基于悬浮区熔技术的难熔金属生长控制系统研究
|
摘要
难熔金属现已广泛用于电子、电气、机械、仪表、制造、核动力工业和各种高技术研究领域,基于其在市场上的广泛应用及重要性,本论文将先进的计算机控制技术应用到难熔金属的单晶生长,并针对性地提出了一套完整的手动控制与自动控制相切换的难熔金属单晶生长控制系统方案。
论文首先简要介绍了难熔金属的特点,接着分别阐述了其目前在功能材料、电子信息材料、能源材料、结构材料、新兴材料等方面的发展前景,然后结合目前难熔金属单晶生长技术的发展历史和现状提出了本课题的研究意义。本论文详细讨论了目前难熔金属所普遍采用的几种生长工艺,并经过比较总结出最理想的难熔金属单晶生长工艺技术——电子束悬浮区熔技术。在此基础上,本课题针对其生长工艺理论设计了相应的机械结构,并提出了速度控制和位置控制双闭环控制模式。根据实际测量的需要,本文给出了满足本控制系统要求的伺服放大器和光栅尺的型号以及硬件控制部分的电路原理图。
本控制系统选用基于PC机的DMC-1842运动控制器为上位控制单元,采用美国AMC公司生产的12A8型直流伺服驱动器和北京勇光公司生产的直流伺服电机作为执行元件,通过丝杠螺母将电机的旋转运动转变为直线运动,利用直流电机附带的测速机作为电机的速度检测单元,光栅尺作为直线运动的位置测量元件,构成双闭环的四轴同步运动控制系统。对此,本文详细地阐述了运动控制系统的组成、关键技术和分类,并对运动控制系统的设计方法进行了分析。论文中介绍了运动控制器的特点,根据控制系统的设计要求,设计了有关的硬件电路,构建了“PC机+运动控制器”的数字控制系统。在此基础上,本课题采用VC++6.0语言编写了软件控制程序。
本课题将理论研究与实际开发有机地结合起来,成功地实现对难熔金属单晶生长设备的机械设计及控制,同时也对其他材料的晶体生长提供了重要参考。鉴于硬件控制部分所具有的通用性,本课题的研究对于任意单晶生长设备的研发都具有一定的指导意义。
Refractory metal has been used widely for electron, electric, machine, meter, manufacture, nuclear-powered industry and all kinds of high-tech research domain. Based on wide use and essentiality in the market, advanced computer control technology is used for single crystal of refractory metal in this paper, a full project of growth and control system of single crystal of refractory metal is brought forward, which is switched between manual mode and automatic mode.
At first, this paper introduces simply the characteristic of refractory metal. Then this paper expatiates respectively development foreground of refractory metal in some domain now, such as the function material, the electron information material, the energy sources material, the structure material, the rising material and so on. And combing with the development history and status in quo of growth tech of single crystal of refractory metal, this paper brings forward the research meaning of this project. This paper discusses some kinds of growth technology of actual refractory metal in detail, and summarize that the most perfect technology of single crystal growth of refractory metal by compare is floating zone-melting tech by electron bundle. Based on it, this project designs the corresponding machine structure and brings forward double closed loop control with the velocity control and the position control. According to the practical measure demand, this paper presents the model of servo and grating which both satisfy control the system demand, and presents the circuit principle drawing of the hardware control.
In this system, the PC-based DMC-1842 motion controller is used as the superior control unit, the 12A8 model direct current servo system which was produced by the U.S. AMC company and the direct current servo motor which was produced by Beijing YongGuang company is used for the execute element, the rotation motion of motor is changed to the rectilinear motion by the guide screw nut, the measure velocity machine which is the appurtenance of the direct current servo is the speed examination part of motor, the optical grating is the position examination part of linear motion, all of these make up of a double closed-loop synchronous motion system with four axes. Regarding these, this article describes the makeup, the essential technology and the classification of the motion control system, and analyzes the method of the motion control system. This paper introduces the characteristic of the motion controller, designs the correlative hardware circuit and actualizes the numeral control system of PC-based and the motion controller, regarding the design demand of the control system. Based on that, this paper uses the VC++ 6.0 language to compile the software control procedure.
The item combines the theory research with the practice exploitation, realizes successfully the machine design and the control for the single crystal growth equipment of the refractory metal, and offers an important reference for the crystal growth of else material. According to the universal of the hardware control, the research of this item has the definite guidance meaning for the exploitation of any single crystal growth equipment.
