激光扫描声学显微镜图象信号的研究
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摘要
激光扫描声学显微镜（Scanning Laser Acoustic Microscope，简称SLAM）
是声显微技术的一种形式。作为一种无损检测仪，它对于研究新材料和新器件
的内部结构问题特别有用。由于声图像的成像机理与光像不同，随机噪声、衍
射条纹和声斑干扰了对获得声图像的分析。本文讨论了在传统SLAM系统的基
础上，利用获得的被测样品声学幅度信息，针对声波传播、声光互作用、光路
及解调这四个过程对信号影响的进行研究，提出了对声学幅度信号进行相位补
偿和线性滤波，采用计算机数值运算，以提高图像质量的方法。给出了利用该
方法的实验结果以及在集成电路引线焊接质量无损检测中的应用结果。
Scanning laser acoustic microscope (SLAM) is one type of acoustic microscopy.
As a instrument for nondestructive, SLAM is very useful tool to study the internal
structure of new materials and new device. The theory of acoustic image is different
from the theory of optic image, so the acoustic image is difficult to analysis and
identification because of the interference generated by random noise, diffractive
streak and acoustic speckle. Base on the conditional SLAM, this paper studied
theory of signal quality affected by acoustic wave propagating, acousto-optic
interacting, optical path and demodulating. A method for enhancing acoustic image
by using magnitude of signal and phase compensating and linear filter and computer
digital processing is presented. Examples by using this method and its application
in nondestructive for evaluating bond quality of chip lead are provided.
是声显微技术的一种形式。作为一种无损检测仪，它对于研究新材料和新器件
的内部结构问题特别有用。由于声图像的成像机理与光像不同，随机噪声、衍
射条纹和声斑干扰了对获得声图像的分析。本文讨论了在传统SLAM系统的基
础上，利用获得的被测样品声学幅度信息，针对声波传播、声光互作用、光路
及解调这四个过程对信号影响的进行研究，提出了对声学幅度信号进行相位补
偿和线性滤波，采用计算机数值运算，以提高图像质量的方法。给出了利用该
方法的实验结果以及在集成电路引线焊接质量无损检测中的应用结果。
Scanning laser acoustic microscope (SLAM) is one type of acoustic microscopy.
As a instrument for nondestructive, SLAM is very useful tool to study the internal
structure of new materials and new device. The theory of acoustic image is different
from the theory of optic image, so the acoustic image is difficult to analysis and
identification because of the interference generated by random noise, diffractive
streak and acoustic speckle. Base on the conditional SLAM, this paper studied
theory of signal quality affected by acoustic wave propagating, acousto-optic
interacting, optical path and demodulating. A method for enhancing acoustic image
by using magnitude of signal and phase compensating and linear filter and computer
digital processing is presented. Examples by using this method and its application
in nondestructive for evaluating bond quality of chip lead are provided.
引文
[1] G．韦德编，上海交通大学声全息研究室译，《声成像》， 国防工业出版社， 1981
[2] LAWRENCE W. KESSLER, DONALD E. YUHAS, Acoustic Microscopy-1979, Proceedings of the IEEE, Vol. 67, No. 4, p526-536, April 1979．
[3] L.W.Kessler, S.P.Sawyer, Ultrasonic stimulation of optical scattering in nematic liquid crystals, Appl.Phys.Lett. Vol.17, p440-441, 1970．
[4] R. A. Lemons, C.F.Quate, Acoustic microscope-scanning version, Appl.Phys.Letters, Vol.24, No.4, p163-165, Feb.15,1974．
[5] 美国无损检测学会编，《美国无损检测手册》(超声卷)下册，世界图书出版 公司，1996
[6] Laser Scanning: Technology and Applications, NASA-no. 19980005393,1996
[7] Tervola,-K.-M.-U; Gummer,-M.-A; Erdman,-J.-W., Jr, Ultrasonic attenuation and velocity properties in rat liver as a function of fat concentration: a study at 100 MHz using a scanning laser acoustic microscope, Journal of the Acoustical Society of America v 77． p 307-13, Jan 1985
[8] KESSLER-LAWRENCE-W; GASIEL-TRACY-M, Acoustic microscopy review-Nondestructive inspection of advanced ceramic materials, Advanced-Ceramic-Materials. vol. 2, p107-109, April 1987
[9] Safvi-AA; Meerbaum-HJ; Morris-SA; Harper-CL; O'Brien-WD Jr, Acoustic imaging of defects in flexible food packages, Journal-of-Food-Protection; 60 (3) , p 309-314, 18 ref.,1997
[10] Kessler,-Lawrence-W; Semmens,-Janet-E, Characterization of the microstructure of ceramics used in multilayer ceramic capacitors by means of the scanning laser acoustic microscope, Journal of the American Ceramic Society v 72． p. 2271-2275 ,Dec 1989．
