用户名: 密码: 验证码:
基于多棱镜扫描分光调制原理的CO_2多头激光毛化技术研究
详细信息    本馆镜像全文|  推荐本文 |  |   获取CNKI官网全文
摘要
冷轧金属薄板在汽车、家电、建筑、装饰等行业需求日益增加,同时对于薄板的冲压成型性能和外观涂镀性能要求也越来越高。通过对轧制金属薄板的轧辊表面进行毛化,经过轧制过程将辊面的微形貌组织复印到薄板表面,从而实现对轧制金属薄板表面质量的控制。研究表明,相较喷丸毛化技术和电火花毛化技术,对辊面加工的激光毛化技术具有加工精确、清洁、均匀性好等优点,且激光毛化辊工作寿命长,轧制的金属薄钢板兼顾深冲成型和涂镀性能,可用于高档汽车和家电外用漆面板。但是,现有单头激光毛化技术的加工效率难以满足大型冷轧企业的生产需求,为了缩短加工时间,往往采用低毛化点密度加工辊面,影响了其轧制薄板的表面质量,从而限制了激光毛化技术的推广和应用。针对单头激光毛化存在的效率瓶颈问题,本论文提出了基于多棱镜扫描分光脉冲调制原理的多头CO2激光毛化技术方案。全文的主要工作内容如下:
     (1)首先介绍了多棱镜扫描分光脉冲调制的原理,将一束连续高功率激光经过旋转多棱镜扫描分光后产生多路高功率高重复频率脉冲激光束,其单路脉冲输出频率可达30kHz,多路激光脉冲同时加工,加工效果一致,成倍提高毛化效率。
     (2)采用“内嵌基模高斯光束”的方法推导了扫描高斯光束在近轴条件下经过多棱镜扫描分光脉冲调制光学系统后在输出平面上的光强分布,并根据分布特征分析了实际扫描高斯光束的聚焦特性,聚焦光斑近似为圆形。由于扫描高斯光束聚焦光斑在聚焦镜几何焦面外随扫描角运动,因而讨论了聚焦光斑中心运动与辊面加工区域旋转同步的条件,实现聚焦点跟踪技术,从而可以在辊面获得圆形毛化点,改善了单头斩光盘CO2激光椭圆毛化点所导致的轧制钢板表面各向异性的问题。
     (3)根据毛化加工在效率、表面粗糙度、微形貌参数等方面的要求对多头C02激光毛化加工系统进行了设计,分析了多棱镜和聚焦镜等主要光学器件的设计参数以及加工飞行光路对聚焦效果的影响,并采用几何光学扫描模型简化聚焦点跟踪技术参数范围的分析。
     (4)通过工艺实验研究了多头CO2激光毛化的加工参数范围以及功率和脉宽等毛化工艺参数对于辊面表面粗糙度和微形貌几何参数的影响规律,并对毛化后辊面进行了金相显微分析和硬度测试,毛化后辊面硬度≥HV800。
     (5)对双头激光设备的实践生产情况进行了总结,该设备在具有稳定性好,运营成本较低,加工效率高的特点,毛化加工后辊面表面粗糙度波动范围在±0.2μm内,满足辊面均匀性要求。
Cold-roll steel sheet is widely used in automobile, appliance, construction and decoration industry, and the requirement for its forming ability and painting quality is also increasing. The surface quality of cold-roll steel sheet is controlled through surface texturing of cold roll whose micro organizations of surface will be printed into the surface of steel sheet during the rolling process. Comparing with the SBT(shot blast texturing) and EDT(electrical discharging texturing) technology, research shows that laser texturing is more precise, clean and uniform, meanwhile its textured roller has longer working duration and the laser texturing cold roll steel sheet has both good forming and painting quality, thus can be used as vehicle and appliance outer panel. However, the efficiency of single-head laser texturing is not sufficient to meet the requirement of large cold-roll enterprise. In order to shorten the texturing time, the surface crater density of single-head laser texturing is usually low and thus has compromised the quality of cold roll steel sheet, which in turn affect the application of laser texturing technology. In order to solve the problem of low efficiency of single-head laser texturing, a multi-heads CO2laser texturing technology based on pulse beam modulation by polygon scanning is proposed. The major content of this thesis is as following:
     (1) The principle of modulation of a high power continuous laser into several high repetition pulse lasers by polygon scanning is introduced, and the repetition rate is up to30kHz.