论文首先简要介绍了难熔金属的特点,接着分别阐述了其目前在功能材料、电子信息材料、能源材料、结构材料、新兴材料等方面的发展前景,然后结合目前难熔金属单晶生长技术的发展历史和现状提出了本课题的研究意义。本论文详细讨论了目前难熔金属所普遍采用的几种生长工艺,并经过比较总结出最理想的难熔金属单晶生长工艺技术——电子束悬浮区熔技术。在此基础上,本课题针对其生长工艺理论设计了相应的机械结构,并提出了速度控制和位置控制双闭环控制模式。根据实际测量的需要,本文给出了满足本控制系统要求的伺服放大器和光栅尺的型号以及硬件控制部分的电路原理图。
本控制系统选用基于PC机的DMC-1842运动控制器为上位控制单元,采用美国AMC公司生产的12A8型直流伺服驱动器和北京勇光公司生产的直流伺服电机作为执行元件,通过丝杠螺母将电机的旋转运动转变为直线运动,利用直流电机附带的测速机作为电机的速度检测单元,光栅尺作为直线运动的位置测量元件,构成双闭环的四轴同步运动控制系统。对此,本文详细地阐述了运动控制系统的组成、关键技术和分类,并对运动控制系统的设计方法进行了分析。论文中介绍了运动控制器的特点,根据控制系统的设计要求,设计了有关的硬件电路,构建了“PC机+运动控制器”的数字控制系统。在此基础上,本课题采用VC++6.0语言编写了软件控制程序。
本课题将理论研究与实际开发有机地结合起来,成功地实现对难熔金属单晶生长设备的机械设计及控制,同时也对其他材料的晶体生长提供了重要参考。鉴于硬件控制部分所具有的通用性,本课题的研究对于任意单晶生长设备的研发都具有一定的指导意义。
Refractory metal has been used widely for electron, electric, machine, meter, manufacture, nuclear-powered industry and all kinds of high-tech research domain. Based on wide use and essentiality in the market, advanced computer control technology is used for single crystal of refractory metal in this paper, a full project of growth and control system of single crystal of refractory metal is brought forward, which is switched between manual mode and automatic mode.
At first, this paper introduces simply the characteristic of refractory metal. Then this paper expatiates respectively development foreground of refractory metal in some domain now, such as the function material, the electron information material, the energy sources material, the structure material, the rising material and so on. And combing with the development history and status in quo of growth tech of single crystal of refractory metal, this paper brings forward the research meaning of this project. This paper discusses some kinds of growth technology of actual refractory metal in detail, and summarize that the most perfect technology of single crystal growth of refractory metal by compare is floating zone-melting tech by electron bundle. Based on it, this project designs the corresponding machine structure and brings forward double closed loop control with the velocity control and the position control. According to the practical measure demand, this paper presents the model of servo and grating which both satisfy control the system demand, and presents the circuit principle drawing of the hardware control.
In this system, the PC-based DMC-1842 motion controller is used as the superior control unit, the 12A8 model direct current servo system which was produced by the U.S. AMC company and the direct current servo motor which was produced by Beijing YongGuang company is used for the execute element, the rotation motion of motor is changed to the rectilinear motion by the guide screw nut, the measure velocity machine which is the appurtenance of the direct current servo is the speed examination part of motor, the optical grating is the position examination part of linear motion, all of these make up of a double closed-loop synchronous motion system with four axes. Regarding these, this article describes the makeup, the essential technology and the classification of the motion control system, and analyzes the method of the motion control system. This paper introduces the characteristic of the motion controller, designs the correlative hardware circuit and actualizes the numeral control system of PC-based and the motion controller, regarding the design demand of the control system. Based on that, this paper uses the VC++ 6.0 language to compile the software control procedure.
The item combines the theory research with the practice exploitation, realizes successfully the machine design and the control for the single crystal growth equipment of the refractory metal, and offers an important reference for the crystal growth of else material. According to the universal of the hardware control, the research of this item has the definite guidance meaning for the exploitation of any single crystal growth equipment.
