溅射离子泵DC-DC特种高压电源的设计
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摘要
真空系统是氢原子钟的重要组成部分，氢原子钟工作时内部必须保持在高真空状态。真空的获得和维持，采用溅射离子泵来完成。离子泵电源是离子泵的关键部分，它直接影响离子泵的抽气效果、寿命以及真空系统的各项指标。目前氢原子钟上的离子泵电源为工频稳压电源，体积大、重量重、纹波大，更为关键的问题是，该电源的输入为220V，50Hz交流电，而氢原子钟其它电子设备是由24V直流电源供电，这对直流供电的情况下，给氢原子钟的造成很大的困难。因此离子泵DC-DC开关电源的研制对统一氢原子钟输入直流电源，开发星载氢原子钟具有重要意义。
本文首先介绍了现有的两种离子泵电源的结构及其特点，针对一些不足提出了以开关电源作为本课题的研究重点；第二章简要介绍了离子泵工作的基本原理并提出了开关式离子泵电源应具有的功能；第三章对电源的功率、控制以及保护电路做了完整的介绍；第四章给出了实验结果并与原有的电源作了一些比较；第五章对研制完成的电源，存在的一些问题作了一个总结，并对将来开发星载离子泵电源提出一些建议。
Vacuum system is an important part of the hydrogen clock in which high vacuum condition is needed when operating. To obtain and keep high vacuum condition, a sputter ion pump (SIP) is used. Power supply is the key element of the sputter ion pump, which directly affect the pump effect, pump life and other performances of the vacuum system. At present, a power frequency constant voltage supply is used in hydrogen clock. The power supply has some demerits, such as big volume, heavy weight, large ripple voltage, and more seriously the input is 220V/50Hz AC. But other parts of the hydrogen clock only need a 24V DC power supply, so it is difficult to use hydrogen clock when only a DC power supply is given. Hence, it is very important to develop a DC-DC SIP power supply for unifying the input of the hydrogen clock, and for developing power supply used in satellite clock in future.
This paper first introduced two types SIP power supply currently used, and explained why a switching mode SIP DC-DC power supply was needed. In chapter 2 the operating principles of SIP and the functions the supply should have were present. In chapter 3, the total circuit of the supply was introduced in detail. In chapter 4, the experiment results were given and some comparisons to other types supply were made. In the last chapter, some conclusions of the problems existing in the power supply were made, and some improvement proposals for future SIP power supply were made too.
本文首先介绍了现有的两种离子泵电源的结构及其特点，针对一些不足提出了以开关电源作为本课题的研究重点；第二章简要介绍了离子泵工作的基本原理并提出了开关式离子泵电源应具有的功能；第三章对电源的功率、控制以及保护电路做了完整的介绍；第四章给出了实验结果并与原有的电源作了一些比较；第五章对研制完成的电源，存在的一些问题作了一个总结，并对将来开发星载离子泵电源提出一些建议。
Vacuum system is an important part of the hydrogen clock in which high vacuum condition is needed when operating. To obtain and keep high vacuum condition, a sputter ion pump (SIP) is used. Power supply is the key element of the sputter ion pump, which directly affect the pump effect, pump life and other performances of the vacuum system. At present, a power frequency constant voltage supply is used in hydrogen clock. The power supply has some demerits, such as big volume, heavy weight, large ripple voltage, and more seriously the input is 220V/50Hz AC. But other parts of the hydrogen clock only need a 24V DC power supply, so it is difficult to use hydrogen clock when only a DC power supply is given. Hence, it is very important to develop a DC-DC SIP power supply for unifying the input of the hydrogen clock, and for developing power supply used in satellite clock in future.
This paper first introduced two types SIP power supply currently used, and explained why a switching mode SIP DC-DC power supply was needed. In chapter 2 the operating principles of SIP and the functions the supply should have were present. In chapter 3, the total circuit of the supply was introduced in detail. In chapter 4, the experiment results were given and some comparisons to other types supply were made. In the last chapter, some conclusions of the problems existing in the power supply were made, and some improvement proposals for future SIP power supply were made too.
引文
[1] 中国科学院上海天文台．实用型氢原子钟技术说明书，1999：23-24
[2] 朱家俊．全自动溅射离子泵电源及其性能检测，真空，2004．7
[3] 徐成海．真空技术及应用系列讲座第五讲，真空，1996．10
[4] 孙亚兵王守国俞世吉．溅射离子泵对N2和CO抽速的理论计算 Vacuum&Cryogenics，1997．6
[5] 杨美民，盛久山．微型溅射离子泵在X射线管制造中的应用，真空电子技术2002．6
[6] 蒋迪奎，殷立新，赵飞云．同步辐射存储环用国产溅射离子泵的发展方向，真空科学与技术，1999．7
[7] Sputter Ion Pumps L. Schulz
[8] 沙占友，睢丙东，王彦朋 ．恒功率输出式单片开关电源的设计原理仪表技术，2000．6
[9] Thermionics Laboratory, Inc.. Ion Pumps: 1-4.
[10] Duniway Stockroom Corp.. Instruction Manual Terranova-741
[11] 刘汉林，刘立宁．关于溅射离子泵电源性能指标的几点建议，真空，2000．4
[12] 张占松，蔡宣三．开关电源的原理与设计(修订版)，电子工业出版社，2004．9
[13] 杨旭等．开关电源技术，机械工业出版社，2004．1
[14] Abraham I. Pressman . Switching Power Supply Design, McGraw-Hill, 1998
[15] TL494脉宽调制控制电路TI技术资料
[16] 赵修科．关电源中磁性元器件件，南京航天航空大学，2004．8
[2] 朱家俊．全自动溅射离子泵电源及其性能检测，真空，2004．7
[3] 徐成海．真空技术及应用系列讲座第五讲，真空，1996．10
[4] 孙亚兵王守国俞世吉．溅射离子泵对N2和CO抽速的理论计算 Vacuum&Cryogenics，1997．6
[5] 杨美民，盛久山．微型溅射离子泵在X射线管制造中的应用，真空电子技术2002．6
[6] 蒋迪奎，殷立新，赵飞云．同步辐射存储环用国产溅射离子泵的发展方向，真空科学与技术，1999．7
[7] Sputter Ion Pumps L. Schulz
[8] 沙占友，睢丙东，王彦朋 ．恒功率输出式单片开关电源的设计原理仪表技术，2000．6
[9] Thermionics Laboratory, Inc.. Ion Pumps: 1-4.
[10] Duniway Stockroom Corp.. Instruction Manual Terranova-741
[11] 刘汉林，刘立宁．关于溅射离子泵电源性能指标的几点建议，真空，2000．4
[12] 张占松，蔡宣三．开关电源的原理与设计(修订版)，电子工业出版社，2004．9
[13] 杨旭等．开关电源技术，机械工业出版社，2004．1
[14] Abraham I. Pressman . Switching Power Supply Design, McGraw-Hill, 1998
[15] TL494脉宽调制控制电路TI技术资料
[16] 赵修科．关电源中磁性元器件件，南京航天航空大学，2004．8