基于楔条形阳极探测器的单光子成像系统
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摘要
在地球周围有一层厚度约为地球半径10倍的等离子体层,其主要由N_2、O、H_2及He等原子或分子的电离而形成。其中,对He~+粒子谐振散射形成的30.4 nm极紫外(EUV/Extreme Ultraviolet)进行成像观测是研究地球空间磁层空间暴的主要手段,我国“嫦娥探月二期工程”已确定将“月基地球等离子体层的成像观测”作为其科学目标之一。为此,本文提出并研制了拥有完全自主知识产权的“基于WSA(Wedge and Strip Anodes)探测器的单光子成像系统”的原理样机,主要研究内容、方法及成果如下:
①通过对光电导与光致发射型图像传感器的分析和比较,提出了适合于“月基地球等离子体层成像探测实验”的“基于MCP(Microchannel Plate)的阳极探测器”。
②通过对WSA、Resistive Anode、Delay-line以及Cross Strip等几种主要阳极探测器的研究分析,确定了“基于WSA探测器的单光子成像系统”的研制方案。
③通过分析和对比不同电极结构的WSA,确定了此次设计的电极结构为WSZ(Wedge-Strip-Zigzag)型。
④通过对单光子成像理论的相关研究,确定了总体设计方案。
采用“低压汞灯+光阑+减光片+253.7 nm的窄带滤波片+光学输入窗+成像掩模板+MCP”的方法模拟30.4 nm的极紫外单光子源;探测器主体采用无窗结构;MCP采用“V”型级联;成像电荷读出采用电荷直接收集法;电子读出子系统的设计采用“CSA(Charge Sensitive Preamplifier)+高斯整形主放+DAQ(Data Acquisition)Card+微处理器”的方法。
⑤系统的研究了WSZ位敏阳极的相关理论和制作工艺。
推导了WSZ的位置解码公式;研究了极间串扰的校正方法;分析了WSZ各参量对成像性能的影响;提出了用于测量成像电荷分布半径的两种简便方法;研究了圆形样式的WSZ设计方法,并优化了条纹宽度等差系数和楔形底宽两个参量;编制了WSZ辅助设计程序;通过对“先光刻腐蚀后电镀增厚”与“先电镀增厚后光刻腐蚀”两种工艺的分析和比较,确定了“先光刻腐蚀后电镀增厚”的工艺路线。
设计并制作了两块圆形样式的阳极面板,电极厚度分别为1μm和2μm,其它各参量相同:电荷收集面积Φ48 mm;周期长度1.2 mm;绝缘沟道宽度30μm。
⑥在理论研究和模拟仿真的基础上,设计并制作了CSA和高斯整形主放。
CSA的主体结构采用多路反馈无限增益高通滤波电路,输入级选用N沟道的结型场效应管:主放由极零相消电路、二级Sallen-Key低通滤波器以及幅度调节电路等构成。
⑦开发了基于PCI(Peripheral Component Interconnect)-DAQ Card的数据采集与处理软件。
软件由数据采集、数据处理以及数字成像等模块构成;DAQ Card与主机之间的通信方式为PCI总线控制下的直接内存访问;在主机内存中设置四块乒乓缓存单元以流水线的方式实现高速的数据采集与处理;数据处理主要由平滑滤波、峰值检测、阈值鉴别、脉冲堆积拒绝、位置解码以及事件计数等子模块构成;数字成像负责输出256阶灰度的积分图像。
⑧根据总体设计方案,构建了相应的实验系统。利用该系统测试了空间分辨率、线性度、计数率以及暗计数率等主要技术指标,并对主要影响因素进行了研究分析。
经过测试:有效成像面积达到了Φ38 mm;空间分辨率优于100μm;线性度优于1%;暗计数率低于0.67 Hz/cm~2。实验结果表明,研制出的原理样机已达到“探月二期工程有效载荷—EUV探测器”的技术指标要求。
⑨在全文总结的基础上,对今后的系统优化与正样研制提出了一些建议。
There is a plasmasphere around the Earth, whose thickness is～10 times of the Earth's radius. The plasmasphere is composed of the abundant ions such as N~+, O~+, H~+, He~+, etc. It is a main way for studying the geospatial magnetosphere explosion by imaging the distribution of the He~+ ion through its emission at 30.4 run. A Lunar Imaging Detection for the Earth's Plasmasphere will be carried out in the 2~(nd) project of Chinese Moon Program. Therefor, a prototype of "Single Photon Imaging System Based on Wedge and Strip Anodes Detector" has been proposed and developed with full independent intellectual property rights.