     (2) By using "Embed fundamental Gaussian beam", the distribution of light intensity of the focusing spot on the output plane is derived and the transmission and focus of pulse beam through the optical system is analyzed. The focusing spot is constantly on the move outside the focusing plane while the roller is rotating, and the condition for synchronization is discussed. Therefore, round texturing crater can be obtained instead of elliptical ones which will influence the of steel sheet surface uniformity.
     (3) Multi-heads texturing system parameters are determined according to the requirement of texturing condition. The design parameters of focusing lens and rotating polygon are discussed and the influence of flying optics on the focusing spot is analyzed. A geometrical optical model is introduced to simplify the analysis of synchronization between focusing spot and roller surface to determine the appropriate off-focus parameters.
     (4) The influence of texturing parameters such as laser power and pulse width on surface roughness and surface topography parameters are studied through laser texturing experiments. Metallographic analysis and hardness tests are performed on the textured surface of roller, and the average hardness is above HV800.
     (5) The practice of two-heads CO2laser texturing device is introduced and the device possesses features such as low cost, stability and high efficiency. The fluctuation of roughness of textured roller surface is between±0.2μm and meets the requirement of roller surface uniformity.
引文
[1]康永林.国内外汽车板的现状需求和发展趋势.中国冶金,2003,(6):18-23
    [2]马鸣图.我国汽车钢板研究与应用进展.钢铁,2001,(8):64-69
    [3]周家琮.冷轧轧辊毛化技术.钢铁钒钛,1996,17(3):1-18
    [4]唐静.冷轧薄板表面粗糙度微观形貌的测试分析.钢铁钒钛,2004,25(2):60-70
    [5]T. Furukawa. Investigation on Dimples Distribution Angle in Laser Texturing of Cylinder-Piston Ring System. Coating Technology,1984,19:284~287
    [6]K. Furukawa. Microstructure and wear behavior of roller. Kawasaki Steel Technical Report,1989.1-3
    [7]Rault. Texturing of mill rolls. Proceedings of the 9th Congress of IDDRG,1976. 97~104
    [8]V. Leroy. Technological Impact of Surface. ASM Conference Proceedings,1982. 3-7
    [9]C. Marique. Developments in the Drawing of Metals. Conf on Metals Drawing,1983. 242-247
    [10]W. C. Emmens. The cooperative effect of laser surface texturing. Proc.13th Bienn. Congr of IDDRG,1984.491~496
    [11]宋博岩,郝博.基于组态监控技术的电火花毛化加工机床监控系统.工业控制计算机,2005,(1):75-76
    [12]李振宗,夏勤.表面形貌的功能及其评定参数的研讨.上海计量测试,1994,(4):22-23
    [13]K. Steinhofl. The Lasertex Process:Texturing Work Rolls by Means of Laser Pulses. J. ATB Metal,1987,27(1):11~14
