基于DSP的波长调谐干涉抗振技术研究
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摘要
以Φ600mm波长调谐相移斐索干涉仪为研究对象,研究移相干涉测量中的波长调谐抗振技术。在主动抗振技术中,以PZT反馈的机电式抗振技术应用比较广泛,但它难以满足大口径光学元件的精密移动要求,且频率响应低,对振动无法实现很好的补偿。本文研究基于波长调谐的抗振技术,采用可调谐半导体激光器,通过改变波长来补偿振动引起的相位变化,能够提供很高的响应频率,更好的达到抗振的目的。
在Φ600mm波长调谐相移斐索干涉仪中,采用单点法探测振动信号,对幅频积100λHz以下的振动信号进行了探测,并研究了振动信号的分析方法,设计了DSP控制补偿系统,全面分析了补偿系统的设计原理,编制了相关控制程序,对可调谐半导体激光器的两种波长调制模式分别施加模拟振动信号与反馈补偿信号,使得振动中的干涉条纹稳定下来,达到了抗振效果。
The wavelength-tuned anti-vibration technology for theΦ600mm wavelength-tuned phase-shifting Fizeau interferometer is researched in this paper. In the active anti-vibration technology, the method using piezoelectric transducer (PZT) as vibration-compensating device is widely used in optical testing. However, it's difficult to satisfy the precise moving requirements while testing the large-aperture optical components. Meanwhile, it has low frequency respond. Therefore, we study on the wavelength-tuned anti-vibration technology basing on the Tunable Diode Laser, which can provide the high frequency respond and achieve better effect of vibration resistance.
In theΦ600mm wavelength-tuned phase-shifting Fizeau interferometer, single-point method is used to detect the vibration signal whose product of amplitude and frequency is less than 100λHz. The analysis of vibration signal is described in details. The compensation control system basing on the DSP is designed, whose designing principle is analyzed and the relevant control procedure is compiled. The simulation vibration signal and compensating signal are separately applied on the two modulation mode of the Tunable Diode Laser. And then the interference fringes are stabilized. It achieves good anti-vibration effects.
在Φ600mm波长调谐相移斐索干涉仪中,采用单点法探测振动信号,对幅频积100λHz以下的振动信号进行了探测,并研究了振动信号的分析方法,设计了DSP控制补偿系统,全面分析了补偿系统的设计原理,编制了相关控制程序,对可调谐半导体激光器的两种波长调制模式分别施加模拟振动信号与反馈补偿信号,使得振动中的干涉条纹稳定下来,达到了抗振效果。
The wavelength-tuned anti-vibration technology for theΦ600mm wavelength-tuned phase-shifting Fizeau interferometer is researched in this paper. In the active anti-vibration technology, the method using piezoelectric transducer (PZT) as vibration-compensating device is widely used in optical testing. However, it's difficult to satisfy the precise moving requirements while testing the large-aperture optical components. Meanwhile, it has low frequency respond. Therefore, we study on the wavelength-tuned anti-vibration technology basing on the Tunable Diode Laser, which can provide the high frequency respond and achieve better effect of vibration resistance.
In theΦ600mm wavelength-tuned phase-shifting Fizeau interferometer, single-point method is used to detect the vibration signal whose product of amplitude and frequency is less than 100λHz. The analysis of vibration signal is described in details. The compensation control system basing on the DSP is designed, whose designing principle is analyzed and the relevant control procedure is compiled. The simulation vibration signal and compensating signal are separately applied on the two modulation mode of the Tunable Diode Laser. And then the interference fringes are stabilized. It achieves good anti-vibration effects.