The main contents, methods and achievements are presented as follows:
1) Through the analysis and comparison between the Photoconductive and Photoemissive image sensors, the Anode Detector Based on MCP was proposed to the experiment of Lunar Imaging Detection for the Earth's Plasmasphere.
2) A scheme of Single Photon Imaging System Based on WSA Detector was established by studying the WSA, Resistive Anode, Delay-line, Cross Strip, etc.
3) A type of WSZ was chosen for the anode design through the analysis and comparison among the diverse electrode structures.
4) A scheme for the overall system design was set up by studying the correlative theory of Single Photon Imaging. It was presented below:
(a) A way of "Mercury Lamp + Diaphragm + Weakeners + Narrow-band Optical Filter of 253.7 nm + Optical Input Window + Imaging Mask + MCP" was used to simulate the single photon radiant source of 30.4 nm. (b) A windowless structure was chosen for the mainbody design. (c) Two MCPs were cascaded in a chevron mode. (d) The imaging charge was directly read out by the position-sensitive anode. (e) A way of "CSA + Gussian Shaping Amplifier + DAQ Card + MPU (Micro Processor Unit)" was applied for the electronic readout subsystem design.
5) The correlative theory and technics were systematically studied.
The formula of position decoding for the WSZ was deduced. The methods for revising the calculating errors caused by the interelectrode disturbances were studied. The effect of each parameter for WSZ on the imaging performance were analysed. Two simple and convenient methods of measuring the radius of imaging charge distribution were presented. A design method for the circular pattern of WSZ was studied. Two parameters for the circular pattern, the varation coefficient of strip width and the bottom wedge width, were optimized. An auxiliary program for the WSZ design was developed. Two technical ways, "Plating-incrassation after Photo-lithography" and "Photo-lithography after Plating-incrassation", were studied in detail and the former was chosen as the final technics.
Two WSZ anodes have been fabricated with diverse electrode thickness: one was 1μm , and the other was 2μm. The rest parameters were same: the imaging charge collecting area wasΦ48 mm; the period width was 1.2 mm; the width of insulating gap was 30μm.
6) On the bases of theoretical study and simulation, the CSA and Gaussian shaping amplifier were designed and fabricated.
An architecture of multi-feedback infinite-gain high-pass filter was chosen for the CSA design and a N type JFET (Junction type Field Effect Transistor) was taken as the input stage of CSA. The shaping amplifier was composed of a pole-zero cancellation circuit, a two-stage Sallen-Key low-pass filter, and a pulse amplitude adjustment circuit.
7) A software of data acquisition & processing based on the PCI-DAQ Card was developed.
The software included a data acquisition module, a data processing module, and a digital image module. The communication mode between PCI-DAQ Card and host computer was of PCI bus-mastering DMA (Direct Memory Access). Four ping-pang buffers were configured in the host memory to answer for the continuous and high-speed data acquisition & processing by a pipelining mode. The data processing module carried out the main functions such as smoothing filter, peak detection, pulse amplitude discrimination, pulse pileup rejection, position decoding, event counting, and so on. The digital image module answered for exporting an integrated image with 256-level gray.
8) An experimental system was set up in term of the scheme for the overall design and the primary technical indexes such as spatial resolution, linearity, counting rate, dark counting rate, and so on were tested. Additionally, the primary factors related to the imaging performance were analysed and studied.
