热超声键合高频换能系统设计与控制
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摘要
压电换能器及驱动系统是高频热超声键合换能系统的关键构成之一，其结构设计与驱动控制方法的研究具有重要学术和应用价值。本文以改善高频热超声引线键合效率与质量为目的，系统地研究了高频超声换能器柔性解耦结构动态设计理论，功率超声激振信源、动态调谐控制策略、键合工艺温控算法，获得如下成果：
基于机电等效电路原理、有限元分析及模块化设计思想，提出了热超声引线键合高频超声换能器柔性解耦结构设计方法，降低了安装环非柔性连接结构对换能器纵振能量分布的影响，有效解决了换能器高频域模态密集问题。研制了工作频率为125kHz的超声换能器，考察了换能器超声能量传递规律及其谐振特性。
建立了压电换能器谐振频率附近的等效电路导纳模型，提出静态电容、动态电阻是影响高频压电换能器电端匹配特性、谐振特性的主要因素，证明了热超声引线键合压电换能器应用时无需电端匹配的推断；归纳出基于电流反馈技术、阻抗相位反馈技术实现超声换能器动态调谐的依据及规律。
将DDS直接数字频率合成技术、射频领域交流信号电流真有效值及相位检测技术、精密温度测控技术、虚拟仪器技术引入高频热超声引线键合换能器驱动系统设计中，开发了以工业级高速AVR单片机为核心的嵌入式系统，试验表明驱动系统实现了高频率分辨率、高品质、高切换速率的功率超声信号生成、高速压电换能器电流真有效值、阻抗相位检测、高速自适应调谐控制、精密温度控制，高效率数据通讯，为高频热超声引线键合样机及相关功率超声加工设备的研制奠定了良好的设计基础。
将二分搜索、分支界限搜索等分治策略引入高频超声换能系统的动态调谐控制算法设计中，提出了基于电流反馈、阻抗相位反馈检测的快速调谐控制策略，并且通过阈值及频率搜索域的自适应调节，提高了调谐搜索算法的效率，增强了嵌入式系统MCU对高频换能系统调谐过程的干预能力，仿真及试验结果表明基于相位反馈的二分搜索调谐控制算法具有更佳的谐振频率搜索特性。
利用系统辨识方法建立了热超声引线键合工艺温升系统数学模型，设计了PID及模糊自适应PID温度控制器，仿真与试验结果表明模糊自适应PID具有具有很强的抗干扰鲁棒性及较好的控制精度，适合于具有多场耦合、时滞非线性、时变特性的热超声芯片键合工艺温度控制。
上述研究成果丰富了热超声引线键合高频压电换能器及驱动控制系统的设计理论，对促进微电子封装装备技术进步具有重要意义。
The piezoelectric transducer and its driving system are one of the key componentsof high frequency thermosonic bonding equipments, and the research on its structureand driving control methodology has important academic and application values. Toimprove the efficiency and quality of thermosonic IC bonding, this dissertationstudies on the dynamic design theory of flexible connection structure for highfrequency ultrasonic transducer, exciting signal source of the power ultrasound,dynamic tuning of control strategies and bonding temperature. The followingcontributions have been achieved:
The flexible connection structure of high-frequency ultrasonic transducer forthermosonic wire bonding is proposed based on the electromechanical equivalenttheory, finite element analysis(FEA) and modular design concept. Thus the influenceof the inflexible joint on the energy distribution of longitudinal vibration can bereduced and the modal concentration problem of high-frequency transducer is solved.A125kHz ultrasonic transducer has been designed, whose energy transmission lawand resonance characteristic have been investigated.
The admittance model of equivalent circuit adjacent to the resonant frequency ofthe ultrasonic transducer is established, and it is concluded that the static category andthe dynamic resistance are the major influence factors for electrics matching andresonant feature of the ultrasonic transducer and it is not necessary for thehigh-frequency ultrasonic transducer to design matching circuit when the transducerpossesses minor static capacitance. Both theory and regulation of the dynamic tuningfor high-frequency ultrasonic transducer based on current and impedance phasefeedback technology are presented.
The technologies, including the direct digital synthesis technology, detectingmethod of the current real effective value and signal phase in RF field, precisemeasurement technique of the temperature and virtual instrument technology, areimported into the driving system design of the high-frequency thermosonic transducer.An embedded system based on high speed AVR microprocessor is developed.Experimental test results of the driving system show the high quality power ultrasonicsignal generation, quick measurement for real effective value of the current andimpedance phase between signals, self adapting tuning control, precise temperature control and highly active data communication can be realized using the system, and itprovides a perfect hardware basis for the prototype development of the thermosonicbonding.
The method of the divide-and-conquer strategy, such as binary search andbranch-bound algorithm, are utilized to design the control algorithm for dynamictuning of the thermosonic transducer system. Based on the current and impedancephase feedback technology, the quick tuning control strategies are presented. Throughself-adaption of the threshold value and frequency search field, the robust andefficiency of the search algorithm are improved. The simulation and test resultsindicate that the tuning control of binary search algorithm based on impedance phasedetecting possesses a better research ability for resonant frequency.
Mathematical model of the temperature rising system for thermosonic bondingprocess is obtained through system identification method and a temperature controlleris developed with fuzzy PID adaptive control algorithm, the simulation and testresults indicate that the fuzzy PID self adaptive controller has strong capacities ofresisting disturbance and better robust performances and control precision, thetechnology is fit to temperature accuracy control of the thermosonic wire bondingprocess with multi field coupling, time varying and hysteresis.