引文
[1]裘立奋主编.现代难熔金属和稀散金属分析[M].北京:化学工业出版社,2007:1
[2]李哲,郑欣.难熔金属单晶技术现状与展望[J].北京:稀有金属,2004.28.(4):721
[3]有色金属材料咨询研究组编辑.有色金属材料咨询报告[M].陕西:陕西科学出版社,2002:94
[4]李哲,郑欣.难熔金属单晶技术现状与展望[J].北京:稀有金属,2004.28.(4):724
[5]尹中荣,马元,郑杰,康志君,谷洪钢,王钺,王秦,李泉旺.新型电子束熔炼炉的研制[J].沈阳:真空.2003:44
[6]倪代秦,宋有庭,张树玉,吴星,陆坤权.金属片加热区熔法单晶生长及应用[J].北京:中文核心期刊要目总览,2001,30(3):165
[7]彭志辉.稀有金属材料加工工艺学[M]。湖南:中南大学出版社,2003:221
[8]C.D.A.Hunt,J.H.C.Lowe,S.K.Harrington,Electron Beam Melting and Refining Conference,AVS,TMS-TMIE,Warrendale,PA,1984,69
[9]王红.难熔金属钼晶体的电子束悬浮区熔定向凝固工艺研究[D].西安:西北工业大学硕士学位论文.2007:5-6
[10]吴炳乾.稀土冶金学[M].湖南:中南工业大学出版社,1997:294
[11]张文林,孙涛,李娟莹.电子束熔炼及其设备[J].冶金设备.2003,4:32
[12]孙涛.20KW电子束炉控制系统的研究[D].西安:陕西科技大学,2004:6
[13]J.Bohn,Ankeludge,Winfriend Schroder,Handbook of Crystal Growth,Elsevier Science B.V.,1994
[14]Robert Bakish,Introduction to Electron Beam Technogy,NewYork,John Wiley&Sons,Inc.,1981
[15]A.Calverley,M.Davis,R.F.Lever,The floating-zone melting of refractory metals by electron bombardment.Journal of Scientific Instruments,1957,34:142-146
[16]M.Cole,M.C.Fisher,Governing equations for the shapes of molten zones,British Journal of Applied Physics,1962,12:577-580
[17]D.Fort,Crystal growth of rare earth metals using the float zoningrnethod,J.Cryst.Grow,1989,1(94):85-96
[18]J.J.Rubin,D.L.Malm,K.J.Bachmann,Processing of single crystals for high temperature application,Mat.Res.Bull,1972,17:597-600
[19]P.H.Keck,W.VanHome,JvSoled,A.MacDonald,Electron beam floating zone melting of refractory metals and alloys,Rev.Sci.Instr,1954,25:331-339
[20]R.E.Green,Work hardening and flow stress of ultrapure molybdenum single crystals,J.pp1.Phys,1964,35:1297-1301
[21]王红.难熔金属钼晶体的电子束悬浮区熔定向凝固工艺研究[D].陕西西安:西北工业大学硕士学位论文.2007:7
[22]吴文远.稀土冶金学[M].北京:化学工业出版社,2005:239-240
[23]武自芳,虞鹤松,王秋才编著.微机控制系统及其应用(第4版)[M].北京:电子工业出版社,2007:224-226
[24]樊亚妮.高速同步的计算机控制设计与研究[D].广东:广东工业大学硕士学位论文,2006:16-17,18-20,54-57
[25]劳奇成,尚雅层,王建华等.CNC齿轮测量中心的测控系统[J].陕西西安:西安工业学院学报.1996(9):213-215
[26]王建华,劳奇成,刘波等.CNC齿轮测量中心的原理、特点及关键技术[J].四川成都:工具技术.1996,(30):41-43
[27]昌明.齿轮测量中心测控系统开发[D].西安:西安理工大学硕士学位论文.2006:8-10
[28]谢剑英,贾青编著.《微型计算机控制技术》[M](第3版).北京:国防工业出版社.2001:127
[29]GALIL控制器选用指南.北京中宝2001伦自动化技术有限公司
[30]DMC18X2 User Manual.Galil Motion Control,Inc.Manual Rev.1.0c
[31]DMC1842说明书.北京中宝伦自动化技术有限公司
[32]PICM-3900互联模块(1.1V)使用说明书.北京中宝伦自动化技术有限公司
[33]诸静.《机器人与控制技术》[M].浙江:浙江大学出版社,1991:112
[34]冯勇,霍勇进主编.《现代计算机数控系统》[M].北京:机械工业出版社,1996
[35]TDR-80单晶炉电气说明书.西安理工大学工厂.西安恒新自动控制有限公司.49-50
[36]SERIES 25A SERVO AMPLIERS.深圳雷赛科技有限公司.
