微波无源器件在液晶聚合物基板上的设计、制作和表征
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摘要
目前,传统的无线局域网已经不能满足用户对高速无线数据传输和多媒体数据宽带传输的需求。超宽带技术(UWB,Ultra-Wideband)和60 GHz技术由于其超高速的数据传输能力(前者最高480 Mbps,后者可以达到几个Gbps),成为第四代无线通信技术的代表,引发了学术界和工业界的研究热潮。与此同时,高速、高频和宽带系统的趋势也刺激了微波/毫米波系统中集成技术以及封装基板的发展。目前可用于微波/毫米波系统的封装材料要么价格昂贵,要么高频性能不够优异。因此,开发性能优异,可满足各种要求的高频封装基板已成为当务之急。液晶聚合物基板由于其优异的电性能、热性能、物理性能、机械性能以及化学性能,已经引起了业界的广泛关注。然而,液晶聚合物还存在一些缺点,如与金属弱的粘结力,通孔的工艺问题等。
为了评估液晶聚合物基板的电性能,本论文结合超宽带技术和60 GHz技术以及这种新型介质材料——液晶聚合物(LCP,Liquid Crystal Polymer)基板,展开了液晶聚合物基板的应用研究,通过在液晶聚合物基板上设计、制作和表征了几种可工作至毫米波段的无源器件,验证了该材料作为一种低值、高性能基板在毫米波系统中的可应用性。本文主要进行了以下几部分工作:
首先,研究了覆铜挠性液晶聚合物基板的制作以及性能表征,在对液晶聚合物基板的介电以及物理性能表征基础上,针对液晶聚合物与金属铜之间弱的结合力问题,采用等离子体刻蚀方法对液晶聚合物薄膜的表面进行了预处理,并在覆铜之前添加了金属钛粘附层,提高了液晶聚合物与铜层的粘结力。
其次,提出了一种新型的双模环形超宽带滤波器结构,并推导出了双模环形谐振器谐振频率的公式。通过一个非等线宽的双模矩形谐振器来调节滤波器的输入零点的位置进而控制滤波器的带宽,同时输入、输出端口与双模谐振器之间采用新型间隙耦合结构实现了超宽带滤波特性。采用新型双模间隙耦合谐振结构的思路,设计了一个可以在22 GHz～29 GHz频带工作的准毫米波超宽带带通滤波器。该滤波器具有结构紧凑、低损耗、频率选择性好、宽阻带和易于加工等优点,可用于汽车防撞雷达系统应用。
接着,又设计了两种可应用于60 GHz无线通讯系统的宽带带通滤波器:一种是基于传统的平行耦合线结构,可工作在57 GHz～64 GHz频带;另一种仍然采用新型双模间隙耦合谐振结构,可工作在50 GHz～70 GHz频带。两种滤波器都具有优异的特性以及紧密的结构。最后,通过分析椭圆单极天线辐射贴片的电流分布,在液晶聚合物基板上提出了带孔的椭圆单极天线模型。该天线主要由带孔的椭圆单极贴片,梯形金属地板和渐变的共面波导馈电组成,不但具有平面印刷结构和较小的电尺寸,而且具有极宽的阻抗带宽和稳定的方向图特性,可应用于超宽带系统中。
在本文研究中,通过采用传统平面半导体工艺,包括表面处理、溅射镀膜、光学曝光和化学蚀刻过程,将这几种微波无源器件制作在两种覆铜液晶聚合物基板上,一种是层压法制成的覆铜LCP基板,一种是电镀法制成的LCP基板,并采用网络分析仪对加工的滤波器和天线进行了测试。实验结果表明,对于在电镀法制成的LCP基板上的滤波器和天线,试验与仿真结果都吻合得很好,进一步证实了覆铜LCP基板在超宽带以及60 GHz毫米波系统中的应用。
Nowadays, there is a great demand for wireless communication systems with ultra-high data rates and multimedia with higher bandwidth. Ultra-Wide Band (UWB) and 60 GHz technology have become the representation of the fourth generation of wireless communication standards (4G) due to their ultra-high data rates (the former is 480 MHz, the later is up to several GHz), which has inspired the research upsurge in both industry and academy. At the same time, the move towards higher frequencies,higher data rates and wider band system has stimulated the development of both integration techniques and substrate materials for millimeter (mm)-wave applications. Therefore, it is urgent affairs to develop a new substrate technology with excellent performance and meeting various demands. Identified as advanced candidate materials for flexible mm-wave substrates’purposes and due to a unique combination of superior features and performance, Liquid Crystal Polymers (LCPs) have attracted considerable attention in commercial wireless applications. Like other materials, LCPs also show some disadvantages such as poor adhesion to Copper (Cu), problems in via processing, etc.