[11] 陈戈林，智能化150MHz 2反射式声学显微镜及声显微图像处理研究， 《应 用科学学报》，11，(3) ：226，1993
[12] HUA LEE, CARLOS RICCI, Modification of the Scanning Laser Acoustic Microscope for Holographic and Tomographic Imaging, Applv. Phys. Lett. 49(20) , 17 , p1336-1338, November 1986．
[13] Bretton L. Douglas, S. Davis Kent, Hua Lee, The use of Image Contrast and Entropy Criteria for the Estimation of Imaging Parameters in Acoustic Microscopy, J. Acoust. Soc. Am.95(l), p306-312, January 1994．
[14] S.Davis Kent, Hua Lee, Automation and System Integration of Scanning Tomographic Acoustic Microscope, Computerized Medical Imaging and Graphics, Vol.21, No.5, p265-276,1997．
[15] 王顺章，激光扫描声学显微镜的图像处理和识别研究，电子科技大学硕士 论文，1995．
[16] ZSE-CHERNG LIN, HUA LEE, GLEN WADE, Scanning Tomographic Acoustic Microscope:A Reviewv. IEEE Transaction on Sonics and Ultrasonics, Vol. SU-32, No. 2,p168-180, March 1985．
[17] HUA LEE, RICHARD Y. CHIAO, Phase Error Estimation and Correction in Acoustic Microscopy, IEEE Transactions on Acoustics, Speech, and Signal Processing, Vol.38, No. 1, p171-173, January 1990．
[18] ZSE-CHERNG LIN, HUA LEE, GLEN WADE, MICHAEL G. ORAVECZ, LAWRENCE W. KESSLER, Holographic Image Reconstruciton in Scanning Laser Acoustic Microscopy, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. UFFC-34, No. 3, p293-300, May 1987．
[19] 王亚非，袁敬闳，陈瑞征，300MHz 激光扫描声学显微镜， 《声学学 报》，Vol．19，No．1，1994
[20] S.Davis Kent, Stephanie J. Lockwood, Hua Lee, High Resolution Tomographic Acoustic Microscopy, IEEE Proceedings of ASILOMAR-29, p1051-1055,1996．
[21] ZSE-CHERNG LIN , GLEN WADE , Signal Processing and Image Reconstruction Microscopic Acoustical Holography , IEEE Transactions on Acoustics, Speech, and Signal Procession. Vol, ASSP-35, No.7, p1037-1045, July 1987
[22] 周鹰、王亚非，“激光扫描声学显微镜中透镜效应的研究”， 《压电与声 光》Vol．22 No3，7，2000
[23] 庄松林，钱振邦，《光学传递函数》，机械工业出版社，1981
[24] 吕乃光，《傅里叶光学》，机械工业出版社，1988
[25] Kenneth．R．Castleman著，朱志刚等译，《数字图像处理》，电子工业出版社， 1998
[26] R.K.Mueller, R.L.Rylander, New demodulation scheme for laser scanned-acoustic imaging systems, J.Opt.Soc.Amer, Vol.69, p407-412, Mar. 1979．
[27] Igor Lyuboshenko, Alexander Akhmetshin, Stable Signal and Image Reconstruction from Noisy Fourier Transform Phase, IEEE Transactions on Signal Processing, Vol.47, No.1, p244-250, January 1999．
[28] 张贤达，《现代信号处理》，清华大学出版社，1995
[29] ALAN V. OPPENHEIM, JAE S. LIM, The Importance of Phase in Signals, Proceedings of the IEEE, Vol.69, No.5, p529-541, May 1981．
[30] MONSON H. HAYES, The Reconstruction of a Multidimensional Sequence from the Phase or Magnitude of Its Fourier Transform, IEEE Transactions on Acoustic, Speech, and Signal Processing, Vol. ASSP-30, No.2, p140-154, April 1982．
[31] J.M.Rouvaen, A.Djebbari, A.Menhaj-Rivenq, Al.Djebbari, Z.Chama, An algorithm for signal reconstruction from its phase based upon least square critera, Signal Processing 79, p67-72,1999．
[32] S. Davis Kent, Hua Lee, Quantization Bit Rate Reduction in Scanning Tomographic Acoustic Microscopy, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol.42, No.3, p464-477, May 1995．
[2] LAWRENCE W. KESSLER, DONALD E. YUHAS, Acoustic Microscopy-1979, Proceedings of the IEEE, Vol. 67, No. 4, p526-536, April 1979．
[3] L.W.Kessler, S.P.Sawyer, Ultrasonic stimulation of optical scattering in nematic liquid crystals, Appl.Phys.Lett. Vol.17, p440-441, 1970．
[4] R. A. Lemons, C.F.Quate, Acoustic microscope-scanning version, Appl.Phys.Letters, Vol.24, No.4, p163-165, Feb.15,1974．
[5] 美国无损检测学会编，《美国无损检测手册》(超声卷)下册，世界图书出版 公司，1996
[6] Laser Scanning: Technology and Applications, NASA-no. 19980005393,1996
[7] Tervola,-K.-M.-U; Gummer,-M.-A; Erdman,-J.-W., Jr, Ultrasonic attenuation and velocity properties in rat liver as a function of fat concentration: a study at 100 MHz using a scanning laser acoustic microscope, Journal of the Acoustical Society of America v 77． p 307-13, Jan 1985