[37]张建民等.机电一体化系统设计第三版[M].北京:高等教育出版社,2007.1,7:281-282
[38]刘艳红.电子束区熔设备温度梯度的估算[J].天津:中国民航学院学报,2001,19(1):40
[39]刘艳红.电子束区熔高温合金单晶的制备工艺[J].陕西西安:铸造技术,2003,24(3):220
[40]胡忠武,李中奎,张清,张廷杰,张军良,殷涛.难熔金属及其合金单晶的发展[J].陕西西安:稀有金属材料与工程,2007,36(2):370-371
[41]钟约先,林亨编著.机械系统计算机控制[M].北京:清华大学出版社,2001:246-247
[42]张玉龙,唐磊主编.人工晶体——生长技术、性能与应用[M].北京:化学工业出版社,2005:1
[43]赵秦延,杨润.稀土金属真空提纯炉的研制[J].北京:半导体设备制造.电子工业专用设备.2005,120:68-70
[44]童启明主编.控制系统数字仿真与监控组态软件应用[M].北京:科学出版社,2006:233
[45]闫浩,鲁士文.单晶区熔生长实验灵境仿真系统的研制[J].北京:计算机仿真.2000,17(4):59-62
[46]刘英同,胡明举,刘炘钢.晶体生长的计算机仿真研究[J].北京:计算机仿真.2005,22(10):268-272
[47]任哲等编著.MFC Windows应用程序设计[M].北京:清华大学出版社,2004:115
[48]门刚编著.精通Protel DXP模块范例篇[M].北京:中国青年出版社,2005:4
[49]贾东明,张明祥,来晓君,王思清.熔炼钼棒锻造工艺研究[J].陕西:中国钼业.2006,3(5):42
[50]刘霞.钼及钼合金单晶的设备[J]广东:中山大学学报论丛.2002,22(5):175
[51]绍伟.测量机器人控制系统的开发[D].西安:西安理工大学,2004:49
[52]无名.科研成果简介.http://www.dataie.com/data/jslt/paper/kycgl.doc,2004
[53]史耀君,杜宇雷,陈国良,陈光.悬浮熔炼制备新型稀土金属间化合物[J].北京:稀有金属.2006,30:102-105
[2]李哲,郑欣.难熔金属单晶技术现状与展望[J].北京:稀有金属,2004.28.(4):721
[3]有色金属材料咨询研究组编辑.有色金属材料咨询报告[M].陕西:陕西科学出版社,2002:94
[4]李哲,郑欣.难熔金属单晶技术现状与展望[J].北京:稀有金属,2004.28.(4):724
[5]尹中荣,马元,郑杰,康志君,谷洪钢,王钺,王秦,李泉旺.新型电子束熔炼炉的研制[J].沈阳:真空.2003:44
[6]倪代秦,宋有庭,张树玉,吴星,陆坤权.金属片加热区熔法单晶生长及应用[J].北京:中文核心期刊要目总览,2001,30(3):165
[7]彭志辉.稀有金属材料加工工艺学[M]。湖南:中南大学出版社,2003:221
[8]C.D.A.Hunt,J.H.C.Lowe,S.K.Harrington,Electron Beam Melting and Refining Conference,AVS,TMS-TMIE,Warrendale,PA,1984,69
[9]王红.难熔金属钼晶体的电子束悬浮区熔定向凝固工艺研究[D].西安:西北工业大学硕士学位论文.2007:5-6
[10]吴炳乾.稀土冶金学[M].湖南:中南工业大学出版社,1997:294
[11]张文林,孙涛,李娟莹.电子束熔炼及其设备[J].冶金设备.2003,4:32
[12]孙涛.20KW电子束炉控制系统的研究[D].西安:陕西科技大学,2004:6
[13]J.Bohn,Ankeludge,Winfriend Schroder,Handbook of Crystal Growth,Elsevier Science B.V.,1994
[14]Robert Bakish,Introduction to Electron Beam Technogy,NewYork,John Wiley&Sons,Inc.,1981
[15]A.Calverley,M.Davis,R.F.Lever,The floating-zone melting of refractory metals by electron bombardment.Journal of Scientific Instruments,1957,34:142-146
[16]M.Cole,M.C.Fisher,Governing equations for the shapes of molten zones,British Journal of Applied Physics,1962,12:577-580
[17]D.Fort,Crystal growth of rare earth metals using the float zoningrnethod,J.Cryst.Grow,1989,1(94):85-96