    [14]M. Pfestorf, U. Engel, M. Geiger.3D-Surface Parameters and their Application on Deterministic Textured Metal Sheets. Int. J Mach. Tools Manufacture,1998,38(5-6): 607~614
    [15]W. Rasp, O. Pawelski. Development of deterministic-stochastic surface structures to improve the tribological conditions of sheet forming processes. Journal of Materials Processing Technology,1996,60:355~361
    [16]K. Nishimura. Trbology in metal resistance. American society for metals. Iron and Steel Engineer,1991, (8):46~47
    [17]赖鹏,张庆茂.激光毛化技术的评述及展望.激光与光电子学进展,2009,(4):53-59
    [18]刘红斌,万大平,胡德金.分形表面接触变形对部分膜润滑的影响.摩擦学学报,2008,(3):244-247
    [19]王旭,赵冰,柳春芳.汽车冷轧深冲激光毛化钢板的试验研究.汽车工艺与材料,1996,(8):16-20
    [20]林子光.激光毛化与摩擦学设计.机械设计,2000,(4):79-84
    [21]姚贵升.钢板表面形貌对冲压成形性能和油漆后外观质量的影响.宝钢技术,2001,(1):12-18
    [22]P. Andersson, J. Koskinen, S. Varjus, et al. Microlubrication effect by laser-textured steel surfaces. Wear,2007,262(3):369-379
    [23]G. Ryk, Y. Kligerman, I. Etsion. Experimental Investigation of Laser Surface Texturing for Reciprocating Automotive Components. Tribology transactions,2002, 45(4):444~449
    [24]储双杰,刘宝军.我国高等级汽车板生产现状与展望.轧钢,2005,(1):36-39
    [25]张志勤,何立波,高真凤.国外先进钢铁公司汽车板品种综述.武钢技术,2005,(6):41-46
    [26]曹国辉,赵万生,王振龙等.冷轧辊毛化技术的对比研究.电加工与模具,2002,(4):1-5
    [27]Hongbing Liu, DaPing Wan, Dejin Hu. Microstructure and wear behavior of laser-textured and micro-alloyed Co-based WC and TiC composite sintered-carbide coating. Journal of Material Processing Technology,2009,209(4):805~810
    [28]周灿栋,孙以容,史海生等.喷射成形轧辊材料组织和性能分析.中国金属学会2003中国钢铁年会论文集,2003.125-127
    [29]Boppel. Surface texturing by laser cladding. Optik,1987,77(2):83~92
    [30]D. P. Wan, B. K. Chen, Y. M. Shao, et al. Microstructure and mechanical characteristics of laser coating-texturing alloying dimples. Applied Surface Science, 2008,225(5):3251~3256
    [31]王旭,赵冰,柳春芳.汽车冷轧深冲激光毛化钢板的试验研究.汽车工艺与材料,1996,(8):16-20
    [32]李克良,于晓鸥.冷轧钢辊电火花毛化技术的实验研究.机械设计与制造,1999,(1):53-54
    [33]徐海军.轧辊电花火打毛的实践.武钢技术,2001,(4):57-60
    [34]蒋显全,张秀锦.激光毛化表面技术与应用.四川有色金属,2000,(1):77-79
    [35]赵福令,贾振元,郭东明等.电火花加工技术的新应用—表面毛化.电加工与模具,1995,(1):218-221
    [36]吴长春,张杰,陈先霖等.EDT毛化轧辊表面凹坑形成过程.北京科技大学学报,2007,(1):59-62
    [37]吴长春,张杰,焦让等.轧辊表面形貌与电加工参数关系的研究.冶金设备,2005,(4):45-47
    [38]孟文捷,杨兴亮.低粗糙度高峰值数轧辊毛化参数的优化.安徽冶金科技职业学院学报,2006,(4):11-13
    [39]康大韬,张海,刘景忠等.9Cr2Mo钢冷轧辊低温回火的合理工艺制度.燕山大学学报,1989,(1):1-7
    [40]赵宏杰.冷轧辊镀铬技术应用.中国水运,2008,(7):32-34
    [41]蒙联光,宋和宁.金属工件表面氮化工艺及氮化炉新型电源.大众科技,2009,(3):109-110
    [42]姚成武,黄坚,张培磊等.9Cr2M冷轧辊用钢的激光淬火试验.金属热处理,2009,(7):32-33
    [43]蔺荣岩,汪家道,孔宪梅等.激光合金化冷轧辊的技术研究.新技术新工艺,2002,(1):30-31
    [44]蒋斌,丁培道,徐滨士等.电刷镀纳米复合镀层的接触疲劳性能研究.表面技术,2002,(5):16-18
    [45]方建成,王续跃,周锦进.电火花加工表面形貌与摩擦磨损.电加工与模具,1995,(5):25-27
    [46]冯莲芹,龚世强,许毅峰.电火花毛化的电参数及稳定性分析.宝钢技术,2001,(1):25-29
