齿轮化学机械光整加工技术研究
摘要
齿轮是机械传动的关键部件,在机械装备中起着重要作用。各类主机的工作精度、性能、寿命、可靠性等各项指标,都与齿轮性能密切相关。齿轮在汽车行业有着广泛的应用,几乎所有汽车的传动系统都包含齿轮副。因此,齿轮的质量将影响汽车传动系统的效率、运动精度等。研究表明,提高齿轮表面质量可以提高齿轮使用性能和寿命。对齿轮进行表明光整加工是改善齿轮质量,提高齿轮精度的有效途径。
化学机械光整加工(Chemical Mechanical Finishing,简称CMF)是近年来得到快速发展的非传统光整加工工艺,其突出优点是效率高,并可获得优良的表面形貌,目前已应用于多种零件表面的光整加工,将其应用于齿轮齿面光整加工对于提高齿轮质量具有重要意义。
从加工过程中工件表面形貌的微观轮廓变化入手,研究了化学机械光整加工方法原理,建立了化学机械光整加工材料去除模型。对展成法齿轮化学机械光整加工过程中的机械作用作了详细分析,给出了相啮合两齿轮在齿廓上的相对运动速度变化曲线和载荷分布曲线,为展成法齿轮光整加工中的精度分析提供了依据。
介绍分析了传统的三酸化学光整,给出环保型化学机械光整工艺,并对45“钢薄片进行实验研究。结果显示,化学机械光整加工可使钢件表面粗糙度Ra值从0.252μm降低到0.067μm,证明了对钢件进行化学机械光整加工的有效性。
建立了圆柱直齿轮化学机械光整加工的实验装置,并进行理论分析与实验研究。实验结果表明,化学机械光整加工不仅可以明显提高齿轮表面质量,而且使齿轮的齿廓精度和螺旋线精度有所提高。
Gear is a key component in mechanical transmission and plays an important role in mechanical equipment. Each index of all kinds of mechanism, such as operating precision, performance, life and reliability, are closely related to gear performance. Gear is gaining wide popularity in the automobile industry, almost all car transmission system contains gear pair. Therefore, the gear manufacturing precision and quality will directly affect the efficiency of auto transmission system, noise, movement precision and longevity,etc. Numerous studies show that improving the surface quality of gear can effectively improve various aspects performance of gear and can improve its service life. Tooth surface finishing is an effective way to improve the tooth surface quality and improve the accuracy of gear.
Chemical mechanical finishing (CMF) has developed rapidly in recent years as a non-traditional machining technics, and its prominent advantages is high efficiency and can obtain good surface morphology. At present, it has been applied in various mechanical parts surface finishing, and it will be of great significance for improving gear quality if it can be applied in gear tooth surface finishing.
This paper studied the material removal mechanism of chemical mechanical finishing based on the process of microscopic outline of workpiece surface morphology. Mechanical action in gear chemical mechanical finishing by generating method is analysed in detail. The relative speed changing curves and load distribution curves of meshing gear tooth profile were given which provide theory basis for precision analysis of gear chemical mechanical finishing by generating method.
The traditional three-acid finishing was analysed, The environmental chemical finishing technic was studied, and 45# steel slice have been investigated. The results showed that chemical mechanical finishing can make Ra value of the steel parts surface roughness reduced from 0.252μm to 0.067μm, and proved that it is effective in steel parts chemical mechanical finishing.
A mechanism is designed to finish the theoretical analysis and experimental research of cylindrical spur gear finishing using chemical mechanical methods. The experimental results showed that chemical mechanical finishing not only can obviously improve the machined gear surface quality, but also can improve the cylindrical spur gear tooth profile accuracy and spiral accuracy.