引文
[1]Bruning J H, Herriott D R, etc. Digital wavefront measuring interferometer for testing optical surfaces and lenses. Applied Optics,1974,13(11):2693-2703
[2]吴栋,朱日宏,陈磊,王青,何勇,高志山.抗振型移相干涉测量术的进展.光学仪器,2004,26(5),59-64
[3]何祖斌,许乔,柴立群,邓燕.移相干涉仪的抗振技术研究进展.光学学报,2007,32(3)：416-419
[4]Schwider J. Phase shifting interferometry:reference phase error reduction. Applied Optics,1989,28(18):3889-3894
[5]Kong I B, Kim S W. General algorithm of phase-shifting interferometry by iterative least-squares fitting. Optical Engineering,1995,34(1):183-188
[6]Zhaoyang Wang, Bongtae Han. Advanced iterative algorithm for phase extraction of randomly phase-shifted interferograms. Optics Letters,2004,29(14):1671-1673
[7]Leslie L. Deck. Suppressing phase errors from vibration in phase-shifting interferometry. Applied Optics,2009,48(20):3948-3960
[8]Jungjae Park, Seung-Woo Kim. Vibration-desensitized interferometer by continuous phase shifting with high-speed fringe capturing. Optics Letters,2010,35(1):19-21
[9]Chris L. Koliopoulos. Simultaneous phase shift interferometer. SPIE,1991,1513:119-127
[10]J. E. Millerd, N. J. Brock. Methods and Apparatus for Splitting、Imaging and Measuring wavefronts in interferometry.2001, U. S. Patent 6,304,330
[11]J. E. Millerd, N. Brock. Pixelated Phase-Mask Dynamic Interferometer. SPIE,2004, 5531:304-310
[12]Troy A. Rhoadarmer, Laura M. Klein. Design of a spatially phase shifted self-referencing interferometer wave front sensor. SPIE,2006,6303:63060K-1-12
[13]左芬,陈磊,徐春生.基于二维光栅分光的同步移相干涉测量技术.光学学报.2007,27(4)：663-667
[14]Terry Yuan-Fang Chen, Yi-Liang Du. One-Shot Surface Profile Measurement Using Polarized Phase-Shifting. SPIE,2009,7511:751102-1-8
[15]徐晨.动态干涉测试技术与应用研究[博士学位论文].南京：南京理工大学,2009
[16]Liang-Chia Chen, Sheng-Lih Yeh, Abraham Mario Tapilouw Jui-Chin Chang,3-D surface profilometry using simultaneous phase-shifting interferometry. Optics Communications,2010,283:3376-3382
[17]Freschi A. A, Frejlich J. Adjustable phase control in stabilized interferometry. Optics Letters,1995.20(6):635-637
[18]吴子明.主动抗振技术研究-单点探测与PZT补偿[硕士学位论文].南京：南京理工大学,2003
[19]Cole G C, Burge J H, Derrmann L R. Vibration stabilization of a phase shifting interferometer for large optics. SPIE,1997,3134:438-446
[20]赵伟瑞,曹根瑞.斩波式自适应移相干涉技术.光学学报,2002,22(70)：858-862
[21]Zhao C, Burge J H. Vibration-compensated interferometer for surface metrology. Appl. Opt.,2001,40(34):6215-6222
[22]Osami Sasaki, Kazuhide Takahashi, Taka-masa Suzuki. Sinusoidal phase modulating laser diode interferometer with a feedback control system to eliminate external disturbance. Optical Engineering,1990,29(12):1511-1515
[23]O.Sasaki, T.Okamura, T.Nakamura. Sinusoidal phase modulating Fizeau interferometer. Appl.Opt.,1990,29(4):512-515
[24]Takamasa Suzuki, Osami Sasaki,etc. Differential type of phase-locked laser diode interferometer free from external disturbance. Applied Optics,1992,31(34):7242-7248
[25]T. Suzuki, O. Sasaki, T. Maruyama. Real-time displacement measurement using synchronous detection in a sinusoidal phase modulating interferometer. Appl.Opl.,1993, 32(5):1635-1639