    [47]M. Vermeulen, J. Scheers, C. DE Mare, et al.3D-Characterization of EBT-steel Sheet surface. International Journal of Machine Tools and Manufacture,1995,35(2): 273~280
    [48]宋仁国,陈光南,张坤.激光和电子束表面强化技术的发展及其应用.物理,2000,(7):411-415
    [49]Dolves. Electron beam texturing of rolls. Iron and Steel Engineer,1991,68(8): 33~38
    [50]De marel. Method and device for manufacturing cold rolled metal sheets or strips and metal sheets or strips. US Patent, No.5789066,1998.1-4
    [51]谭勇,于晓中,刘常升等.电沉积铬毛化工艺及影响参数的研究.钢铁钒钛,2010,31(2):77-80
    [52]孙大乐,姚利松,范群等.不同毛化工艺冷轧辊的使用性能研究.2005年全国冷轧板带生产技术交流会暨第三届薄钢板质量研讨会论文集,2005.123-128
    [53]徐安定.新型大功率CO2激光毛化成套设备及工艺.冶金设备,2004,(6):35-37
    [54]徐焱.激光毛化轧辊成套设备及工艺的应用.现代制造,2005,(19):99-103
    [55]朱大庆,李适民,左都罗等.高功率CO2激光快速刻花实验.激光与红外,1996,(3):172-174
    [56]Hamilius. The effect of laser surface texturing on the tribological behavior of Ti-6A1-4V. La Revue de Metallurgie,1992,89(12):1083-1091
    [57]Pankert, Stahl und Eisen. Trbology in metal working. American society for metals, 1990,110(3):55-60.
    [58]王旭,赵冰,柳春芳.汽车冷轧深冲激光毛化钢板的试验研究.汽车工艺与材料,1996,(8):16-20
    [59]赵新,金杰,姚建铨.激光表面改性技术的研究与发展.光电子·激光,2000,11(3):324-328
    [60]P. Baumgart, D. J. Krajnovich, T. A. Nguyen, et al. A new laser texturing technique for high performance magnetic disk drives. IEEE Transactions on Magnetics,1995, 31(6):2946~2951
    [61]A.C. Tam, I.K. Pour, T. Nguyen, et al. Experimental and theoretical studies of bump formation during laser texturing of Ni-P disk substrates. IEEE Transactions on Magnetics,1996,32(5):3771~3773
    [62]A.C. Tam, I. K. Pour, P. Baumgart. New laser texturing process of magnetic disks for stiction reduction. SPIE,1996,2888:96~107
    [63]陈燕.光纤激光毛化形貌对镀锌板锌花形貌的影响:[硕士学位论文].兰州:兰州理工大学材料加工工程系,2012
    [64]Shaochen Chen, Costas Grigoropoulos, Hee Park, et al. Photothermal displacement detection and transient imaging of bump growth dynamics in laser zone texturing of Ni-P disk substrates. J. Appl. Phys.,1999,85(8):5618~5620
    [65]Shaochen Chen, Mengqi Ye, Costas Grigoropoulos. Time and space resolved imaging and numerical simulation of laser zone texturing of Ni-P disk substrates. SPIE,1999,3618:182~190
    [66]S. C. Chen, D. G. Cahill, C. P. Grigoropoulos. Melting and surface deformation in pulsed laser surface micromodification of Ni-P disks. Journal of Heat Transfer,2000, 122:107~112
    [67]高宏,陈光南.利用激光毛化技术在普通冷带轧机上实现异步轧制.钢铁,1998,(3):63-66
    [68]A. C. Tam, J. Brannon, P. Baumgart et al. Laser texturing of glass disk substrates. IEEE Transactions on Magnetics,1997,33(5):3181~3183
    [69]杨明江,彭林华,李正阳.YAG激光毛化技术进展.应用激光,2002,22(3):323-326
    [70]R. Ranjan, D. N. Lambeth, M. Tromel, et al. Laser texturing for low-flying-height media. J. Appl. Phys.,1991,69(8):5745~5747
