huang, H.Y.Zheng, G.C.Lim. Femtosecond laser machining characteristics of Nitinol[J]. Applied Surface Science,2004,228(1-4):201-206.
    [42] B.Richerzhagen,M. Kutsuna,H. Okada,et al. Waterjet-guided Laser Processing[J].Industrial Laser Review,1997(08) .
    [43] Ochelio sibailly,John Manley,Bernold Richerzhagen. Mixng Laser and water[J].Application report,2003,12.
    [44] Bernold Richerzhagen. Chip singulation process with a water jet-guided laser[J]. Solid State Technology,2001,44(4):S25-S29.
    [45] C.F.Li,D.B.Johnson,R.Kovacevic. Modeling of waterjet guided laser grooving of silicon[J]. International Journal of Machine Tools&Manufacture,2003,43:925-936.
    [46]初杰成.水引导激光耦合机理及加工试验研究. [硕士学位论文].哈尔滨工业大学,2006.
    [47] Yang Wang, Ling Li, Lijun Yang, et al. Experimental research on water-jet guided laser processing[J]. Proceedings of the SPIE-The International Society for Opitcal Engineering, 2007, (6595):25.1-25.6.
    [48]余承业主编.航空制造工程手册特种加工分册[M].北京:航空工业出版社,1993.
    [49] Mohan.Sen, H S.Shan A review of electrochemical macro-to micro-hole drilling processes [ J ]. International Journal of Machine. Tools & Manufacture, 2005, (45):137~152.
    [50] Mohan Sen,H.S.Shan. Analysis of hole quality characteristics in the electro jet drilling process[J]. International Journal of Machine Tools&Manufacture.2005(45):1706-1716.
    [51] J. Kozak , J. P. Rajurkar, R. Balkrishna. Study of Electrochemical Jet Machining Process. Journal of Manufacturing Science and Engineering.[J]. 1996. 118:490-498.
    [52] Wataru Natsu, Tomone Ikeda, Masaori Kunieda.Generating complicated surface with electrolyte jet machining[J].Precision Engineering,2007,31(1):33-39.
    [53] Xiong Lu, Yang Leng. Electrochemical micromachining of titanium surfaces for biomedical applications[J].Journal of Materials Processing Technology,2005,169(2):173-178.
    [54]P.T.Pajak,A.K.M.Desilva,D.K.Harrison,J.A.Mcgeough.Precision and efficiency of laser assisted jet electrochemical machining[J]. Precision Engineering,2006(30):288-298.
    [55]P.T.Pajak,A.K.M.Desilva,J.A.Mcgeough,D.K.Harrison.Modelling the aspects of precision and efficiency in laser-assisted jet electrochemical machining(LAJECM) [J]. Journal of Materials Processing Technology,2004(149):512-518.
    [56]辛凤兰.高质量激光打孔技术的研究. [硕士学位论文].北京工业大学:2006.
    [57]关振中主编.激光加工工艺手册[M].北京:中国计量出版社,2005.
    [58]杨立军.四种难加工材料激光加热辅助切削技术研究.[硕士学位论文].哈尔滨工业大学2001.
    [59]左铁钏等.21世纪的先进制造-激光技术与工程[M].北京:科学出版社,2007.
    [60] D.Schuocker.Handbook of the Eurolaser Academy[M].Chapman&Hall,1998:534-536.
    [61]徐家文,云乃彰,王建业等.电化学加工技术-原理、工艺及应用[M].北京:国防工业出版社,2008.
    [62]王建业.高频窄脉冲电解加工的机理研究[J].华南理工大学学报(自然科学版),2002,30(1):6-11.
    [63]方韵和.分析化学[M].上海:同济大学出版社,1993.
    [64] G.A.Shafeev, A.V.Simakhin.Spatially confined laser-induced damage of Si under a liquid layer[J]. J.Appl.PhysA,1992,54.
    [65] G.M.Hale,M.R.Querry.Optical constants of water in the 2002nm to 2002μm wavelength region[J ] . Applied Optics 1973 , 12(3) :555 - 563.
    [66]张华,徐家文,王吉明,等.激光在中性盐溶液中传输特性的研究[J].应用激光,2008,28(4):301-305.
    [67]刘纯胜,张天序,李晓彤.无规则非均匀折射率场描述[J].红外与激光工程,2007,36(1):127-130.
    [68]廖延彪.光纤光学[M].北京:清华大学出版社,2000.
    [69] Gerd Keiser.光纤通信[M].李玉权,崔敏译.北京:电子工业出版社,2002.
    [70]张志伟,尹卫峰,温廷敦,等.溶液浓度与其折射率关系的理论和实验研究[J].中北大学学报(自然科学版),2009,30(3):281-285.
    [71] Frank Wagner, Ochélio Sibailly,Nandor Vágó,Rafal Romanowicz,Bernold Richerzhagen, Synova SA, Ecublens, CH.The Laser Microjet Technology-10 Years of Development (M401). 2003:1-9.
    [72]王福军编著.计算流体动力学分析—CFD软件原理与应用[M].北京:清华大学出版社,2004.
    [73]韩占忠,王敬,兰小平编.FLUENT:流体工程仿真计算实例与应用[M].北京:北京理工大学出版社,2004.
    [74]薛胜雄,黄汪平,陈正文,等著.高压水射流技术与应用[M].北京:机械工业出版社,1998:206.
    [75]何枫,谢峻石,杨京龙.喷嘴内部流道型线对射流流场的影响[J] .应用力学学报,2001,12:Vol.18,No.4.
    [76]航空制造工程手册总编委会.航空制造工程手册—发动机叶片工艺[M].北京:航空工业出版社,1998.
    [77]中国航空材料手册编辑委员会.中国航空材料手册第二卷—变形高温合金、铸造高温合金[M].北京:中国标准出版社,2002:235.
    [78]王新新,芦明泽,蒲以康.空气中大气压下均匀辉光放电的可能性[J].物理学报,2002,51(12) :2778-2785.
    [79]李成榕,王新新.大气压下的辉光放电[J].高电压技术,2002,28(120):41-43.
    [80]王晓臣,王宁会,李国锋.孔阳极大气压直流辉光放电研究[J].高电压技术,2007,33(2):50-54.

© 2004-2018 中国地质图书馆版权所有 京ICP备05064691号 京公网安备11010802017129号

地址:北京市海淀区学院路29号 邮编:100083

电话:办公室:(+86 10)66554848;文献借阅、咨询服务、科技查新:66554700