[18]J.J.Rubin,D.L.Malm,K.J.Bachmann,Processing of single crystals for high temperature application,Mat.Res.Bull,1972,17:597-600
[19]P.H.Keck,W.VanHome,JvSoled,A.MacDonald,Electron beam floating zone melting of refractory metals and alloys,Rev.Sci.Instr,1954,25:331-339
[20]R.E.Green,Work hardening and flow stress of ultrapure molybdenum single crystals,J.pp1.Phys,1964,35:1297-1301
[21]王红.难熔金属钼晶体的电子束悬浮区熔定向凝固工艺研究[D].陕西西安:西北工业大学硕士学位论文.2007:7
[22]吴文远.稀土冶金学[M].北京:化学工业出版社,2005:239-240
[23]武自芳,虞鹤松,王秋才编著.微机控制系统及其应用(第4版)[M].北京:电子工业出版社,2007:224-226
[24]樊亚妮.高速同步的计算机控制设计与研究[D].广东:广东工业大学硕士学位论文,2006:16-17,18-20,54-57
[25]劳奇成,尚雅层,王建华等.CNC齿轮测量中心的测控系统[J].陕西西安:西安工业学院学报.1996(9):213-215
[26]王建华,劳奇成,刘波等.CNC齿轮测量中心的原理、特点及关键技术[J].四川成都:工具技术.1996,(30):41-43
[27]昌明.齿轮测量中心测控系统开发[D].西安:西安理工大学硕士学位论文.2006:8-10
[28]谢剑英,贾青编著.《微型计算机控制技术》[M](第3版).北京:国防工业出版社.2001:127
[29]GALIL控制器选用指南.北京中宝2001伦自动化技术有限公司
[30]DMC18X2 User Manual.Galil Motion Control,Inc.Manual Rev.1.0c
[31]DMC1842说明书.北京中宝伦自动化技术有限公司
[32]PICM-3900互联模块(1.1V)使用说明书.北京中宝伦自动化技术有限公司
[33]诸静.《机器人与控制技术》[M].浙江:浙江大学出版社,1991:112
[34]冯勇,霍勇进主编.《现代计算机数控系统》[M].北京:机械工业出版社,1996
[35]TDR-80单晶炉电气说明书.西安理工大学工厂.西安恒新自动控制有限公司.49-50
[36]SERIES 25A SERVO AMPLIERS.深圳雷赛科技有限公司.
[37]张建民等.机电一体化系统设计第三版[M].北京:高等教育出版社,2007.1,7:281-282
[38]刘艳红.电子束区熔设备温度梯度的估算[J].天津:中国民航学院学报,2001,19(1):40
[39]刘艳红.电子束区熔高温合金单晶的制备工艺[J].陕西西安:铸造技术,2003,24(3):220
[40]胡忠武,李中奎,张清,张廷杰,张军良,殷涛.难熔金属及其合金单晶的发展[J].陕西西安:稀有金属材料与工程,2007,36(2):370-371
[41]钟约先,林亨编著.机械系统计算机控制[M].北京:清华大学出版社,2001:246-247
[42]张玉龙,唐磊主编.人工晶体——生长技术、性能与应用[M].北京:化学工业出版社,2005:1
[43]赵秦延,杨润.稀土金属真空提纯炉的研制[J].北京:半导体设备制造.电子工业专用设备.2005,120:68-70
[44]童启明主编.控制系统数字仿真与监控组态软件应用[M].北京:科学出版社,2006:233
[45]闫浩,鲁士文.单晶区熔生长实验灵境仿真系统的研制[J].北京:计算机仿真.2000,17(4):59-62
[46]刘英同,胡明举,刘炘钢.晶体生长的计算机仿真研究[J].北京:计算机仿真.2005,22(10):268-272
[47]任哲等编著.MFC Windows应用程序设计[M].北京:清华大学出版社,2004:115
[48]门刚编著.精通Protel DXP模块范例篇[M].北京:中国青年出版社,2005:4
[49]贾东明,张明祥,来晓君,王思清.熔炼钼棒锻造工艺研究[J].陕西:中国钼业.2006,3(5):42
[50]刘霞.钼及钼合金单晶的设备[J]广东:中山大学学报论丛.2002,22(5):175
[51]绍伟.测量机器人控制系统的开发[D].西安:西安理工大学,2004:49
[52]无名.科研成果简介.http://www.dataie.com/data/jslt/paper/kycgl.doc,2004
[53]史耀君,杜宇雷,陈国良,陈光.悬浮熔炼制备新型稀土金属间化合物[J].北京:稀有金属.2006,30:102-105