等离子体鞘层及尘埃在鞘层中的特性研究
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摘要
在等离子体材料表面改性、合成薄膜及刻蚀等工艺过程中，等离子体和材料表面附近形成的等离子体鞘层的物理特性直接影响被加工材料的性能。鞘层内带电粒子的能量分布、密度分布、鞘层的电位结构以及磁场等都将决定等离子体与材料的相互作用过程。所以对等离子体鞘层的研究具有重要的意义和价值。但等离子体鞘层的研究工作还不够完善，特别是电负性等离子鞘层特性的研究，由于在某些等离子体加工中存在大量的负离子，会对鞘层结构产生很大的影响。另外，带电尘埃粒子广泛存在于宇宙空间、实验室等离子体装置以及微电子工业加工等离子体中，人们对尘埃等离子体或尘埃在等离子体中性质的研究涉及诸多方面，包括尘埃的带电机理，动力学行为，尘埃晶格结构，马赫锥现象，尘埃空洞等，但是其中还有许多问题没有研究清楚。本文针对电负性等离子体鞘层及电负性等离子体中存在紫外辐射时尘埃的充电行为，柱槽状电极的等离子体鞘层及在鞘层中尘埃粒子的分布结构，在磁场作用下等离子体鞘层中单尘埃粒子的动力学行为进行了数值模拟研究，具体内容为：
(1)综述介绍了等离子体鞘层和尘埃等离子体的基本概念、基本特性及研究意义和发展现状。
(2)采用流体理论研究了强电负性等离子体的鞘层结构。采用有限轨道运动(OML)模型研究了紫外辐射对尘埃颗粒在电负性硅烷(SiH_4)等离子体中的充电行为的影响。研究结果表明：在等离子体区和鞘层区之间几乎不存在预鞘过渡区，在电极附近形成一个纯正离子鞘层，在鞘边附近鞘层里的空间净电荷形成一个很陡的峰分布，空间电势下降得更快，鞘层厚度变得更薄；光电分离效应将会有效的降低尘埃所带的负电荷数量，甚至会使尘埃颗粒带上正电荷。
(3)采用柱形槽状电极的流体鞘层模型，数值模拟了二维鞘层特性，并在此基础上，建立了描述尘埃粒子运动的三维动力学模型，研究了尘埃粒子在鞘层中的分布结构。研究结果表明：电极鞘层形成一个势阱，可以束缚尘埃粒子。等离子体密度高时，鞘层薄，反之，鞘层厚；尘埃数目少时，基本形成一层结构，粒子数目多时，形成多层结构；电极尺寸不同时，尘埃粒子形成一些复杂而又有趣的结构。在考虑尾流效应时，发现分布在鞘层中的上层粒子对相对应的下层粒子在轴向分量上有取向一致的吸引作用。
(4)采用单尘埃粒子模型研究了在磁场作用下等离子体鞘层中尘埃粒子的动力学行为。研究结果表明：尘埃粒子的大小，初始位置，初始速度和磁场都会影响尘埃在等离子体鞘层中的平衡位置和运动状态。对于大小相同的尘埃，不论其初始位置、初始速度如何，最终会在静电力、重力、中性气体碰撞力、离子拖拽力和洛仑兹力的共同作用下平衡于相同的位置。如果尘埃大小超过某一值，它将不会平衡在鞘层中。
(5)采用一维流体模型，对等离子体源离子注入不同几何形状的靶，不同中性气体气压条件下无碰撞和碰撞鞘层的时空演化进行了数值研究，并研究了鞘层表面处离子注入平均动能和离子注入电流密度等物理量随时间的演化。研究结果表明：对碰撞鞘层，平面靶、球形靶和柱形靶所对应的最终鞘层厚度彼此之间有显著差别，且不同几何形状靶的碰撞鞘层的数值结果与相应解析模型得到的结果符合得很好。
最后，给出本文研究工作的主要结论及对未来工作的展望。
In the process of plasma material surface modification, synthesis film and etching, theplasma and the physical characteristic of the plasma sheath formed near the surface of thematerials directly affect the capability of the materials processed. Energy and densitydistribution of charged particle in the sheath, potential structure of sheath and magnetic fieldwill all decide the interactive process of plasma and material. Therefore, it is significant andworthy to research the plasma sheath. Meanwhile, the researches on the plasma sheath are notenough, especially the research on the sheath characteristic of the electronegative plasma. Forthe great amount of negative ions that exist in some plasmas' processes have impact on thestructure of the sheath dramatically. In addition, the charged dust particles exist widely inspace, laboratory as well as micro-electronics industry for plasma processes devices. Theresearch on characteristic of the dusty plasma or the dust in the plasma have explaineddifferent aspects, however, there are still many questions remaining unclear. This thesisresearches through simulation on the sheath of the electronegative plasma and the chargebehavior of dust with the ultraviolet radiation in the electronegative plasma, the plasma sheathof the cylindrical concave electrode and the distribution of the dust particles in the sheath, anddynamic behavior of the single dust particle in the plasma sheath within the magnetic field.The contents are:
Firstly,basic concept and characteristic of plasma sheath and dusty plasmas, significance ofresearch and development actuality are introduced.