    [71]David Kuo, Jing Gui, Bruno Marchon, et al. Design of laser zone texture for low glide media. IEEE Transactions on Magnetics,1996,32(5):3753~3758
    [72]David Kuo, Stan Vierk, Gary Rauch, et al. Laser zone texturing on glass and glass-ceramic substrates. IEEE Transactions on Magnetics,1997,33(1):944~949
    [73]Ted Bennett, Douglas Krajnovich, LeiLi, et al. Mechanism of topography formation during CO2 laser texturing of silicate glasses. J. Appl. Phys.,1998,84(5):2897~2905
    [74]Ted Bennett, Douglas Krajnovich, LeiLi. Thermophysical modeling of bump formation during CO2 laser texturing of silicate glasses. J. Appl. Phys.,1999,85(1): 153~159
    [75]G. Ryk, I. Etsion. Testing piston rings with partial laser surface texturing for friction reduction. Wear,2006,261:792~796
    [76]N. Mirhosseini, P. L. Crouse, M. J. J. Schmidth, et al. Laser surface micro-texturing of Ti-6A1-4V substrates for improved cell integration. Appl. Surf. Sci.,2007,253: 7738-7743
    [77]Izhak E. State of the Art in Laser Surface Texturing. Journal of Tribology,2005, 127(1):248~353
    [78]陈光南.毛化轧辊的新方法及其应用.应用激光,1996,16(4):155-158
    [79]杨森,黄卫东,刘文今等.激光表面快速熔凝过程中熔区组织重构.应用激光,2001,21(4):224-228
    [80]汪家道.功能性表面的摩擦学研究:[博士学位论文].北京:清华大学精密仪器与机械系,1999
    [81]陈光南.激光毛化轧辊技术的特色与进展.力学与实践,2011,(5):79-85
    [82]陈光南.材料力学性能的激光调控(特邀报告).中国激光,2011,(6):43-53
    [83]刘莹.轧辊激光毛化形貌设计与冷轧钢板平整复映关系研究:[博士学位论文].北京:清华大学精密仪器与机械系,2003
    [84]P. Andersson, J. Koskinen, S. Varjus, et al. Microlubrication effect by laser-textured steel surfaces. Wear,2007,262(3-4):369~379
    [85]Dumitru, G Romano, V. Weber, et al. Laser microstructuring of steel surfaces for tribological applications. Applied Physics A Materials Science & Processing,2000, 70(4):485~487
    [86]Gurinder Singh, Peter Baumgart, Eric Baugh, et al. Review of laser-based applications advancing magnetic recordinghard disk drive technology. SPIE,2005, 5713:417~431
    [87]M. Vermeulen, J. Scheers, C. De Mar. Characterization of EBT surfaces. Sibetex 2 Seminar, OCAS Zelzate,1994.456~459
    [88]M. pfestorf, U. Gngel, M. Geiger.3D-surface parameters and their application on deterministic textured metal sheets. International Journal Machine Tools Manufacture, 1998, (5-6):607~614
    [89]S. C. Wang, P. S. Wei. Energy-Beam redistribution and absorption in a drilling or welding cavity. Metal. Trans,1992,23:505~511
    [90]H. S. Carslaw, J. C. Jaeger. Conduct of Heat in Solids. Cavendon Press Oxford,1986. 23-24
    [91]H. E. Cline and T. R. Anthony. Heat treating and melting material with a scanning laser or electron beam. J. Appl. Phys.,1977,48(9):3895~3900
