基于LTCC工艺的射频无源器件建模与研究
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摘要
低温共烧陶瓷（LTCC, Low Temperature Co-fired Ceramic）技术作为一种新型的封装技术，可将电路中的各种无源器件，如电容、电感、电阻、滤波器、耦合器、双工器等完全掩埋在介质中，以三维多层电路结构的形式实现小型化贴片产品，同时可与有源器件相结合用于研制各种高集成度、低成本的小功率射频与微波功能模块。掩埋在介质基板内的滤波器、耦合器、双工器等三维射频无源器件不同于常规的微带板无源器件，它们更能充分利用三维空间，这给小型化三维射频无源器件的发展开拓了新的研究方向。本文结合科研课题，对低通滤波器、带通滤波器、功率分配器、定向耦合器进行了深入研究，实现了多款不同功能的射频无源器件。作者的主要工作和成果可以概括为以下几点：
1.研究了LTCC无源元件建模方法，对LTCC单层电容、多层电容、平面螺旋电感进行建模、仿真和加工验证，分析了单层电容、多层电容、平面螺旋电感等各种结构的无源元件的使用方法和注意事项，通过设立变量的方法建立了传输线、电感、电容、毫米波直流偏置电路等关键无源元件的三维电磁场模型库。
2.研究了几种高/低通滤波器三维电磁场仿真模型。建立了五阶并联谐振、七阶并联谐振和九阶串联谐振低通滤波器三维电磁场模型。在分析高阶椭圆函数滤波器模型抑制度不高的情况下，提出了一种具有额外传输零点的并联谐振低通滤波器模型，同时建立了采用不同介电常数介质层的高通滤波器模型。
3.研究了具有传输零点SIR谐振带通滤波器和LC谐振带通滤波器的设计与建模方法，提出了一种改进型的SIR谐振带通滤波器和一种具有传输零点的T型带通滤波器，详细给出了基于LTCC技术的SIR谐振带通滤波器的设计方法，同时采用T型带通滤波器结构，设计实现了一款应用于北斗导航通讯系统的双通道带通滤波器。对部分设计实例中的带通滤波器进行了加工验证，测试结果与仿真结果基本一致。
4.研究了LTCC小型化功率分配器和定向耦合器三维层叠结构的实现方法，建立了小型化威尔金森功率分配器、90o电桥、90o串联型电桥、180o窄带巴伦、180o宽带巴伦三维电磁场仿真模型。其中功率分配器、90o串联型电桥、180o窄带巴伦器件采用3216的标准封装，可应用于1.616GHz北斗导航通讯系统和2.45GHz无线通讯系统。180o宽带巴伦，可应用于移动电视（CMMB）偶极子天线，解决手机终端内置CMMB天线的问题。
Low Temperature Co-fired Ceramic (LTCC, Low Temperature Co-fired Ceramic)technology, as a new packaging technology, can be used to bury a variety of passivecircuit components in the medium, such as capacitors, inductors, resistors, filters,couplers, diplexers etc. It can achieve the miniaturization of chip products by formingthree-dimensional multi-layer circuit, and can be used to develop the RF andmicrowave modules of highly integrated, low-cost and low-power by combining withsome active devices. Different from the conventional passive devices, the filters,couplers, diplexers and other three-dimensional RF passive components berried in themedium, need to make full use of three-dimensional space, which gives us a newresearch direction for the development of RF passive components. Taking into accountof research projects, the low-pass filters, band-pass filters, power dividers anddirectional couplers are studied in this paper. The main work and results of the authorcan be summarized as follows:
1. Based on the processing line of modeling method for LTCC passivecomponents are studied in this paper. Specifically, this paper models and simulates thesingle-layer capacitors, multi-layer capacitors, stub inductors, planar spiral inductorsand does some process validation to them. Then it analysis of the use methods andnotes to the single-layer capacitors, multi-layer capacitors, planar spiral inductors andother passive components of variable structures, and after that it establishes a HFSSmodel library of some key components through setting up some variables, whichcontain transmission lines, inductors, capacitors, DC bias circuits of millimeter-wave.
2. Some high/low pass filters are introduced in this paper. It first researches thethree-dimensional electromagnetic device models of LTCC low pass filters withfive-order parallel resonant, seven-order parallel resonant or nine-order series resonant.In the case of the inhibition of high-order elliptic function LTCC filter is not enough,this paper proposes a new LTCC low pass filter model of parallel resonant withadditional zeros. What’s more, it deals with some LTCC high pass filter models withdifferent medium of different dielectric constant.
3. The design and modeling methods of SIR and LC band pass filter are presentedin this paper. It not only puts forward an improved SIR band pass filter and a T-typeLC filer with transmission zeros, but also gives an detail design method of designingthe SIR band pass filter based on the LTCC technology. At the same time, it does process validation to some of the band pass filters in the previous design examples,and the text results are consistent with the simulation results, so that these band passfilters can be applied to modern communications systems.