In order to evaluate LCP’s electrical performance, the design, fabrication and characterization of passive components operating at frequencies extending into the mm-wave regime are performed to determine the feasibility of LCP as a low-cost and high-performance substrate solution for mm-wave application. In this thesis, combining UWB and 60 GHz technology, a novel compact microstrip UWB bandpass filter, an UWB printed monopole antenna and two 60 GHz bandpass filters are presented on LCP substrates. The main contents of the dissertation include the following four parts:
Firstly, LCP substrate combined/laminated with Copper (Cu) is prepared in order to improve the surface roughness of the LCP substrate, and the surface is pre-treated by means of oxygen plasma etching. In addition, a thin adhesion layer of Titanium (Ti) is applied prior to the sputter deposition of Cu to improve the adhesion between the Cu and the LCP material.
Secondly, based on the dual-mode ring resonator theory, an UWB bandpass filters, working on 22 GHz～29 GHz is proposed. The proposed UWB bandpass filter includes a full dual-mode rectangular-ring resonator at the center, which controls the bandwidth of the passband and two novel parallel-coupled feed structures between input/output ports and the ring resonator, for coupling purposes with the resonator. The designed filter is compact, low-loss, easy to fabricate, and exhibits sharp attenuations and wide-stopbands, which can be used in vehicular radar systems.
Thirdly, two 60 GHz bandpass filters are reported on LCP substrates, one is a planar microstrip bandpass filter with ultra-fine conductor linewidth and gap, which could work on 57 GHz～64 GHz band based on the parallel-coupled line structure, another one is wideband bandpass filter working on 50 GHz～70 GHz band based on dual-mode ring resonator structure.
Finally, a hollowed UWB printed monopole antenna is also presented on a LCP substrate. It consists of a hollowed elliptical monopole, two trapeziform ground planes and a tapered CPW (Co-Planar Waveguide) feeder, which provides this antenna extremely wide bandwidth and compact size.
By using standard processing methods i.e. surface pretreatment, sputter deposition, photolithography and wet etching, all of these microwave passive devices are fabricated on both laminated and direct metalized LCP substrates. The comparison of simulated and measured results of both developed filters and antennas is also shown and discussed. The fact that both filters and antennas on the direct metalized LCP substrates show good results, verifies that LCP materials are potentially promising substrate material for microwave/mm-wave applications.
为了评估液晶聚合物基板的电性能,本论文结合超宽带技术和60 GHz技术以及这种新型介质材料——液晶聚合物(LCP,Liquid Crystal Polymer)基板,展开了液晶聚合物基板的应用研究,通过在液晶聚合物基板上设计、制作和表征了几种可工作至毫米波段的无源器件,验证了该材料作为一种低值、高性能基板在毫米波系统中的可应用性。本文主要进行了以下几部分工作:
首先,研究了覆铜挠性液晶聚合物基板的制作以及性能表征,在对液晶聚合物基板的介电以及物理性能表征基础上,针对液晶聚合物与金属铜之间弱的结合力问题,采用等离子体刻蚀方法对液晶聚合物薄膜的表面进行了预处理,并在覆铜之前添加了金属钛粘附层,提高了液晶聚合物与铜层的粘结力。
其次,提出了一种新型的双模环形超宽带滤波器结构,并推导出了双模环形谐振器谐振频率的公式。通过一个非等线宽的双模矩形谐振器来调节滤波器的输入零点的位置进而控制滤波器的带宽,同时输入、输出端口与双模谐振器之间采用新型间隙耦合结构实现了超宽带滤波特性。采用新型双模间隙耦合谐振结构的思路,设计了一个可以在22 GHz～29 GHz频带工作的准毫米波超宽带带通滤波器。该滤波器具有结构紧凑、低损耗、频率选择性好、宽阻带和易于加工等优点,可用于汽车防撞雷达系统应用。
接着,又设计了两种可应用于60 GHz无线通讯系统的宽带带通滤波器:一种是基于传统的平行耦合线结构,可工作在57 GHz～64 GHz频带;另一种仍然采用新型双模间隙耦合谐振结构,可工作在50 GHz～70 GHz频带。两种滤波器都具有优异的特性以及紧密的结构。最后,通过分析椭圆单极天线辐射贴片的电流分布,在液晶聚合物基板上提出了带孔的椭圆单极天线模型。该天线主要由带孔的椭圆单极贴片,梯形金属地板和渐变的共面波导馈电组成,不但具有平面印刷结构和较小的电尺寸,而且具有极宽的阻抗带宽和稳定的方向图特性,可应用于超宽带系统中。
在本文研究中,通过采用传统平面半导体工艺,包括表面处理、溅射镀膜、光学曝光和化学蚀刻过程,将这几种微波无源器件制作在两种覆铜液晶聚合物基板上,一种是层压法制成的覆铜LCP基板,一种是电镀法制成的LCP基板,并采用网络分析仪对加工的滤波器和天线进行了测试。实验结果表明,对于在电镀法制成的LCP基板上的滤波器和天线,试验与仿真结果都吻合得很好,进一步证实了覆铜LCP基板在超宽带以及60 GHz毫米波系统中的应用。