Secondly,sheath structures of strong electronegative plasmas are investigated, using a fluidtheory. The effect of ultraviolet radiation to the charge behavior of dust particles in theelectronegative SiH_4 plasmas has been researched, using the OML model. The result showsthat presheath transition almost does not exist between bulk plasma and sheath and a purepositive ion sheath is formed near the electrode. Furthermore, the net charge has a peak nearthe sheath edge. The faster spatial potential falls, the thinner the sheath thickness becomes.UV photodetachment could significantly lower the dust negative charge and even make dustgrains positively charged under some special conditions.
Thirdly,a fluid sheath model of a cylindrical concave electrode has been established and itstwo-dimension characteristic has been simulated. Based on that, a three dimensionaldynamics model describing dust particles has been established and their distributions have been studied. The result shows that the potential well formed by the electrode sheath couldscatter the dust particles. The sheath is thin if the density of the plasma is high; on thecontrary, the sheath is thick. One layer structure is formed if the number of the dust is small;while multilayer structure is formed if the number of the dust is large. With variant sizes ofthe electrode, the dust particles then form some complex and interesting structures. Whileconsidering the wake effect, it is found that in the sheath, the particles on the upper level areorientationally consistent to attract their counterparts on the lower level on the axialcomponent.
Fourthly,dynamics of dust in a plasma sheath with magnetic field is investigated, using asingle particle model. The result shows that radius, original position and velocity of dustparticles and the magnetic field have effect on its movement and equilibrium position in theplasma sheath. The same size dust particles, whatever original velocity and position they have,finally will rest at the same position under the net actions of electrostatic, gravitational,neutral collisional,ion drag and Lorentz forces. But they will not rest in the plasma sheath iftheir radius is beyond certain size.
Fifthly,the evolution of collisionless and collisional sheaths in different geometries andunder various gas pressures has been numerically studied, using a one-dimensional fluidmodel. Besides that, plots for the average kinetic energy as well as the current density of ionimplantations at the target surface are presented. For the collisional sheath, it is found that thefinal sheath thickness in planar, spherical or cylindrical geometries differs from each othersignificantly. Also, computational results of the collisional sheath in different geometries arein good agreement with those obtained by analytic models.
Finally, conclusions and the future work are given in the thesis.
(1)综述介绍了等离子体鞘层和尘埃等离子体的基本概念、基本特性及研究意义和发展现状。
(2)采用流体理论研究了强电负性等离子体的鞘层结构。采用有限轨道运动(OML)模型研究了紫外辐射对尘埃颗粒在电负性硅烷(SiH_4)等离子体中的充电行为的影响。研究结果表明：在等离子体区和鞘层区之间几乎不存在预鞘过渡区，在电极附近形成一个纯正离子鞘层，在鞘边附近鞘层里的空间净电荷形成一个很陡的峰分布，空间电势下降得更快，鞘层厚度变得更薄；光电分离效应将会有效的降低尘埃所带的负电荷数量，甚至会使尘埃颗粒带上正电荷。
(3)采用柱形槽状电极的流体鞘层模型，数值模拟了二维鞘层特性，并在此基础上，建立了描述尘埃粒子运动的三维动力学模型，研究了尘埃粒子在鞘层中的分布结构。研究结果表明：电极鞘层形成一个势阱，可以束缚尘埃粒子。等离子体密度高时，鞘层薄，反之，鞘层厚；尘埃数目少时，基本形成一层结构，粒子数目多时，形成多层结构；电极尺寸不同时，尘埃粒子形成一些复杂而又有趣的结构。在考虑尾流效应时，发现分布在鞘层中的上层粒子对相对应的下层粒子在轴向分量上有取向一致的吸引作用。
(4)采用单尘埃粒子模型研究了在磁场作用下等离子体鞘层中尘埃粒子的动力学行为。研究结果表明：尘埃粒子的大小，初始位置，初始速度和磁场都会影响尘埃在等离子体鞘层中的平衡位置和运动状态。对于大小相同的尘埃，不论其初始位置、初始速度如何，最终会在静电力、重力、中性气体碰撞力、离子拖拽力和洛仑兹力的共同作用下平衡于相同的位置。如果尘埃大小超过某一值，它将不会平衡在鞘层中。
(5)采用一维流体模型，对等离子体源离子注入不同几何形状的靶，不同中性气体气压条件下无碰撞和碰撞鞘层的时空演化进行了数值研究，并研究了鞘层表面处离子注入平均动能和离子注入电流密度等物理量随时间的演化。研究结果表明：对碰撞鞘层，平面靶、球形靶和柱形靶所对应的最终鞘层厚度彼此之间有显著差别，且不同几何形状靶的碰撞鞘层的数值结果与相应解析模型得到的结果符合得很好。
最后，给出本文研究工作的主要结论及对未来工作的展望。