4. The implementation methods of the miniaturized LTCC power dividers anddirectional couplers are described in this paper. In details, it designs thethree-dimensional electromagnetic models of the Wilkinson power divider,90°bridge,90°series-bridge,180°balun,180°broad band balun, and implements theminiaturization of them. Some devices, such as power divider,90°series-bridge,180°balun use a standard of3216package, so that they can be applied to the Beidounavigation system of1.616GHz and can be used for the wireless communicationsystem of2.45GHz. Mainly used in the mobile TV (CMMB) dipole antenna, the180°broad band balun solves the problem of built-in antenna in mobile TV (CMMB).
1.研究了LTCC无源元件建模方法，对LTCC单层电容、多层电容、平面螺旋电感进行建模、仿真和加工验证，分析了单层电容、多层电容、平面螺旋电感等各种结构的无源元件的使用方法和注意事项，通过设立变量的方法建立了传输线、电感、电容、毫米波直流偏置电路等关键无源元件的三维电磁场模型库。
2.研究了几种高/低通滤波器三维电磁场仿真模型。建立了五阶并联谐振、七阶并联谐振和九阶串联谐振低通滤波器三维电磁场模型。在分析高阶椭圆函数滤波器模型抑制度不高的情况下，提出了一种具有额外传输零点的并联谐振低通滤波器模型，同时建立了采用不同介电常数介质层的高通滤波器模型。
3.研究了具有传输零点SIR谐振带通滤波器和LC谐振带通滤波器的设计与建模方法，提出了一种改进型的SIR谐振带通滤波器和一种具有传输零点的T型带通滤波器，详细给出了基于LTCC技术的SIR谐振带通滤波器的设计方法，同时采用T型带通滤波器结构，设计实现了一款应用于北斗导航通讯系统的双通道带通滤波器。对部分设计实例中的带通滤波器进行了加工验证，测试结果与仿真结果基本一致。
4.研究了LTCC小型化功率分配器和定向耦合器三维层叠结构的实现方法，建立了小型化威尔金森功率分配器、90o电桥、90o串联型电桥、180o窄带巴伦、180o宽带巴伦三维电磁场仿真模型。其中功率分配器、90o串联型电桥、180o窄带巴伦器件采用3216的标准封装，可应用于1.616GHz北斗导航通讯系统和2.45GHz无线通讯系统。180o宽带巴伦，可应用于移动电视（CMMB）偶极子天线，解决手机终端内置CMMB天线的问题。
Low Temperature Co-fired Ceramic (LTCC, Low Temperature Co-fired Ceramic)technology, as a new packaging technology, can be used to bury a variety of passivecircuit components in the medium, such as capacitors, inductors, resistors, filters,couplers, diplexers etc. It can achieve the miniaturization of chip products by formingthree-dimensional multi-layer circuit, and can be used to develop the RF andmicrowave modules of highly integrated, low-cost and low-power by combining withsome active devices. Different from the conventional passive devices, the filters,couplers, diplexers and other three-dimensional RF passive components berried in themedium, need to make full use of three-dimensional space, which gives us a newresearch direction for the development of RF passive components. Taking into accountof research projects, the low-pass filters, band-pass filters, power dividers anddirectional couplers are studied in this paper. The main work and results of the authorcan be summarized as follows:
1. Based on the processing line of modeling method for LTCC passivecomponents are studied in this paper. Specifically, this paper models and simulates thesingle-layer capacitors, multi-layer capacitors, stub inductors, planar spiral inductorsand does some process validation to them. Then it analysis of the use methods andnotes to the single-layer capacitors, multi-layer capacitors, planar spiral inductors andother passive components of variable structures, and after that it establishes a HFSSmodel library of some key components through setting up some variables, whichcontain transmission lines, inductors, capacitors, DC bias circuits of millimeter-wave.
2. Some high/low pass filters are introduced in this paper. It first researches thethree-dimensional electromagnetic device models of LTCC low pass filters withfive-order parallel resonant, seven-order parallel resonant or nine-order series resonant.In the case of the inhibition of high-order elliptic function LTCC filter is not enough,this paper proposes a new LTCC low pass filter model of parallel resonant withadditional zeros. What’s more, it deals with some LTCC high pass filter models withdifferent medium of different dielectric constant.
3. The design and modeling methods of SIR and LC band pass filter are presentedin this paper. It not only puts forward an improved SIR band pass filter and a T-typeLC filer with transmission zeros, but also gives an detail design method of designingthe SIR band pass filter based on the LTCC technology. At the same time, it does process validation to some of the band pass filters in the previous design examples,and the text results are consistent with the simulation results, so that these band passfilters can be applied to modern communications systems.
4. The implementation methods of the miniaturized LTCC power dividers anddirectional couplers are described in this paper. In details, it designs thethree-dimensional electromagnetic models of the Wilkinson power divider,90°bridge,90°series-bridge,180°balun,180°broad band balun, and implements theminiaturization of them. Some devices, such as power divider,90°series-bridge,180°balun use a standard of3216package, so that they can be applied to the Beidounavigation system of1.616GHz and can be used for the wireless communicationsystem of2.45GHz. Mainly used in the mobile TV (CMMB) dipole antenna, the180°broad band balun solves the problem of built-in antenna in mobile TV (CMMB).
引文
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