With proper evaluation, the system reveals an effective imaging area more thanΦ38 mm, a spatial resolution superior to 100μm, a nonlinear distortion less than 1% and a dark counting rate below 0.67 Hz/cm~2. It indicates that the developed prototype is up to the main technical requirements of the 2~(nd) Project of Chinese Moon Program for the EUV Detector.
9) Some advices for the system optimization and the formal device development were presented by summarizing this thesis.
①通过对光电导与光致发射型图像传感器的分析和比较,提出了适合于“月基地球等离子体层成像探测实验”的“基于MCP(Microchannel Plate)的阳极探测器”。
②通过对WSA、Resistive Anode、Delay-line以及Cross Strip等几种主要阳极探测器的研究分析,确定了“基于WSA探测器的单光子成像系统”的研制方案。
③通过分析和对比不同电极结构的WSA,确定了此次设计的电极结构为WSZ(Wedge-Strip-Zigzag)型。
④通过对单光子成像理论的相关研究,确定了总体设计方案。
采用“低压汞灯+光阑+减光片+253.7 nm的窄带滤波片+光学输入窗+成像掩模板+MCP”的方法模拟30.4 nm的极紫外单光子源;探测器主体采用无窗结构;MCP采用“V”型级联;成像电荷读出采用电荷直接收集法;电子读出子系统的设计采用“CSA(Charge Sensitive Preamplifier)+高斯整形主放+DAQ(Data Acquisition)Card+微处理器”的方法。
⑤系统的研究了WSZ位敏阳极的相关理论和制作工艺。
推导了WSZ的位置解码公式;研究了极间串扰的校正方法;分析了WSZ各参量对成像性能的影响;提出了用于测量成像电荷分布半径的两种简便方法;研究了圆形样式的WSZ设计方法,并优化了条纹宽度等差系数和楔形底宽两个参量;编制了WSZ辅助设计程序;通过对“先光刻腐蚀后电镀增厚”与“先电镀增厚后光刻腐蚀”两种工艺的分析和比较,确定了“先光刻腐蚀后电镀增厚”的工艺路线。
设计并制作了两块圆形样式的阳极面板,电极厚度分别为1μm和2μm,其它各参量相同:电荷收集面积Φ48 mm;周期长度1.2 mm;绝缘沟道宽度30μm。
⑥在理论研究和模拟仿真的基础上,设计并制作了CSA和高斯整形主放。
CSA的主体结构采用多路反馈无限增益高通滤波电路,输入级选用N沟道的结型场效应管:主放由极零相消电路、二级Sallen-Key低通滤波器以及幅度调节电路等构成。
⑦开发了基于PCI(Peripheral Component Interconnect)-DAQ Card的数据采集与处理软件。
软件由数据采集、数据处理以及数字成像等模块构成;DAQ Card与主机之间的通信方式为PCI总线控制下的直接内存访问;在主机内存中设置四块乒乓缓存单元以流水线的方式实现高速的数据采集与处理;数据处理主要由平滑滤波、峰值检测、阈值鉴别、脉冲堆积拒绝、位置解码以及事件计数等子模块构成;数字成像负责输出256阶灰度的积分图像。
⑧根据总体设计方案,构建了相应的实验系统。利用该系统测试了空间分辨率、线性度、计数率以及暗计数率等主要技术指标,并对主要影响因素进行了研究分析。
经过测试:有效成像面积达到了Φ38 mm;空间分辨率优于100μm;线性度优于1%;暗计数率低于0.67 Hz/cm~2。实验结果表明,研制出的原理样机已达到“探月二期工程有效载荷—EUV探测器”的技术指标要求。
⑨在全文总结的基础上,对今后的系统优化与正样研制提出了一些建议。
There is a plasmasphere around the Earth, whose thickness is～10 times of the Earth's radius. The plasmasphere is composed of the abundant ions such as N~+, O~+, H~+, He~+, etc. It is a main way for studying the geospatial magnetosphere explosion by imaging the distribution of the He~+ ion through its emission at 30.4 run. A Lunar Imaging Detection for the Earth's Plasmasphere will be carried out in the 2~(nd) project of Chinese Moon Program. Therefor, a prototype of "Single Photon Imaging System Based on Wedge and Strip Anodes Detector" has been proposed and developed with full independent intellectual property rights.