    [92]S. Kou, S. C. Hsu, R. Mehrebian. Rapid melting and solidification of surface fue to a moving heat flux. Metall. Trans. B,1981,12:33~45
    [93]C. L. Chan, J. Mazumder, M. M. Chen. Three-dimensional axisymmetric Model for convection in laser melted pools. Mater. Sci. Technol.,1987,3:306~311
    [94]C. Chan, J. Mazumder, M. M. Chen. Effects of surface tension gradient driven convection in a laser melt pool:three-dimensional perturb-bation model. J. Appl. Phys.,1988,2(11):6166~6174
    [95]叶晓虎,陈熙.激光加热熔池流动和传热的分区数值模拟.中国激光,2002,29(9):855-858
    [96]K. Ravindran, J. Srinivasan, A. G. Marathe. Finite element Solution of surface tension driven flows in laser surface-melting. Mech. Res. Communication,1995, 22(3):291~304
    [97]朱大庆,左都罗,李适民等.激光刻花表面形貌的数值模拟及实验比较.华中理工大学学报,2000,28(1):68-70
    [98]S. R. Vatsya, S. K. Nikumb. Modeling of fluid dynamical processesduring pulsed-laser texturing of material surfaces. Phys. Rev. B,2003,68(3):1-5
    [99]万大平,胡德金,刘红斌等.脉冲激光毛化加工的计算机流体动力学数值模拟.中国激光,2007,34(7):1004-1008
    [100]朱大庆,左都罗,李适民等.一种模拟激光刻花的二维CSF模型.华中科技大学学报,1999,30(6):31-33
    [101]梁钰.激光毛化热效应的有限元仿真分析:[硕士学位论文].武汉:华中科技大 学,2009
    [102]G. Ryk, Y. Kligerman, I. Etsion. Experimental Investigation of Laser Surface Texturing for Reciprocating Automotive Components. Tribology transactions,2002, 45(4):444~449
    [103]雷永平,史耀武,周家瑾.脉冲Nd:YAG激光表面熔凝流场与热场的数值模拟.中国激光,1996,(4):112-114
    [104]Jianfeng Jiang, Yonghui He, Yonggen Yan, et al. Research on laser texturing process and surface quality control. SPIE,2000,4088:240~24
    [105]D.Q. Zhu, D.L. Zuo., S.M. Li, et al. A numerical approach to the shape of the laser textured roll surface and its experimental comparison. Journal of Huazhong University of Science and Technology,2000,28(1):68~70
    [106]洪蕾,李力钧.连续激励斩光盘式调Q-C02脉冲激光器的研制.湖南大学学报,2000,27(6):42-46
    [107]陈培锋,朱明珠,周乐等.射频脉冲CO2激光轧辊毛化技术及工艺实验研究.激光杂志,2008,(1):63-65
    [108]薛原,陈培锋,朱明珠.射频CO2激光用于轧辊毛化的实验研究.光学与光电技术,2007,(4):16-19
    [109]D. L. Zuo, D. Q. Zhu, Z. N. Xie, et al. Effects of chopper on laser texturing of rolls by CO2 laser. SPIE,1999,3862:347~51
    [110]颜永根.冷轧辊毛化技术现状与进展.宝钢技术,1995,(6):2-4
    [11 1]曹国辉,赵万生,王振龙等.冷轧辊毛化技术的对比研究.电加工与模具,2002,(4):1-3
    [112]张瑞华,张为山,李宝磊等.光纤激光无序毛化.应用激光,2012,32(2):100-103
    [113]张瑞华,梁海蛟,李宝磊等.光纤激光轧辊毛化工艺参数研究.应用激光,2012,32(2):104-107
    [114]韩帅.光纤激光轧辊毛化形貌研究:[硕士学位论文].兰州:兰州理工大学材料加工工程系,2012
    [115]张为山.光纤激光毛化数值模拟:[硕士学位论文].兰州:兰州理工大学材料加工工程系,2012
    [116]梁海蛟.光纤激光轧辊毛化工艺研究:[硕士学位论文].兰州:兰州理工大学材料加工工程系,2012
    [117]梁乔春.全固态脉冲串YAG激光毛化设备及工艺研究:[硕士学位论文].武汉:华中科技大学,2012
    [118]杨明江.高重频调制多脉冲YAG激光刻花系统及加工方法.中国,实用新型专利,专利公开号:CN92113223.9,2001.1-4
    [119]D.P. Wan, H. B. Liu, D. J.Hu, et al. C02 laser beam modulating for surface texturing machining. Optics and Laser Technology,2008,40(2):309-314