[26]何国田,曾智,李明.实时测量表面形貌的抗振抗干扰半导体激光干涉仪.光学学报,2009,29：216-219
[27]Guotian He, Xiangzhao Wang, Aijun Zeng et al.. Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement. Chin. Opt. Lett.,2007,5(3): 164-167
[28]郝晶晶.波长移相干涉测量技术研究[硕士学位论文].南京：南京理工大学,2007
[29]陆敏江.抗振型半导体激光干涉仪的研制[硕士学位论文].武汉：武汉大学,2003
[30]徐斌,邱怡申,徐惠真.可调谐半导体激光器调谐机理及进展.闽江学院学报(自然科学版),2006,27(5),47-49
[31]李耐和.可调谐激光器种类及发展趋势.世界产品与技术,2002,(2)：39-41
[32]谢建平,王沛,许立新,章江英,吴云霞,明海.半导体激光器的波长调谐和波长稳定技术.量子电子学报,2002,19(2)：97-103
[33]程丽君.主动抗振干涉技术中瞬态相位检测的研究[硕士学位论文].南京：南京理工大学,2001
[34]P. D. Ruiz, J. M. Huntley, Y. Shen, etc. Vibration-induced phase errors in high-speed phase-shifting speckle-pattern interferometry. Appl. Opt.2001,40(13):2117-2125
[35]郑国强,傅江涛等.数字信号处理-理论与实践(第1版).西安：西安电子科技大学出版社,2009：21-28
[36]徐天成,谷亚林,钱玲.信号与系统(第3版).北京：电子工业出版社,2008
[37]袁中文.故障信号采样长度、时间间隔和频率的关系.设备管理与维修,2002,(1)：31-32
[38]何勇,姬会东,徐永祥,吴子明.基于单管法探测相位的自适应抗振干涉技术.红外与激光工程,2004,33(4),409-413
[39]吴栋,朱日宏,陈磊等.移相干涉仪的主动抗振技术：光强-相位法振动探测与补偿.激光杂志,2004,25(6),65-66
[40]J.M.Huntley. Suppression of phase errors from vibration in phase-shifting interferometry. Opt. Soc. Am. A,1998,15(8):2233-2237
[41]P. J. de Groot, Vibration in phase-shifting interferometry. Opt. Soc.Am.A,1995, (12): 354-365
[42]P. J. de Groot, Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window. Appl. Opt.,1995,34:4723-4730
[43]L. Deck. Vibration-resistant phase-shifting interferometry. Appl.Opt.,1996, (35): 6655-6662
[44]张雄伟.DSP芯片原理与开发应用(第二版).北京：电子工业出版社,2000
[45]顾卫钢.手把手教你学DSP--基于TMS320X281x.北京：北京航空航天大学出版社,2011
[2]吴栋,朱日宏,陈磊,王青,何勇,高志山.抗振型移相干涉测量术的进展.光学仪器,2004,26(5),59-64
[3]何祖斌,许乔,柴立群,邓燕.移相干涉仪的抗振技术研究进展.光学学报,2007,32(3)：416-419
[4]Schwider J. Phase shifting interferometry:reference phase error reduction. Applied Optics,1989,28(18):3889-3894
[5]Kong I B, Kim S W. General algorithm of phase-shifting interferometry by iterative least-squares fitting. Optical Engineering,1995,34(1):183-188
[6]Zhaoyang Wang, Bongtae Han. Advanced iterative algorithm for phase extraction of randomly phase-shifted interferograms. Optics Letters,2004,29(14):1671-1673
[7]Leslie L. Deck. Suppressing phase errors from vibration in phase-shifting interferometry. Applied Optics,2009,48(20):3948-3960
[8]Jungjae Park, Seung-Woo Kim. Vibration-desensitized interferometer by continuous phase shifting with high-speed fringe capturing. Optics Letters,2010,35(1):19-21
[9]Chris L. Koliopoulos. Simultaneous phase shift interferometer. SPIE,1991,1513:119-127
[10]J. E. Millerd, N. J. Brock. Methods and Apparatus for Splitting、Imaging and Measuring wavefronts in interferometry.2001, U. S. Patent 6,304,330
[11]J. E. Millerd, N. Brock. Pixelated Phase-Mask Dynamic Interferometer. SPIE,2004, 5531:304-310
[12]Troy A. Rhoadarmer, Laura M. Klein. Design of a spatially phase shifted self-referencing interferometer wave front sensor. SPIE,2006,6303:63060K-1-12
[13]左芬,陈磊,徐春生.基于二维光栅分光的同步移相干涉测量技术.光学学报.2007,27(4)：663-667
