高效晶硅太阳能光伏电池精密印刷系统的关键理论与技术研究
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摘要
光伏发电技术是解决全球能源危机的有效途径之一，而在众多太阳能光伏电池技术中，晶体硅太阳能光伏电池技术发展最为成熟，产业化好，是主流的发展方向。2008年金融危机之后，欧洲主权债务危机相继爆发，全球光伏产业受到了极大的影响。在这种背景下，整个光伏产业都在积极寻求一种有效降低生产成本而提高电池转换效率的方法，因此，晶硅光伏电池生产不断向薄片化、低破损率、高产量等方向发展，选择性发射极(Selective Emitter)和双次印刷(DoublePrinting)等晶硅光伏电池电极金属化新技术也相继出现，这对太阳能晶硅光伏电池电极金属化生产线上设备提出了更高的技术要求。
在晶硅光伏电池电极金属化生产线上，全自动视觉丝网印刷系统是线上主要生产设备之一，也是执行选择性发射极和双次印刷工艺的主体，其生产效率和破损控制影响着整条生产线的产量，因此，本文将对高效晶硅太阳能光伏电池精密印刷系统的关键理论与技术进行深入地研究，特别是在基于视觉的精密定位方面做了系统的研究，主要内容如下：
(1)针对丝网印刷的高速、高精度和少破损要求，开发出了新型精密视觉丝网印刷系统，并对整个系统进行模块化、柔性化设计；提出了一种多相机视觉精密印刷系统定位基准标定方法，快速建立了系统内各局部坐标系间的映射关系；在硅片视觉定位、检测方面，提出了基于正方形拟合的硅片视觉定位算法、基于平行线拟合的栅线检测算法以及多种逻辑组合的破损检测算法。
(2)平面三自由度调整对位机构是精密视觉丝网印刷系统的关键机构，其定位精度直接影响丝网印刷质量，本文提出了一种适用于丝网印刷的新型平面三自由度并联对位平台(XY-Theta并联对位平台)，并使用几何法和矢量解析法建立了该并联平台的两种运动学正解和逆解模型，然后，提出了一种有效的运动学精度分析方法，得到了分别由输入误差和结构参数误差引起的末端位置和姿态误差在并联平台工作空间内的分布情况，由此得到了相关的结论。
(3)利用XY-Theta并联对位平台的结构特点，结合矢量法和解析法，提出了一种XY-Theta并联对位平台的误差建模方法，构造出末端位置和姿态误差与几何误差源之间的映射关系，得到了误差雅克比矩阵；并通过一种几何误差灵敏度分析方法，评估了各个几何误差源对末端位置误差和姿态误差的影响。
(4)在XY-Theta并联对位平台运动学标定方面，提出了基于可移动单相机视觉测量的三角形面姿态插值标定方法和基于双相机全位姿视觉测量的分步运动学标定方法。三角形面姿态插值标定方法是一种有别于传统并联机构运动学标定的方法，避免了较为复杂的几何全参数辨识，降低了调试人员的技术要求，而且容易实现工业设备的自动标定，而分步运动学标定方法是一种分步递进的误差测量、参数辨识、误差补偿运动学标定方案，以实现更高精度的标定。
最后，在总结全文的基础上，本文还对晶硅光伏电池的精密视觉印刷系统的研究重点和研究方向进行了展望。
The photovoltaic (PV) power generation technology is the new energy leader tosolve the global energy crisis. Various materials are applied to solar cells, but themost prevalent material for solar cells is bulk crystalline silicon in the PV market,and its product technology also is mature. After the2008global financial crisis, thesovereign debt crisis break out in European, the global PV industry has been greatlychallenged. Against this background the whole PV industry is seeking a way toreduce the cost of production and increase the efficiency of a solar cell. Therefore,the wafer tends to become thinner and thinner, ask for the lower breakage rate andthe higher throughput, and new technologies of selective emitter and double printingare applied to the metallization of crystalline silicon solar cells. These bring newchallenges to the equipments on the metallization production line.