化学机械光整加工(Chemical Mechanical Finishing,简称CMF)是近年来得到快速发展的非传统光整加工工艺,其突出优点是效率高,并可获得优良的表面形貌,目前已应用于多种零件表面的光整加工,将其应用于齿轮齿面光整加工对于提高齿轮质量具有重要意义。
从加工过程中工件表面形貌的微观轮廓变化入手,研究了化学机械光整加工方法原理,建立了化学机械光整加工材料去除模型。对展成法齿轮化学机械光整加工过程中的机械作用作了详细分析,给出了相啮合两齿轮在齿廓上的相对运动速度变化曲线和载荷分布曲线,为展成法齿轮光整加工中的精度分析提供了依据。
介绍分析了传统的三酸化学光整,给出环保型化学机械光整工艺,并对45“钢薄片进行实验研究。结果显示,化学机械光整加工可使钢件表面粗糙度Ra值从0.252μm降低到0.067μm,证明了对钢件进行化学机械光整加工的有效性。
建立了圆柱直齿轮化学机械光整加工的实验装置,并进行理论分析与实验研究。实验结果表明,化学机械光整加工不仅可以明显提高齿轮表面质量,而且使齿轮的齿廓精度和螺旋线精度有所提高。
Gear is a key component in mechanical transmission and plays an important role in mechanical equipment. Each index of all kinds of mechanism, such as operating precision, performance, life and reliability, are closely related to gear performance. Gear is gaining wide popularity in the automobile industry, almost all car transmission system contains gear pair. Therefore, the gear manufacturing precision and quality will directly affect the efficiency of auto transmission system, noise, movement precision and longevity,etc. Numerous studies show that improving the surface quality of gear can effectively improve various aspects performance of gear and can improve its service life. Tooth surface finishing is an effective way to improve the tooth surface quality and improve the accuracy of gear.
Chemical mechanical finishing (CMF) has developed rapidly in recent years as a non-traditional machining technics, and its prominent advantages is high efficiency and can obtain good surface morphology. At present, it has been applied in various mechanical parts surface finishing, and it will be of great significance for improving gear quality if it can be applied in gear tooth surface finishing.
This paper studied the material removal mechanism of chemical mechanical finishing based on the process of microscopic outline of workpiece surface morphology. Mechanical action in gear chemical mechanical finishing by generating method is analysed in detail. The relative speed changing curves and load distribution curves of meshing gear tooth profile were given which provide theory basis for precision analysis of gear chemical mechanical finishing by generating method.
The traditional three-acid finishing was analysed, The environmental chemical finishing technic was studied, and 45# steel slice have been investigated. The results showed that chemical mechanical finishing can make Ra value of the steel parts surface roughness reduced from 0.252μm to 0.067μm, and proved that it is effective in steel parts chemical mechanical finishing.
A mechanism is designed to finish the theoretical analysis and experimental research of cylindrical spur gear finishing using chemical mechanical methods. The experimental results showed that chemical mechanical finishing not only can obviously improve the machined gear surface quality, but also can improve the cylindrical spur gear tooth profile accuracy and spiral accuracy.
引文
[1]齿轮加工技术和装备发展现状与趋势[J].重庆机床(集团)有限责任公司廖绍华,2007.4
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[11]Krantz T L, Alanou M P, Evans H P, et al. Surface fatigue lives of case-carburized gears with an improved surface finish[J]. Journal of Tribology-Transactions of the ASME,2001,123:709-716.
[12]Nakatsuji T, Mori A, Shimotsuma Y. Pitting durability of electrolytically polished medium carbon steel gears[J]. Journal of Tribology-Transactions of the ASME,1995,38 (2):223-232.
[13]Nakatsuji T, Mori A. Pitting durability of electrolytically polished medium carbon steel gears-succeeding report[J]. Journal of Tribology-Transactions of the ASME,1999,42(2):393-400.
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[15]S.M.A Aziz Seireg. A parametric study of frictional noise in gears[J]. Wear, 1994.176:25-28
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[18王祝堂主编.铝材表面处理手册[M].1992,江苏科学技术出版社