The above research achievements enrich the design theory of high-frequencyultrasonic transducer and control strategy of driving system for thermosonic bonding,and it has great significances on promoting the development of microelectronicspackaging equipments.
基于机电等效电路原理、有限元分析及模块化设计思想，提出了热超声引线键合高频超声换能器柔性解耦结构设计方法，降低了安装环非柔性连接结构对换能器纵振能量分布的影响，有效解决了换能器高频域模态密集问题。研制了工作频率为125kHz的超声换能器，考察了换能器超声能量传递规律及其谐振特性。
建立了压电换能器谐振频率附近的等效电路导纳模型，提出静态电容、动态电阻是影响高频压电换能器电端匹配特性、谐振特性的主要因素，证明了热超声引线键合压电换能器应用时无需电端匹配的推断；归纳出基于电流反馈技术、阻抗相位反馈技术实现超声换能器动态调谐的依据及规律。
将DDS直接数字频率合成技术、射频领域交流信号电流真有效值及相位检测技术、精密温度测控技术、虚拟仪器技术引入高频热超声引线键合换能器驱动系统设计中，开发了以工业级高速AVR单片机为核心的嵌入式系统，试验表明驱动系统实现了高频率分辨率、高品质、高切换速率的功率超声信号生成、高速压电换能器电流真有效值、阻抗相位检测、高速自适应调谐控制、精密温度控制，高效率数据通讯，为高频热超声引线键合样机及相关功率超声加工设备的研制奠定了良好的设计基础。
将二分搜索、分支界限搜索等分治策略引入高频超声换能系统的动态调谐控制算法设计中，提出了基于电流反馈、阻抗相位反馈检测的快速调谐控制策略，并且通过阈值及频率搜索域的自适应调节，提高了调谐搜索算法的效率，增强了嵌入式系统MCU对高频换能系统调谐过程的干预能力，仿真及试验结果表明基于相位反馈的二分搜索调谐控制算法具有更佳的谐振频率搜索特性。
利用系统辨识方法建立了热超声引线键合工艺温升系统数学模型，设计了PID及模糊自适应PID温度控制器，仿真与试验结果表明模糊自适应PID具有具有很强的抗干扰鲁棒性及较好的控制精度，适合于具有多场耦合、时滞非线性、时变特性的热超声芯片键合工艺温度控制。
上述研究成果丰富了热超声引线键合高频压电换能器及驱动控制系统的设计理论，对促进微电子封装装备技术进步具有重要意义。
The piezoelectric transducer and its driving system are one of the key componentsof high frequency thermosonic bonding equipments, and the research on its structureand driving control methodology has important academic and application values. Toimprove the efficiency and quality of thermosonic IC bonding, this dissertationstudies on the dynamic design theory of flexible connection structure for highfrequency ultrasonic transducer, exciting signal source of the power ultrasound,dynamic tuning of control strategies and bonding temperature. The followingcontributions have been achieved:
The flexible connection structure of high-frequency ultrasonic transducer forthermosonic wire bonding is proposed based on the electromechanical equivalenttheory, finite element analysis(FEA) and modular design concept. Thus the influenceof the inflexible joint on the energy distribution of longitudinal vibration can bereduced and the modal concentration problem of high-frequency transducer is solved.A125kHz ultrasonic transducer has been designed, whose energy transmission lawand resonance characteristic have been investigated.
The admittance model of equivalent circuit adjacent to the resonant frequency ofthe ultrasonic transducer is established, and it is concluded that the static category andthe dynamic resistance are the major influence factors for electrics matching andresonant feature of the ultrasonic transducer and it is not necessary for thehigh-frequency ultrasonic transducer to design matching circuit when the transducerpossesses minor static capacitance. Both theory and regulation of the dynamic tuningfor high-frequency ultrasonic transducer based on current and impedance phasefeedback technology are presented.
The technologies, including the direct digital synthesis technology, detectingmethod of the current real effective value and signal phase in RF field, precisemeasurement technique of the temperature and virtual instrument technology, areimported into the driving system design of the high-frequency thermosonic transducer.An embedded system based on high speed AVR microprocessor is developed.Experimental test results of the driving system show the high quality power ultrasonicsignal generation, quick measurement for real effective value of the current andimpedance phase between signals, self adapting tuning control, precise temperature control and highly active data communication can be realized using the system, and itprovides a perfect hardware basis for the prototype development of the thermosonicbonding.
The method of the divide-and-conquer strategy, such as binary search andbranch-bound algorithm, are utilized to design the control algorithm for dynamictuning of the thermosonic transducer system. Based on the current and impedancephase feedback technology, the quick tuning control strategies are presented. Throughself-adaption of the threshold value and frequency search field, the robust andefficiency of the search algorithm are improved. The simulation and test resultsindicate that the tuning control of binary search algorithm based on impedance phasedetecting possesses a better research ability for resonant frequency.
Mathematical model of the temperature rising system for thermosonic bondingprocess is obtained through system identification method and a temperature controlleris developed with fuzzy PID adaptive control algorithm, the simulation and testresults indicate that the fuzzy PID self adaptive controller has strong capacities ofresisting disturbance and better robust performances and control precision, thetechnology is fit to temperature accuracy control of the thermosonic wire bondingprocess with multi field coupling, time varying and hysteresis.
The above research achievements enrich the design theory of high-frequencyultrasonic transducer and control strategy of driving system for thermosonic bonding,and it has great significances on promoting the development of microelectronicspackaging equipments.
引文
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