[8] KESSLER-LAWRENCE-W; GASIEL-TRACY-M, Acoustic microscopy review-Nondestructive inspection of advanced ceramic materials, Advanced-Ceramic-Materials. vol. 2, p107-109, April 1987
[9] Safvi-AA; Meerbaum-HJ; Morris-SA; Harper-CL; O'Brien-WD Jr, Acoustic imaging of defects in flexible food packages, Journal-of-Food-Protection; 60 (3) , p 309-314, 18 ref.,1997
[10] Kessler,-Lawrence-W; Semmens,-Janet-E, Characterization of the microstructure of ceramics used in multilayer ceramic capacitors by means of the scanning laser acoustic microscope, Journal of the American Ceramic Society v 72． p. 2271-2275 ,Dec 1989．
[11] 陈戈林，智能化150MHz 2反射式声学显微镜及声显微图像处理研究， 《应 用科学学报》，11，(3) ：226，1993
[12] HUA LEE, CARLOS RICCI, Modification of the Scanning Laser Acoustic Microscope for Holographic and Tomographic Imaging, Applv. Phys. Lett. 49(20) , 17 , p1336-1338, November 1986．
[13] Bretton L. Douglas, S. Davis Kent, Hua Lee, The use of Image Contrast and Entropy Criteria for the Estimation of Imaging Parameters in Acoustic Microscopy, J. Acoust. Soc. Am.95(l), p306-312, January 1994．
[14] S.Davis Kent, Hua Lee, Automation and System Integration of Scanning Tomographic Acoustic Microscope, Computerized Medical Imaging and Graphics, Vol.21, No.5, p265-276,1997．
[15] 王顺章，激光扫描声学显微镜的图像处理和识别研究，电子科技大学硕士 论文，1995．
[16] ZSE-CHERNG LIN, HUA LEE, GLEN WADE, Scanning Tomographic Acoustic Microscope:A Reviewv. IEEE Transaction on Sonics and Ultrasonics, Vol. SU-32, No. 2,p168-180, March 1985．
[17] HUA LEE, RICHARD Y. CHIAO, Phase Error Estimation and Correction in Acoustic Microscopy, IEEE Transactions on Acoustics, Speech, and Signal Processing, Vol.38, No. 1, p171-173, January 1990．
[18] ZSE-CHERNG LIN, HUA LEE, GLEN WADE, MICHAEL G. ORAVECZ, LAWRENCE W. KESSLER, Holographic Image Reconstruciton in Scanning Laser Acoustic Microscopy, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. UFFC-34, No. 3, p293-300, May 1987．
[19] 王亚非，袁敬闳，陈瑞征，300MHz 激光扫描声学显微镜， 《声学学 报》，Vol．19，No．1，1994
[20] S.Davis Kent, Stephanie J. Lockwood, Hua Lee, High Resolution Tomographic Acoustic Microscopy, IEEE Proceedings of ASILOMAR-29, p1051-1055,1996．
[21] ZSE-CHERNG LIN , GLEN WADE , Signal Processing and Image Reconstruction Microscopic Acoustical Holography , IEEE Transactions on Acoustics, Speech, and Signal Procession. Vol, ASSP-35, No.7, p1037-1045, July 1987
[22] 周鹰、王亚非，“激光扫描声学显微镜中透镜效应的研究”， 《压电与声 光》Vol．22 No3，7，2000
[23] 庄松林，钱振邦，《光学传递函数》，机械工业出版社，1981
[24] 吕乃光，《傅里叶光学》，机械工业出版社，1988
[25] Kenneth．R．Castleman著，朱志刚等译，《数字图像处理》，电子工业出版社， 1998
[26] R.K.Mueller, R.L.Rylander, New demodulation scheme for laser scanned-acoustic imaging systems, J.Opt.Soc.Amer, Vol.69, p407-412, Mar. 1979．
[27] Igor Lyuboshenko, Alexander Akhmetshin, Stable Signal and Image Reconstruction from Noisy Fourier Transform Phase, IEEE Transactions on Signal Processing, Vol.47, No.1, p244-250, January 1999．
[28] 张贤达，《现代信号处理》，清华大学出版社，1995
[29] ALAN V. OPPENHEIM, JAE S. LIM, The Importance of Phase in Signals, Proceedings of the IEEE, Vol.69, No.5, p529-541, May 1981．
[30] MONSON H. HAYES, The Reconstruction of a Multidimensional Sequence from the Phase or Magnitude of Its Fourier Transform, IEEE Transactions on Acoustic, Speech, and Signal Processing, Vol. ASSP-30, No.2, p140-154, April 1982．
[31] J.M.Rouvaen, A.Djebbari, A.Menhaj-Rivenq, Al.Djebbari, Z.Chama, An algorithm for signal reconstruction from its phase based upon least square critera, Signal Processing 79, p67-72,1999．
[32] S. Davis Kent, Hua Lee, Quantization Bit Rate Reduction in Scanning Tomographic Acoustic Microscopy, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol.42, No.3, p464-477, May 1995．