[19]梅燕,韩业斌,聂柞仁.用于超精密硅晶片表面的化学机械抛光(CMP)技术研究[J].润滑与密封,2006,9：206-212
[20]G Nanz Camilletti E Lawrence. Modeling of chemical-mechanical polishing a review[J]. IEEE Transactions on Semiconductor Manufacturing 1995,8:382-389
[21]Hong Liang, Thierry Le Mogne, Jean-Michel Martin. Interfacial Transfer between Copper and Polyurethane in Chemical-Mechanical Polishing[J]. Journal of Electronic Materials, Vol.31, No.8,2002
[22]Runnel S R, Eyman L M. Tribology Analysis of Chemical-Mechanical Polishing[J]. J Electroghem Soe,1994,141(6):1698-1701
[23]Runnel S R. Feature-Scale Fluid-Based Erosion Modeling for Chemical-Mechanical Polishing[J]. J Electroghem Soe,1994,141(7):1900-1904
[24]Cook L M. Proc SRC Topical Research[A], Conference on Chemical-Mechanical for Planarization[C], SRC Reseach Park, NC(1992), vol#P92008
[25]Golini D, Jacobs S D. Phsics of loose abrasive microgrinding[J]. Appl Opt,1991,30(19): 2761-2777
[26]Nam-Hoon kim,Yong-Jin Seo and Woo-Sun Lee. Tem erature effeets of Pad eonditioning Process on oxide CMP:Polishing Pad, slurry charaeteristics, and surface reaetions.Available online at www.sciencedirect.com.7 November 2005
[27]Brian Tuck. The chemical polishing of semiconductors. Journal of Materials Science 10(1975) 321-339
[28]Z. F. Tomashik, V.M. Tomashik, I.B. Stratiychuk. Chemical-Mechanical Polishing of CdTe and ZnxCdl-xTe Single Crystals by H2O2(HNO3)-HBr-Organic Solvent Etchant Compositions. Journal of Electronic Materials, Vol.38, No.8,2009 Special Issue Paper
[29]吴明远、金毅等.纳米化学研磨改善轴承表面质量的试验[J].农业机械学报,第39卷第8期,2008.8
[30]董延茂、赵丹等.钢表面环保型化学抛光液的研制[J].电镀与涂饰,第29卷第4期,2009.10
[31]屈战民.镍铁合金化学抛光工艺研究[J].材料保护第36卷增刊,2004.9
[32]诺门仓.表面工程资讯[J].第三卷12期,2003.5
[33]庞洪涛,铝及铝合金环保型化学抛光研究[D]：(硕士学位论文).广州：机械科学研究院.2002
[34]Steigerwald J M, Murarka S P, Gutmann R J. Chemical Mechanical Planarization of Microelectric Materials[M]. John Wiley & Sons Ine:New York, USA,1996,214
[35]Luo Q, Babu S V. Dishing Effects during Chemical Mechanical Polishing of Copper in Acidic Media[J]. J Electrochem Soc,2000,147(12):4639-4644
[36]Pobaix M. Atlas of Electrochomical Equilibria in Aqueous Solutions[M], NACE, Houston, TX,1975
[37]Uhiig H H, Revie R W. Corrosion ard Corrosion Control[M]. John Wiley & Sons Ine:New York, USA,1985
[38]刘东光,H2SO4-H3PO4为基液的模具钢化学抛光工艺研究[D]：(硕士学位论文),武汉：武汉理工大学.2008
[39]董岚枫,徐春旭,诺门仓.化学研磨抛光技术在IC制造设备中的应用电子工艺专用设备[J].2005,34(9)
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[41]暨调和.建筑铝型材的阳极氧化和电解着色[J].湖南科学技术出版社
[42]Patta M, VerCruysse D. J. Electrochem[J]. Soe,1990,137(10):3016
[43]Jacquet P. A. Metal Finishing[J],1950,48(1):25
[44]Glarum S.H, Marshall J. H, J. Electrochem[J]. Soc,1985,132:2872
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[55]白明光等.齿轮光整加工新工艺动态力互研法[J].机械工程学报,2000.1
[2]乐美豪.中国齿轮制造也的发展预测[J].制造技术与机床,2003,5：11-13.
[3]孙凤池.汽车齿轮制造技术及研究方向[J].汽车工艺与材料,2007,3：1-3.
[4]江甫炎.近代齿轮制造工艺[M].北京：航空工业出版社,1994.
[5]杨世春,汪鸣铮,张银喜等.表面质量与光整技术[M].北京：机械工业出版社,2000.
[6]马宁,螺旋锥齿轮脉冲电化学及电化学机械光整加工技术研究[D]：(博士学位论文).大连：大连理工大学,2010
[7]齿轮手册编委会.齿轮手册(上册)[M].北京：机械工业出版社,2001.1
[8]全永听.工程摩擦学[M].杭州：浙江大学出版社,1994.1
[9]周锦进,翟小兵,庞桂兵,李洪友,王辉,徐文骥,郭丽莎.脉冲电化学光整加工的实验研究[J].大连理工大学学报,2003.3：311-314(EI收录)
[10]李洪友,周锦进,庞桂兵,翟小兵,王辉.表面质量对齿轮使用性能指标影响的研究[J].农业机械学报.2004.4：174-178(EI索源)
[11]Krantz T L, Alanou M P, Evans H P, et al. Surface fatigue lives of case-carburized gears with an improved surface finish[J]. Journal of Tribology-Transactions of the ASME,2001,123:709-716.
[12]Nakatsuji T, Mori A, Shimotsuma Y. Pitting durability of electrolytically polished medium carbon steel gears[J]. Journal of Tribology-Transactions of the ASME,1995,38 (2):223-232.
[13]Nakatsuji T, Mori A. Pitting durability of electrolytically polished medium carbon steel gears-succeeding report[J]. Journal of Tribology-Transactions of the ASME,1999,42(2):393-400.