Fully automatic vision-based screen printing system is one of the key productionfacilities on the crystalline silicon solar cells production line, so are the mainactuators that implement the technologies of selective emitter and double printing.And its productivity and breakage affect the output of solar cells of the whole line.Therefore, key theories and technologies on the precision printing system of highefficient crystalline silicon solar cells is thoroughly investigated in this paper,especially in the field of precision positioning base on vision metrology. The maincontributors of the thesis are listed as follows:
(1) Based on the requirement of high accuracy, high speed and low breakage rate,a novel precision vision-based screen printing system is proposed, which has amodular design and the highest flexibility. And then a positioning calibrationalgorithm applied to multi-cameras screen printing system is presented, which canquickly establish the mapping relationship of local coordinate systems. awafer-positioning method based on the square fitting and a finger-inspection methodbased on parallel lines fitting are proposed using vision metrology, and somebreakage inspection methods and its logical grouping are also introduced in thissection.
(2) The three degree-of-freedom (3-DOF) planar alignment positioningmechanism is a key part of precision vision-based screen printing system, and itspositioning accuracy directly impacts the quality of printing. A novel3-DOF planar parallel alignment stage for screen printing, being named XY-Theta parallelalignment stage, is proposed in this paper. Its two direct and inverse kinematicmodels are obtained by a geometrical method and a vector combined with analyticmethod. An useful method is presented to analyze the kinematic accuracy ofXY-Theta parallel alignment stage, to obtain the maximum position and orientationerrors in the workspace subjected to input errors and structure parameter errors, andthen some conclusions are drawn.
(3) Based on the characteristics of XY-Theta parallel alignment stage, animproved error modelling method is proposed using the vector method and theanalytical method. The mapping relationship between the errors of position andorientation and the errors of geometric parameters is derived, and the Jacobin errormatrix is also obtained. Then, the influences of all geometric error sources ofXY-Theta parallel alignment stage on the terminal pose errors are estimated via asensitivity analysis method.
(4) For the calibration of XY-Theta parallel alignment stage, an orientationinterpolation method using a triangular area to position the alignment point based ona moving camera, and a step kinematic calibration method based on two cameras aredesigned. The orientation interpolation method differs from the traditional kinematiccalibration methods, and can calibrate the equipment itself automatically withoutcomplicated error modelling and identification for all geometric errors and the needfor any background in parallel robot calibration. By contrast, the step and gradualkinematic calibration including step measurement, step identification and stepcompensation can lead to a higher accuracy.
Finally, concentration and academic future of the precision vision-based screenprinting system for crystalline silicon solar cells is speculated based on thesummarization of the whole paper.
在晶硅光伏电池电极金属化生产线上，全自动视觉丝网印刷系统是线上主要生产设备之一，也是执行选择性发射极和双次印刷工艺的主体，其生产效率和破损控制影响着整条生产线的产量，因此，本文将对高效晶硅太阳能光伏电池精密印刷系统的关键理论与技术进行深入地研究，特别是在基于视觉的精密定位方面做了系统的研究，主要内容如下：
(1)针对丝网印刷的高速、高精度和少破损要求，开发出了新型精密视觉丝网印刷系统，并对整个系统进行模块化、柔性化设计；提出了一种多相机视觉精密印刷系统定位基准标定方法，快速建立了系统内各局部坐标系间的映射关系；在硅片视觉定位、检测方面，提出了基于正方形拟合的硅片视觉定位算法、基于平行线拟合的栅线检测算法以及多种逻辑组合的破损检测算法。
(2)平面三自由度调整对位机构是精密视觉丝网印刷系统的关键机构，其定位精度直接影响丝网印刷质量，本文提出了一种适用于丝网印刷的新型平面三自由度并联对位平台(XY-Theta并联对位平台)，并使用几何法和矢量解析法建立了该并联平台的两种运动学正解和逆解模型，然后，提出了一种有效的运动学精度分析方法，得到了分别由输入误差和结构参数误差引起的末端位置和姿态误差在并联平台工作空间内的分布情况，由此得到了相关的结论。
(3)利用XY-Theta并联对位平台的结构特点，结合矢量法和解析法，提出了一种XY-Theta并联对位平台的误差建模方法，构造出末端位置和姿态误差与几何误差源之间的映射关系，得到了误差雅克比矩阵；并通过一种几何误差灵敏度分析方法，评估了各个几何误差源对末端位置误差和姿态误差的影响。
(4)在XY-Theta并联对位平台运动学标定方面，提出了基于可移动单相机视觉测量的三角形面姿态插值标定方法和基于双相机全位姿视觉测量的分步运动学标定方法。三角形面姿态插值标定方法是一种有别于传统并联机构运动学标定的方法，避免了较为复杂的几何全参数辨识，降低了调试人员的技术要求，而且容易实现工业设备的自动标定，而分步运动学标定方法是一种分步递进的误差测量、参数辨识、误差补偿运动学标定方案，以实现更高精度的标定。
最后，在总结全文的基础上，本文还对晶硅光伏电池的精密视觉印刷系统的研究重点和研究方向进行了展望。