In the process of plasma material surface modification, synthesis film and etching, theplasma and the physical characteristic of the plasma sheath formed near the surface of thematerials directly affect the capability of the materials processed. Energy and densitydistribution of charged particle in the sheath, potential structure of sheath and magnetic fieldwill all decide the interactive process of plasma and material. Therefore, it is significant andworthy to research the plasma sheath. Meanwhile, the researches on the plasma sheath are notenough, especially the research on the sheath characteristic of the electronegative plasma. Forthe great amount of negative ions that exist in some plasmas' processes have impact on thestructure of the sheath dramatically. In addition, the charged dust particles exist widely inspace, laboratory as well as micro-electronics industry for plasma processes devices. Theresearch on characteristic of the dusty plasma or the dust in the plasma have explaineddifferent aspects, however, there are still many questions remaining unclear. This thesisresearches through simulation on the sheath of the electronegative plasma and the chargebehavior of dust with the ultraviolet radiation in the electronegative plasma, the plasma sheathof the cylindrical concave electrode and the distribution of the dust particles in the sheath, anddynamic behavior of the single dust particle in the plasma sheath within the magnetic field.The contents are:
Firstly,basic concept and characteristic of plasma sheath and dusty plasmas, significance ofresearch and development actuality are introduced.
Secondly,sheath structures of strong electronegative plasmas are investigated, using a fluidtheory. The effect of ultraviolet radiation to the charge behavior of dust particles in theelectronegative SiH_4 plasmas has been researched, using the OML model. The result showsthat presheath transition almost does not exist between bulk plasma and sheath and a purepositive ion sheath is formed near the electrode. Furthermore, the net charge has a peak nearthe sheath edge. The faster spatial potential falls, the thinner the sheath thickness becomes.UV photodetachment could significantly lower the dust negative charge and even make dustgrains positively charged under some special conditions.
Thirdly,a fluid sheath model of a cylindrical concave electrode has been established and itstwo-dimension characteristic has been simulated. Based on that, a three dimensionaldynamics model describing dust particles has been established and their distributions have been studied. The result shows that the potential well formed by the electrode sheath couldscatter the dust particles. The sheath is thin if the density of the plasma is high; on thecontrary, the sheath is thick. One layer structure is formed if the number of the dust is small;while multilayer structure is formed if the number of the dust is large. With variant sizes ofthe electrode, the dust particles then form some complex and interesting structures. Whileconsidering the wake effect, it is found that in the sheath, the particles on the upper level areorientationally consistent to attract their counterparts on the lower level on the axialcomponent.
Fourthly,dynamics of dust in a plasma sheath with magnetic field is investigated, using asingle particle model. The result shows that radius, original position and velocity of dustparticles and the magnetic field have effect on its movement and equilibrium position in theplasma sheath. The same size dust particles, whatever original velocity and position they have,finally will rest at the same position under the net actions of electrostatic, gravitational,neutral collisional,ion drag and Lorentz forces. But they will not rest in the plasma sheath iftheir radius is beyond certain size.
Fifthly,the evolution of collisionless and collisional sheaths in different geometries andunder various gas pressures has been numerically studied, using a one-dimensional fluidmodel. Besides that, plots for the average kinetic energy as well as the current density of ionimplantations at the target surface are presented. For the collisional sheath, it is found that thefinal sheath thickness in planar, spherical or cylindrical geometries differs from each othersignificantly. Also, computational results of the collisional sheath in different geometries arein good agreement with those obtained by analytic models.
Finally, conclusions and the future work are given in the thesis.
引文
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