[14][日]仙波正驻著,张范孚译.齿轮的误差与强度[M].北京：机械工业出版社,1982.1
[15]S.M.A Aziz Seireg. A parametric study of frictional noise in gears[J]. Wear, 1994.176:25-28
[16]庞桂兵.脉冲电化学及电化学机械齿轮光整与修形加工技术研究[D].大连：大连理工大学,2005.
[17]李洪友.齿轮的脉冲电化学光整加工技术基础研究[D]：(硕士学位论文).大连：大连理工大学,2003.
[18王祝堂主编.铝材表面处理手册[M].1992,江苏科学技术出版社
[19]梅燕,韩业斌,聂柞仁.用于超精密硅晶片表面的化学机械抛光(CMP)技术研究[J].润滑与密封,2006,9：206-212
[20]G Nanz Camilletti E Lawrence. Modeling of chemical-mechanical polishing a review[J]. IEEE Transactions on Semiconductor Manufacturing 1995,8:382-389
[21]Hong Liang, Thierry Le Mogne, Jean-Michel Martin. Interfacial Transfer between Copper and Polyurethane in Chemical-Mechanical Polishing[J]. Journal of Electronic Materials, Vol.31, No.8,2002
[22]Runnel S R, Eyman L M. Tribology Analysis of Chemical-Mechanical Polishing[J]. J Electroghem Soe,1994,141(6):1698-1701
[23]Runnel S R. Feature-Scale Fluid-Based Erosion Modeling for Chemical-Mechanical Polishing[J]. J Electroghem Soe,1994,141(7):1900-1904
[24]Cook L M. Proc SRC Topical Research[A], Conference on Chemical-Mechanical for Planarization[C], SRC Reseach Park, NC(1992), vol#P92008
[25]Golini D, Jacobs S D. Phsics of loose abrasive microgrinding[J]. Appl Opt,1991,30(19): 2761-2777
[26]Nam-Hoon kim,Yong-Jin Seo and Woo-Sun Lee. Tem erature effeets of Pad eonditioning Process on oxide CMP:Polishing Pad, slurry charaeteristics, and surface reaetions.Available online at www.sciencedirect.com.7 November 2005
[27]Brian Tuck. The chemical polishing of semiconductors. Journal of Materials Science 10(1975) 321-339
[28]Z. F. Tomashik, V.M. Tomashik, I.B. Stratiychuk. Chemical-Mechanical Polishing of CdTe and ZnxCdl-xTe Single Crystals by H2O2(HNO3)-HBr-Organic Solvent Etchant Compositions. Journal of Electronic Materials, Vol.38, No.8,2009 Special Issue Paper
[29]吴明远、金毅等.纳米化学研磨改善轴承表面质量的试验[J].农业机械学报,第39卷第8期,2008.8
[30]董延茂、赵丹等.钢表面环保型化学抛光液的研制[J].电镀与涂饰,第29卷第4期,2009.10
[31]屈战民.镍铁合金化学抛光工艺研究[J].材料保护第36卷增刊,2004.9
[32]诺门仓.表面工程资讯[J].第三卷12期,2003.5
[33]庞洪涛,铝及铝合金环保型化学抛光研究[D]：(硕士学位论文).广州：机械科学研究院.2002
[34]Steigerwald J M, Murarka S P, Gutmann R J. Chemical Mechanical Planarization of Microelectric Materials[M]. John Wiley & Sons Ine:New York, USA,1996,214
[35]Luo Q, Babu S V. Dishing Effects during Chemical Mechanical Polishing of Copper in Acidic Media[J]. J Electrochem Soc,2000,147(12):4639-4644
[36]Pobaix M. Atlas of Electrochomical Equilibria in Aqueous Solutions[M], NACE, Houston, TX,1975
[37]Uhiig H H, Revie R W. Corrosion ard Corrosion Control[M]. John Wiley & Sons Ine:New York, USA,1985
[38]刘东光,H2SO4-H3PO4为基液的模具钢化学抛光工艺研究[D]：(硕士学位论文),武汉：武汉理工大学.2008
[39]董岚枫,徐春旭,诺门仓.化学研磨抛光技术在IC制造设备中的应用电子工艺专用设备[J].2005,34(9)
[40]李华敏,韩元莹,王知行.渐开线齿轮的几何原理与计算[J].机械工业出版社,1985.11,第1版.
[41]暨调和.建筑铝型材的阳极氧化和电解着色[J].湖南科学技术出版社
[42]Patta M, VerCruysse D. J. Electrochem[J]. Soe,1990,137(10):3016
[43]Jacquet P. A. Metal Finishing[J],1950,48(1):25
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