[14]Terry Yuan-Fang Chen, Yi-Liang Du. One-Shot Surface Profile Measurement Using Polarized Phase-Shifting. SPIE,2009,7511:751102-1-8
[15]徐晨.动态干涉测试技术与应用研究[博士学位论文].南京：南京理工大学,2009
[16]Liang-Chia Chen, Sheng-Lih Yeh, Abraham Mario Tapilouw Jui-Chin Chang,3-D surface profilometry using simultaneous phase-shifting interferometry. Optics Communications,2010,283:3376-3382
[17]Freschi A. A, Frejlich J. Adjustable phase control in stabilized interferometry. Optics Letters,1995.20(6):635-637
[18]吴子明.主动抗振技术研究-单点探测与PZT补偿[硕士学位论文].南京：南京理工大学,2003
[19]Cole G C, Burge J H, Derrmann L R. Vibration stabilization of a phase shifting interferometer for large optics. SPIE,1997,3134:438-446
[20]赵伟瑞,曹根瑞.斩波式自适应移相干涉技术.光学学报,2002,22(70)：858-862
[21]Zhao C, Burge J H. Vibration-compensated interferometer for surface metrology. Appl. Opt.,2001,40(34):6215-6222
[22]Osami Sasaki, Kazuhide Takahashi, Taka-masa Suzuki. Sinusoidal phase modulating laser diode interferometer with a feedback control system to eliminate external disturbance. Optical Engineering,1990,29(12):1511-1515
[23]O.Sasaki, T.Okamura, T.Nakamura. Sinusoidal phase modulating Fizeau interferometer. Appl.Opt.,1990,29(4):512-515
[24]Takamasa Suzuki, Osami Sasaki,etc. Differential type of phase-locked laser diode interferometer free from external disturbance. Applied Optics,1992,31(34):7242-7248
[25]T. Suzuki, O. Sasaki, T. Maruyama. Real-time displacement measurement using synchronous detection in a sinusoidal phase modulating interferometer. Appl.Opl.,1993, 32(5):1635-1639
[26]何国田,曾智,李明.实时测量表面形貌的抗振抗干扰半导体激光干涉仪.光学学报,2009,29：216-219
[27]Guotian He, Xiangzhao Wang, Aijun Zeng et al.. Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement. Chin. Opt. Lett.,2007,5(3): 164-167
[28]郝晶晶.波长移相干涉测量技术研究[硕士学位论文].南京：南京理工大学,2007
[29]陆敏江.抗振型半导体激光干涉仪的研制[硕士学位论文].武汉：武汉大学,2003
[30]徐斌,邱怡申,徐惠真.可调谐半导体激光器调谐机理及进展.闽江学院学报(自然科学版),2006,27(5),47-49
[31]李耐和.可调谐激光器种类及发展趋势.世界产品与技术,2002,(2)：39-41
[32]谢建平,王沛,许立新,章江英,吴云霞,明海.半导体激光器的波长调谐和波长稳定技术.量子电子学报,2002,19(2)：97-103
[33]程丽君.主动抗振干涉技术中瞬态相位检测的研究[硕士学位论文].南京：南京理工大学,2001
[34]P. D. Ruiz, J. M. Huntley, Y. Shen, etc. Vibration-induced phase errors in high-speed phase-shifting speckle-pattern interferometry. Appl. Opt.2001,40(13):2117-2125
[35]郑国强,傅江涛等.数字信号处理-理论与实践(第1版).西安：西安电子科技大学出版社,2009：21-28
[36]徐天成,谷亚林,钱玲.信号与系统(第3版).北京：电子工业出版社,2008
[37]袁中文.故障信号采样长度、时间间隔和频率的关系.设备管理与维修,2002,(1)：31-32
[38]何勇,姬会东,徐永祥,吴子明.基于单管法探测相位的自适应抗振干涉技术.红外与激光工程,2004,33(4),409-413
[39]吴栋,朱日宏,陈磊等.移相干涉仪的主动抗振技术：光强-相位法振动探测与补偿.激光杂志,2004,25(6),65-66
[40]J.M.Huntley. Suppression of phase errors from vibration in phase-shifting interferometry. Opt. Soc. Am. A,1998,15(8):2233-2237
[41]P. J. de Groot, Vibration in phase-shifting interferometry. Opt. Soc.Am.A,1995, (12): 354-365
[42]P. J. de Groot, Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window. Appl. Opt.,1995,34:4723-4730
[43]L. Deck. Vibration-resistant phase-shifting interferometry. Appl.Opt.,1996, (35): 6655-6662
[44]张雄伟.DSP芯片原理与开发应用(第二版).北京：电子工业出版社,2000
[45]顾卫钢.手把手教你学DSP--基于TMS320X281x.北京：北京航空航天大学出版社,2011