The main contents, methods and achievements are presented as follows:
1) Through the analysis and comparison between the Photoconductive and Photoemissive image sensors, the Anode Detector Based on MCP was proposed to the experiment of Lunar Imaging Detection for the Earth's Plasmasphere.
2) A scheme of Single Photon Imaging System Based on WSA Detector was established by studying the WSA, Resistive Anode, Delay-line, Cross Strip, etc.
3) A type of WSZ was chosen for the anode design through the analysis and comparison among the diverse electrode structures.
4) A scheme for the overall system design was set up by studying the correlative theory of Single Photon Imaging. It was presented below:
(a) A way of "Mercury Lamp + Diaphragm + Weakeners + Narrow-band Optical Filter of 253.7 nm + Optical Input Window + Imaging Mask + MCP" was used to simulate the single photon radiant source of 30.4 nm. (b) A windowless structure was chosen for the mainbody design. (c) Two MCPs were cascaded in a chevron mode. (d) The imaging charge was directly read out by the position-sensitive anode. (e) A way of "CSA + Gussian Shaping Amplifier + DAQ Card + MPU (Micro Processor Unit)" was applied for the electronic readout subsystem design.
5) The correlative theory and technics were systematically studied.
The formula of position decoding for the WSZ was deduced. The methods for revising the calculating errors caused by the interelectrode disturbances were studied. The effect of each parameter for WSZ on the imaging performance were analysed. Two simple and convenient methods of measuring the radius of imaging charge distribution were presented. A design method for the circular pattern of WSZ was studied. Two parameters for the circular pattern, the varation coefficient of strip width and the bottom wedge width, were optimized. An auxiliary program for the WSZ design was developed. Two technical ways, "Plating-incrassation after Photo-lithography" and "Photo-lithography after Plating-incrassation", were studied in detail and the former was chosen as the final technics.
Two WSZ anodes have been fabricated with diverse electrode thickness: one was 1μm , and the other was 2μm. The rest parameters were same: the imaging charge collecting area wasΦ48 mm; the period width was 1.2 mm; the width of insulating gap was 30μm.
6) On the bases of theoretical study and simulation, the CSA and Gaussian shaping amplifier were designed and fabricated.
An architecture of multi-feedback infinite-gain high-pass filter was chosen for the CSA design and a N type JFET (Junction type Field Effect Transistor) was taken as the input stage of CSA. The shaping amplifier was composed of a pole-zero cancellation circuit, a two-stage Sallen-Key low-pass filter, and a pulse amplitude adjustment circuit.
7) A software of data acquisition & processing based on the PCI-DAQ Card was developed.
The software included a data acquisition module, a data processing module, and a digital image module. The communication mode between PCI-DAQ Card and host computer was of PCI bus-mastering DMA (Direct Memory Access). Four ping-pang buffers were configured in the host memory to answer for the continuous and high-speed data acquisition & processing by a pipelining mode. The data processing module carried out the main functions such as smoothing filter, peak detection, pulse amplitude discrimination, pulse pileup rejection, position decoding, event counting, and so on. The digital image module answered for exporting an integrated image with 256-level gray.
8) An experimental system was set up in term of the scheme for the overall design and the primary technical indexes such as spatial resolution, linearity, counting rate, dark counting rate, and so on were tested. Additionally, the primary factors related to the imaging performance were analysed and studied.
With proper evaluation, the system reveals an effective imaging area more thanΦ38 mm, a spatial resolution superior to 100μm, a nonlinear distortion less than 1% and a dark counting rate below 0.67 Hz/cm~2. It indicates that the developed prototype is up to the main technical requirements of the 2~(nd) Project of Chinese Moon Program for the EUV Detector.
9) Some advices for the system optimization and the formal device development were presented by summarizing this thesis.
引文
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