The photovoltaic (PV) power generation technology is the new energy leader tosolve the global energy crisis. Various materials are applied to solar cells, but themost prevalent material for solar cells is bulk crystalline silicon in the PV market,and its product technology also is mature. After the2008global financial crisis, thesovereign debt crisis break out in European, the global PV industry has been greatlychallenged. Against this background the whole PV industry is seeking a way toreduce the cost of production and increase the efficiency of a solar cell. Therefore,the wafer tends to become thinner and thinner, ask for the lower breakage rate andthe higher throughput, and new technologies of selective emitter and double printingare applied to the metallization of crystalline silicon solar cells. These bring newchallenges to the equipments on the metallization production line.
Fully automatic vision-based screen printing system is one of the key productionfacilities on the crystalline silicon solar cells production line, so are the mainactuators that implement the technologies of selective emitter and double printing.And its productivity and breakage affect the output of solar cells of the whole line.Therefore, key theories and technologies on the precision printing system of highefficient crystalline silicon solar cells is thoroughly investigated in this paper,especially in the field of precision positioning base on vision metrology. The maincontributors of the thesis are listed as follows:
(1) Based on the requirement of high accuracy, high speed and low breakage rate,a novel precision vision-based screen printing system is proposed, which has amodular design and the highest flexibility. And then a positioning calibrationalgorithm applied to multi-cameras screen printing system is presented, which canquickly establish the mapping relationship of local coordinate systems. awafer-positioning method based on the square fitting and a finger-inspection methodbased on parallel lines fitting are proposed using vision metrology, and somebreakage inspection methods and its logical grouping are also introduced in thissection.
(2) The three degree-of-freedom (3-DOF) planar alignment positioningmechanism is a key part of precision vision-based screen printing system, and itspositioning accuracy directly impacts the quality of printing. A novel3-DOF planar parallel alignment stage for screen printing, being named XY-Theta parallelalignment stage, is proposed in this paper. Its two direct and inverse kinematicmodels are obtained by a geometrical method and a vector combined with analyticmethod. An useful method is presented to analyze the kinematic accuracy ofXY-Theta parallel alignment stage, to obtain the maximum position and orientationerrors in the workspace subjected to input errors and structure parameter errors, andthen some conclusions are drawn.
(3) Based on the characteristics of XY-Theta parallel alignment stage, animproved error modelling method is proposed using the vector method and theanalytical method. The mapping relationship between the errors of position andorientation and the errors of geometric parameters is derived, and the Jacobin errormatrix is also obtained. Then, the influences of all geometric error sources ofXY-Theta parallel alignment stage on the terminal pose errors are estimated via asensitivity analysis method.
(4) For the calibration of XY-Theta parallel alignment stage, an orientationinterpolation method using a triangular area to position the alignment point based ona moving camera, and a step kinematic calibration method based on two cameras aredesigned. The orientation interpolation method differs from the traditional kinematiccalibration methods, and can calibrate the equipment itself automatically withoutcomplicated error modelling and identification for all geometric errors and the needfor any background in parallel robot calibration. By contrast, the step and gradualkinematic calibration including step measurement, step identification and stepcompensation can lead to a higher accuracy.
Finally, concentration and academic future of the precision vision-based screenprinting system for crystalline silicon solar cells is speculated based on thesummarization of the whole paper.
引文
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