    [120]D. B. Marc, D. Loren, E. R. Kenneth, et al. High speed of laser perforation of cigarette tipping paper. US Patent, No:7393313,2008.1-4
    [121]陈培锋.高功率激光辊类表面多头毛化加工方法及其装置.中国,国家发明专利,专利公开号:CN200610018261.1,2006.1-6
    [122]H. Shiro. Method and apparatus for laser drilling. US Patent, No:6720524,2004. 1-2
    [123]L. Beiser. Fundamental architecture of optical scanning systems. Applied optics, 1995,34 (31):7307-7317
    [124]L. Liu, N. Chen, C. J. R. Sheppard. Double-reflection polygon mirror for high speed optical coherence microscopy. Optics Letters,2007,32 (24):3528~3530
    [125]L. Langhans. Device for the optical chopping of a laser beam. US Patent, No: 4378480,1983.1-5
    [126]S. Hamada. Method and apparatus for laser drilling. US Patent, No:6720524,2004. 1-16
    [127]X. Yang, Y. Yan, M. Zhong. Laser cladding with wide-band scanning rotating polygon mirror. Proceedings of the ICALEO'98,1989,69:205~215
    [128]H. Weber. Collins'integral for misaligned optical elements. Journal of Modern Optics,2006,53(18):2793~2801
    [129]吕百达.激光光学.(第2版).成都:四川大学出版社,1992.77-79
    [130]葛华,杨坤涛.离轴高斯光束经光学系统变换后的特性研究.激光与红外,2003,33(1):68-70
    [131]张光钧.激光表面工程的发展趋势.机械制造,2005,485(43):1-2
    [132]X. Luo, Y. Wang, P. Chen, et al. Investigation of CO2 laser beam modulation by rotating polygon. Optics and Lasers in Engineering,2011,49(1):132~136
    [133]王本,沈树群.激光扫描和光盘技术.(第1版).北京:北京邮电大学出版社,1992.77-79
    [134]陈海清.现代光学系统.(第2版).武汉:华中科技大学出版社,2003.75-77
    [135]T. Zuo, Z. Wang, K. Chen, et al. The problems that flying optics faced and solution. Proceedings of SPIE,1998,3268:39~46
    [136]H. E. Cline, T. R. Anthony. Heat treating and melting material with a scanning laser or electron beam. J. Appl. Phys.,1977,48:3895~3900
    [137]A. Kar, T. Rockstroh, J. Mazumder. Two dimensional model for laser induced materials damage:Effects of assist gas and multiple reflections inside the cavity. J. Appl. Phys.,1992,71:2560~2569
    [138]M.Ii, T. P. Duffey, J. Mazumder. Spatially and temporally resolved temperature measurements of plasma generated in percussion drilling with a diode-pumped Nd:YAG laser. J. Appl. Phys.,1998,84:4122~4127
    [139]Etsuji Ohmura, Rina Murayama, Isamu Miyamoto. Thermo hydrodynamics analysis on the mechanism of bump formation in laser texturing. SPIE,2000,4088:244-248
    [140]S. R. Vatsya, S. K. Nikumb. Modeling of fluid dynamical processes during pulsed-laser texturing of material surfaces. Phys. Rev. B,2003,68(3):1-5
    [141]邓勃.分析测试数据的统计处理方法.(第1版).北京:清华出版社,2003.71-77

© 2004-2018 中国地质图书馆版权所有 京ICP备05064691号 京公网安备11010802017129号

地址:北京市海淀区学院路29号 邮编:100083

电话:办公室:(+86 10)66554848;文献借阅、咨询服务、科技查新:66554700