Nowadays, there is a great demand for wireless communication systems with ultra-high data rates and multimedia with higher bandwidth. Ultra-Wide Band (UWB) and 60 GHz technology have become the representation of the fourth generation of wireless communication standards (4G) due to their ultra-high data rates (the former is 480 MHz, the later is up to several GHz), which has inspired the research upsurge in both industry and academy. At the same time, the move towards higher frequencies,higher data rates and wider band system has stimulated the development of both integration techniques and substrate materials for millimeter (mm)-wave applications. Therefore, it is urgent affairs to develop a new substrate technology with excellent performance and meeting various demands. Identified as advanced candidate materials for flexible mm-wave substrates’purposes and due to a unique combination of superior features and performance, Liquid Crystal Polymers (LCPs) have attracted considerable attention in commercial wireless applications. Like other materials, LCPs also show some disadvantages such as poor adhesion to Copper (Cu), problems in via processing, etc.
In order to evaluate LCP’s electrical performance, the design, fabrication and characterization of passive components operating at frequencies extending into the mm-wave regime are performed to determine the feasibility of LCP as a low-cost and high-performance substrate solution for mm-wave application. In this thesis, combining UWB and 60 GHz technology, a novel compact microstrip UWB bandpass filter, an UWB printed monopole antenna and two 60 GHz bandpass filters are presented on LCP substrates. The main contents of the dissertation include the following four parts:
Firstly, LCP substrate combined/laminated with Copper (Cu) is prepared in order to improve the surface roughness of the LCP substrate, and the surface is pre-treated by means of oxygen plasma etching. In addition, a thin adhesion layer of Titanium (Ti) is applied prior to the sputter deposition of Cu to improve the adhesion between the Cu and the LCP material.
Secondly, based on the dual-mode ring resonator theory, an UWB bandpass filters, working on 22 GHz～29 GHz is proposed. The proposed UWB bandpass filter includes a full dual-mode rectangular-ring resonator at the center, which controls the bandwidth of the passband and two novel parallel-coupled feed structures between input/output ports and the ring resonator, for coupling purposes with the resonator. The designed filter is compact, low-loss, easy to fabricate, and exhibits sharp attenuations and wide-stopbands, which can be used in vehicular radar systems.
Thirdly, two 60 GHz bandpass filters are reported on LCP substrates, one is a planar microstrip bandpass filter with ultra-fine conductor linewidth and gap, which could work on 57 GHz～64 GHz band based on the parallel-coupled line structure, another one is wideband bandpass filter working on 50 GHz～70 GHz band based on dual-mode ring resonator structure.
Finally, a hollowed UWB printed monopole antenna is also presented on a LCP substrate. It consists of a hollowed elliptical monopole, two trapeziform ground planes and a tapered CPW (Co-Planar Waveguide) feeder, which provides this antenna extremely wide bandwidth and compact size.
By using standard processing methods i.e. surface pretreatment, sputter deposition, photolithography and wet etching, all of these microwave passive devices are fabricated on both laminated and direct metalized LCP substrates. The comparison of simulated and measured results of both developed filters and antennas is also shown and discussed. The fact that both filters and antennas on the direct metalized LCP substrates show good results, verifies that LCP materials are potentially promising substrate material for microwave/mm-wave applications.
引文
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